{"id":2419,"date":"2026-04-27T02:15:07","date_gmt":"2026-04-27T02:15:07","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2419"},"modified":"2026-06-11T09:57:44","modified_gmt":"2026-06-11T09:57:44","slug":"6-inch-n-type-6h-sic-epitaxy-wafer-for-mems-uv-sensors-graphene-growth","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/6-inch-n-type-6h-sic-epitaxy-wafer-for-mems-uv-sensors-graphene-growth\/","title":{"rendered":"\u7528\u65bc MEMS\u3001UV \u611f\u6e2c\u5668\u548c\u77f3\u58a8\u70ef\u751f\u9577\u7684 6 \u82f1\u540b N \u578b 6H SiC \u78ca\u6676\u6676\u5713"},"content":{"rendered":"

\"\u7528\u65bc6 Inch N-Type 6H SiC Epitaxy Wafer \u662f\u4e00\u7a2e\u9ad8\u6027\u80fd\u534a\u5c0e\u9ad4\u57fa\u677f\uff0c\u5c08\u70ba MEMS \u88dd\u7f6e\u3001\u7d2b\u5916\u7dda (UV) \u611f\u6e2c\u5668\u548c\u5916\u5ef6\u77f3\u58a8\u70ef\u751f\u9577\u7b49\u5148\u9032\u61c9\u7528\u800c\u8a2d\u8a08\u3002\u6b64\u6676\u5713\u4ee5\u9ad8\u54c1\u8cea\u7684\u78b3\u5316\u77fd (SiC) \u55ae\u6676\u88fd\u6210\uff0c\u7d50\u5408\u4e86\u512a\u7570\u7684\u96fb\u6c23\u3001\u71b1\u548c\u6a5f\u68b0\u7279\u6027\uff0c\u4f7f\u5176\u6210\u70ba\u50b3\u7d71\u77fd\u6750\u8cea\u7121\u6cd5\u53ef\u9760\u904b\u4f5c\u7684\u56b4\u82db\u74b0\u5883\u4e0b\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/p>\n

\u6b64\u6676\u5713\u7684\u6a19\u6e96\u76f4\u5f91\u70ba 150 mm\uff086 \u82f1\u5bf8\uff09\uff0c\u539a\u5ea6\u7cbe\u78ba\u63a7\u5236\u5728 350 \u00b5m\uff0c\u5177\u6709\u512a\u7570\u7684\u6a5f\u68b0\u7a69\u5b9a\u6027\uff0c\u4e26\u8207\u73fe\u4ee3\u534a\u5c0e\u9ad4\u88fd\u9020\u8a2d\u5099\u7684\u88fd\u7a0b\u76f8\u5bb9\u30026H Polytype \u5177\u6709\u7d04 2.96 eV \u7684\u5bec\u5e36\u9699\uff0c\u53ef\u5728\u9ad8\u6eab\u3001\u9ad8\u8f3b\u5c04\u548c\u5316\u5b78\u4fb5\u8755\u6027\u689d\u4ef6\u4e0b\u6709\u6548\u904b\u4f5c\u3002.<\/p>\n

\u6bcf\u500b\u6676\u5713\u90fd\u4f7f\u7528\u5148\u9032\u7684\u5316\u5b78\u6a5f\u68b0\u7814\u78e8 (CMP) \u6280\u8853\u52a0\u5de5\u6210\u53ef\u4f9b\u78ca\u6676\u4f7f\u7528\u7684\u8868\u9762\u3002\u9019\u53ef\u78ba\u4fdd\u8d85\u4f4e\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u3001\u6700\u5c0f\u7684\u6b21\u8868\u9762\u640d\u50b7\uff0c\u4ee5\u53ca\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD) \u7b49\u5916\u5ef6\u5c64\u751f\u9577\u88fd\u7a0b\u7684\u6700\u4f73\u689d\u4ef6\u3002\u5176\u7d50\u679c\u662f\u6539\u5584\u88dd\u7f6e\u6548\u80fd\u3001\u63d0\u9ad8\u826f\u7387\uff0c\u4ee5\u53ca\u589e\u5f37\u95dc\u9375\u61c9\u7528\u7684\u53ef\u9760\u6027\u3002.<\/p>\n

\n

\"\u7528\u65bc\u4e3b\u8981\u529f\u80fd<\/strong><\/span><\/h3>\n

\u53ef\u9032\u884c\u9ad8\u54c1\u8cea\u751f\u9577\u7684\u5916\u5ef6-\u5c31\u7dd2\u8868\u9762<\/strong>
\u4ea4\u4ed8\u7684\u6676\u5713\u5177\u6709\u93e1\u9762\u822c\u7684 CMP \u7814\u78e8\u8868\u9762\uff0c\u53ef\u9054\u5230\u6b21\u5948\u7c73\u7d1a\u7684\u7c97\u7cd9\u5ea6\u3002\u9019\u53ef\u78ba\u4fdd\u8207\u78ca\u6676\u6210\u9577\u88fd\u7a0b\u6709\u6975\u4f73\u7684\u76f8\u5bb9\u6027\uff0c\u7279\u5225\u662f\u5728\u77f3\u58a8\u70ef\u5f62\u6210\u548c UV \u611f\u61c9\u5143\u4ef6\u88fd\u9020\u65b9\u9762\u3002.<\/p>\n

\u91dd\u5c0d MEMS \u8207\u60e1\u52a3\u74b0\u5883\u9032\u884c\u6700\u4f73\u5316<\/strong>
6 Inch N-Type 6H SiC Epitaxy Wafer \u5177\u6709\u6975\u4f73\u7684\u71b1\u7a69\u5b9a\u6027\uff0c\u53ef\u5728\u8d85\u904e 500\u00b0C \u7684\u6eab\u5ea6\u4e0b\u7dad\u6301\u6548\u80fd\u3002\u5176\u9ad8\u6a5f\u68b0\u5f37\u5ea6\u548c\u5316\u5b78\u60f0\u6027\u4f7f\u5176\u9069\u7528\u65bc\u5728\u6975\u7aef\u74b0\u5883\u4e0b\u904b\u4f5c\u7684 MEMS \u88dd\u7f6e\uff0c\u4f8b\u5982\u822a\u592a\u3001\u80fd\u6e90\u548c\u5de5\u696d\u76e3\u63a7\u7cfb\u7d71\u3002.<\/p>\n

\u7528\u65bc UV \u611f\u6e2c\u5668\u61c9\u7528\u7684\u5bec\u5e36\u9699<\/strong>
\u6b64\u6676\u5713\u7684\u5e36\u9699\u7d04\u70ba 2.96 eV\uff0c\u5c0d\u7d2b\u5916\u5149\u5177\u6709\u5929\u7136\u7684\u654f\u611f\u5ea6\uff0c\u540c\u6642\u5c0d\u53ef\u898b\u5149\u6ce2\u9577\u4e0d\u654f\u611f\u3002\u9019\u4f7f\u5176\u6210\u70ba\u7528\u65bc\u706b\u7130\u5075\u6e2c\u3001\u74b0\u5883\u76e3\u63a7\u548c\u9632\u79a6\u7cfb\u7d71\u7684\u65e5\u5149\u76f2\u7d2b\u5916\u7dda\u611f\u6e2c\u5668\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/p>\n

\u7a69\u5b9a\u7684\u96fb\u6c23\u6027\u80fd<\/strong>
\u6c2e\u647b\u96dc\u53ef\u78ba\u4fdd\u53ef\u9760\u7684 N \u578b\u5c0e\u96fb\u6027\uff0c\u5f9e\u800c\u5be6\u73fe\u4e00\u81f4\u7684\u96fb\u6c23\u7279\u6027\u548c\u7a69\u5b9a\u7684\u6b50\u59c6\u63a5\u9ede\u5f62\u6210\u3002\u9019\u5c0d\u65bc\u7cbe\u5bc6\u611f\u6e2c\u88dd\u7f6e\u548c\u5149\u96fb\u61c9\u7528\u662f\u975e\u5e38\u91cd\u8981\u7684\u3002.<\/p>\n

\u53d7\u63a7\u6676\u9ad4\u53d6\u5411<\/strong>
\u6b64\u6676\u5713\u5177\u6709\u671d\u5411 (\u00b10.5\u00b0) \u7684 4\u00b0 \u96e2\u8ef8\u53d6\u5411\uff0c\u53ef\u4fc3\u9032\u968e\u6d41\u5f0f\u78ca\u6676\u6210\u9577\u4e26\u6e1b\u5c11\u8868\u9762\u7f3a\u9677\u3002\u9019\u53ef\u589e\u5f37\u88dd\u7f6e\u88fd\u9020\u904e\u7a0b\u4e2d\u7684\u5747\u52fb\u6027\u548c\u53ef\u91cd\u8907\u6027\u3002.<\/p>\n

\n

\u61c9\u7528<\/strong><\/span><\/h3>\n

\u6975\u7aef\u689d\u4ef6\u4e0b\u7684 MEMS \u5143\u4ef6<\/strong>
6 Inch N-Type 6H SiC Epitaxy Wafer \u5ee3\u6cdb\u61c9\u7528\u65bc MEMS \u611f\u6e2c\u5668\uff0c\u4f8b\u5982\u5c08\u70ba\u9ad8\u6eab\u548c\u9ad8\u58d3\u529b\u74b0\u5883\u8a2d\u8a08\u7684\u58d3\u529b\u611f\u6e2c\u5668\u548c\u52a0\u901f\u5ea6\u8a08\u3002\u9019\u4e9b\u88dd\u7f6e\u5728\u6cb9\u6c23\u52d8\u63a2\u3001\u6c7d\u8eca\u7cfb\u7d71\u53ca\u822a\u592a\u6e26\u8f2a\u76e3\u63a7\u4e2d\u81f3\u70ba\u91cd\u8981\u3002.<\/p>\n

\u65e5\u5149\u76f2\u578b\u7d2b\u5916\u7dda\u611f\u6e2c\u5668<\/strong>
\u7531\u65bc\u5177\u6709\u5bec\u5e36\u9699\uff0c\u6b64\u6676\u5713\u662f\u88fd\u9020\u7d2b\u5916\u7dda\u5149\u96fb\u611f\u6e2c\u5668\u7684\u7406\u60f3\u9078\u64c7\uff0c\u80fd\u5920\u7cbe\u78ba\u5730\u5075\u6e2c\u7d2b\u5916\u7dda\u8f3b\u5c04\uff0c\u800c\u4e0d\u53d7\u53ef\u898b\u5149\u7684\u5e72\u64fe\u3002\u9019\u7a2e\u80fd\u529b\u5c0d\u706b\u7130\u5075\u6e2c\u7cfb\u7d71\u548c\u5148\u9032\u5149\u5b78\u50b3\u611f\u6280\u8853\u800c\u8a00\u662f\u4e0d\u53ef\u6216\u7f3a\u7684\u3002.<\/p>\n

\u77f3\u58a8\u70ef\u751f\u9577\u57fa\u677f<\/strong>
\u6b64\u6676\u5713\u53ef\u4f5c\u70ba\u77f3\u58a8\u70ef\u5916\u5ef6\u751f\u9577\u7684\u9ad8\u54c1\u8cea\u57fa\u677f\u3002\u5728\u9ad8\u6eab\u771f\u7a7a\u689d\u4ef6\u4e0b\uff0c\u77fd\u539f\u5b50\u5f9e SiC \u8868\u9762\u6607\u83ef\uff0c\u7559\u4e0b\u6709\u5e8f\u7684\u77f3\u58a8\u70ef\u5c64\u3002\u6b64\u88fd\u7a0b\u5ee3\u6cdb\u61c9\u7528\u65bc\u5148\u9032\u96fb\u5b50\u3001\u9ad8\u901f\u88dd\u7f6e\u53ca\u91cf\u5b50\u7814\u7a76\u3002.<\/p>\n

\u5148\u9032\u5149\u96fb\u7cfb\u7d71<\/strong>
6H-SiC \u7684\u5149\u5b78\u900f\u660e\u5ea6\u548c\u6750\u6599\u7a69\u5b9a\u6027\u4f7f\u5176\u9069\u7528\u65bc\u7279\u6b8a\u5149\u96fb\u5143\u4ef6\uff0c\u5305\u62ec UV \u5149\u96fb\u4e8c\u6975\u9ad4\u548c\u9ad8\u983b\u5143\u4ef6\u3002.<\/p>\n

\"\"<\/p>\n

\n

\u6280\u8853\u898f\u683c<\/strong><\/span><\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u8ca1\u7522<\/th>\n\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n
\u6750\u8cea<\/td>\nSiC \u55ae\u6676<\/td>\n<\/tr>\n
\u76f4\u5f91<\/td>\n150 \u516c\u91d0\uff086 \u82f1\u540b\uff09<\/td>\n<\/tr>\n
\u539a\u5ea6<\/td>\n350 \u5fae\u7c73<\/td>\n<\/tr>\n
\u591a\u91cd\u985e\u578b<\/td>\n6H<\/td>\n<\/tr>\n
\u96fb\u5c0e\u985e\u578b<\/td>\nN \u578b\uff08\u647b\u6c2e\uff09<\/td>\n<\/tr>\n
\u5c0e\u89bd<\/td>\n4\u00b0 \u671d\u5411 \u00b10.5\u00b0<\/td>\n<\/tr>\n
\u8868\u9762\u8655\u7406<\/td>\nSSP \/ DSP \/ CMP \/ MP<\/td>\n<\/tr>\n
\u8868\u9762\u54c1\u8cea<\/td>\nEpitaxy-Ready (CMP \u62cb\u5149)<\/td>\n<\/tr>\n
\u5e36\u9699<\/td>\n~2.96 eV<\/td>\n<\/tr>\n
\u61c9\u7528\u7126\u9ede<\/td>\nMEMS \/ UV \u611f\u6e2c\u5668 \/ \u77f3\u58a8\u70ef\u751f\u9577<\/td>\n<\/tr>\n
\u5305\u88dd<\/td>\n\u76d2\u5f0f\u6216\u55ae\u6676\u5713\u5bb9\u5668<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\u5ba2\u88fd\u5316\u9078\u9805<\/strong><\/span><\/h3>\n

\u6211\u5011\u63d0\u4f9b\u9748\u6d3b\u7684\u5ba2\u88fd\u5316\u670d\u52d9\uff0c\u4ee5\u6eff\u8db3\u7279\u5b9a\u7684\u88fd\u7a0b\u548c\u61c9\u7528\u9700\u6c42\u3002\u53ef\u7528\u9078\u9805\u5305\u62ec<\/p>\n

    \n
  • \u5ba2\u88fd\u5316\u6676\u5713\u539a\u5ea6<\/li>\n
  • \u4e0d\u540c\u7684\u504f\u5207\u89d2\u5ea6\uff08\u540c\u8ef8\u6216\u91cf\u8eab\u8a02\u505a\u7684\u65b9\u5411\uff09<\/li>\n
  • \u647b\u96dc\u6fc3\u5ea6\u8207\u96fb\u963b\u7387\u63a7\u5236<\/li>\n
  • \u8868\u9762\u8655\u7406\u8207\u62cb\u5149\u7b49\u7d1a<\/li>\n<\/ul>\n

    \u9019\u53ef\u78ba\u4fdd\u8207\u5404\u7a2e\u5916\u5ef6\u88fd\u7a0b\u548c\u88dd\u7f6e\u7d50\u69cb\u7684\u76f8\u5bb9\u6027\uff0c\u7121\u8ad6\u662f\u7528\u65bc\u7814\u7a76\u3001\u539f\u578b\u88fd\u4f5c\u6216\u8a66\u7522\u898f\u6a21\u3002.<\/p>\n

    \n

    \u5e38\u898b\u554f\u984c<\/strong><\/span><\/h3>\n

    Q1: \u6b64\u6676\u5713\u7684\u300cepi-ready\u300d\u662f\u4ec0\u9ebc\u610f\u601d\uff1f<\/strong>
    \u7b54\uff1a\u9019\u8868\u793a\u6676\u5713\u8868\u9762\u5df2\u4f7f\u7528 CMP \u6280\u8853\u7cbe\u78ba\u62cb\u5149\uff0c\u9054\u5230\u8d85\u4f4e\u7c97\u7cd9\u5ea6\uff0c\u4f7f\u5176\u7acb\u5373\u9069\u5408\u5916\u5ef6\u751f\u9577\uff0c\u7121\u9700\u984d\u5916\u52a0\u5de5\u3002.<\/p>\n

    Q2: \u70ba\u4f55\u4f7f\u7528 6H-SiC \u800c\u975e\u5176\u4ed6\u591a\u6676\u77fd\uff1f<\/strong>
    \u7b54\uff1a6H-SiC \u56e0\u5176\u5e36\u9699\u548c\u6676\u9ad4\u7d50\u69cb\uff0c\u5728\u7d2b\u5916\u5149\u5075\u6e2c\u3001\u77f3\u58a8\u70ef\u751f\u9577\u548c\u5149\u5b78\u61c9\u7528\u65b9\u9762\u5177\u6709\u512a\u52e2\u3002.<\/p>\n

    Q3: \u6b64\u6676\u5713\u662f\u5426\u9069\u5408\u5de5\u696d\u751f\u7522\uff1f<\/strong>
    \u7b54\uff1a\u662f\u7684\uff0c6 \u540b\u6676\u5713\u5ee3\u6cdb\u7528\u65bc\u8a66\u7522\u548c\u5148\u9032\u7814\u767c\uff0c\u8996\u54c1\u8cea\u7b49\u7d1a\u548c\u61c9\u7528\u9700\u6c42\u800c\u5b9a\u3002.<\/p>\n

    Q4: \u6211\u53ef\u4ee5\u8981\u6c42\u5ba2\u88fd\u5316\u898f\u683c\u55ce\uff1f<\/strong>
    \u7b54\uff1a\u662f\u7684\uff0c\u6211\u5011\u652f\u63f4\u5b8c\u5168\u5ba2\u88fd\u5316\uff0c\u5305\u62ec\u539a\u5ea6\u3001\u65b9\u5411\u3001\u647b\u96dc\u548c\u8868\u9762\u8655\u7406\u3002.<\/p>\n

    \n

    \u70ba\u4f55\u9078\u64c7\u6b64 6 \u540b N \u578b 6H SiC \u78ca\u6676\u6676\u5713<\/strong><\/span><\/h3>\n

    \u6b64\u6676\u5713\u7684\u8a2d\u8a08\u53ef\u63d0\u4f9b\u4e00\u81f4\u7684\u6548\u80fd\u3001\u9ad8\u6750\u6599\u54c1\u8cea\uff0c\u4ee5\u53ca\u8207\u5148\u9032\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u7d55\u4f73\u76f8\u5bb9\u6027\u3002\u5b83\u662f\u5de5\u7a0b\u5e2b\u548c\u7814\u7a76\u4eba\u54e1\u70ba MEMS\u3001UV \u611f\u6e2c\u548c\u77f3\u58a8\u70ef\u6280\u8853\u5c0b\u627e\u53ef\u9760\u57fa\u677f\u7684\u7406\u60f3\u89e3\u6c7a\u65b9\u6848\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

    6 Inch N-Type 6H SiC Epitaxy Wafer \u662f\u4e00\u7a2e\u9ad8\u6027\u80fd\u534a\u5c0e\u9ad4\u57fa\u677f\uff0c\u5c08\u70ba MEMS \u88dd\u7f6e\u3001\u7d2b\u5916\u7dda (UV) \u611f\u6e2c\u5668\u548c\u5916\u5ef6\u77f3\u58a8\u70ef\u751f\u9577\u7b49\u5148\u9032\u61c9\u7528\u800c\u8a2d\u8a08\u3002\u6b64\u6676\u5713\u4ee5\u9ad8\u54c1\u8cea\u7684\u78b3\u5316\u77fd (SiC) 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