{"id":2379,"date":"2026-04-24T05:38:15","date_gmt":"2026-04-24T05:38:15","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2379"},"modified":"2026-06-07T03:14:53","modified_gmt":"2026-06-07T03:14:53","slug":"high-purity-single-crystal-silicon-electrode-for-semiconductor-plasma-etching-systems","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/high-purity-single-crystal-silicon-electrode-for-semiconductor-plasma-etching-systems\/","title":{"rendered":"\u7528\u65bc\u534a\u5c0e\u9ad4\u7b49\u96e2\u5b50\u8755\u523b\u7cfb\u7d71\u7684\u9ad8\u7d14\u5ea6\u55ae\u6676\u77fd\u96fb\u6975"},"content":{"rendered":"![\"\u7528\u65bc\u534a\u5c0e\u9ad4\u7b49\u96e2\u5b50\u8755\u523b\u7cfb\u7d71\u7684\u9ad8\u7d14\u5ea6\u55ae\u6676\u77fd\u96fb\u6975\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/qdOjBmoV8IvfXCCZyP_TScsFcvsnf_rXpW086f8iuioCNO5yQDt0Z9y7ezVD__Z9xzJIqXRfLcHey9Fywi2oJzAWqcbFTEAZfR8g7LsL3RbSqPh8llkzHKhu9Nukj7rB22Gxq5U3xKXDSW2VQzm-N5hCDNWN3CSGBxRIWYEm0DeDO8KSIBMjrAfKNQtx2jyA-300x262.jpg\")
\u77fd\u96fb\u6975\u662f\u5148\u9032\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8655\u7406\u8a2d\u5099\uff08\u5305\u62ec\u8755\u523b\u3001\u6c89\u7a4d\u548c\u8868\u9762\u6539\u6027\u7cfb\u7d71\uff09\u4e2d\u4f7f\u7528\u7684\u6838\u5fc3\u529f\u80fd\u5143\u4ef6\u3002\u77fd\u96fb\u6975\u7531\u9ad8\u7d14\u5ea6\u55ae\u6676\u77fd\u88fd\u6210\uff0c\u5728\u78ba\u4fdd\u7a69\u5b9a\u7684\u96fb\u6f3f\u7522\u751f\u3001\u5747\u52fb\u7684\u96fb\u5834\u5206\u4f48\u548c\u7cbe\u6e96\u7684\u6676\u5713\u8655\u7406\u4e2d\u626e\u6f14\u8457\u91cd\u8981\u7684\u89d2\u8272\u3002.<\/p>\n
\u5728\u73fe\u4ee3\u534a\u5c0e\u9ad4\u88fd\u7a0b\u4e2d\uff0c\u88fd\u7a0b\u7a69\u5b9a\u6027\u548c\u826f\u7387\u76f4\u63a5\u53d7\u5230\u5167\u8154\u5143\u4ef6\u6027\u80fd\u7684\u5f71\u97ff\u3002\u7531\u65bc\u77fd\u96fb\u6975\u8207\u77fd\u57fa\u88fd\u7a0b\u6709\u6975\u4f73\u7684\u76f8\u5bb9\u6027\uff0c\u53ef\u5c07\u6c61\u67d3\u98a8\u96aa\u964d\u81f3\u6700\u4f4e\uff0c\u4e26\u7dad\u6301\u9ad8\u88fd\u7a0b\u7d14\u5ea6\uff0c\u56e0\u6b64\u5ee3\u53d7\u9752\u775e\u3002\u76f8\u8f03\u65bc\u91d1\u5c6c\u96fb\u6975\uff0c\u77fd\u6750\u6599\u5c55\u73fe\u51fa\u66f4\u512a\u7570\u7684\u6297\u96fb\u6f3f\u5f15\u8d77\u7684\u6c61\u67d3\u80fd\u529b\uff0c\u4e26\u63d0\u4f9b\u66f4\u7a69\u5b9a\u7684\u96fb\u6c23\u7279\u6027\u3002.<\/p>\n
\u9019\u4e9b\u96fb\u6975\u901a\u5e38\u7528\u65bc\u6d89\u53ca\u9ad8\u80fd\u7b49\u96e2\u5b50\u9ad4\u3001\u6d3b\u6027\u6c23\u9ad4 (\u4f8b\u5982 CF\u2084\u3001SF\u2086 \u548c Cl\u2082) \u548c\u9ad8\u6eab\u7684\u56b4\u82db\u74b0\u5883\u4e2d\u3002\u96a8\u8457\u6642\u9593\u7684\u63a8\u79fb\uff0c\u5b83\u5011\u6703\u9010\u6f38\u53d7\u5230\u4fb5\u8755\uff0c\u56e0\u6b64\u88ab\u6b78\u985e\u70ba \u95dc\u9375\u534a\u5c0e\u9ad4\u6d88\u8017\u54c1<\/strong>, \u9700\u8981\u5b9a\u671f\u66f4\u63db\uff0c\u540c\u6642\u5728\u6574\u500b\u751f\u547d\u9031\u671f\u5167\u4fdd\u6301\u9ad8\u6027\u80fd\u3002.<\/p>\n
\n\u4e3b\u8981\u529f\u80fd<\/h2>\n\n- \u9ad8\u7d14\u5ea6\u6750\u6599<\/strong>:\u63a1\u7528\u534a\u5c0e\u9ad4\u7d1a\u55ae\u6676\u77fd\u88fd\u6210\uff0c\u78ba\u4fdd\u96dc\u8cea\u6700\u5c11\uff0c\u96fb\u6c23\u6027\u80fd\u7a69\u5b9a
![\"\u7528\u65bc\u534a\u5c0e\u9ad4\u7b49\u96e2\u5b50\u8755\u523b\u7cfb\u7d71\u7684\u9ad8\u7d14\u5ea6\u55ae\u6676\u77fd\u96fb\u6975\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/53ijDEI-Hbi31uz0t_L-DHLJsiyWWfRJlHlxVX1VI2hoHMMjCcOYgDxAcs06M_S4FBCl-zPueLgyH54wg3KtodiwkAok0zCME57k1CV0QE0UhxXuTtBJZpJPZ2eY9AembejJC0C5gN2j4R_87GHMZu-o2kMW4owmMIgDwzwwhM5_TvnzGqj9V0JcNVswUNE-300x281.jpg\")
<\/li>\n- \u591a\u7a2e\u96fb\u963b\u7387\u9078\u9805<\/strong>:\u63d0\u4f9b\u4f4e\u3001\u4e2d\u3001\u9ad8\u96fb\u963b\u7387\u7b49\u7d1a\uff0c\u4ee5\u7b26\u5408\u4e0d\u540c\u7684\u96fb\u6f3f\u63a7\u5236\u9700\u6c42<\/li>\n
- \u512a\u7570\u7684\u7b49\u96e2\u5b50\u76f8\u5bb9\u6027<\/strong>:\u6e1b\u5c11\u5fae\u7c92\u7522\u751f\uff0c\u63d0\u9ad8\u6676\u5713\u826f\u7387<\/li>\n
- \u7cbe\u5bc6\u52a0\u5de5<\/strong>:\u9ad8\u968e\u534a\u5c0e\u9ad4\u8a2d\u5099\u6574\u5408\u7684\u56b4\u683c\u516c\u5dee (<10 \u03bcm)<\/li>\n
- \u81ea\u8a02\u6c23\u5b54\u8a2d\u8a08<\/strong>:\u652f\u63f4\u5747\u52fb\u7684\u6c23\u9ad4\u5206\u4f48\u548c\u6700\u4f73\u5316\u7684\u96fb\u6f3f\u5bc6\u5ea6<\/li>\n
- \u8868\u9762\u5f48\u6027<\/strong>:\u53ef\u6839\u64da\u61c9\u7528\u9700\u6c42\u63d0\u4f9b\u62cb\u5149\u3001\u7814\u78e8\u6216\u78e8\u7802\u8868\u9762\u8655\u7406<\/li>\n<\/ul>\n
\n\u6280\u8853\u898f\u683c<\/h2>\n\n
\n
\n\n\n| \u53c3\u6578<\/th>\n | \u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n |
\n\n| \u6750\u8cea<\/td>\n | \u55ae\u6676\u77fd<\/td>\n<\/tr>\n |
\n| \u7d14\u6de8<\/td>\n | \u2265 99.999% (5N \u534a\u5c0e\u9ad4\u7d1a)<\/td>\n<\/tr>\n |
\n| \u76f4\u5f91\uff08\u6700\u5927\u503c\uff09<\/td>\n | \u6700\u5927 480 \u516c\u91d0<\/td>\n<\/tr>\n |
\n| \u539a\u5ea6<\/td>\n | \u5ba2\u88fd\u5316\uff08\u8996\u8a2d\u8a08\u800c\u5b9a\uff0c\u4e00\u822c\u70ba 5-50 \u516c\u91d0\uff09<\/td>\n<\/tr>\n |
\n| \u96fb\u963b\u7387 (\u4f4e)<\/td>\n | < 0.02 \u03a9-cm<\/td>\n<\/tr>\n |
\n| \u96fb\u963b\u7387 (\u4e2d)<\/td>\n | 1 - 4 \u03a9-cm<\/td>\n<\/tr>\n |
\n| \u96fb\u963b\u7387 (\u9ad8)<\/td>\n | 70 - 90 \u03a9-cm<\/td>\n<\/tr>\n |
\n| \u96fb\u963b\u7387\u5747\u52fb\u6027 (RRG)<\/td>\n | < 5%<\/td>\n<\/tr>\n |
\n| \u6c23\u5b54\u76f4\u5f91<\/td>\n | 0.2 - 0.8 mm\uff08\u53ef\u81ea\u8a02\uff09<\/td>\n<\/tr>\n |
\n| \u8868\u9762\u72c0\u614b<\/td>\n | \u62cb\u5149\/\u7814\u78e8\/\u78e8\u524a<\/td>\n<\/tr>\n |
\n| \u8868\u9762\u7c97\u5ea6 (Ra)<\/td>\n | \u2264 0.8 \u03bcm\uff08\u62cb\u5149\u9078\u9805\u8f03\u4f4e\uff09<\/td>\n<\/tr>\n |
\n| \u52a0\u5de5\u7cbe\u5ea6<\/td>\n | < 10 \u03bcm<\/td>\n<\/tr>\n |
\n| \u5e73\u6574\u5ea6<\/td>\n | \u2264 30 \u03bcm\uff08\u8996\u5c3a\u5bf8\u800c\u5b9a\uff09<\/td>\n<\/tr>\n |
\n| \u908a\u7de3\u7c21\u4ecb<\/td>\n | \u81ea\u8a02\u5012\u89d2\/\u534a\u5f91<\/td>\n<\/tr>\n |
\n| \u54c1\u8cea\u63a7\u5236<\/td>\n | \u7121\u7f3a\u53e3\u3001\u88c2\u7e2b\u3001\u522e\u50b7\u3001\u6c61\u67d3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n\u61c9\u7528<\/h2>\n\u77fd\u96fb\u6975\u5ee3\u6cdb\u61c9\u7528\u65bc\u9700\u8981\u96fb\u6f3f\u4e92\u52d5\u7684\u534a\u5c0e\u9ad4\u88fd\u9020\u8a2d\u5099\u3002\u5178\u578b\u7684\u61c9\u7528\u5305\u62ec<\/p>\n \n- \u96fb\u6f3f\u8755\u523b\u7cfb\u7d71\uff08ICP\u3001RIE\uff09<\/li>\n
- \u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD \/ PECVD)<\/li>\n
- \u6676\u5713\u8868\u9762\u8655\u7406\u88fd\u7a0b<\/li>\n
- \u534a\u5c0e\u9ad4\u5ba4\u5167\u90e8\u5143\u4ef6<\/li>\n
- \u975c\u96fb\u6216\u96fb\u6f3f\u5206\u914d\u7cfb\u7d71<\/li>\n<\/ul>\n
\u5b83\u5011\u80fd\u5920\u4fdd\u6301\u7b49\u96e2\u5b50\u5747\u52fb\u6027\u4e26\u6e1b\u5c11\u6c61\u67d3\uff0c\u56e0\u6b64\u5728\u6210\u719f\u548c\u5148\u9032\u88fd\u7a0b\u7bc0\u9ede\u4e2d\u90fd\u975e\u5e38\u91cd\u8981\u3002.<\/p>\n
\n\u70ba\u4f55\u9078\u64c7\u77fd\u96fb\u6975\uff1f<\/h2>\n\u77fd\u96fb\u6975\u5728\u6210\u672c\u6548\u76ca\u8207\u6548\u80fd\u4e4b\u9593\u63d0\u4f9b\u4e86\u7368\u7279\u7684\u5e73\u8861\u3002\u8207 SiC \u5143\u4ef6\u76f8\u6bd4\uff0c\u77fd\u96fb\u6975\u66f4\u7d93\u6fdf\u4e14\u66f4\u5bb9\u6613\u52a0\u5de5\uff0c\u56e0\u6b64\u975e\u5e38\u9069\u5408\u53ef\u63a5\u53d7\u66f4\u63db\u9031\u671f\u7684\u61c9\u7528\u3002\u6b64\u5916\uff0c\u77fd\u96fb\u6975\u8207\u77fd\u6676\u5713\u88fd\u7a0b\u7684\u672c\u8cea\u76f8\u5bb9\u6027\u53ef\u78ba\u4fdd\u4ea4\u53c9\u6c61\u67d3\u7684\u98a8\u96aa\u964d\u81f3\u6700\u4f4e\uff0c\u9019\u5c0d\u65bc\u7dad\u6301\u88dd\u7f6e\u7684\u9ad8\u826f\u7387\u975e\u5e38\u91cd\u8981\u3002.<\/p>\n \u5c0d\u65bc\u9700\u8981\u8f03\u9577\u58fd\u547d\u6216\u8f03\u9ad8\u8010\u8150\u8755\u6027\u7684\u61c9\u7528\uff0c\u53ef\u4ee5\u8003\u616e\u4f7f\u7528 SiC \u96fb\u6975\u3002\u7136\u800c\uff0c\u5c0d\u65bc\u5ee3\u6cdb\u7684\u6a19\u6e96\u534a\u5c0e\u9ad4\u88fd\u7a0b\u800c\u8a00\uff0c\u77fd\u96fb\u6975\u4ecd\u662f\u696d\u754c\u6a19\u6e96\u7684\u89e3\u6c7a\u65b9\u6848\u3002.<\/p>\n ![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\") <\/p>\n
\n\u5e38\u898b\u554f\u984c<\/h2>\nQ1: \u77fd\u6676\u96fb\u6975\u662f\u8017\u6750\u55ce\uff1f<\/strong>
\u662f\u7684\uff0c\u5b83\u88ab\u6b78\u985e\u70ba\u95dc\u9375\u534a\u5c0e\u9ad4\u6d88\u8017\u54c1\u3002\u7531\u65bc\u7b49\u96e2\u5b50\u9ad4\u66dd\u9732\u548c\u5316\u5b78\u53cd\u61c9\uff0c\u5b83\u6703\u9010\u6f38\u78e8\u640d\uff0c\u9700\u8981\u5b9a\u671f\u66f4\u63db\u3002.<\/p>\nQ2: \u6211\u61c9\u8a72\u9078\u64c7\u4ec0\u9ebc\u6a23\u7684\u96fb\u963b\u7387\uff1f<\/strong>
\u9019\u53d6\u6c7a\u65bc\u60a8\u7684\u88fd\u7a0b\u9700\u6c42\u3002\u4f4e\u96fb\u963b\u7387\u901a\u5e38\u7528\u65bc\u8f03\u9ad8\u7684\u5c0e\u96fb\u9700\u6c42\uff0c\u800c\u9ad8\u96fb\u963b\u7387\u5247\u9069\u7528\u65bc\u7d55\u7de3\u548c\u53d7\u63a7\u96fb\u6f3f\u74b0\u5883\u3002.<\/p>\nQ3: \u96fb\u6975\u53ef\u4ee5\u5ba2\u88fd\u5316\u55ce\uff1f<\/strong>
\u662f\u7684\u3002\u5c3a\u5bf8\u3001\u539a\u5ea6\u3001\u6c23\u5b54\u6a23\u5f0f\u3001\u96fb\u963b\u7387\u548c\u8868\u9762\u8655\u7406\u90fd\u53ef\u4ee5\u6839\u64da\u60a8\u7684\u5716\u7d19\u6216\u8a2d\u5099\u8981\u6c42\u9032\u884c\u5b9a\u5236\u3002.<\/p>","protected":false},"excerpt":{"rendered":"\u77fd\u96fb\u6975\u662f\u5148\u9032\u534a\u5c0e\u9ad4\u96fb\u6f3f\u8655\u7406\u8a2d\u5099\uff08\u5305\u62ec\u8755\u523b\u3001\u6c89\u7a4d\u548c\u8868\u9762\u6539\u6027\u7cfb\u7d71\uff09\u4e2d\u4f7f\u7528\u7684\u6838\u5fc3\u529f\u80fd\u5143\u4ef6\u3002\u77fd\u96fb\u6975\u7531\u9ad8\u7d14\u5ea6\u55ae\u6676\u77fd\u88fd\u6210\uff0c\u5728\u78ba\u4fdd\u7a69\u5b9a\u7684\u96fb\u6f3f\u7522\u751f\u3001\u5747\u52fb\u7684\u96fb\u5834\u5206\u4f48\u548c\u7cbe\u6e96\u7684\u6676\u5713\u8655\u7406\u4e2d\u626e\u6f14\u8457\u91cd\u8981\u7684\u89d2\u8272\u3002.<\/p>","protected":false},"featured_media":2397,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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