{"id":2400,"date":"2026-04-24T06:21:19","date_gmt":"2026-04-24T06:21:19","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2400"},"modified":"2026-04-24T06:21:22","modified_gmt":"2026-04-24T06:21:22","slug":"precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching\/","title":{"rendered":"\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8755\u523b\u7528\u7cbe\u5bc6\u77fd\u74b0 (\u55ae\u6676\/\u591a\u6676)"},"content":{"rendered":"<p data-start=\"228\" data-end=\"558\">\u00a0\u00a0<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2404 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8755\u523b\u7528\u7cbe\u5bc6\u77fd\u74b0 (\u55ae\u6676\/\u591a\u6676)\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u77fd\u74b0 (Si Ring) \u662f\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8655\u7406\u8a2d\u5099\u4e2d\u5ee3\u6cdb\u4f7f\u7528\u7684\u5143\u4ef6\uff0c\u53ef\u7528\u4f5c\u805a\u7126\u74b0\u3001\u908a\u7de3\u74b0\u6216\u8154\u9ad4\u896f\u677f\u3002\u5b83\u5728\u63a7\u5236\u96fb\u6f3f\u5206\u4f48\u3001\u6539\u5584\u8755\u523b\u5747\u52fb\u6027\u4ee5\u53ca\u4fdd\u8b77\u91cd\u8981\u8154\u5ba4\u5143\u4ef6\u514d\u65bc\u76f4\u63a5\u66b4\u9732\u65bc\u9ad8\u80fd\u96fb\u6f3f\u4e2d\u767c\u63ee\u95dc\u9375\u4f5c\u7528\u3002.<\/p>\n<p data-start=\"560\" data-end=\"882\">\u77fd\u74b0\u4ee5\u9ad8\u7d14\u5ea6\u55ae\u6676\u77fd\u6216\u591a\u6676\u77fd\u88fd\u6210\uff0c\u8207\u77fd\u6676\u5713\u88fd\u7a0b\u6709\u6975\u4f73\u7684\u76f8\u5bb9\u6027\u3002\u9019\u7a2e\u56fa\u6709\u7684\u6750\u6599\u76f8\u5bb9\u6027\u5927\u5927\u964d\u4f4e\u4e86\u6c61\u67d3\u98a8\u96aa\uff0c\u4f7f\u77fd\u74b0\u6210\u70ba\u8a31\u591a\u534a\u5c0e\u9ad4\u88fd\u9020\u74b0\u5883\u4e2d\u7684\u9996\u9078\u3002.<\/p>\n<p data-start=\"884\" data-end=\"1239\">\u5728\u904b\u8f49\u904e\u7a0b\u4e2d\uff0c\u77fd\u74b0\u6703\u66b4\u9732\u5728\u7531 CF\u2084\u3001SF\u2086\u3001NF\u2083 \u548c Cl\u2082 \u7b49\u6c23\u9ad4\u6240\u7522\u751f\u7684\u53cd\u61c9\u96fb\u6f3f\u4e2d\u3002\u9019\u4e9b\u689d\u4ef6\u6703\u9010\u6f38\u9020\u6210\u6750\u6599\u4fb5\u8755\u548c\u8868\u9762\u964d\u89e3\u3002\u56e0\u6b64\uff0c\u77fd\u74b0\u88ab\u6b78\u985e\u70ba\u95dc\u9375\u534a\u5c0e\u9ad4\u6d88\u8017\u54c1\uff0c\u9700\u8981\u5b9a\u671f\u66f4\u63db\u4ee5\u7dad\u6301\u6700\u4f73\u88fd\u7a0b\u6548\u80fd\u8207\u826f\u7387\u3002.<\/p>\n<p data-start=\"1241\" data-end=\"1430\">\u8207\u78b3\u5316\u77fd\u74b0\u76f8\u6bd4\uff0c\u77fd\u74b0\u66f4\u5177\u6210\u672c\u6548\u76ca\u4e14\u66f4\u5bb9\u6613\u52a0\u5de5\uff0c\u56e0\u6b64\u975e\u5e38\u9069\u5408\u66f4\u63db\u9031\u671f\u53ef\u63a5\u53d7\u4e14\u6210\u672c\u63a7\u5236\u975e\u5e38\u91cd\u8981\u7684\u61c9\u7528\u3002.<\/p>\n<hr data-start=\"1432\" data-end=\"1435\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1437\" data-end=\"1457\">\u4e3b\u8981\u529f\u80fd<\/h2>\n<ul data-start=\"1458\" data-end=\"2054\">\n<li data-section-id=\"1wvx41j\" data-start=\"1458\" data-end=\"1549\">\u9ad8\u7d14\u5ea6\u77fd\u6750\u8cea\uff1a\u63d0\u4f9b\u55ae\u6676\u548c\u591a\u6676\u5169\u7a2e\u5f62\u614b<\/li>\n<li data-section-id=\"16rlosp\" data-start=\"1550\" data-end=\"1653\">\u512a\u7570\u7684\u88fd\u7a0b\u76f8\u5bb9\u6027\uff1a\u9069\u7528\u65bc\u77fd\u6676\u5713\u88fd\u7a0b\uff0c\u6c61\u67d3\u98a8\u96aa\u4f4e<\/li>\n<li data-section-id=\"h5tu82\" data-start=\"1654\" data-end=\"1727\">\u7a69\u5b9a\u7684\u96fb\u6c23\u7279\u6027\uff1a\u652f\u63f4\u4e00\u81f4\u7684\u96fb\u6f3f\u884c\u70ba<\/li>\n<li data-section-id=\"qwtj7n\" data-start=\"1728\" data-end=\"1814\">\u7cbe\u5bc6\u52a0\u5de5\uff1a\u5148\u9032\u534a\u5c0e\u9ad4\u5de5\u5177\u7684\u56b4\u683c\u516c\u5dee (&lt;10 \u03bcm)<\/li>\n<li data-section-id=\"cd4ksl\" data-start=\"1815\" data-end=\"1903\">\u591a\u7a2e\u96fb\u963b\u7387\u9078\u64c7\uff1a\u9069\u5408\u4e0d\u540c\u7684\u96fb\u6f3f\u63a7\u5236\u9700\u6c42<\/li>\n<li data-section-id=\"vfz8a3\" data-start=\"1904\" data-end=\"1984\">\u5177\u6210\u672c\u6548\u76ca\u7684\u89e3\u6c7a\u65b9\u6848\uff1a\u8207\u78b3\u5316\u77fd\u66ff\u4ee3\u54c1\u76f8\u6bd4\uff0c\u521d\u59cb\u6210\u672c\u8f03\u4f4e<\/li>\n<li data-section-id=\"1q6rj8k\" data-start=\"1985\" data-end=\"2054\">\u5ba2\u88fd\u5316\u8a2d\u8a08\u652f\u63f4\uff1a\u53ef\u63d0\u4f9b\u8907\u96dc\u7684\u5e7e\u4f55\u5f62\u72c0\u548c\u5c3a\u5bf8<\/li>\n<\/ul>\n<hr data-start=\"2056\" data-end=\"2059\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2061\" data-end=\"2093\">\u6280\u8853\u898f\u683c<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2095\" data-end=\"2793\">\n<thead data-start=\"2095\" data-end=\"2124\">\n<tr data-start=\"2095\" data-end=\"2124\">\n<th class=\"\" data-start=\"2095\" data-end=\"2107\" data-col-size=\"sm\">\u53c3\u6578<\/th>\n<th class=\"\" data-start=\"2107\" data-end=\"2124\" data-col-size=\"md\">\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2152\" data-end=\"2793\">\n<tr data-start=\"2152\" data-end=\"2215\">\n<td data-start=\"2152\" data-end=\"2163\" data-col-size=\"sm\">\u6750\u8cea<\/td>\n<td data-col-size=\"md\" data-start=\"2163\" data-end=\"2215\">\u55ae\u6676\u77fd\/\u591a\u6676\u77fd<\/td>\n<\/tr>\n<tr data-start=\"2216\" data-end=\"2263\">\n<td data-start=\"2216\" data-end=\"2225\" data-col-size=\"sm\">\u7d14\u6de8<\/td>\n<td data-col-size=\"md\" data-start=\"2225\" data-end=\"2263\">\u2265 99.999% (5N \u534a\u5c0e\u9ad4\u7d1a)<\/td>\n<\/tr>\n<tr data-start=\"2264\" data-end=\"2297\">\n<td data-start=\"2264\" data-end=\"2281\" data-col-size=\"sm\">\u76f4\u5f91\uff08\u6700\u5927\u503c\uff09<\/td>\n<td data-col-size=\"md\" data-start=\"2281\" data-end=\"2297\">\u6700\u5927 480 \u516c\u91d0<\/td>\n<\/tr>\n<tr data-start=\"2298\" data-end=\"2340\">\n<td data-start=\"2298\" data-end=\"2310\" data-col-size=\"sm\">\u539a\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2310\" data-end=\"2340\">\u81ea\u8a02 (\u4e00\u822c\u70ba 5-30 \u516c\u91d0)<\/td>\n<\/tr>\n<tr data-start=\"2341\" data-end=\"2376\">\n<td data-start=\"2341\" data-end=\"2361\" data-col-size=\"sm\">\u96fb\u963b\u7387 (\u4f4e)<\/td>\n<td data-col-size=\"md\" data-start=\"2361\" data-end=\"2376\">&lt; 0.02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2377\" data-end=\"2414\">\n<td data-start=\"2377\" data-end=\"2400\" data-col-size=\"sm\">\u96fb\u963b\u7387 (\u4e2d)<\/td>\n<td data-col-size=\"md\" data-start=\"2400\" data-end=\"2414\">1 - 4 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2415\" data-end=\"2452\">\n<td data-start=\"2415\" data-end=\"2436\" data-col-size=\"sm\">\u96fb\u963b\u7387 (\u9ad8)<\/td>\n<td data-col-size=\"md\" data-start=\"2436\" data-end=\"2452\">70 - 90 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2453\" data-end=\"2492\">\n<td data-start=\"2453\" data-end=\"2484\" data-col-size=\"sm\">\u96fb\u963b\u7387\u5747\u52fb\u6027 (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2484\" data-end=\"2492\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2493\" data-end=\"2543\">\n<td data-start=\"2493\" data-end=\"2513\" data-col-size=\"sm\">\u8868\u9762\u72c0\u614b<\/td>\n<td data-col-size=\"md\" data-start=\"2513\" data-end=\"2543\">\u62cb\u5149\/\u7814\u78e8\/\u78e8\u524a<\/td>\n<\/tr>\n<tr data-start=\"2544\" data-end=\"2605\">\n<td data-start=\"2544\" data-end=\"2569\" data-col-size=\"sm\">\u8868\u9762\u7c97\u5ea6 (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2569\" data-end=\"2605\">\u2264 0.8 \u03bcm\uff08\u62cb\u5149\u53ef\u4ee5\u66f4\u4f4e\uff09<\/td>\n<\/tr>\n<tr data-start=\"2606\" data-end=\"2639\">\n<td data-start=\"2606\" data-end=\"2628\" data-col-size=\"sm\">\u52a0\u5de5\u7cbe\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2628\" data-end=\"2639\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2640\" data-end=\"2682\">\n<td data-start=\"2640\" data-end=\"2651\" data-col-size=\"sm\">\u5e73\u6574\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2651\" data-end=\"2682\">\u2264 30 \u03bcm\uff08\u8996\u5c3a\u5bf8\u800c\u5b9a\uff09<\/td>\n<\/tr>\n<tr data-start=\"2683\" data-end=\"2728\">\n<td data-start=\"2683\" data-end=\"2695\" data-col-size=\"sm\">\u908a\u7de3\u985e\u578b<\/td>\n<td data-col-size=\"md\" data-start=\"2695\" data-end=\"2728\">\u5012\u89d2\/\u534a\u5f91\u53ef\u81ea\u8a02<\/td>\n<\/tr>\n<tr data-start=\"2729\" data-end=\"2793\">\n<td data-start=\"2729\" data-end=\"2747\" data-col-size=\"sm\">\u54c1\u8cea\u63a7\u5236<\/td>\n<td data-col-size=\"md\" data-start=\"2747\" data-end=\"2793\">\u7121\u88c2\u7e2b\u3001\u7f3a\u53e3\u3001\u522e\u75d5\u3001\u6c61\u67d3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2795\" data-end=\"2798\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2800\" data-end=\"2820\">\u61c9\u7528<\/h2>\n<p data-start=\"2821\" data-end=\"2903\">\u77fd\u74b0\u5728\u5404\u7a2e\u534a\u5c0e\u9ad4\u52a0\u5de5\u74b0\u5883\u4e2d\u90fd\u662f\u4e0d\u53ef\u6216\u7f3a\u7684\uff1a<\/p>\n<ul data-start=\"2905\" data-end=\"3108\">\n<li data-section-id=\"qzqq98\" data-start=\"2905\" data-end=\"2943\">\u96fb\u6f3f\u8755\u523b\u7cfb\u7d71 (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"2944\" data-end=\"2987\">\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD \/ PECVD)<\/li>\n<li data-section-id=\"1hekjdg\" data-start=\"2988\" data-end=\"3025\">\u5c0d\u7126\u74b0\/\u908a\u74b0\u7d44\u4ef6<\/li>\n<li data-section-id=\"y1zl6l\" data-start=\"3026\" data-end=\"3065\">\u8154\u9ad4\u4fdd\u8b77\u548c\u896f\u7247\u96f6\u4ef6<\/li>\n<li data-section-id=\"83pt8g\" data-start=\"3066\" data-end=\"3108\">\u6676\u5713\u908a\u7de3\u7b49\u96e2\u5b50\u63a7\u5236\u61c9\u7528<\/li>\n<\/ul>\n<p data-start=\"3110\" data-end=\"3235\">\u5b83\u5011\u88ab\u5ee3\u6cdb\u61c9\u7528\u65bc\u6210\u719f\u548c\u4e2d\u9593\u88fd\u7a0b\u7bc0\u9ede\uff0c\u9019\u4e9b\u7bc0\u9ede\u90fd\u9700\u8981\u6210\u672c\u6548\u76ca\u548c\u7a69\u5b9a\u7684\u6027\u80fd\u3002.<\/p>\n<p data-start=\"3110\" data-end=\"3235\"><img decoding=\"async\" class=\"aligncenter wp-image-2406 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg\" alt=\"\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8755\u523b\u7528\u7cbe\u5bc6\u77fd\u74b0 (\u55ae\u6676\/\u591a\u6676)\" width=\"1024\" height=\"681\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-300x199.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-768x510.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1536x1021.jpg 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-600x399.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0.jpg 2048w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3237\" data-end=\"3240\" \/>\n<h2 data-section-id=\"1misgzs\" data-start=\"3242\" data-end=\"3274\">\u512a\u52e2\u8207\u5b9a\u4f4d<\/h2>\n<p data-start=\"3275\" data-end=\"3371\">\u77fd\u74b0\u63d0\u4f9b\u6027\u80fd\u8207\u6210\u672c\u9593\u7684\u5e73\u8861\u89e3\u6c7a\u65b9\u6848\u3002\u8207 SiC \u74b0\u76f8\u6bd4\uff1a<\/p>\n<ul data-start=\"3373\" data-end=\"3681\">\n<li data-section-id=\"qgkkrh\" data-start=\"3373\" data-end=\"3449\">\u6210\u672c\u8f03\u4f4e\uff1a\u9069\u5408\u5c0d\u9810\u7b97\u654f\u611f\u6216\u66f4\u63db\u9700\u6c42\u8f03\u9ad8\u7684\u65b9\u6848<\/li>\n<li data-section-id=\"fe5ihf\" data-start=\"3450\" data-end=\"3533\">\u826f\u597d\u7684\u88fd\u7a0b\u76f8\u5bb9\u6027\uff1a\u7279\u5225\u9069\u7528\u65bc\u77fd\u57fa\u88fd\u7a0b<\/li>\n<li data-section-id=\"1wgvfgt\" data-start=\"3534\" data-end=\"3604\">\u5f48\u6027\u88fd\u9020\uff1a\u66f4\u5bb9\u6613\u52a0\u5de5\u6210\u8907\u96dc\u7684\u8a2d\u8a08<\/li>\n<li data-section-id=\"1855g4l\" data-start=\"3605\" data-end=\"3681\">\u53ef\u9760\u7684\u6548\u80fd\uff1a\u7d93\u5927\u578b\u534a\u5c0e\u9ad4\u751f\u7522\u9a57\u8b49<\/li>\n<\/ul>\n<p data-start=\"3683\" data-end=\"3894\">\u7136\u800c\uff0c\u5728\u6975\u5ea6\u56b4\u82db\u7684\u96fb\u6f3f\u689d\u4ef6\u4e0b\uff0c\u77fd\u74b0\u7684\u78e8\u640d\u901f\u5ea6\u53ef\u80fd\u6bd4 SiC \u74b0\u66f4\u5feb\u3002\u56e0\u6b64\uff0c\u6750\u6599\u7684\u9078\u64c7\u61c9\u57fa\u65bc\u88fd\u7a0b\u5f37\u5ea6\u3001\u58fd\u547d\u671f\u671b\u548c\u6210\u672c\u8003\u91cf\u3002.<\/p>\n<p data-start=\"3683\" data-end=\"3894\"><img decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"3896\" data-end=\"3899\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"3901\" data-end=\"3912\">\u5e38\u898b\u554f\u984c<\/h2>\n<p data-start=\"3914\" data-end=\"4070\">Q1: \u77fd\u81a0\u5708\u662f\u6d88\u8017\u54c1\u55ce\uff1f<br data-start=\"3963\" data-end=\"3966\" \/>\u662f\u7684\uff0c\u7531\u65bc\u5728\u96fb\u6f3f\u74b0\u5883\u4e2d\u6703\u9010\u6f38\u4fb5\u8755\uff0c\u56e0\u6b64\u88ab\u8996\u70ba\u91cd\u8981\u7684\u534a\u5c0e\u9ad4\u6d88\u8017\u54c1\u3002.<\/p>\n<p data-start=\"4072\" data-end=\"4291\">Q2: \u55ae\u6676\u77fd\u74b0\u548c\u591a\u6676\u77fd\u74b0\u6709\u4f55\u4e0d\u540c\uff1f<br data-start=\"4160\" data-end=\"4163\" \/>\u55ae\u6676\u77fd\u80fd\u63d0\u4f9b\u66f4\u597d\u7684\u5747\u52fb\u6027\u548c\u96fb\u6c23\u7279\u6027\uff0c\u800c\u591a\u6676\u77fd\u5247\u66f4\u5177\u6210\u672c\u6548\u76ca\u3002.<\/p>\n<p data-start=\"4293\" data-end=\"4452\">Q3: \u77fd\u81a0\u5708\u53ef\u4ee5\u5ba2\u88fd\u5316\u55ce\uff1f<br data-start=\"4336\" data-end=\"4339\" \/>\u53ef\u4ee5\uff0c\u5c3a\u5bf8\u3001\u539a\u5ea6\u3001\u96fb\u963b\u7387\u3001\u8868\u9762\u8655\u7406\u548c\u5e7e\u4f55\u5f62\u72c0\u90fd\u53ef\u4ee5\u6839\u64da\u60a8\u7684\u5716\u7d19\u5b9a\u5236\u3002.<\/p>\n<p data-start=\"4454\" data-end=\"4622\">Q4: \u77fd\u81a0\u5708\u591a\u4e45\u9700\u8981\u66f4\u63db\u4e00\u6b21\uff1f<br data-start=\"4509\" data-end=\"4512\" \/>\u9019\u53d6\u6c7a\u65bc\u88fd\u7a0b\u689d\u4ef6\uff0c\u4f46\u7531\u65bc\u7b49\u96e2\u5b50\u96fb\u963b\u8f03\u4f4e\uff0c\u901a\u5e38\u6bd4 SiC \u74b0\u66f4\u983b\u7e41\u3002.<\/p>\n<p data-start=\"4624\" data-end=\"4743\">Q5: \u4e00\u822c\u7684\u4ea4\u8ca8\u671f\u662f\u591a\u4e45\uff1f<br data-start=\"4662\" data-end=\"4665\" \/>\u751f\u7522\u4e00\u822c\u9700\u6642 3-5 \u9031\uff0c\u8996\u898f\u683c\u548c\u6578\u91cf\u800c\u5b9a\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>\u77fd\u74b0 (Si Ring) \u662f\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8655\u7406\u8a2d\u5099\u4e2d\u5ee3\u6cdb\u4f7f\u7528\u7684\u5143\u4ef6\uff0c\u53ef\u7528\u4f5c\u805a\u7126\u74b0\u3001\u908a\u7de3\u74b0\u6216\u8154\u9ad4\u896f\u677f\u3002\u5b83\u5728\u63a7\u5236\u96fb\u6f3f\u5206\u4f48\u3001\u6539\u5584\u8755\u523b\u5747\u52fb\u6027\u4ee5\u53ca\u4fdd\u8b77\u91cd\u8981\u8154\u5ba4\u5143\u4ef6\u514d\u65bc\u76f4\u63a5\u66b4\u9732\u65bc\u9ad8\u80fd\u96fb\u6f3f\u4e2d\u767c\u63ee\u95dc\u9375\u4f5c\u7528\u3002.<\/p>","protected":false},"featured_media":2404,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1212],"product_tag":[1251,1250,1246,1237,1254,1218,1232,1249,1252,1248,1255,1253,1256],"class_list":{"0":"post-2400","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-semiconductor-consumables","7":"product_tag-edge-ring-semiconductor","8":"product_tag-focus-ring-silicon","9":"product_tag-icp-rie-ring","10":"product_tag-plasma-etching-ring","11":"product_tag-polycrystalline-silicon-ring","12":"product_tag-semiconductor-consumables","13":"product_tag-semiconductor-equipment-parts","14":"product_tag-si-ring-semiconductor","15":"product_tag-silicon-chamber-parts","16":"product_tag-silicon-ring","17":"product_tag-silicon-wear-parts","18":"product_tag-single-crystal-silicon-ring","19":"product_tag-wafer-processing-components","20":"desktop-align-left","21":"tablet-align-left","22":"mobile-align-left","23":"ast-product-gallery-layout-horizontal-slider","24":"ast-product-tabs-layout-horizontal","26":"first","27":"instock","28":"shipping-taxable","29":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product\/2400","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/comments?post=2400"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product\/2400\/revisions"}],"predecessor-version":[{"id":2408,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product\/2400\/revisions\/2408"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media\/2404"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media?parent=2400"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product_brand?post=2400"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product_cat?post=2400"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product_tag?post=2400"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}