เครื่องบอนด์ความแม่นยำสูงสำหรับแผ่นเวเฟอร์และเมล็ดซิลิคอนคาร์ไบด์แบบปราศจากฟองอากาศ

The SiC Bonding Machine is a high-precision, vacuum-assisted system designed to bond wafers, SiC seeds, graphite paper, and graphite plates with exceptional accuracy and stability.

ภาพรวมของผลิตภัณฑ์

The SiC Bonding Machine is a high-precision, vacuum-assisted system designed to bond wafers, SiC seeds, graphite paper, and graphite plates with exceptional accuracy and stability.

It ensures:

  • Precise center alignment for wafers and substrates

  • Uniform compression for stable, bubble-free bonding

  • Reproducible results suitable for both R&D and small-to-medium scale production

Ideal for semiconductors, SiC seed bonding, high-temperature ceramics, and advanced materials research, this machine provides a reliable, efficient, and high-quality bonding solution.

คุณสมบัติเด่นและข้อได้เปรียบ

  • Precision Alignment – Mechanically ensures exact center positioning for perfect bonding.

  • Vacuum-Assisted Bubble Removal – Eliminates air pockets for defect-free adhesive interfaces.

  • Adjustable Pressure – Provides uniform compression for consistent bonding across substrates.

  • Material Flexibility – Compatible with wafers, SiC seeds, graphite paper, and graphite plates.

  • High Repeatability – Delivers consistent results for pilot-scale production or R&D projects.

  • User-Friendly Interface – Simple controls for process monitoring and semi-automated operation.

System Features

  • Vacuum-Assisted Bonding – Ensures bubble-free and uniform adhesion

  • Precision Pressure Control – Adjustable for various substrate types and adhesive requirements

  • Center Alignment Mechanism – Guarantees accurate positioning of wafers and SiC seeds

  • Programmable Process Settings – Customizable temperature, pressure, and dwell time for precise control

  • Compact, Modular Design – Easy integration and maintenance

  • Data Logging & Monitoring – Records process parameters for quality assurance

ข้อมูลจำเพาะทางเทคนิค

พารามิเตอร์ ข้อกำหนด หมายเหตุ
Maximum Substrate Size ≤12 inches Supports small to medium wafers and substrates
ระดับสุญญากาศ ≤10⁻² Pa Ensures bubble-free bonding
ช่วงความดัน 0–5 MPa Adjustable for uniform compression
ช่วงอุณหภูมิ Ambient – 300 °C Optional heated bonding for special adhesives
เวลาในการหมุนเวียน 5–60 min Adjustable depending on substrate and process
แหล่งจ่ายไฟ 220V / 380V Single or three-phase depending on installation
การควบคุมการเคลื่อนไหว Manual or semi-automated For precise alignment and bonding

การประยุกต์ใช้

  • SiC Seed Bonding – High-precision bonding for SiC seeds and wafers

  • Semiconductor Wafer Bonding – Single or multi-layer wafer adhesion

  • Graphite Substrate Bonding – High-temperature and high-strength bonding of graphite paper or plates

  • Pilot and R&D Production – Small-batch, research, or pilot-scale production

  • Advanced Materials – Bonding ceramics and composite substrates

คำถามที่พบบ่อย – คำถามที่มักถูกถามบ่อย

Q1: What types of substrates can the machine handle?
A1: Wafers, SiC seeds, graphite paper, and graphite plates, including rigid and flexible materials.

Q2: How is bubble-free bonding achieved?
A2: Vacuum-assisted bonding removes trapped air, ensuring defect-free adhesive layers.

Q3: Can pressure and temperature be adjusted?
A3: Yes, pressure is adjustable from 0–5 MPa, and temperature can reach up to 300 °C for specialized adhesives.

Q4: Is this machine suitable for pilot-scale production?
A4: Yes, it is ideal for R&D, pilot-scale, and small-batch production.

Q5: How user-friendly is the operation?
A5: The interface is intuitive, with semi-automated alignment and easy process monitoring.

GET A QUOTE

Request a Quote for SiC Precision Bonding Machine for Bubble-Free Wafer and SiC Seed Assembly

Tell us your required specifications, dimensions, quantity, application and technical requirements. You can also provide drawings or additional project information. Our technical team will review your requirements and reply as soon as possible.

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