{"id":2389,"date":"2026-04-24T05:55:23","date_gmt":"2026-04-24T05:55:23","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2389"},"modified":"2026-04-24T05:55:25","modified_gmt":"2026-04-24T05:55:25","slug":"cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching\/","title":{"rendered":"\u7528\u65bc\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8755\u523b\u7684 CVD \u78b3\u5316\u77fd SiC \u74b0"},"content":{"rendered":"<p data-start=\"213\" data-end=\"577\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2392 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"\u7528\u65bc\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8755\u523b\u7684 CVD \u78b3\u5316\u77fd SiC \u74b0\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>SiC \u74b0\uff08\u78b3\u5316\u77fd\u74b0\uff09\u662f\u4e00\u7a2e\u9ad8\u6027\u80fd\u5143\u4ef6\uff0c\u5ee3\u6cdb\u7528\u65bc\u534a\u5c0e\u9ad4\u7b49\u96e2\u5b50\u8655\u7406\u8a2d\u5099\uff0c\u5c24\u5176\u662f\u8755\u523b\u5ba4\u548c\u6c89\u7a4d\u5ba4\u3002\u6b64\u7522\u54c1\u4f7f\u7528\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD) \u78b3\u5316\u77fd\u88fd\u9020\uff0c\u5177\u6709\u6975\u4f73\u7684\u8010\u96fb\u6f3f\u4fb5\u8755\u3001\u8010\u9ad8\u6eab\u548c\u8010\u4fb5\u8755\u6027\u5316\u5b78\u74b0\u5883\u7684\u80fd\u529b\u3002.<\/p>\n<p data-start=\"579\" data-end=\"989\">\u5728\u534a\u5c0e\u9ad4\u88fd\u9020\u904e\u7a0b\u4e2d\uff0c\u8154\u5ba4\u5143\u4ef6\u6703\u6301\u7e8c\u66b4\u9732\u65bc\u53cd\u61c9\u6027\u6c23\u9ad4\u4e2d\uff0c\u4f8b\u5982\u4ee5\u6c1f\u548c\u6c2f\u70ba\u57fa\u790e\u7684\u5316\u5b78\u54c1 (CF\u2084\u3001SF\u2086\u3001Cl\u2082)\uff0c\u4ee5\u53ca\u9ad8\u80fd\u96e2\u5b50\u8f5f\u64ca\u3002\u5728\u9019\u6a23\u7684\u689d\u4ef6\u4e0b\uff0c\u50b3\u7d71\u7684\u77fd\u5143\u4ef6\u5f80\u5f80\u964d\u89e3\u5f97\u66f4\u5feb\u3002\u76f8\u6bd4\u4e4b\u4e0b\uff0c\u78b3\u5316\u77fd\u74b0\u53ef\u986f\u8457\u589e\u5f37\u8010\u7528\u6027\u3001\u6e1b\u5c11\u5fae\u7c92\u7522\u751f\uff0c\u4e26\u6539\u5584\u88fd\u7a0b\u7a69\u5b9a\u6027\u3002.<\/p>\n<p data-start=\"991\" data-end=\"1355\">\u7531\u65bc\u5177\u6709\u51fa\u8272\u7684\u6a5f\u68b0\u5f37\u5ea6\u3001\u71b1\u5c0e\u6027\u548c\u5316\u5b78\u60f0\u6027\uff0cCVD SiC \u88ab\u8a8d\u70ba\u662f\u4e0b\u4e00\u4ee3\u534a\u5c0e\u9ad4\u8a2d\u5099\u6700\u53ef\u9760\u7684\u6750\u6599\u4e4b\u4e00\u3002SiC \u74b0\u901a\u5e38\u4f5c\u70ba\u805a\u7126\u74b0\u3001\u908a\u7de3\u74b0\u6216\u8154\u5ba4\u4fdd\u8b77\u74b0\u5b89\u88dd\uff0c\u6709\u52a9\u65bc\u63a7\u5236\u7b49\u96e2\u5b50\u9ad4\u5206\u4f48\u548c\u4fdd\u8b77\u95dc\u9375\u8154\u5ba4\u90e8\u4ef6\u3002.<\/p>\n<p data-start=\"1357\" data-end=\"1595\">\u9019\u4e9b\u74b0\u5708\u88ab\u6b78\u985e\u70ba\u95dc\u9375\u534a\u5c0e\u9ad4\u6d88\u8017\u54c1\uff0c\u8207\u50b3\u7d71\u77fd\u74b0\u5708\u76f8\u6bd4\uff0c\u5177\u6709\u66f4\u9577\u7684\u4f7f\u7528\u58fd\u547d\uff0c\u662f\u5148\u9032\u88fd\u7a0b\u7bc0\u9ede\u548c\u9ad8\u7522\u91cf\u88fd\u9020\u74b0\u5883\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/p>\n<hr data-start=\"1597\" data-end=\"1600\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1602\" data-end=\"1622\">\u4e3b\u8981\u529f\u80fd<\/h2>\n<p><img decoding=\"async\" class=\"size-medium wp-image-2390 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul data-start=\"1623\" data-end=\"2189\">\n<li data-section-id=\"185xteb\" data-start=\"1623\" data-end=\"1725\">\u9ad8\u7d14\u5ea6 CVD SiC \u6750\u6599\uff1a\u78ba\u4fdd\u512a\u7570\u7684\u7d50\u69cb\u5b8c\u6574\u6027\u53ca\u6700\u5c11\u7684\u6c61\u67d3<\/li>\n<li data-section-id=\"103qh1t\" data-start=\"1726\" data-end=\"1822\">\u5091\u51fa\u7684\u8010\u96fb\u6f3f\u6027\uff1a\u5c0d\u6c1f\u548c\u6c2f\u57fa\u7b49\u96e2\u5b50\u9ad4\u5177\u6709\u512a\u7570\u7684\u8010\u53d7\u6027<\/li>\n<li data-section-id=\"19jl5gi\" data-start=\"1823\" data-end=\"1924\">\u9ad8\u6eab\u7a69\u5b9a\u6027\uff1a\u5728\u9ad8\u6eab\u52a0\u5de5\u74b0\u5883\u4e0b\u4ecd\u80fd\u7dad\u6301\u6548\u80fd<\/li>\n<li data-section-id=\"ixqmoc\" data-start=\"1925\" data-end=\"2002\">\u4f4e\u5fae\u7c92\u7522\u751f\uff1a\u63d0\u9ad8\u6676\u5713\u826f\u54c1\u7387\u548c\u88fd\u7a0b\u6e05\u6f54\u5ea6<\/li>\n<li data-section-id=\"nx34my\" data-start=\"2003\" data-end=\"2084\">\u5ef6\u9577\u4f7f\u7528\u58fd\u547d\uff1a\u901a\u5e38\u6bd4\u77fd\u5143\u4ef6\u9577\u6578\u500d<\/li>\n<li data-section-id=\"14jsdwf\" data-start=\"2085\" data-end=\"2189\">\u7cbe\u5bc6\u52a0\u5de5\uff1a\u56b4\u683c\u7684\u516c\u5dee (&lt;10 \u03bcm)\uff0c\u53ef\u7121\u7e2b\u6574\u5408\u81f3\u534a\u5c0e\u9ad4\u5de5\u5177\u4e2d<\/li>\n<\/ul>\n<hr data-start=\"2191\" data-end=\"2194\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2196\" data-end=\"2228\">\u6280\u8853\u898f\u683c<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2230\" data-end=\"2883\">\n<thead data-start=\"2230\" data-end=\"2259\">\n<tr data-start=\"2230\" data-end=\"2259\">\n<th class=\"\" data-start=\"2230\" data-end=\"2242\" data-col-size=\"sm\">\u53c3\u6578<\/th>\n<th class=\"\" data-start=\"2242\" data-end=\"2259\" data-col-size=\"md\">\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2287\" data-end=\"2883\">\n<tr data-start=\"2287\" data-end=\"2327\">\n<td data-start=\"2287\" data-end=\"2298\" data-col-size=\"sm\">\u6750\u8cea<\/td>\n<td data-col-size=\"md\" data-start=\"2298\" data-end=\"2327\">CVD \u78b3\u5316\u77fd (SiC)<\/td>\n<\/tr>\n<tr data-start=\"2328\" data-end=\"2348\">\n<td data-start=\"2328\" data-end=\"2337\" data-col-size=\"sm\">\u7d14\u6de8<\/td>\n<td data-col-size=\"md\" data-start=\"2337\" data-end=\"2348\">\u2265 99.9%<\/td>\n<\/tr>\n<tr data-start=\"2349\" data-end=\"2374\">\n<td data-start=\"2349\" data-end=\"2359\" data-col-size=\"sm\">\u5bc6\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2359\" data-end=\"2374\">\u2265 3.1 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"2375\" data-end=\"2408\">\n<td data-start=\"2375\" data-end=\"2392\" data-col-size=\"sm\">\u76f4\u5f91\uff08\u6700\u5927\u503c\uff09<\/td>\n<td data-col-size=\"md\" data-start=\"2392\" data-end=\"2408\">\u6700\u5927 370 \u516c\u91d0<\/td>\n<\/tr>\n<tr data-start=\"2409\" data-end=\"2451\">\n<td data-start=\"2409\" data-end=\"2421\" data-col-size=\"sm\">\u539a\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2421\" data-end=\"2451\">\u81ea\u8a02 (\u4e00\u822c\u70ba 5-30 \u516c\u91d0)<\/td>\n<\/tr>\n<tr data-start=\"2452\" data-end=\"2487\">\n<td data-start=\"2452\" data-end=\"2472\" data-col-size=\"sm\">\u96fb\u963b\u7387 (\u4f4e)<\/td>\n<td data-col-size=\"md\" data-start=\"2472\" data-end=\"2487\">&lt; 0.02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2488\" data-end=\"2528\">\n<td data-start=\"2488\" data-end=\"2511\" data-col-size=\"sm\">\u96fb\u963b\u7387 (\u4e2d)<\/td>\n<td data-col-size=\"md\" data-start=\"2511\" data-end=\"2528\">0.2 - 25 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2529\" data-end=\"2564\">\n<td data-start=\"2529\" data-end=\"2550\" data-col-size=\"sm\">\u96fb\u963b\u7387 (\u9ad8)<\/td>\n<td data-col-size=\"md\" data-start=\"2550\" data-end=\"2564\">&gt; 100 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2565\" data-end=\"2604\">\n<td data-start=\"2565\" data-end=\"2596\" data-col-size=\"sm\">\u96fb\u963b\u7387\u5747\u52fb\u6027 (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2596\" data-end=\"2604\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2605\" data-end=\"2670\">\n<td data-start=\"2605\" data-end=\"2625\" data-col-size=\"sm\">\u8868\u9762\u72c0\u614b<\/td>\n<td data-col-size=\"md\" data-start=\"2625\" data-end=\"2670\">\u5730\u9762\uff08\u53ef\u6839\u64da\u8981\u6c42\u9032\u884c\u62cb\u5149\uff09<\/td>\n<\/tr>\n<tr data-start=\"2671\" data-end=\"2723\">\n<td data-start=\"2671\" data-end=\"2696\" data-col-size=\"sm\">\u8868\u9762\u7c97\u5ea6 (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2696\" data-end=\"2723\">\u2264 1.6 \u03bcm\uff08\u53ef\u81ea\u8a02\uff09<\/td>\n<\/tr>\n<tr data-start=\"2724\" data-end=\"2757\">\n<td data-start=\"2724\" data-end=\"2746\" data-col-size=\"sm\">\u52a0\u5de5\u7cbe\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2746\" data-end=\"2757\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2758\" data-end=\"2799\">\n<td data-start=\"2758\" data-end=\"2781\" data-col-size=\"sm\">\u71b1\u50b3\u5c0e<\/td>\n<td data-col-size=\"md\" data-start=\"2781\" data-end=\"2799\">~120-200 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"2800\" data-end=\"2824\">\n<td data-start=\"2800\" data-end=\"2811\" data-col-size=\"sm\">\u786c\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2811\" data-end=\"2824\">~9.2 \u83ab\u6c0f\u786c\u5ea6<\/td>\n<\/tr>\n<tr data-start=\"2825\" data-end=\"2883\">\n<td data-start=\"2825\" data-end=\"2843\" data-col-size=\"sm\">\u54c1\u8cea\u63a7\u5236<\/td>\n<td data-col-size=\"md\" data-start=\"2843\" data-end=\"2883\">\u7121\u88c2\u7e2b\u3001\u7f3a\u53e3\u3001\u6c61\u67d3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2885\" data-end=\"2888\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2890\" data-end=\"2910\">\u61c9\u7528<\/h2>\n<p data-start=\"2911\" data-end=\"3025\">SiC \u74b0\u662f\u534a\u5c0e\u9ad4\u8a2d\u5099\u4e2d\u4e0d\u53ef\u6216\u7f3a\u7684\u5143\u4ef6\uff0c\u5728\u9019\u4e9b\u8a2d\u5099\u4e2d\uff0c\u8010\u7528\u6027\u548c\u8010\u96fb\u6f3f\u6027\u81f3\u95dc\u91cd\u8981\uff1a<\/p>\n<ul data-start=\"3027\" data-end=\"3241\">\n<li data-section-id=\"qzqq98\" data-start=\"3027\" data-end=\"3065\">\u96fb\u6f3f\u8755\u523b\u7cfb\u7d71 (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"3066\" data-end=\"3109\">\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD \/ PECVD)<\/li>\n<li data-section-id=\"yfc3l\" data-start=\"3110\" data-end=\"3149\">\u5c0d\u7126\u74b0\/\u908a\u74b0\u61c9\u7528<\/li>\n<li data-section-id=\"14j8f1u\" data-start=\"3150\" data-end=\"3193\">\u8154\u9ad4\u896f\u588a\u548c\u4fdd\u8b77\u5143\u4ef6<\/li>\n<li data-section-id=\"1l8pbfg\" data-start=\"3194\" data-end=\"3241\">\u9ad8\u5bc6\u5ea6\u7b49\u96e2\u5b50\u8655\u7406\u74b0\u5883<\/li>\n<\/ul>\n<p data-start=\"3243\" data-end=\"3383\">\u5b83\u5011\u7279\u5225\u9069\u7528\u65bc\u77fd\u5143\u4ef6\u7121\u6cd5\u6eff\u8db3\u4f7f\u7528\u58fd\u547d\u8981\u6c42\u7684\u5148\u9032\u7bc0\u9ede\u548c\u56b4\u82db\u7684\u8755\u523b\u88fd\u7a0b\u3002.<\/p>\n<p data-start=\"3243\" data-end=\"3383\"><img decoding=\"async\" class=\"aligncenter wp-image-2393 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-1024x511.jpg\" alt=\"\" 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data-end=\"3436\">\u70ba\u4f55\u8981\u9078\u64c7\u78b3\u5316\u77fd\u74b0\u800c\u4e0d\u662f\u77fd\u74b0\uff1f<\/h2>\n<p data-start=\"3437\" data-end=\"3702\">\u8207\u50b3\u7d71\u7684\u77fd\u74b0\u76f8\u6bd4\uff0cSiC \u74b0\u5728\u4f7f\u7528\u58fd\u547d\u548c\u88fd\u7a0b\u7a69\u5b9a\u6027\u65b9\u9762\u90fd\u6709\u986f\u8457\u7684\u6539\u5584\u3002\u5118\u7ba1\u77fd\u74b0\u6700\u521d\u7684\u6210\u672c\u6548\u76ca\u8f03\u9ad8\uff0c\u4f46\u5728\u4fb5\u8755\u6027\u96fb\u6f3f\u689d\u4ef6\u4e0b\u78e8\u640d\u901f\u5ea6\u8f03\u5feb\uff0c\u9700\u8981\u66f4\u983b\u7e41\u5730\u66f4\u63db\u3002.<\/p>\n<p data-start=\"3704\" data-end=\"3742\">\u53e6\u4e00\u65b9\u9762\uff0cSiC \u74b0\u63d0\u4f9b\uff1a<\/p>\n<ul data-start=\"3743\" data-end=\"3903\">\n<li data-section-id=\"17mv8nk\" data-start=\"3743\" data-end=\"3772\">\u58fd\u547d\u5ef6\u9577 3-10 \u500d<\/li>\n<li data-section-id=\"16lo0t8\" data-start=\"3773\" data-end=\"3820\">\u66f4\u4f73\u7684\u8010\u5316\u5b78\u8150\u8755\u6027<\/li>\n<li data-section-id=\"19uuz0f\" data-start=\"3821\" data-end=\"3857\">\u8f03\u4f4e\u7684\u5fae\u7c92\u6c61\u67d3<\/li>\n<li data-section-id=\"uhpkja\" data-start=\"3858\" data-end=\"3903\">\u6e1b\u5c11\u505c\u6a5f\u6642\u9593\u8207\u7dad\u8b77\u6210\u672c<\/li>\n<\/ul>\n<p data-start=\"3905\" data-end=\"4056\">\u5c0d\u65bc\u9ad8\u968e\u534a\u5c0e\u9ad4\u88fd\u9020\u800c\u8a00\uff0c\u5118\u7ba1 SiC \u5143\u4ef6\u7684\u524d\u671f\u6210\u672c\u8f03\u9ad8\uff0c\u4f46\u4f7f\u7528 SiC \u5143\u4ef6\u6642\u7684\u7e3d\u64c1\u6709\u6210\u672c (TCO) \u901a\u5e38\u8f03\u4f4e\u3002.<\/p>\n<p data-start=\"3905\" data-end=\"4056\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"4058\" data-end=\"4061\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"4063\" data-end=\"4074\">\u5e38\u898b\u554f\u984c<\/h2>\n<p data-start=\"4076\" data-end=\"4283\">Q1: SiC \u74b0\u662f\u6d88\u8017\u54c1\u55ce\uff1f<br data-start=\"4121\" data-end=\"4124\" \/>\u662f\u7684\uff0c\u5b83\u88ab\u8996\u70ba\u91cd\u8981\u7684\u534a\u5c0e\u9ad4\u6d88\u8017\u54c1\u3002\u5118\u7ba1\u5b83\u7684\u58fd\u547d\u6bd4\u77fd\u96f6\u4ef6\u9577\uff0c\u4f46\u5728\u7b49\u96e2\u5b50\u66dd\u9732\u4e0b\u6700\u7d42\u6703\u78e8\u640d\u3002.<\/p>\n<p data-start=\"4285\" data-end=\"4492\">Q2: CVD SiC \u6750\u6599\u7684\u512a\u52e2\u5728\u54ea\u88e1\uff1f<br data-start=\"4335\" data-end=\"4338\" \/>CVD SiC \u5177\u6709\u6975\u9ad8\u7684\u7d14\u5ea6\u3001\u81f4\u5bc6\u7684\u7d50\u69cb\uff0c\u4ee5\u53ca\u512a\u7570\u7684\u8010\u96fb\u6f3f\u548c\u8010\u5316\u5b78\u54c1\u7279\u6027\uff0c\u4f7f\u5176\u6210\u70ba\u534a\u5c0e\u9ad4\u61c9\u7528\u7684\u7406\u60f3\u6750\u6599\u3002.<\/p>\n<p data-start=\"4494\" data-end=\"4668\">Q3: SiC \u74b0\u53ef\u4ee5\u5ba2\u88fd\u5316\u55ce\uff1f<br data-start=\"4533\" data-end=\"4536\" \/>\u662f\u7684\u3002\u76f4\u5f91\u3001\u539a\u5ea6\u3001\u96fb\u963b\u7387\u548c\u8868\u9762\u8655\u7406\u90fd\u53ef\u4ee5\u6839\u64da\u60a8\u7684\u5716\u7d19\u6216\u8a2d\u5099\u8981\u6c42\u9032\u884c\u5b9a\u5236\u3002.<\/p>\n<p data-start=\"4670\" data-end=\"4814\">Q4: \u8207\u77fd\u74b0\u76f8\u6bd4\uff0cSiC \u74b0\u7684\u58fd\u547d\u6709\u591a\u9577\uff1f<br data-start=\"4735\" data-end=\"4738\" \/>\u4e00\u822c\u800c\u8a00\uff0cSiC \u74b0\u7684\u4f7f\u7528\u58fd\u547d\u53ef\u5ef6\u9577 3-10 \u500d\uff0c\u8996\u88fd\u7a0b\u689d\u4ef6\u800c\u5b9a\u3002.<\/p>\n<p data-start=\"4816\" data-end=\"4928\">Q5: \u524d\u7f6e\u6642\u9593\u662f\u591a\u4e45\uff1f<br data-start=\"4846\" data-end=\"4849\" \/>\u751f\u7522\u901a\u5e38\u9700\u8981 4-8 \u9031\uff0c\u8996\u8a2d\u8a08\u7684\u8907\u96dc\u6027\u548c\u6578\u91cf\u800c\u5b9a\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>SiC \u74b0\uff08\u78b3\u5316\u77fd\u74b0\uff09\u662f\u4e00\u7a2e\u9ad8\u6027\u80fd\u5143\u4ef6\uff0c\u5ee3\u6cdb\u7528\u65bc\u534a\u5c0e\u9ad4\u7b49\u96e2\u5b50\u8655\u7406\u8a2d\u5099\uff0c\u5c24\u5176\u662f\u8755\u523b\u5ba4\u548c\u6c89\u7a4d\u5ba4\u3002\u6b64\u7522\u54c1\u4f7f\u7528\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD) \u78b3\u5316\u77fd\u88fd\u9020\uff0c\u5177\u6709\u6975\u4f73\u7684\u8010\u96fb\u6f3f\u4fb5\u8755\u3001\u8010\u9ad8\u6eab\u548c\u8010\u4fb5\u8755\u6027\u5316\u5b78\u74b0\u5883\u7684\u80fd\u529b\u3002.<\/p>","protected":false},"featured_media":2392,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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