Custom Fused Quartz Fixture Ring with Radial Support Ribs

ZMSH manufactures custom fused quartz fixture rings for semiconductor process equipment, wafer heat-treatment systems and other high-temperature, cleanliness-sensitive applications.

The component consists of a large annular quartz body with a central opening and multiple radial support ribs. The ribbed structure is designed to improve rigidity and distribute mechanical loads while retaining an open internal configuration. Outer diameter, inner diameter, overall thickness, rib layout, mounting holes and positioning features can be produced according to customer drawings.

Each fixture is reviewed according to its operating temperature, thermal cycle, loading conditions, equipment interface and cleanliness requirements before manufacturing.

Product Specifications

Item	Available Specification
Product name	Fused Quartz Fixture Ring
Brand	ZMSH
Material	Fused quartz
Structure	Annular ring with radial support ribs
Outer diameter	Customized
Inner diameter	Customized
Overall thickness	Customized
Rib quantity	According to customer drawing
Rib dimensions	Width, height and position customizable
Surface condition	Transparent, translucent or frosted
Edge treatment	Ground, chamfered, rounded or polished
Additional features	Mounting holes, positioning holes, slots, grooves and steps
Flatness	According to drawing and application
Dimensional tolerance	According to component size and technical requirements
Manufacturing methods	Quartz forming, welding, grinding and precision machining
Inspection	Dimensional, visual and cleanliness inspection
Packaging	Individual protective or clean packaging
MOQ	Normally 50 pieces; development quantities subject to confirmation
Lead time	Approximately 2–4 weeks
Payment terms	T/T
Place of origin	Shanghai, China

Final specifications are determined after reviewing the component drawing and operating conditions.

Key Product Features

Annular Structure with Radial Reinforcement

The large central opening and radial rib arrangement provide a practical structure for equipment fixtures requiring an open process area. Rib quantity, width, height and spacing can be adjusted according to the required support points and load distribution.

Actual mechanical performance depends on the component dimensions, support method, working temperature and applied load.

Low Thermal Expansion

Fused quartz has a low coefficient of thermal expansion, helping the fixture maintain dimensional stability during heating and cooling cycles. This property is useful in semiconductor thermal processes where repeated temperature changes may occur.

High-Temperature Process Compatibility

Fused quartz is widely used in semiconductor furnaces and thermal-processing equipment because it maintains good stability at elevated temperatures.

The maximum suitable operating temperature depends on the quartz grade, fixture geometry, applied load, process atmosphere and thermal cycle.

Chemical Resistance

Fused quartz provides resistance to many acids and process chemicals used in semiconductor and laboratory environments. Chemical compatibility should nevertheless be verified against the actual process gas, liquid and cleaning chemistry.

Low Contamination Potential

Quartz is commonly selected for semiconductor equipment because it can be supplied with controlled material quality and clean surface conditions. Cleaning method and packaging level can be specified according to the intended process.

Drawing-Based Customization

Unlike standard quartz rings, this fixture can be manufactured around the equipment interface. The ring body, ribs, holes, slots, edges and surface condition can all be adapted to the customer’s design.

Custom Design Options

Design Area	Customizable Parameters
Ring body	Outer diameter, inner diameter and overall thickness
Radial ribs	Quantity, width, height, length, angle and spacing
Rib connections	Joining position, transition radius and connection geometry
Mounting interface	Bolt holes, positioning holes, slots and notches
Supporting surface	Contact area, step height and support-point location
Dimensional control	Flatness, roundness, concentricity and positional tolerance
Edge design	Chamfer, bevel, radius or polished edge
Surface condition	Transparent, translucent, ground or frosted
Quartz material	Quartz grade selected according to process requirements
Cleaning	Standard cleaning or project-specific cleaning requirements
Packaging	Individual protection, clean packaging or export packaging

Sharp internal corners and abrupt thickness changes should be avoided where possible because they may increase local stress during heating, handling or assembly.

Typical Applications

Custom fused quartz fixture rings can be evaluated for use in:

• Semiconductor process equipment
• Wafer heat-treatment systems
• Diffusion furnaces
• Oxidation furnaces
• Chemical vapor deposition equipment
• Quartz furnace assemblies
• Wafer supporting and positioning systems
• High-temperature process chambers
• Laboratory thermal-processing equipment
• Optical and electronic material processing
• Customized semiconductor production fixtures

Suitability must be confirmed according to the operating temperature, process atmosphere, supported load, thermal cycle and equipment structure.

Manufacturing Process

1. Drawing and Application Review

The component drawing, dimensions, rib arrangement, tolerances and operating conditions are reviewed before quotation. Areas with high thermal or mechanical stress can be identified during this stage.

2. Material and Process Selection

The quartz material grade and manufacturing route are selected according to the fixture size, structure and cleanliness requirements.

Depending on the design, production may involve quartz forming, welded assembly, grinding and precision machining.

3. Structural Fabrication

The annular body, radial ribs and additional mounting features are manufactured according to the approved drawing. Rib position and connection geometry are controlled to maintain the required structure.

4. Edge and Surface Finishing

Edges can be ground, chamfered, rounded or polished. Surface condition can be transparent, translucent or frosted according to the application.

5. Inspection and Packaging

Finished components are inspected against the agreed drawing and acceptance criteria before cleaning and protective packaging.

Quality Inspection

Available inspection items include:

• Outer diameter
• Inner diameter
• Overall thickness
• Ring roundness
• Concentricity
• Flatness
• Rib quantity and position
• Rib width and height
• Hole diameter and position
• Slot and groove dimensions
• Edge condition
• Surface scratches
• Chips and cracks
• Weld appearance
• Visual cleanliness
• Packaging condition

Dimensional inspection reports, material documentation and product photographs can be provided when included in the order requirements.

Information Required for Quotation

For an accurate quotation and manufacturability review, please provide:

Required Information	Description
Technical drawing	PDF, DXF, DWG, STEP or another available format
Main dimensions	Outer diameter, inner diameter and total thickness
Rib structure	Rib quantity, width, height, length and angular position
Mounting features	Hole, slot, notch and positioning-point details
Dimensional tolerances	Critical dimensions and positional tolerances
Geometric tolerances	Flatness, roundness, concentricity and parallelism
Surface requirements	Transparent, translucent, ground or frosted
Edge treatment	Chamfer, radius, bevel or polished edge
Operating temperature	Continuous and peak process temperature
Thermal cycle	Heating and cooling conditions
Loading conditions	Supported weight, loading direction and contact points
Process environment	Gas, chemical, vacuum or atmospheric conditions
Equipment type	Furnace, deposition system, process chamber or other equipment
Order quantity	Trial quantity and estimated batch demand
Quality requirements	Inspection report, material certificate and packaging standard

Providing the operating conditions in addition to the drawing helps evaluate whether the rib layout, wall thickness and connection structure are suitable for the intended process.

Why Choose ZMSH Custom Quartz Components?

ZMSH supports drawing-based quartz component manufacturing for semiconductor equipment, laboratory systems and high-temperature industrial applications.

Our custom quartz product range includes:

• Quartz fixture rings
• Quartz support rings
• Quartz jigs
• Quartz plates and discs
• Quartz wafer carriers
• Quartz boats
• Quartz furnace tubes
• Quartz flanges
• Quartz chambers
• Quartz welded assemblies
• Other custom semiconductor quartz components

We can review the drawing, manufacturing route, dimensional requirements, inspection method and packaging needs as part of the quotation process.

Frequently Asked Questions

Can the outer and inner diameters be customized?

Yes. The outer diameter, inner diameter, thickness and overall ring geometry can be manufactured according to the customer’s drawing and equipment interface.

Can the number and dimensions of the radial ribs be changed?

Yes. Rib quantity, width, height, spacing and angular position can be customized. The design should be reviewed together with the expected load and operating temperature.

Can you manufacture the fixture from a physical sample?

Sample-based reproduction may be possible. However, a technical drawing is strongly recommended to define critical dimensions, tolerances and rib positions accurately.

Is the fixture manufactured as one piece or as a welded assembly?

The manufacturing route depends on the ring size, rib structure, tolerances and production feasibility. Formed, machined and welded structures can be evaluated during the drawing review.