![\"\u7528\u65bc\u534a\u5c0e\u9ad4\u96fb\u6f3f\u7cfb\u7d71\u7684](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1-300x300.png\")
\u5728\u6975\u7aef\u52a0\u5de5\u689d\u4ef6\u4e0b\uff0c\u53ef\u5927\u5e45\u63d0\u5347\u8010\u7528\u6027\u3001\u512a\u7570\u7684\u6297\u96fb\u6f3f\u80fd\u529b\uff0c\u4ee5\u53ca\u66f4\u9577\u7684\u4f7f\u7528\u58fd\u547d\u3002.<\/p>\nSiC Electrode\uff08\u78b3\u5316\u77fd\u96fb\u6975\uff09\u662f\u5c08\u70ba\u5148\u9032\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8655\u7406\u7cfb\u7d71\uff08\u5305\u62ec\u8755\u523b\u3001\u6c89\u7a4d\u548c\u8868\u9762\u8655\u7406\u8a2d\u5099\uff09\u800c\u8a2d\u8a08\u7684\u9ad8\u6027\u80fd\u5143\u4ef6\u3002\u8207\u50b3\u7d71\u7684\u77fd\u96fb\u6975\u76f8\u6bd4\uff0c\u78b3\u5316\u77fd\u96fb\u6975\u5177\u6709\u4ee5\u4e0b\u512a\u9ede\u5728\u6975\u7aef\u52a0\u5de5\u689d\u4ef6\u4e0b\uff0c\u53ef\u5927\u5e45\u63d0\u5347\u8010\u7528\u6027\u3001\u512a\u7570\u7684\u6297\u96fb\u6f3f\u80fd\u529b\uff0c\u4ee5\u53ca\u66f4\u9577\u7684\u4f7f\u7528\u58fd\u547d\u3002.<\/p>\n
\u6b64\u96fb\u6975\u4f7f\u7528\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD) \u78b3\u5316\u77fd\u88fd\u6210\uff0c\u5177\u6709\u81f4\u5bc6\u3001\u9ad8\u7d14\u5ea6\u7684\u7d50\u69cb\uff0c\u4ee5\u53ca\u512a\u7570\u7684\u71b1\u50b3\u5c0e\u6027\u548c\u5316\u5b78\u7a69\u5b9a\u6027\u3002\u9019\u4f7f\u5f97\u5b83\u7279\u5225\u9069\u7528\u65bc\u6d89\u53ca\u9ad8\u80fd\u91cf\u96fb\u6f3f\u3001\u4fb5\u8755\u6027\u6c23\u9ad4\uff08\u5982 CF\u2084\u3001SF\u2086\u3001NF\u2083 \u548c Cl\u2082\uff09\u548c\u9ad8\u6eab\u7684\u74b0\u5883\u3002.<\/p>\n
\u5728\u96fb\u6f3f\u5ba4\u4e2d\uff0c\u96fb\u6975\u5728\u63a7\u5236\u96fb\u5834\u3001\u96fb\u6f3f\u5bc6\u5ea6\u548c\u88fd\u7a0b\u5747\u52fb\u6027\u65b9\u9762\u626e\u6f14\u95dc\u9375\u89d2\u8272\u3002SiC \u96fb\u6975\u53ef\u9577\u6642\u9593\u7dad\u6301\u7a69\u5b9a\u7684\u96fb\u6c23\u7279\u6027\uff0c\u6e1b\u5c11\u6f02\u79fb\u3001\u964d\u4f4e\u5fae\u7c92\u6c61\u67d3\uff0c\u4e26\u78ba\u4fdd\u4e00\u81f4\u7684\u6676\u5713\u88fd\u7a0b\u7d50\u679c\u3002.<\/p>\n
\u7531\u65bc SiC \u96fb\u6975\u7684\u8010\u7528\u6027\u8207\u6548\u80fd\uff0cSiC \u96fb\u6975\u88ab\u6b78\u985e\u70ba\u95dc\u9375\u534a\u5c0e\u9ad4\u6d88\u8017\u54c1\uff08\u9577\u58fd\u547d\u8010\u78e8\u96f6\u4ef6\uff09\uff0c\u4e26\u5ee3\u6cdb\u61c9\u7528\u65bc\u5148\u9032\u534a\u5c0e\u9ad4\u7bc0\u9ede\u8207\u9ad8\u7522\u91cf\u751f\u7522\u74b0\u5883\u3002.<\/p>\n
<\/p>\n SiC \u96fb\u6975\u5ee3\u6cdb\u61c9\u7528\u65bc\u9700\u8981\u9ad8\u8010\u7528\u6027\u8207\u7a69\u5b9a\u6027\u7684\u534a\u5c0e\u9ad4\u52a0\u5de5\u74b0\u5883\uff1a<\/p>\n \u5b83\u5011\u7279\u5225\u9069\u7528\u65bc \u56b4\u82db\u7684\u96fb\u6f3f\u689d\u4ef6\u548c\u8f03\u9577\u7684\u751f\u7522\u9031\u671f<\/strong>, \u50b3\u7d71\u7684\u77fd\u96fb\u6975\u7121\u6cd5\u6eff\u8db3\u4f7f\u7528\u58fd\u547d\u7684\u8981\u6c42\u3002.<\/p>\n \u8207\u50b3\u7d71\u7684\u77fd\u96fb\u6975\u76f8\u6bd4\uff0cSiC \u96fb\u6975\u7684\u6548\u80fd\u6709\u986f\u8457\u7684\u63d0\u5347\uff1a<\/p>\n \u96d6\u7136\u521d\u59cb\u6210\u672c\u8f03\u9ad8\uff0c\u4f46 SiC \u96fb\u6975\u5728\u9ad8\u968e\u534a\u5c0e\u9ad4\u61c9\u7528\u4e2d\u63d0\u4f9b\u8f03\u4f4e\u7684\u7e3d\u64c1\u6709\u6210\u672c (TCO)\u3002.<\/p>\n Q1: SiC \u96fb\u6975\u662f\u6613\u8017\u54c1\u55ce\uff1f<\/strong> Q2: \u70ba\u4f55\u9078\u64c7 SiC \u800c\u975e\u77fd\u96fb\u6975\uff1f<\/strong> Q3: \u96fb\u6975\u53ef\u4ee5\u5ba2\u88fd\u5316\u55ce\uff1f<\/strong> Q4: \u54ea\u4e9b\u7522\u696d\u4f7f\u7528 SiC \u96fb\u6975\uff1f<\/strong> SiC \u96fb\u6975\uff08\u78b3\u5316\u77fd\u96fb\u6975\uff09\u662f\u5c08\u70ba\u5148\u9032\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8655\u7406\u7cfb\u7d71\uff08\u5305\u62ec\u8755\u523b\u3001\u6c89\u7a4d\u548c\u8868\u9762\u8655\u7406\u8a2d\u5099\uff09\u800c\u8a2d\u8a08\u7684\u9ad8\u6027\u80fd\u5143\u4ef6\u3002\u8207\u50b3\u7d71\u7684\u77fd\u96fb\u6975\u76f8\u6bd4\uff0cSiC \u96fb\u6975\u5728\u6975\u7aef\u52a0\u5de5\u689d\u4ef6\u4e0b\u5177\u6709\u986f\u8457\u589e\u5f37\u7684\u8010\u7528\u6027\u3001\u51fa\u8272\u7684\u8010\u96fb\u6f3f\u6027\u53ca\u66f4\u9577\u7684\u5de5\u4f5c\u58fd\u547d\u3002\u8a72\u96fb\u6975\u63a1\u7528\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD) \u78b3\u5316\u77fd\u88fd\u6210\uff0c\u5177\u6709\u81f4\u5bc6\u3001\u9ad8\u7d14\u5ea6\u7684\u7d50\u69cb\uff0c\u4e26\u5177\u6709\u51fa\u8272\u7684\u71b1\u5c0e\u7387\u548c\u5316\u5b78\u7a69\u5b9a\u6027\u3002.<\/p>","protected":false},"featured_media":2414,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1212],"product_tag":[],"class_list":{"0":"post-2411","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-semiconductor-consumables","7":"desktop-align-left","8":"tablet-align-left","9":"mobile-align-left","10":"ast-product-gallery-layout-horizontal-slider","11":"ast-product-tabs-layout-horizontal","13":"first","14":"instock","15":"shipping-taxable","16":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product\/2411","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/comments?post=2411"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product\/2411\/revisions"}],"predecessor-version":[{"id":2416,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product\/2411\/revisions\/2416"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media\/2414"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media?parent=2411"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product_brand?post=2411"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product_cat?post=2411"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product_tag?post=2411"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}![\"\u7528\u65bc\u534a\u5c0e\u9ad4\u96fb\u6f3f\u7cfb\u7d71\u7684](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2-300x300.png\")
<\/strong><\/p>\n\n
\n\u6280\u8853\u898f\u683c<\/h2>\n
\n\n\n\n
\n \n\u53c3\u6578<\/th>\n \u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n \n \u6750\u8cea<\/td>\n CVD \u78b3\u5316\u77fd (SiC)<\/td>\n<\/tr>\n \n \u7d14\u6de8<\/td>\n \u2265 99.9%<\/td>\n<\/tr>\n \n \u5bc6\u5ea6<\/td>\n \u2265 3.1 g\/cm\u00b3<\/td>\n<\/tr>\n \n \u76f4\u5f91\uff08\u6700\u5927\u503c\uff09<\/td>\n \u6700\u5927 330 \u516c\u91d0<\/td>\n<\/tr>\n \n \u539a\u5ea6<\/td>\n \u81ea\u8a02 (\u4e00\u822c\u70ba 5-50 mm)<\/td>\n<\/tr>\n \n \u96fb\u963b\u7387 (\u4f4e)<\/td>\n < 0.02 \u03a9-cm<\/td>\n<\/tr>\n \n \u96fb\u963b\u7387 (\u4e2d)<\/td>\n 0.2 - 25 \u03a9-cm<\/td>\n<\/tr>\n \n \u96fb\u963b\u7387 (\u9ad8)<\/td>\n > 100 \u03a9-cm<\/td>\n<\/tr>\n \n \u96fb\u963b\u7387\u5747\u52fb\u6027 (RRG)<\/td>\n < 5%<\/td>\n<\/tr>\n \n \u6c23\u5b54\u76f4\u5f91<\/td>\n 0.2 - 0.8 mm\uff08\u53ef\u81ea\u8a02\uff09<\/td>\n<\/tr>\n \n \u8868\u9762\u72c0\u614b<\/td>\n \u5730\u9762\uff08\u53ef\u9078\u62cb\u5149\uff09<\/td>\n<\/tr>\n \n \u8868\u9762\u7c97\u5ea6 (Ra)<\/td>\n \u2264 1.6 \u03bcm<\/td>\n<\/tr>\n \n \u52a0\u5de5\u7cbe\u5ea6<\/td>\n < 10 \u03bcm<\/td>\n<\/tr>\n \n \u71b1\u50b3\u5c0e<\/td>\n 120 - 200 W\/m-K<\/td>\n<\/tr>\n \n \u786c\u5ea6<\/td>\n ~9.2 \u83ab\u6c0f\u786c\u5ea6<\/td>\n<\/tr>\n \n \u6700\u9ad8\u64cd\u4f5c\u6eab\u5ea6<\/td>\n > 1000\u00b0C\uff08\u53d6\u6c7a\u65bc\u88fd\u7a0b\uff09<\/td>\n<\/tr>\n \n \u54c1\u8cea\u63a7\u5236<\/td>\n \u7121\u88c2\u7e2b\u3001\u7f3a\u53e3\u3001\u6c61\u67d3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n\u61c9\u7528<\/h2>\n
\n
![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/KYQhvr8H6fiJzv0Gyv0QBbnTGAn0D-jgL0afJ2QhVSsVzaDSfEEx4D1Qc9Qg9IxXDOCUhnYHl82TwzfZ-OQMZzQa5u3KF6R1mE3QPYDfCW4ltwvgZ5uecKGM7VBlj-f5ppfWrANQSR4kHdIoBW-vOxmtu56kJnlmCndnFjtFqasApRq1EpNs3nKzmFQFM9WF-300x225.jpg\")
<\/p>\n<\/li>\n
\n\u512a\u65bc\u77fd\u96fb\u6975<\/h2>\n
\n
![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\")
<\/p>\n
\n\u5e38\u898b\u554f\u984c<\/h2>\n
\u662f\u7684\uff0c\u5b83\u662f\u4e00\u7a2e\u91cd\u8981\u7684\u534a\u5c0e\u9ad4\u6d88\u8017\u54c1\uff0c\u4f46\u8207\u77fd\u96fb\u6975\u76f8\u6bd4\uff0c\u5b83\u7684\u4f7f\u7528\u58fd\u547d\u66f4\u9577\u3002.<\/p>\n
SiC \u5177\u6709\u66f4\u4f73\u7684\u6297\u96fb\u6f3f\u80fd\u529b\u3001\u66f4\u9577\u7684\u4f7f\u7528\u58fd\u547d\u4ee5\u53ca\u66f4\u4f4e\u7684\u5fae\u7c92\u751f\u6210\u91cf\uff0c\u56e0\u6b64\u975e\u5e38\u9069\u5408\u56b4\u82db\u7684\u52a0\u5de5\u74b0\u5883\u3002.<\/p>\n
\u53ef\u4ee5\uff0c\u5c3a\u5bf8\u3001\u539a\u5ea6\u3001\u96fb\u963b\u7387\u3001\u6c23\u5b54\u8a2d\u8a08\u548c\u8868\u9762\u8655\u7406\u90fd\u53ef\u4ee5\u6839\u64da\u60a8\u7684\u8981\u6c42\u5b9a\u5236\u3002.<\/p>\n
\u4e3b\u8981\u662f\u534a\u5c0e\u9ad4\u88fd\u9020\uff0c\u5c24\u5176\u662f\u7b49\u96e2\u5b50\u8755\u523b\u548c\u6c89\u7a4d\u7cfb\u7d71\u3002.<\/p>","protected":false},"excerpt":{"rendered":"