{"id":2426,"date":"2026-04-27T05:56:44","date_gmt":"2026-04-27T05:56:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2426"},"modified":"2026-07-21T21:14:43","modified_gmt":"2026-07-21T21:14:43","slug":"%e9%88%a6%e9%8a%85%e9%87%91%e5%b1%ac%e5%a1%97%e5%b1%a4%e7%9f%bd%e6%99%b6%e5%9c%93-%e9%88%a6%e9%8a%85%e6%bf%ba%e9%8d%8d%e6%99%b6%e5%9c%93%e7%94%a8%e6%96%bc%e8%a8%98%e6%86%b6%e9%ab%94%e5%be%ae%e9%9b%bb","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/ti-cu-metal-coated-silicon-wafer-titanium-copper-sputtered-wafer-for-mems-microelectronics-conductive-substrate\/","title":{"rendered":"\u9226\/\u9285\u91d1\u5c6c\u5857\u5c64\u77fd\u6676\u5713 \u9226\u9285\u6ffa\u934d\u6676\u5713\u7528\u65bc MEMS \u5fae\u96fb\u5b50\u5c0e\u96fb\u57fa\u677f"},"content":{"rendered":"

\"\"Ti\/Cu \u91d1\u5c6c\u934d\u5c64\u77fd\u6676\u5713\u662f\u5c08\u70ba\u5148\u9032\u7814\u7a76\u8207\u5de5\u696d\u61c9\u7528\u6240\u8a2d\u8a08\u7684\u6a19\u6e96\u5c0e\u96fb\u8207\u88fd\u7a0b\u76f8\u5bb9\u57fa\u677f\u3002\u900f\u904e\u7d50\u5408\u77fd\u6676\u5713\u6280\u8853\u8207\u91d1\u5c6c\u8584\u819c\u5857\u5c64\uff0c\u5b83\u53ef\u70ba\u96fb\u6c23\u3001\u5316\u5b78\u8207\u5fae\u88fd\u7a0b\u63d0\u4f9b\u7a69\u5b9a\u7684\u5e73\u53f0\u3002.<\/p>\n

Ti\/Cu \u5857\u5c64\u7cfb\u7d71\u7684\u7d50\u69cb\u53ef\u78ba\u4fdd\u6a5f\u68b0\u53ef\u9760\u6027\u548c\u529f\u80fd\u5c0e\u96fb\u6027\u3002\u5b83\u7279\u5225\u9069\u5408\u9700\u8981\u53ef\u9760\u7684\u91d1\u5c6c\u4ecb\u9762\u3001\u5747\u52fb\u7684\u8868\u9762\u5c0e\u96fb\u6027\uff0c\u4ee5\u53ca\u8207\u6a19\u6e96\u534a\u5c0e\u9ad4\u52a0\u5de5\u6280\u8853\u76f8\u5bb9\u7684\u61c9\u7528\u3002.<\/p>\n

\u8a72\u7522\u54c1\u652f\u63f4\u6676\u5713\u5c3a\u5bf8\u3001\u57fa\u677f\u985e\u578b\u548c\u8584\u819c\u539a\u5ea6\u7684\u5ba2\u88fd\u5316\uff0c\u56e0\u6b64\u9069\u7528\u65bc\u5c0f\u898f\u6a21\u7814\u7a76\u5be6\u9a57\u548c\u8a66\u7522\u74b0\u5883\u3002.<\/p>\n

\n

\"\"\u4e3b\u8981\u529f\u80fd<\/strong><\/span><\/h2>\n
    \n
  • \u9644\u8457\u529b\u5f37<\/strong>
    \u9226\u9ecf\u8457\u5c64\u53ef\u5927\u5e45\u6539\u5584\u9285\u819c\u8207\u77fd\u57fa\u677f\u4e4b\u9593\u7684\u9ecf\u8457\u6027\uff0c\u964d\u4f4e\u525d\u843d\u8207\u812b\u5c64\u98a8\u96aa\u3002.<\/li>\n
  • \u9ad8\u96fb\u5c0e\u6027<\/strong>
    \u9285\u8868\u9762\u5c64\u63d0\u4f9b\u4f4e\u96fb\u963b\u548c\u7a69\u5b9a\u7684\u96fb\u6c23\u6027\u80fd\uff0c\u9069\u7528\u65bc\u88dd\u7f6e\u6e2c\u8a66\u548c\u5c0e\u96fb\u61c9\u7528\u3002.<\/li>\n
  • \u512a\u7570\u7684\u8584\u819c\u5747\u52fb\u6027<\/strong>
    \u78c1\u63a7\u6ffa\u934d\u53ef\u78ba\u4fdd\u6574\u500b\u6676\u5713\u4e0a\u5747\u52fb\u7684\u5857\u5c64\u539a\u5ea6\u548c\u5e73\u6ed1\u7684\u8868\u9762\u5f62\u614b\u3002.<\/li>\n
  • \u826f\u597d\u7684\u88fd\u7a0b\u76f8\u5bb9\u6027<\/strong>
    \u8207\u5149\u523b\u3001\u8755\u523b\u3001\u96fb\u934d\u3001\u6c89\u7a4d\u53ca\u6a19\u6e96\u534a\u5c0e\u9ad4\u88fd\u7a0b\u76f8\u5bb9\u3002.<\/li>\n
  • \u5f48\u6027\u5ba2\u88fd\u5316<\/strong>
    \u63d0\u4f9b\u591a\u7a2e\u6676\u5713\u5c3a\u5bf8\u3001\u57fa\u677f\u985e\u578b\u548c\u91d1\u5c6c\u5c64\u539a\u5ea6\u7d44\u5408\u3002.<\/li>\n<\/ul>\n
    \n

    \"\"\u5178\u578b\u7d50\u69cb<\/strong><\/span><\/h2>\n

    \u57fa\u677f + \u9226\u9ecf\u8457\u5c64 + \u9285\u5c0e\u96fb\u5c64<\/strong><\/p>\n

      \n
    • \u57fa\u677f\uff1a\u77fd\/\u77f3\u82f1\/\u73bb\u7483 (\u9078\u8cfc)<\/li>\n
    • \u9ecf\u8457\u5c64\uff1a\u9226 (Ti)<\/li>\n
    • \u5c0e\u96fb\u5c64\uff1a\u9285 (Cu)<\/li>\n
    • \u6c89\u7a4d\u65b9\u6cd5\uff1a\u78c1\u63a7\u6ffa\u5c04<\/li>\n<\/ul>\n

      Ti \u5c64\u4f5c\u70ba\u57fa\u677f\u8207\u9285\u819c\u4e4b\u9593\u7684\u4ecb\u9762\u63a5\u5408\u5c64\uff0c\u53ef\u78ba\u4fdd\u7d50\u69cb\u7684\u7a69\u5b9a\u6027\u3002\u9285\u5c64\u5247\u70ba\u96fb\u6c23\u548c\u88fd\u7a0b\u61c9\u7528\u63d0\u4f9b\u529f\u80fd\u6027\u5c0e\u96fb\u8868\u9762\u3002.<\/p>\n

      \n

      \u898f\u683c<\/strong><\/span><\/h2>\n
      \n
      \n\n\n\n\n\n\n\n\n\n\n\n\n
      \u9805\u76ee<\/th>\n\u8aaa\u660e<\/th>\n<\/tr>\n<\/thead>\n
      \u6676\u5713\u5c3a\u5bf8<\/td>\n2\u2033\u30014\u2033\u30016\u2033\u30018\u2033\uff0c\u5ba2\u88fd\u5316\u5c3a\u5bf8<\/td>\n<\/tr>\n
      \u57fa\u677f\u6750\u6599<\/td>\n\u77fd\u3001\u77f3\u82f1\u3001BF33 \u73bb\u7483 (\u9078\u8cfc)<\/td>\n<\/tr>\n
      \u6676\u9ad4\u65b9\u5411<\/td>\n\u3001 \u7b49\u3002.<\/td>\n<\/tr>\n
      \u96fb\u963b\u7387<\/td>\n\u4f4e \/ \u4e2d \/ \u9ad8\uff08\u53ef\u81ea\u8a02\uff09<\/td>\n<\/tr>\n
      \u9226\u539a\u5ea6<\/td>\n10-50 \u5948\u7c73 (\u5178\u578b\u7bc4\u570d)<\/td>\n<\/tr>\n
      \u9285\u539a<\/td>\n50 nm - 1 \u00b5m\uff08\u6ffa\u934d\uff09\uff0c\u901a\u904e\u96fb\u934d\u52a0\u539a<\/td>\n<\/tr>\n
      \u5857\u5c64\u65b9\u6cd5<\/td>\n\u78c1\u63a7\u7ba1\u6ffa\u5c04<\/td>\n<\/tr>\n
      \u5857\u5c64\u9762<\/td>\n\u55ae\u9762\u6216\u96d9\u9762<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
      \n

      \"\"\u88fd\u9020\u904e\u7a0b<\/strong><\/span><\/h2>\n

      Ti\/Cu \u91d1\u5c6c\u934d\u819c\u6676\u5713\u662f\u5229\u7528\u771f\u7a7a\u78c1\u63a7\u6ffa\u5c04\u6280\u8853\u88fd\u6210\u3002\u9996\u5148\uff0c\u5728\u6e05\u6f54\u904e\u7684\u77fd\u8868\u9762\u6c89\u7a4d\u4e00\u5c64\u9226\u819c\uff0c\u4ee5\u63d0\u9ad8\u9644\u8457\u529b\u3002\u63a5\u8457\u5728\u9226\u819c\u4e0a\u9762\u6c89\u7a4d\u4e00\u5c64\u9285\uff0c\u5f62\u6210\u5747\u52fb\u7684\u5c0e\u96fb\u8868\u9762\u3002.<\/p>\n

      \u5c0d\u65bc\u9700\u8981\u8f03\u539a\u9285\u819c\u7684\u61c9\u7528\uff0c\u6ffa\u934d\u9285\u5c64\u53ef\u7528\u4f5c\u96fb\u934d\u7684\u7a2e\u5b50\u5c64\uff0c\u8b93\u91d1\u5c6c\u9032\u4e00\u6b65\u751f\u9577\uff0c\u4ee5\u9054\u5230\u5fae\u7c73\u7d1a\u7684\u539a\u5ea6\uff0c\u540c\u6642\u4fdd\u6301\u5f37\u5927\u7684\u9644\u8457\u529b\u3002.<\/p>\n

      \u9019\u7a2e\u7d44\u5408\u88fd\u7a0b\u53ef\u540c\u6642\u78ba\u4fdd\u9ad8\u8584\u819c\u54c1\u8cea\u8207\u5f48\u6027\u7684\u529f\u80fd\u64f4\u5145\u6027\u3002.<\/p>\n

      \n

      \u61c9\u7528<\/strong><\/span><\/h2>\n
        \n
      • \u534a\u5c0e\u9ad4\u5143\u4ef6\u7814\u7a76\u8207\u539f\u578b\u88fd\u4f5c<\/li>\n
      • \u6b50\u59c6\u63a5\u89f8\u548c\u96fb\u6975\u88fd\u9020<\/li>\n
      • MEMS \u5fae\u7d50\u69cb\u7a2e\u5b50\u5c64\u958b\u767c<\/li>\n
      • \u7528\u65bc RDL \u548c\u539a\u9285\u7d50\u69cb\u7684\u96fb\u934d\u5e95\u5ea7<\/li>\n
      • \u8584\u819c\u8207\u5948\u7c73\u6750\u6599\u751f\u9577\u7814\u7a76<\/li>\n
      • \u8868\u9762\u96fb\u5c0e\u7387\u6e2c\u8a66\u548c\u6750\u6599\u5206\u6790<\/li>\n
      • SEM\u3001AFM \u548c\u8868\u9762\u8a08\u91cf\u6a23\u54c1\u88fd\u5099<\/li>\n
      • \u751f\u7269\u96fb\u5316\u5b78\u611f\u6e2c\u5668\u548c\u5fae\u9663\u5217\u5e73\u53f0<\/li>\n<\/ul>\n
        \n

        \u8207\u55ae\u4e00\u91d1\u5c6c\u5857\u5c64\u76f8\u6bd4\u7684\u512a\u52e2<\/strong><\/span><\/h2>\n

        \u76f8\u8f03\u65bc\u76f4\u63a5\u5728\u77fd\u4e0a\u934d\u9285\uff0cTi\/Cu \u7d50\u69cb\u53ef\u63d0\u4f9b\uff1a<\/p>\n

          \n
        • \u5728\u71b1\u61c9\u529b\u548c\u5316\u5b78\u61c9\u529b\u4e0b\u5177\u6709\u66f4\u4f73\u7684\u9ecf\u8457\u7a69\u5b9a\u6027<\/li>\n
        • \u964d\u4f4e\u9285\u525d\u843d\u6216\u958b\u88c2\u7684\u98a8\u96aa<\/li>\n
        • \u63d0\u9ad8\u5fae\u88fd\u7a0b\u6b65\u9a5f\u7684\u88fd\u7a0b\u826f\u7387<\/li>\n
        • \u9577\u6642\u9593\u4f7f\u7528\u5f8c\uff0c\u96fb\u6c23\u6027\u80fd\u66f4\u7a69\u5b9a<\/li>\n
        • \u8207\u591a\u6b65\u534a\u5c0e\u9ad4\u88fd\u7a0b\u6709\u66f4\u597d\u7684\u76f8\u5bb9\u6027<\/li>\n<\/ul>\n

          \u9019\u8b93\u5b83\u6210\u70ba\u7814\u7a76\u5be6\u9a57\u5ba4\u548c\u5de5\u696d\u7814\u767c\u74b0\u5883\u66f4\u53ef\u9760\u7684\u89e3\u6c7a\u65b9\u6848\u3002.<\/p>\n

          \n

          \u5e38\u898b\u554f\u984c<\/strong><\/span><\/h2>\n

          Q1: \u70ba\u4f55\u5728\u934d\u9285\u5c64\u4e0b\u4f7f\u7528\u9226\uff1f<\/strong>
          \u9226\u53ef\u4f5c\u70ba\u9644\u8457\u5c64\uff0c\u6539\u5584\u9285\u8207\u77fd\u57fa\u790e\u4e4b\u9593\u7684\u63a5\u5408\uff0c\u9632\u6b62\u5728\u52a0\u5de5\u548c\u4f7f\u7528\u904e\u7a0b\u4e2d\u812b\u5c64\u3002.<\/p>\n

          Q2: \u9285\u539a\u5ea6\u53ef\u4ee5\u589e\u52a0\u55ce\uff1f<\/strong>
          \u662f\u7684\uff0c\u6ffa\u934d\u9285\u53ef\u4f5c\u70ba\u96fb\u934d\u7684\u7a2e\u5b50\u5c64\uff0c\u4f9d\u61c9\u7528\u9700\u6c42\u9054\u5230\u66f4\u539a\u7684\u91d1\u5c6c\u5c64\u3002.<\/p>\n

          Q3: \u6676\u5713\u7684\u5169\u9762\u90fd\u53ef\u4ee5\u5857\u5c64\u55ce\uff1f<\/strong>
          \u662f\uff0c\u53ef\u6839\u64da\u8981\u6c42\u63d0\u4f9b\u55ae\u9762\u6216\u96d9\u9762\u5857\u5c64\u9078\u9805\u3002.<\/p>\n

          Q4: \u6709\u54ea\u4e9b\u57fa\u677f\u9078\u9805\uff1f<\/strong>
          \u6a19\u6e96\u77fd\u662f\u6700\u5e38\u898b\u7684\uff0c\u4f46\u77f3\u82f1\u548c\u73bb\u7483\u57fa\u677f\u4e5f\u53ef\u7528\u65bc\u7279\u6b8a\u5149\u5b78\u6216\u5316\u5b78\u61c9\u7528\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

          Ti\/Cu \u91d1\u5c6c\u934d\u5c64\u77fd\u6676\u5713\u662f\u5229\u7528\u78c1\u63a7\u6ffa\u5c04\u6280\u8853\u5728\u77fd\u57fa\u677f\u4e0a\u6c89\u7a4d\u9226\u9644\u8457\u5c64\u548c\u9285\u5c0e\u96fb\u5c64\u800c\u5236\u5099\u7684\u9ad8\u54c1\u8cea\u529f\u80fd\u6027\u6676\u5713\u3002\u9226\u5c64\u63d0\u9ad8\u4e86\u8584\u819c\u7684\u9644\u8457\u529b\u548c\u7a69\u5b9a\u6027\uff0c\u800c\u9285\u5c64\u5247\u63d0\u4f9b\u4e86\u512a\u7570\u7684\u5c0e\u96fb\u6027\u3002\u6b64\u7522\u54c1\u5ee3\u6cdb\u61c9\u7528\u65bc\u5fae\u96fb\u5b50\u3001\u5fae\u6a5f\u96fb\u7cfb\u7d71\u88fd\u9020\u3001\u5be6\u9a57\u5ba4\u7814\u7a76\u53ca\u8584\u819c\u88fd\u7a0b\u958b\u767c\u3002.<\/p>","protected":false},"featured_media":2428,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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