{"id":2354,"date":"2026-04-22T06:34:59","date_gmt":"2026-04-22T06:34:59","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2354"},"modified":"2026-04-22T07:16:34","modified_gmt":"2026-04-22T07:16:34","slug":"ai300-medium-beam-high-temperature-ion-implantation-system-for-12-inch-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/ai300-medium-beam-high-temperature-ion-implantation-system-for-12-inch-wafer-processing\/","title":{"rendered":"\u7528\u65bc 12 \u540b\u6676\u5713\u88fd\u7a0b\u7684 Ai300\uff08\u4e2d\u675f\uff09\u9ad8\u6eab\u96e2\u5b50\u690d\u5165\u7cfb\u7d71"},"content":{"rendered":"

\"\u7528\u65bcAi300 (Medium Beam) \u9ad8\u6eab\u96e2\u5b50\u690d\u5165\u7cfb\u7d71\u5c08\u70ba 12 \u540b\u77fd\u6676\u5713\u534a\u5c0e\u9ad4\u88fd\u9020\u7dda\u6240\u8a2d\u8a08\u3002\u5b83\u662f\u91dd\u5c0d\u77fd\u57fa\u548c\u5bec\u5e36\u9699\u534a\u5c0e\u9ad4\u61c9\u7528\uff08\u5305\u62ec SiC \u88fd\u7a0b\u7dda\uff09\u7684\u5148\u9032\u647b\u96dc\u88fd\u7a0b\u800c\u958b\u767c\u7684\u4e2d\u7b49\u96fb\u6d41\u96e2\u5b50\u690d\u5165\u5668\u3002.<\/p>\n

\u8a72\u7cfb\u7d71\u652f\u63f4\u7684\u80fd\u91cf\u7bc4\u570d\u5f9e 5 keV \u5230 300 keV\uff0c\u80fd\u5920\u9748\u6d3b\u5730\u9032\u884c\u5f9e\u6dfa\u7d50\u6210\u5230\u6df1\u647b\u96dc\u61c9\u7528\u7684\u690d\u5165\u3002\u8a72\u7cfb\u7d71\u914d\u5099\u9ad8\u6eab\u52a0\u71b1\u6676\u5713\u53f0\uff0c\u6700\u9ad8\u6eab\u5ea6\u53ef\u9054 400\u00b0C\uff0c\u53ef\u5728\u690d\u5165\u904e\u7a0b\u4e2d\u6539\u5584\u647b\u8cea\u6d3b\u5316\u4e26\u964d\u4f4e\u6676\u683c\u640d\u5bb3\u3002.<\/p>\n

Ai300 \u7cfb\u7d71\u5177\u6709\u7a69\u5b9a\u7684\u5149\u675f\u6027\u80fd\u3001\u9ad8\u7cbe\u5ea6\u63a7\u5236\u4ee5\u53ca\u8207\u5927\u578b\u7a4d\u9ad4\u96fb\u8def\u88fd\u7a0b\u7684\u76f8\u5bb9\u6027\uff0c\u9069\u5408\u5148\u9032\u7684\u534a\u5c0e\u9ad4\u88fd\u9020\u74b0\u5883\u3002.<\/p>\n

\n

\u7279\u9ede<\/h2>\n

\u9ad8\u6eab\u690d\u5165\u80fd\u529b<\/h3>\n

\u914d\u5099\u52a0\u71b1\u6676\u5713\u53f0\uff0c\u53ef\u652f\u63f4\u9ad8\u9054 400\u00b0C \u7684\u6eab\u5ea6\uff0c\u6539\u5584\u690d\u5165\u54c1\u8cea\u8207\u647b\u8cea\u6d3b\u5316\u6548\u7387\u3002.<\/p>\n

\u5bec\u80fd\u91cf\u7bc4\u570d<\/h3>\n

5-300 keV \u7684\u80fd\u91cf\u7bc4\u570d\u53ef\u652f\u63f4\u5148\u9032\u88dd\u7f6e\u7d50\u69cb\u7684\u6dfa\u5c64\u8207\u6df1\u5c64\u690d\u5165\u88fd\u7a0b\u3002.<\/p>\n

\u9ad8\u7cbe\u5ea6\u5149\u675f\u63a7\u5236<\/h3>\n

\u63d0\u4f9b\u9ad8\u7cbe\u5ea6\u690d\u5165\uff0c\u89d2\u5ea6\u7cbe\u5ea6\u22640.1\u00b0\uff0c\u5149\u675f\u5e73\u884c\u5ea6\u22640.1\u00b0\uff0c\u5747\u52fb\u5ea6\u22640.5%\uff0c\u91cd\u8907\u6027\u22640.5%\u3002.<\/p>\n

\u9ad8\u901a\u91cf\u6548\u80fd<\/h3>\n

\u652f\u63f4\u6bcf\u5c0f\u6642\u9ad8\u9054 \u2265 500 \u7247\u6676\u5713\u7684\u7522\u91cf\uff0c\u9069\u7528\u65bc\u9ad8\u7522\u91cf\u7684\u534a\u5c0e\u9ad4\u88fd\u9020\u3002.<\/p>\n

\u5148\u9032\u96e2\u5b50\u6e90\u80fd\u529b<\/h3>\n

\u652f\u63f4\u591a\u7a2e\u690d\u5165\u5143\u7d20\uff0c\u5305\u62ec C\u3001B\u3001P\u3001N\u3001He \u548c Ar\uff0c\u6eff\u8db3\u591a\u6a23\u5316\u7684\u534a\u5c0e\u9ad4\u88fd\u7a0b\u9700\u6c42\u3002.<\/p>\n

LSI \u88fd\u7a0b\u76f8\u5bb9\u6027<\/h3>\n

\u8207\u5927\u578b\u7a4d\u9ad4\u96fb\u8def\u88fd\u7a0b\u53ca\u5148\u9032\u5143\u4ef6\u88fd\u9020\u5b8c\u5168\u76f8\u5bb9\u3002.<\/p>\n

\"\" \"\"<\/p>\n

\n

\u4e3b\u8981\u898f\u683c<\/h2>\n

\u88fd\u7a0b\u53c3\u6578<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\u9805\u76ee<\/th>\n\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n
\u6676\u5713\u5c3a\u5bf8<\/td>\n12 \u540b<\/td>\n<\/tr>\n
\u80fd\u91cf\u7bc4\u570d<\/td>\n5-300 keV<\/td>\n<\/tr>\n
\u690d\u5165\u5143\u4ef6<\/td>\nC\u3001B\u3001P\u3001N\u3001He\u3001Ar<\/td>\n<\/tr>\n
\u5291\u91cf\u7bc4\u570d<\/td>\n1E11-1E16 \u96e2\u5b50\/\u5e73\u65b9\u5398\u7c73<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u5149\u675f\u6027\u80fd<\/h3>\n
\n
\n\n\n\n\n\n\n
\u9805\u76ee<\/th>\n\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n
\u6881\u7684\u7a69\u5b9a\u6027<\/td>\n\u2264 10% \/ \u5c0f\u6642 (\u2264\u6bcf\u5c0f\u6642 1 \u6b21\u5149\u675f\u4e2d\u65b7\u6216\u8d77\u5f27)<\/td>\n<\/tr>\n
\u5149\u675f\u5e73\u884c\u5ea6<\/td>\n\u2264 0.1\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u690d\u5165\u7cbe\u78ba\u5ea6<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\u9805\u76ee<\/th>\n\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n
\u690d\u5165\u89d2\u5ea6\u7bc4\u570d<\/td>\n0\u00b0-45\u00b0<\/td>\n<\/tr>\n
\u89d2\u5ea6\u7cbe\u78ba\u5ea6<\/td>\n\u2264 0.1\u00b0<\/td>\n<\/tr>\n
\u5747\u4e00\u6027 (1\u03c3)<\/td>\n\u2264 0.5% (P+, 1E14, 100 keV)<\/td>\n<\/tr>\n
\u91cd\u8907\u6027 (1\u03c3)<\/td>\n\u2264 0.5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u7cfb\u7d71\u6548\u80fd<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n\n
\u9805\u76ee<\/th>\n\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n
\u541e\u5410\u91cf<\/td>\n\u2265 \u6bcf\u5c0f\u6642 500 \u7247\u6676\u5713<\/td>\n<\/tr>\n
\u6700\u9ad8\u690d\u5165\u6eab\u5ea6<\/td>\n400\u00b0C<\/td>\n<\/tr>\n
\u8a2d\u5099\u5c3a\u5bf8<\/td>\n6400 \u00d7 3640 \u00d7 3100 \u516c\u91d0<\/td>\n<\/tr>\n
\u771f\u7a7a\u5ea6<\/td>\n5E-7 \u6258<\/td>\n<\/tr>\n
X \u5c04\u7dda\u6d29\u6f0f<\/td>\n\u2264 0.3 \u03bcSv\/h<\/td>\n<\/tr>\n
\u6383\u63cf\u6a21\u5f0f<\/td>\n\u6c34\u5e73\u975c\u96fb\u6383\u63cf + \u5782\u76f4\u6a5f\u68b0\u6383\u63cf<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\u61c9\u7528\u9818\u57df<\/h2>\n

SiC \u534a\u5c0e\u9ad4\u88fd\u7a0b<\/h3>\n

\u7528\u65bc\u78b3\u5316\u77fd\u5143\u4ef6\u88fd\u9020\uff0c\u652f\u63f4\u5bec\u5e36\u9699\u6750\u6599\u6240\u9700\u7684\u9ad8\u6eab\u690d\u5165\u88fd\u7a0b\u3002.<\/p>\n

\u77fd\u57fa\u534a\u5c0e\u9ad4\u88fd\u9020<\/h3>\n

\u9069\u7528\u65bc CMOS \u548c\u5148\u9032\u7a4d\u9ad4\u96fb\u8def\u88fd\u9020\u7684 12 \u540b\u77fd\u6676\u5713\u751f\u7522\u7dda\u3002.<\/p>\n

\u9ad8\u6eab\u690d\u5165\u88fd\u7a0b<\/h3>\n

\u652f\u63f4\u9700\u8981\u8f03\u9ad8\u6676\u5713\u6eab\u5ea6\u7684\u690d\u5165\u88fd\u7a0b\uff0c\u4ee5\u6e1b\u5c11\u7f3a\u9677\u4e26\u6539\u5584\u647b\u8cea\u6d3b\u5316\u3002.<\/p>\n

\u529f\u7387\u5143\u4ef6\u88fd\u9020<\/h3>\n

\u9069\u7528\u65bc\u9700\u8981\u7cbe\u5bc6\u647b\u96dc\u548c\u9ad8\u80fd\u91cf\u690d\u5165\u7684\u529f\u7387\u534a\u5c0e\u9ad4\u88dd\u7f6e\u3002.<\/p>\n

\u5148\u9032\u7a4d\u9ad4\u96fb\u8def\u751f\u7522<\/h3>\n

\u652f\u63f4\u5177\u6709\u9ad8\u7cbe\u5ea6\u8207\u9ad8\u7522\u91cf\u9700\u6c42\u7684 LSI \u88fd\u7a0b\u6574\u5408\u3002.<\/p>\n

\n

\u5e38\u898b\u554f\u984c<\/h2>\n

1.Ai300 \u7cfb\u7d71\u652f\u63f4\u4f55\u7a2e\u6676\u5713\u5c3a\u5bf8<\/h3>\n

\u6b64\u7cfb\u7d71\u5c08\u70ba 12 \u540b\u77fd\u6676\u5713\u6240\u8a2d\u8a08\uff0c\u9069\u7528\u65bc\u5148\u9032\u7684\u534a\u88fd\u9020\u751f\u7522\u7dda\u3002.<\/p>\n

2.\u9ad8\u6eab\u690d\u5165\u80fd\u529b\u7684\u4e3b\u8981\u512a\u52e2\u662f\u4ec0\u9ebc\uff1f<\/h3>\n

\u6b64\u7cfb\u7d71\u652f\u63f4\u9ad8\u9054 400\u00b0C \u7684\u690d\u5165\u6eab\u5ea6\uff0c\u6709\u52a9\u65bc\u6e1b\u5c11\u6676\u683c\u640d\u5bb3\u3001\u6539\u5584\u647b\u8cea\u6d3b\u5316\uff0c\u4ee5\u53ca\u63d0\u5347\u6574\u9ad4\u5143\u4ef6\u6548\u80fd\u3002.<\/p>\n

3.\u7cfb\u7d71\u63d0\u4f9b\u7684\u7cbe\u78ba\u5ea6\u548c\u751f\u7522\u6548\u7387\u9054\u5230\u4ec0\u9ebc\u7a0b\u5ea6<\/h3>\n

\u8a72\u7cfb\u7d71\u7684\u89d2\u5ea6\u7cbe\u78ba\u5ea6\u5728 0.1 \u5ea6\u4ee5\u5167\uff0c\u5149\u675f\u5e73\u884c\u5ea6\u5728 0.1 \u5ea6\u4ee5\u5167\uff0c\u5747\u52fb\u5ea6\u548c\u91cd\u8907\u6027\u5728 0.5% \u4ee5\u5167\uff0c\u7522\u80fd\u9ad8\u9054\u6bcf\u5c0f\u6642 500 \u7247\u6676\u5713\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

Ai300 (Medium Beam) \u9ad8\u6eab\u96e2\u5b50\u690d\u5165\u7cfb\u7d71\u5c08\u70ba 12 \u540b\u77fd\u6676\u5713\u534a\u5c0e\u9ad4\u88fd\u9020\u7dda\u6240\u8a2d\u8a08\u3002\u5b83\u662f\u91dd\u5c0d\u77fd\u57fa\u548c\u5bec\u5e36\u9699\u534a\u5c0e\u9ad4\u61c9\u7528\uff08\u5305\u62ec SiC \u88fd\u7a0b\u7dda\uff09\u7684\u5148\u9032\u647b\u96dc\u88fd\u7a0b\u800c\u958b\u767c\u7684\u4e2d\u7b49\u96fb\u6d41\u96e2\u5b50\u690d\u5165\u5668\u3002.<\/p>","protected":false},"featured_media":2357,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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