{"id":2346,"date":"2026-04-22T05:56:29","date_gmt":"2026-04-22T05:56:29","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2346"},"modified":"2026-04-22T07:25:08","modified_gmt":"2026-04-22T07:25:08","slug":"ai250-medium-beam-room-temperature-ion-implantation-system-for-6-8-inch-silicon-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/ai250-medium-beam-room-temperature-ion-implantation-system-for-6-8-inch-silicon-wafer-processing\/","title":{"rendered":"\u7528\u65bc 6-8 \u540b\u77fd\u6676\u5713\u88fd\u7a0b\u7684 Ai250\uff08\u4e2d\u675f\uff09\u5ba4\u6eab\u96e2\u5b50\u690d\u5165\u7cfb\u7d71"},"content":{"rendered":"<p data-start=\"190\" data-end=\"506\"><img decoding=\"async\" class=\"wp-image-2347 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai250-Medium-Beam-Room-Temperature-Ion-Implantation-System-for-6-8-Inch-Silicon-Wafer-Processing-300x300.png\" alt=\"\" width=\"217\" height=\"217\" srcset=\"\" sizes=\"(max-width: 217px) 100vw, 217px\" data-srcset=\"\" \/>Ai250 (Medium Beam) \u96e2\u5b50\u690d\u5165\u7cfb\u7d71\u5c08\u70ba 6 \u540b\u548c 8 \u540b\u77fd\u6676\u5713\u534a\u5c0e\u9ad4\u88fd\u9020\u7dda\u6240\u8a2d\u8a08\u3002\u5b83\u662f\u7528\u65bc\u5148\u9032\u7a4d\u9ad4\u96fb\u8def\u88fd\u9020\u88fd\u7a0b\u7684\u4e2d\u7b49\u96fb\u6d41\u96e2\u5b50\u690d\u5165\u5668\uff0c\u63d0\u4f9b\u7a69\u5b9a\u7684\u675f\u6d41\u6027\u80fd\u3001\u9ad8\u690d\u5165\u7cbe\u5ea6\u548c\u53ef\u9760\u7684\u5291\u91cf\u63a7\u5236\u3002.<\/p>\n<p data-start=\"508\" data-end=\"755\">\u8a72\u7cfb\u7d71\u652f\u63f4\u7684\u80fd\u91cf\u7bc4\u570d\u5f9e 5 keV \u5230 250 keV\uff0c\u53ef\u5be6\u73fe\u6dfa\u5c64\u548c\u6df1\u5c64\u96e2\u5b50\u690d\u5165\u61c9\u7528\u3002\u5b83\u9069\u7528\u65bc\u5404\u7a2e\u534a\u5c0e\u9ad4\u647b\u96dc\u88fd\u7a0b\uff0c\u4e26\u5b8c\u5168\u7b26\u5408 LSI \u88fd\u9020\u8981\u6c42\u3002.<\/p>\n<hr data-start=\"757\" data-end=\"760\" \/>\n<h2 data-section-id=\"1d7mrtu\" data-start=\"762\" data-end=\"773\">\u7279\u9ede<\/h2>\n<h3 data-section-id=\"cu05id\" data-start=\"775\" data-end=\"809\">\u7a69\u5b9a\u7684\u4e2d\u5149\u675f\u6548\u80fd<\/h3>\n<p data-start=\"810\" data-end=\"927\">\u78ba\u4fdd\u9577\u751f\u7522\u9031\u671f\u5167\u7a69\u5b9a\u7684\u96e2\u5b50\u675f\u8f38\u51fa\uff0c\u6539\u5584\u88fd\u7a0b\u4e00\u81f4\u6027\u4e26\u964d\u4f4e\u8b8a\u7570\u6027\u3002.<\/p>\n<h3 data-section-id=\"14z8c7o\" data-start=\"929\" data-end=\"961\">\u5bec\u80fd\u91cf\u7bc4\u570d\u80fd\u529b<\/h3>\n<p data-start=\"962\" data-end=\"1082\">5-250 keV \u7684\u80fd\u91cf\u7bc4\u570d\u53ef\u652f\u63f4\u4e0d\u540c\u88dd\u7f6e\u7d50\u69cb\u548c\u88fd\u7a0b\u7bc0\u9ede\u7684\u5f48\u6027\u690d\u5165\u9700\u6c42\u3002.<\/p>\n<h3 data-section-id=\"1hi8i36\" data-start=\"1084\" data-end=\"1118\">\u9ad8\u7cbe\u5bc6\u88fd\u7a0b\u63a7\u5236<\/h3>\n<p data-start=\"1119\" data-end=\"1264\">\u63d0\u4f9b\u9ad8\u7cbe\u5ea6\u690d\u5165\u6027\u80fd\uff0c\u89d2\u5ea6\u7cbe\u5ea6\u22640.2\u00b0\uff0c\u5149\u675f\u5e73\u884c\u5ea6\u22640.2\u00b0\uff0c\u5747\u52fb\u5ea6\u22640.5%\uff0c\u91cd\u8907\u6027\u22640.5%\u3002.<\/p>\n<h3 data-section-id=\"8aw6q\" data-start=\"1266\" data-end=\"1296\">\u9ad8\u7522\u91cf\u80fd\u529b<\/h3>\n<p data-start=\"1297\" data-end=\"1389\">\u6bcf\u5c0f\u6642\u652f\u63f4 \u2265 200 \u7247\u6676\u5713\uff0c\u9069\u7528\u65bc\u4e2d\u9ad8\u7522\u91cf\u7684\u534a\u5c0e\u9ad4\u751f\u7522\u3002.<\/p>\n<h3 data-section-id=\"oms7zj\" data-start=\"1391\" data-end=\"1419\">\u690d\u5165\u6a21\u5f0f\u529f\u80fd<\/h3>\n<p data-start=\"1420\" data-end=\"1545\">\u652f\u63f4\u5728\u55ae\u4e00\u6676\u5713\u4e0a\u9032\u884c\u591a\u5340\u57df\u8207\u8c61\u9650\u690d\u5165\uff0c\u63d0\u9ad8\u88fd\u7a0b\u5f48\u6027\u4e26\u964d\u4f4e\u958b\u767c\u6210\u672c\u3002.<\/p>\n<h3 data-section-id=\"1bq068l\" data-start=\"1547\" data-end=\"1576\">LSI \u88fd\u7a0b\u76f8\u5bb9\u6027<\/h3>\n<p data-start=\"1577\" data-end=\"1641\">\u5b8c\u5168\u76f8\u5bb9\u65bc LSI \u534a\u5c0e\u9ad4\u88fd\u7a0b\u3002.<\/p>\n<p data-start=\"1577\" data-end=\"1641\"><img fetchpriority=\"high\" decoding=\"async\" class=\"wp-image-2371 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png\" alt=\"\" width=\"1024\" height=\"388\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-300x114.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-768x291.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-600x227.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs.png 1216w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"1643\" data-end=\"1646\" \/>\n<h2 data-section-id=\"rkota4\" data-start=\"1648\" data-end=\"1669\">\u4e3b\u8981\u898f\u683c<\/h2>\n<h3 data-section-id=\"rc5knr\" data-start=\"1671\" data-end=\"1693\">\u88fd\u7a0b\u53c3\u6578<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1695\" data-end=\"1899\">\n<thead data-start=\"1695\" data-end=\"1719\">\n<tr data-start=\"1695\" data-end=\"1719\">\n<th class=\"\" data-start=\"1695\" data-end=\"1702\" data-col-size=\"sm\">\u9805\u76ee<\/th>\n<th class=\"\" data-start=\"1702\" data-end=\"1719\" data-col-size=\"sm\">\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1744\" data-end=\"1899\">\n<tr data-start=\"1744\" data-end=\"1784\">\n<td data-start=\"1744\" data-end=\"1757\" data-col-size=\"sm\">\u6676\u5713\u5c3a\u5bf8<\/td>\n<td data-col-size=\"sm\" data-start=\"1757\" data-end=\"1784\">6-8 \u540b\u77fd\u6676\u5713<\/td>\n<\/tr>\n<tr data-start=\"1785\" data-end=\"1813\">\n<td data-start=\"1785\" data-end=\"1800\" data-col-size=\"sm\">\u80fd\u91cf\u7bc4\u570d<\/td>\n<td data-col-size=\"sm\" data-start=\"1800\" data-end=\"1813\">5-250 keV<\/td>\n<\/tr>\n<tr data-start=\"1814\" data-end=\"1863\">\n<td data-start=\"1814\" data-end=\"1835\" data-col-size=\"sm\">\u690d\u5165\u5143\u4ef6<\/td>\n<td data-col-size=\"sm\" data-start=\"1835\" data-end=\"1863\">B+\u3001P+\u3001As+\u3001Ar+\u3001N+\u3001H+<\/td>\n<\/tr>\n<tr data-start=\"1864\" data-end=\"1899\">\n<td data-start=\"1864\" data-end=\"1877\" data-col-size=\"sm\">\u5291\u91cf\u7bc4\u570d<\/td>\n<td data-col-size=\"sm\" data-start=\"1877\" data-end=\"1899\">5E11-1E16 \u96e2\u5b50\/\u5e73\u65b9\u5398\u7c73<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"h0mtjp\" data-start=\"1901\" data-end=\"1921\">\u5149\u675f\u6027\u80fd<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1923\" data-end=\"2217\">\n<thead data-start=\"1923\" data-end=\"1947\">\n<tr data-start=\"1923\" data-end=\"1947\">\n<th class=\"\" data-start=\"1923\" data-end=\"1930\" data-col-size=\"sm\">\u9805\u76ee<\/th>\n<th class=\"\" data-start=\"1930\" data-end=\"1947\" data-col-size=\"md\">\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1972\" data-end=\"2217\">\n<tr data-start=\"1972\" data-end=\"2104\">\n<td data-start=\"1972\" data-end=\"1995\" data-col-size=\"sm\">\u6700\u5927\u5149\u675f\u96fb\u6d41<\/td>\n<td data-col-size=\"md\" data-start=\"1995\" data-end=\"2104\">Ar+ \u2265 1300 \u03bcA @ \u2265220 keV<br \/>\nB+ \u2265 1000 \u03bcA @ \u2265220 keV<br \/>\nP+ \u2265 1300 \u03bcA @ \u2265220 keV<br \/>\nN+ \u2265 1000 \u03bcA @ \u2265220 keV<\/td>\n<\/tr>\n<tr data-start=\"2105\" data-end=\"2187\">\n<td data-start=\"2105\" data-end=\"2122\" data-col-size=\"sm\">\u6881\u7684\u7a69\u5b9a\u6027<\/td>\n<td data-col-size=\"md\" data-start=\"2122\" data-end=\"2187\">\u2264 15% \/ \u5c0f\u6642 (\u5149\u675f\u4e2d\u65b7\u548c\u8d77\u5f27 \u2264 \u6bcf\u5c0f\u6642 1 \u6b21)<\/td>\n<\/tr>\n<tr data-start=\"2188\" data-end=\"2217\">\n<td data-start=\"2188\" data-end=\"2207\" data-col-size=\"sm\">\u5149\u675f\u5e73\u884c\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2207\" data-end=\"2217\">\u2264 0.2\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"ieoahx\" data-start=\"2219\" data-end=\"2244\">\u690d\u5165\u7cbe\u78ba\u5ea6<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2246\" data-end=\"2436\">\n<thead data-start=\"2246\" data-end=\"2270\">\n<tr data-start=\"2246\" data-end=\"2270\">\n<th class=\"\" data-start=\"2246\" data-end=\"2253\" data-col-size=\"sm\">\u9805\u76ee<\/th>\n<th class=\"\" data-start=\"2253\" data-end=\"2270\" data-col-size=\"sm\">\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2295\" data-end=\"2436\">\n<tr data-start=\"2295\" data-end=\"2327\">\n<td data-start=\"2295\" data-end=\"2317\" data-col-size=\"sm\">\u690d\u5165\u89d2\u5ea6\u7bc4\u570d<\/td>\n<td data-col-size=\"sm\" data-start=\"2317\" data-end=\"2327\">0\u00b0-45\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2328\" data-end=\"2355\">\n<td data-start=\"2328\" data-end=\"2345\" data-col-size=\"sm\">\u89d2\u5ea6\u7cbe\u78ba\u5ea6<\/td>\n<td data-col-size=\"sm\" data-start=\"2345\" data-end=\"2355\">\u2264 0.2\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2356\" data-end=\"2404\">\n<td data-start=\"2356\" data-end=\"2374\" data-col-size=\"sm\">\u5747\u4e00\u6027 (1\u03c3)<\/td>\n<td data-col-size=\"sm\" data-start=\"2374\" data-end=\"2404\">\u2264 0.5% (B+, 2E14, 150 keV)<\/td>\n<\/tr>\n<tr data-start=\"2405\" data-end=\"2436\">\n<td data-start=\"2405\" data-end=\"2426\" data-col-size=\"sm\">\u91cd\u8907\u6027 (1\u03c3)<\/td>\n<td data-col-size=\"sm\" data-start=\"2426\" data-end=\"2436\">\u2264 0.5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"1i84h7f\" data-start=\"2438\" data-end=\"2460\">\u7cfb\u7d71\u6548\u80fd<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2462\" data-end=\"2740\">\n<thead data-start=\"2462\" data-end=\"2486\">\n<tr data-start=\"2462\" data-end=\"2486\">\n<th class=\"\" data-start=\"2462\" data-end=\"2469\" data-col-size=\"sm\">\u9805\u76ee<\/th>\n<th class=\"\" data-start=\"2469\" data-end=\"2486\" data-col-size=\"md\">\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2511\" data-end=\"2740\">\n<tr data-start=\"2511\" data-end=\"2549\">\n<td data-start=\"2511\" data-end=\"2524\" data-col-size=\"sm\">\u541e\u5410\u91cf<\/td>\n<td data-col-size=\"md\" data-start=\"2524\" data-end=\"2549\">\u2265 \u6bcf\u5c0f\u6642 200 \u7247\u6676\u5713<\/td>\n<\/tr>\n<tr data-start=\"2550\" data-end=\"2580\">\n<td data-start=\"2550\" data-end=\"2565\" data-col-size=\"sm\">\u771f\u7a7a\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2565\" data-end=\"2580\">&lt; 5E-7 \u6258<\/td>\n<\/tr>\n<tr data-start=\"2581\" data-end=\"2612\">\n<td data-start=\"2581\" data-end=\"2597\" data-col-size=\"sm\">X \u5c04\u7dda\u6d29\u6f0f<\/td>\n<td data-col-size=\"md\" data-start=\"2597\" data-end=\"2612\">\u2264 0.6 \u03bcSv\/h<\/td>\n<\/tr>\n<tr data-start=\"2613\" data-end=\"2697\">\n<td data-start=\"2613\" data-end=\"2629\" data-col-size=\"sm\">\u6383\u63cf\u6a21\u5f0f<\/td>\n<td data-col-size=\"md\" data-start=\"2629\" data-end=\"2697\">\u6c34\u5e73\u975c\u96fb\u6383\u63cf + \u5782\u76f4\u6a5f\u68b0\u6383\u63cf<\/td>\n<\/tr>\n<tr data-start=\"2698\" data-end=\"2740\">\n<td data-start=\"2698\" data-end=\"2715\" data-col-size=\"sm\">\u8a2d\u5099\u5c3a\u5bf8<\/td>\n<td data-col-size=\"md\" data-start=\"2715\" data-end=\"2740\">5600 \u00d7 3300 \u00d7 2600 \u516c\u91d0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2742\" data-end=\"2745\" \/>\n<h2 data-section-id=\"1nd7jny\" data-start=\"2747\" data-end=\"2768\">\u61c9\u7528\u9818\u57df<\/h2>\n<h3 data-section-id=\"y2e8l1\" data-start=\"2770\" data-end=\"2808\">\u534a\u5c0e\u9ad4\u5143\u4ef6\u88fd\u9020<\/h3>\n<p data-start=\"2809\" data-end=\"2910\">\u7528\u65bc CMOS \u908f\u8f2f\u5143\u4ef6\u751f\u7522\uff0c\u63d0\u4f9b\u7cbe\u78ba\u7684\u647b\u96dc\u5291\u690d\u5165\uff0c\u4ee5\u5f62\u6210\u96fb\u6676\u9ad4\u3002.<\/p>\n<h3 data-section-id=\"184zlsy\" data-start=\"2912\" data-end=\"2946\">\u7a4d\u9ad4\u96fb\u8def\u88fd\u9020<\/h3>\n<p data-start=\"2947\" data-end=\"3042\">\u61c9\u7528\u65bc\u9700\u8981\u9ad8\u7cbe\u5ea6\u647b\u96dc\u63a7\u5236\u7684 LSI \u548c\u5148\u9032 IC \u88fd\u7a0b\u3002.<\/p>\n<h3 data-section-id=\"l748la\" data-start=\"3044\" data-end=\"3083\">\u6dfa\u5c64\u548c\u6df1\u5c64\u63a5\u5408\u5c64<\/h3>\n<p data-start=\"3084\" data-end=\"3172\">\u652f\u63f4\u6e90\u6975\/\u6f0f\u6975\u5de5\u7a0b\u548c\u7d50\u6df1\u63a7\u5236\u7684\u690d\u5165\u88fd\u7a0b\u3002.<\/p>\n<h3 data-section-id=\"oja97j\" data-start=\"3174\" data-end=\"3196\">\u647b\u8cea\u5de5\u7a0b<\/h3>\n<p data-start=\"3197\" data-end=\"3292\">\u900f\u904e\u7cbe\u78ba\u7684\u96e2\u5b50\u690d\u5165\uff0c\u7528\u65bc\u63a7\u5236\u77fd\u6676\u5713\u7684\u96fb\u6c23\u7279\u6027\u3002.<\/p>\n<h3 data-section-id=\"dpf9id\" data-start=\"3294\" data-end=\"3325\">\u88fd\u7a0b\u958b\u767c\u8207\u7814\u767c<\/h3>\n<p data-start=\"3326\" data-end=\"3428\">\u9069\u7528\u65bc\u534a\u5c0e\u9ad4\u88fd\u7a0b\u958b\u767c\u3001\u8a66\u7522\u53ca\u5be6\u9a57\u6027\u88dd\u7f6e\u88fd\u9020\u3002.<\/p>\n<hr data-start=\"3430\" data-end=\"3433\" \/>\n<h2 data-section-id=\"1r8frcv\" data-start=\"3435\" data-end=\"3464\">\u5e38\u898b\u554f\u984c<\/h2>\n<h3 data-section-id=\"kw7yja\" data-start=\"3466\" data-end=\"3512\">1.Ai250 \u652f\u63f4\u54ea\u4e9b\u6676\u5713\u5c3a\u5bf8<\/h3>\n<p data-start=\"3513\" data-end=\"3631\">\u8a72\u7cfb\u7d71\u652f\u63f4 6 \u540b\u548c 8 \u540b\u77fd\u6676\u5713\uff0c\u9069\u7528\u65bc\u4e3b\u6d41\u534a\u5c0e\u9ad4\u751f\u7522\u7dda\u3002.<\/p>\n<h3 data-section-id=\"1ufru2j\" data-start=\"3633\" data-end=\"3678\">2.\u7cfb\u7d71\u7684\u80fd\u91cf\u7bc4\u570d\u662f\u591a\u5c11<\/h3>\n<p data-start=\"3679\" data-end=\"3810\">\u80fd\u91cf\u7bc4\u570d\u5f9e 5 keV \u5230 250 keV\uff0c\u53ef\u652f\u63f4\u534a\u5c0e\u9ad4\u5143\u4ef6\u88fd\u9020\u7684\u6dfa\u690d\u5165\u548c\u6df1\u690d\u5165\u88fd\u7a0b\u3002.<\/p>\n<h3 data-section-id=\"ce5nbe\" data-start=\"3812\" data-end=\"3873\">3.\u7cfb\u7d71\u53ef\u63d0\u4f9b\u4f55\u7a2e\u7a0b\u5ea6\u7684\u88fd\u7a0b\u7cbe\u78ba\u5ea6<\/h3>\n<p data-start=\"3874\" data-end=\"4052\">\u7cfb\u7d71\u63d0\u4f9b 0.2\u00b0 \u4ee5\u5167\u7684\u89d2\u5ea6\u7cbe\u78ba\u5ea6\u30010.2\u00b0 \u4ee5\u5167\u7684\u5149\u675f\u5e73\u884c\u5ea6\uff0c\u4ee5\u53ca 0.5% \u4ee5\u5167\u7684\u5747\u52fb\u5ea6\u8207\u91cd\u8907\u6027\uff0c\u78ba\u4fdd\u7a69\u5b9a\u4e14\u9ad8\u7522\u91cf\u7684\u751f\u7522\u6548\u80fd\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>Ai250 (Medium Beam) \u96e2\u5b50\u690d\u5165\u7cfb\u7d71\u5c08\u70ba 6 \u540b\u548c 8 \u540b\u77fd\u6676\u5713\u534a\u5c0e\u9ad4\u88fd\u9020\u7dda\u6240\u8a2d\u8a08\u3002\u5b83\u662f\u7528\u65bc\u5148\u9032\u7a4d\u9ad4\u96fb\u8def\u88fd\u9020\u88fd\u7a0b\u7684\u4e2d\u7b49\u96fb\u6d41\u96e2\u5b50\u690d\u5165\u5668\uff0c\u63d0\u4f9b\u7a69\u5b9a\u7684\u675f\u6d41\u6027\u80fd\u3001\u9ad8\u690d\u5165\u7cbe\u5ea6\u548c\u53ef\u9760\u7684\u5291\u91cf\u63a7\u5236\u3002.<\/p>","protected":false},"featured_media":2347,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1177],"product_tag":[1189,1190,1191,1193,1178,1192,1186,1185,1188,1187],"class_list":{"0":"post-2346","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-ion-implantation-equipment","7":"product_tag-6-inch-wafer-equipment","8":"product_tag-8-inch-wafer-processing","9":"product_tag-cmos-manufacturing-equipment","10":"product_tag-high-current-ion-implantation","11":"product_tag-ion-implantation-system","12":"product_tag-lsi-process-equipment","13":"product_tag-medium-beam-ion-implanter","14":"product_tag-semiconductor-fabrication-equipment","15":"product_tag-semiconductor-implantation-machine","16":"product_tag-silicon-wafer-doping-equipment","17":"desktop-align-left","18":"tablet-align-left","19":"mobile-align-left","20":"ast-product-gallery-layout-horizontal-slider","21":"ast-product-gallery-with-no-image","22":"ast-product-tabs-layout-horizontal","24":"first","25":"instock","26":"shipping-taxable","27":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product\/2346","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/comments?post=2346"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product\/2346\/revisions"}],"predecessor-version":[{"id":2374,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product\/2346\/revisions\/2374"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media\/2347"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media?parent=2346"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product_brand?post=2346"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product_cat?post=2346"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/product_tag?post=2346"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}