ZMSH manufactures custom fused quartz fixture rings for semiconductor process equipment, wafer heat-treatment systems and other high-temperature, cleanliness-sensitive applications.
The component consists of a large annular quartz body with a central opening and multiple radial support ribs. The ribbed structure is designed to improve rigidity and distribute mechanical loads while retaining an open internal configuration. Outer diameter, inner diameter, overall thickness, rib layout, mounting holes and positioning features can be produced according to customer drawings.
Each fixture is reviewed according to its operating temperature, thermal cycle, loading conditions, equipment interface and cleanliness requirements before manufacturing.
Product Specifications
| البند | Available Specification |
|---|---|
| Product name | Fused Quartz Fixture Ring |
| العلامة التجارية | ZMSH |
| المواد | Fused quartz |
| الهيكل | Annular ring with radial support ribs |
| Outer diameter | Customized |
| Inner diameter | Customized |
| Overall thickness | Customized |
| Rib quantity | According to customer drawing |
| Rib dimensions | Width, height and position customizable |
| Surface condition | Transparent, translucent or frosted |
| Edge treatment | Ground, chamfered, rounded or polished |
| Additional features | Mounting holes, positioning holes, slots, grooves and steps |
| التسطيح | According to drawing and application |
| Dimensional tolerance | According to component size and technical requirements |
| Manufacturing methods | Quartz forming, welding, grinding and precision machining |
| Inspection | Dimensional, visual and cleanliness inspection |
| التعبئة والتغليف | Individual protective or clean packaging |
| MOQ | Normally 50 pieces; development quantities subject to confirmation |
| Lead time | Approximately 2–4 weeks |
| Payment terms | T/T |
| Place of origin | Shanghai, China |
Final specifications are determined after reviewing the component drawing and operating conditions.
Key Product Features
Annular Structure with Radial Reinforcement
The large central opening and radial rib arrangement provide a practical structure for equipment fixtures requiring an open process area. Rib quantity, width, height and spacing can be adjusted according to the required support points and load distribution.
Actual mechanical performance depends on the component dimensions, support method, working temperature and applied load.
Low Thermal Expansion
Fused quartz has a low coefficient of thermal expansion, helping the fixture maintain dimensional stability during heating and cooling cycles. This property is useful in semiconductor thermal processes where repeated temperature changes may occur.
High-Temperature Process Compatibility
Fused quartz is widely used in semiconductor furnaces and thermal-processing equipment because it maintains good stability at elevated temperatures.
The maximum suitable operating temperature depends on the quartz grade, fixture geometry, applied load, process atmosphere and thermal cycle.
مقاومة المواد الكيميائية
Fused quartz provides resistance to many acids and process chemicals used in semiconductor and laboratory environments. Chemical compatibility should nevertheless be verified against the actual process gas, liquid and cleaning chemistry.
Low Contamination Potential
Quartz is commonly selected for semiconductor equipment because it can be supplied with controlled material quality and clean surface conditions. Cleaning method and packaging level can be specified according to the intended process.
Drawing-Based Customization
Unlike standard quartz rings, this fixture can be manufactured around the equipment interface. The ring body, ribs, holes, slots, edges and surface condition can all be adapted to the customer’s design.
Custom Design Options
| Design Area | Customizable Parameters |
| Ring body | Outer diameter, inner diameter and overall thickness |
| Radial ribs | Quantity, width, height, length, angle and spacing |
| Rib connections | Joining position, transition radius and connection geometry |
| Mounting interface | Bolt holes, positioning holes, slots and notches |
| Supporting surface | Contact area, step height and support-point location |
| Dimensional control | Flatness, roundness, concentricity and positional tolerance |
| Edge design | Chamfer, bevel, radius or polished edge |
| Surface condition | Transparent, translucent, ground or frosted |
| Quartz material | Quartz grade selected according to process requirements |
| التنظيف | Standard cleaning or project-specific cleaning requirements |
| التعبئة والتغليف | Individual protection, clean packaging or export packaging |
Sharp internal corners and abrupt thickness changes should be avoided where possible because they may increase local stress during heating, handling or assembly.
التطبيقات النموذجية
Custom fused quartz fixture rings can be evaluated for use in:
- Semiconductor process equipment
- Wafer heat-treatment systems
- Diffusion furnaces
- أفران الأكسدة
- Chemical vapor deposition equipment
- Quartz furnace assemblies
- Wafer supporting and positioning systems
- High-temperature process chambers
- Laboratory thermal-processing equipment
- Optical and electronic material processing
- Customized semiconductor production fixtures
Suitability must be confirmed according to the operating temperature, process atmosphere, supported load, thermal cycle and equipment structure.
عملية التصنيع
1. Drawing and Application Review
The component drawing, dimensions, rib arrangement, tolerances and operating conditions are reviewed before quotation. Areas with high thermal or mechanical stress can be identified during this stage.
2. Material and Process Selection
The quartz material grade and manufacturing route are selected according to the fixture size, structure and cleanliness requirements.
Depending on the design, production may involve quartz forming, welded assembly, grinding and precision machining.
3. Structural Fabrication
The annular body, radial ribs and additional mounting features are manufactured according to the approved drawing. Rib position and connection geometry are controlled to maintain the required structure.
4. Edge and Surface Finishing
Edges can be ground, chamfered, rounded or polished. Surface condition can be transparent, translucent or frosted according to the application.
5. Inspection and Packaging
Finished components are inspected against the agreed drawing and acceptance criteria before cleaning and protective packaging.
Quality Inspection
Available inspection items include:
- Outer diameter
- Inner diameter
- Overall thickness
- Ring roundness
- Concentricity
- التسطيح
- Rib quantity and position
- Rib width and height
- Hole diameter and position
- Slot and groove dimensions
- Edge condition
- Surface scratches
- Chips and cracks
- Weld appearance
- Visual cleanliness
- Packaging condition
Dimensional inspection reports, material documentation and product photographs can be provided when included in the order requirements.
Information Required for Quotation
For an accurate quotation and manufacturability review, please provide:
| Required Information | الوصف |
| Technical drawing | PDF, DXF, DWG, STEP or another available format |
| Main dimensions | Outer diameter, inner diameter and total thickness |
| Rib structure | Rib quantity, width, height, length and angular position |
| Mounting features | Hole, slot, notch and positioning-point details |
| Dimensional tolerances | Critical dimensions and positional tolerances |
| Geometric tolerances | Flatness, roundness, concentricity and parallelism |
| Surface requirements | Transparent, translucent, ground or frosted |
| Edge treatment | Chamfer, radius, bevel or polished edge |
| Operating temperature | Continuous and peak process temperature |
| Thermal cycle | Heating and cooling conditions |
| Loading conditions | Supported weight, loading direction and contact points |
| Process environment | Gas, chemical, vacuum or atmospheric conditions |
| Equipment type | Furnace, deposition system, process chamber or other equipment |
| Order quantity | Trial quantity and estimated batch demand |
| Quality requirements | Inspection report, material certificate and packaging standard |
Providing the operating conditions in addition to the drawing helps evaluate whether the rib layout, wall thickness and connection structure are suitable for the intended process.
Why Choose ZMSH Custom Quartz Components?
ZMSH supports drawing-based quartz component manufacturing for semiconductor equipment, laboratory systems and high-temperature industrial applications.
Our custom quartz product range includes:
- Quartz fixture rings
- Quartz support rings
- Quartz jigs
- Quartz plates and discs
- Quartz wafer carriers
- Quartz boats
- Quartz furnace tubes
- Quartz flanges
- Quartz chambers
- Quartz welded assemblies
- Other custom semiconductor quartz components
We can review the drawing, manufacturing route, dimensional requirements, inspection method and packaging needs as part of the quotation process.
الأسئلة الشائعة
Can the outer and inner diameters be customized?
Yes. The outer diameter, inner diameter, thickness and overall ring geometry can be manufactured according to the customer’s drawing and equipment interface.
Can the number and dimensions of the radial ribs be changed?
Yes. Rib quantity, width, height, spacing and angular position can be customized. The design should be reviewed together with the expected load and operating temperature.
Can you manufacture the fixture from a physical sample?
Sample-based reproduction may be possible. However, a technical drawing is strongly recommended to define critical dimensions, tolerances and rib positions accurately.
Is the fixture manufactured as one piece or as a welded assembly?
The manufacturing route depends on the ring size, rib structure, tolerances and production feasibility. Formed, machined and welded structures can be evaluated during the drawing review.
المراجعات
لا توجد مراجعات بعد.