{"id":2335,"date":"2026-04-21T09:54:15","date_gmt":"2026-04-21T09:54:15","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2335"},"modified":"2026-05-20T03:41:03","modified_gmt":"2026-05-20T03:41:03","slug":"ceramic-disc-cleaning-and-waxing-integrated-machine-for-semiconductor-wafer-mounting-and-pre-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/ceramic-disc-cleaning-and-waxing-integrated-machine-for-semiconductor-wafer-mounting-and-pre-processing\/","title":{"rendered":"\u7528\u65bc\u534a\u5c0e\u9ad4\u6676\u5713\u5b89\u88dd\u548c\u524d\u8655\u7406\u7684\u9676\u74f7\u5713\u7247\u6e05\u6d17\u6253\u881f\u4e00\u9ad4\u6a5f"},"content":{"rendered":"

\"\u7528\u65bc\u534a\u5c0e\u9ad4\u6676\u5713\u5b89\u88dd\u548c\u524d\u8655\u7406\u7684\u9676\u74f7\u5713\u7247\u6e05\u6d17\u6253\u881f\u4e00\u9ad4\u6a5f\"\u9676\u74f7\u5713\u7247\u6e05\u6d17\u6253\u881f\u4e00\u9ad4\u6a5f\u662f\u5c08\u70ba\u534a\u5c0e\u9ad4\u6676\u5713\u524d\u8655\u7406\u6240\u8a2d\u8a08\u7684\u9ad8\u6548\u7387\u81ea\u52d5\u5316\u7cfb\u7d71\uff0c\u5c07\u7cbe\u5bc6\u6e05\u6d17\u3001\u4e7e\u71e5\u548c\u6676\u5713\u6253\u881f\uff08\u9472\u5d4c\uff09\u6574\u5408\u5728\u55ae\u4e00\u5e73\u53f0\u4e0a\u3002.<\/p>\n

\u6b64\u8a2d\u5099\u5ee3\u6cdb\u61c9\u7528\u65bc SiC\u3001Si\u3001GaN\u3001\u85cd\u5bf6\u77f3\u548c\u5148\u9032\u9676\u74f7\u7684\u52a0\u5de5\uff0c\u53ef\u78ba\u4fdd\u5728\u7814\u78e8\u3001\u6e1b\u8584\u6216\u62cb\u5149\u88fd\u7a0b\u4e4b\u524d\uff0c\u7a69\u5b9a\u5730\u5c07\u6676\u5713\u63a5\u5408\u81f3\u8f09\u7247\u76e4\u3002\u900f\u904e\u7d50\u5408\u8d85\u97f3\u6ce2\u6e05\u6d17\u6280\u8853\u8207\u667a\u6167\u578b\u6253\u881f\u63a7\u5236\uff0c\u672c\u7cfb\u7d71\u53ef\u9054\u5230\u9ad8\u826f\u7387\uff0c\u6700\u9ad8\u53ef\u9054 99.9%\uff0c\u662f\u91cf\u7522\u53ca\u9ad8\u968e\u534a\u5c0e\u9ad4\u61c9\u7528\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/p>\n

\u6b64\u6a5f\u5668\u5177\u5099\u5168\u81ea\u52d5\u64cd\u4f5c\u53ca MES \u9023\u7dda\u529f\u80fd\uff0c\u53ef\u5927\u5e45\u63d0\u5347\u751f\u7522\u6548\u7387\u3001\u88fd\u7a0b\u4e00\u81f4\u6027\u53ca\u53ef\u8ffd\u8e64\u6027\u3002.<\/p>\n

\n

\u4e3b\u8981\u6280\u8853\u7279\u6027<\/span><\/h2>\n

\u6574\u5408\u5f0f\u6e05\u6f54\u8207\u6253\u881f\u7cfb\u7d71<\/span><\/h3>\n
    \n
  • \u7d50\u5408\u9676\u74f7\u5713\u76e4\u6e05\u6f54 + \u96d9\u6253\u881f\u7ad9<\/li>\n
  • \u4e00\u6b65\u8655\u7406\uff1a\u6e05\u6d17 \u2192 \u4e7e\u71e5 \u2192 \u6253\u881f<\/li>\n
  • \u5e73\u884c\u4f5c\u696d\u53ef\u63d0\u9ad8\u541e\u5410\u91cf<\/li>\n<\/ul>\n

    \u8d85\u9ad8\u7cbe\u5ea6\u6821\u6e96<\/span><\/h3>\n
      \n
    • CCD \u8996\u89ba\u5b9a\u4f4d\u7cfb\u7d71<\/li>\n
    • \u6821\u6e96\u7cbe\u5ea6\uff1a \u00b10.02 mm<\/li>\n
    • \u78ba\u4fdd\u7cbe\u78ba\u7684\u6676\u5713\u653e\u7f6e\u548c\u63a5\u5408\u54c1\u8cea<\/li>\n<\/ul>\n

      \u53ef\u63a7\u881f\u6c89\u7a4d<\/span><\/h3>\n
        \n
      • \u881f\u91cf\uff1a\u6bcf\u7247 0.8 \u514b \u00b10.05 \u514b<\/li>\n
      • \u5747\u52fb\u5206\u4f48\u78ba\u4fdd\u7814\u78e8\u6642\u5b89\u88dd\u7a69\u5b9a<\/li>\n<\/ul>\n

        \u7a69\u5b9a\u7684\u58d3\u529b\u63a7\u5236<\/span><\/h3>\n
          \n
        • \u6c23\u58d3\u7cfb\u7d71\u53ef\u7dad\u6301 5-10 N\/cm\u00b2 \u7684\u5747\u52fb\u58d3\u529b<\/li>\n
        • \u9632\u6b62\u6676\u5713\u7ff9\u66f2\u548c\u63a5\u5408\u7f3a\u9677<\/li>\n<\/ul>\n

          \u9ad8\u826f\u7387\u8207\u88fd\u7a0b\u7a69\u5b9a\u6027<\/span><\/h3>\n
            \n
          • \u826f\u7387\u9ad8\u9054 99.9%<\/li>\n
          • \u5373\u6642\u76e3\u63a7\u8207\u81ea\u52d5\u53c3\u6578\u8abf\u6574 (\u00b13% \u516c\u5dee)<\/li>\n<\/ul>\n
            \n

            \u6280\u8853\u898f\u683c<\/span><\/h2>\n
            \n
            \n\n\n\n\n\n\n\n\n
            \u53c3\u6578<\/th>\n\u50f9\u503c<\/th>\n<\/tr>\n<\/thead>\n
            \u5c3a\u5bf8<\/td>\n7740 \u00d7 3390 \u00d7 2300 \u516c\u91d0<\/td>\n<\/tr>\n
            \u96fb\u6e90\u4f9b\u61c9\u5668<\/td>\nAC 380V\u300150Hz\u300190 kW<\/td>\n<\/tr>\n
            \u6c23\u58d3\u4f9b\u61c9<\/td>\n2 m\u00b3\/h, 0.4-0.5 MPa (\u7121\u6cb9\u4e7e\u71e5\u7a7a\u6c23)<\/td>\n<\/tr>\n
            \u4f9b\u6c34<\/td>\n2 T\/h @ 0.3 MPa\uff0c\u226512 M\u03a9-cm DI \u6c34<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
            \n

            \u5de5\u4f5c\u539f\u7406<\/span><\/h2>\n

            1.\u9676\u74f7\u76e4\u6e05\u6f54\u968e\u6bb5<\/span><\/h3>\n
              \n
            • \u8d85\u8072\u6ce2\u6e05\u6d17\u7cfb\u7d71\u53ef\u6e05\u9664\u5fae\u7c73\u7d1a\u5fae\u7c92\u548c\u6c61\u67d3\u7269<\/li>\n
            • \u4f7f\u7528\u9ad8\u7d14\u5ea6 DI \u6c34 (\u226512 M\u03a9-cm)<\/li>\n
            • \u7d50\u5408\u6c23\u5200 + \u771f\u7a7a\u4e7e\u71e5\uff0c\u78ba\u4fdd\u96f6\u6b98\u7559<\/li>\n<\/ul>\n

              2.\u81ea\u52d5\u4e0a\u881f\u88fd\u7a0b<\/span><\/h3>\n
                \n
              • \u8996\u89ba\u7cfb\u7d71\u5075\u6e2c\u5149\u789f\u5ea7\u6a19<\/li>\n
              • \u53ef\u7a0b\u5f0f\u9ede\u81a0\u982d\u53ef\u5857\u4e0a\u5747\u52fb\u7684\u881f\u5c64<\/li>\n
              • \u6676\u5713\u5728\u53d7\u63a7\u58d3\u529b\u689d\u4ef6\u4e0b\u5b89\u88dd<\/li>\n<\/ul>\n

                3.\u667a\u6167\u578b\u88fd\u7a0b\u63a7\u5236<\/span><\/h3>\n
                  \n
                • PLC \u7cfb\u7d71\u53ef\u540c\u6b65\u6e05\u6f54\u548c\u6253\u881f\u6a21\u7d44<\/li>\n
                • \u652f\u63f4\u4e26\u884c\u8655\u7406\uff0c\u6bcf\u5c0f\u6642\u6700\u9ad8\u53ef\u8655\u7406 30 \u5f35\u5149\u789f<\/li>\n
                • \u539a\u5ea6\u611f\u61c9\u5668\u53ef\u5373\u6642\u76e3\u63a7\u881f\u8cea\u5747\u52fb\u5ea6<\/li>\n<\/ul>\n
                  \n

                  \u7522\u80fd<\/span><\/h2>\n
                  \n
                  \n\n\n\n\n\n\n\n\n\n\n
                  \u6676\u5713\u5c3a\u5bf8<\/th>\n\u5713\u76e4\u76f4\u5f91<\/th>\n\u6578\u91cf<\/th>\n\u9031\u671f\u6642\u9593<\/th>\n<\/tr>\n<\/thead>\n
                  4 \u82f1\u5bf8<\/td>\n\u03a6485 mm<\/td>\n11 \u4ef6<\/td>\n5 \u5206\u9418\/\u789f<\/td>\n<\/tr>\n
                  4 \u82f1\u5bf8<\/td>\n\u03a6576 mm<\/td>\n13 \u4ef6<\/td>\n6 \u5206\u9418\/\u789f<\/td>\n<\/tr>\n
                  6 \u82f1\u5bf8<\/td>\n\u03a6485 mm<\/td>\n6 \u4ef6<\/td>\n3 \u5206\u9418\/\u789f<\/td>\n<\/tr>\n
                  6 \u82f1\u5bf8<\/td>\n\u03a6576 mm<\/td>\n8 \u4ef6<\/td>\n4 \u5206\u9418\/\u789f<\/td>\n<\/tr>\n
                  8 \u82f1\u5bf8<\/td>\n\u03a6485 mm<\/td>\n3 \u4ef6<\/td>\n2 \u5206\u9418\/\u5149\u789f<\/td>\n<\/tr>\n
                  8 \u82f1\u5bf8<\/td>\n\u03a6576 mm<\/td>\n5 \u4ef6<\/td>\n3 \u5206\u9418\/\u789f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
                  \n

                  \u61c9\u7528<\/span><\/h2>\n

                  \"\"\u534a\u5c0e\u9ad4\u6676\u5713\u524d\u8655\u7406<\/span><\/h3>\n
                    \n
                  • \u7814\u78e8\/\u6e1b\u8584\/\u62cb\u5149\u524d\u7684\u6676\u5713\u5b89\u88dd<\/li>\n
                  • \u9069\u7528\u65bc\n
                      \n
                    • \u77fd (Si)<\/li>\n
                    • \u78b3\u5316\u77fd (SiC)<\/li>\n
                    • \u6c2e\u5316\u93b5 (GaN)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n

                      \u5316\u5408\u7269\u534a\u5c0e\u9ad4\u88fd\u9020<\/span><\/h3>\n
                        \n
                      • GaN\u3001SiC \u529f\u7387\u5143\u4ef6<\/li>\n
                      • \u5148\u9032\u7684\u57fa\u677f\u8655\u7406<\/li>\n<\/ul>\n

                        \u5149\u5b78\u8207\u6c34\u6676\u6750\u6599<\/span><\/h3>\n
                          \n
                        • \u85cd\u5bf6\u77f3\u57fa\u677f<\/li>\n
                        • \u7cbe\u5bc6\u9676\u74f7<\/li>\n
                        • \u5149\u5b78\u5143\u4ef6<\/li>\n<\/ul>\n

                          \u5fae\u6a5f\u96fb\u7cfb\u7d71\u8207\u5148\u9032\u6750\u6599<\/span><\/h3>\n
                            \n
                          • \u5fae\u6676\u5713\u88fd\u5099<\/li>\n
                          • \u7279\u6b8a\u6750\u6599\u52a0\u5de5<\/li>\n<\/ul>\n
                            \n

                            \"\"\u4e3b\u8981\u512a\u52e2<\/span><\/h2>\n
                              \n
                            • \u9ad8\u5ea6\u6574\u5408\uff1a\u6e05\u6d17 + \u70d8\u4e7e + \u6253\u881f\u65bc\u4e00\u9ad4\u7684\u7cfb\u7d71<\/li>\n
                            • \u80fd\u6e90\u6548\u7387\uff1a\u6c34\u5faa\u74b0\u7387 >80%\uff0c\u6e1b\u5c11\u6d88\u8017<\/li>\n
                            • \u9ad8\u7522\u91cf\uff1a\u9ad8\u9054\u6bcf\u5c0f\u6642 30 \u5f35\u5149\u789f<\/li>\n
                            • \u667a\u6167\u88fd\u9020\u5c31\u7dd2\uff1a\u652f\u63f4 MES\/ERP \u6574\u5408<\/li>\n
                            • \u5f48\u6027\u5ba2\u88fd\u5316\uff1a\u652f\u63f4 \u03a6300-650 mm \u975e\u6a19\u6e96\u5149\u789f<\/li>\n
                            • \u5feb\u901f\u66f4\u63db\uff1a\u5200\u5177\u5207\u63db\u6642\u9593 <3 \u5206\u9418<\/li>\n<\/ul>\n
                              \n

                              \u8868\u73fe\u4eae\u9ede<\/span><\/h2>\n
                                \n
                              • \u881f\u8cea\u5747\u52fb\u5ea6\u504f\u5dee\uff1a\u2264\u00b13%<\/li>\n
                              • \u8017\u6c34\u91cf\uff1a \u22640.5 \u516c\u5347\/\u789f<\/li>\n
                              • \u53ef\u5b8c\u5168\u8ffd\u8e64\u7684\u81ea\u52d5\u5316\u64cd\u4f5c<\/li>\n
                              • \u7a69\u5b9a\u4e14\u53ef\u91cd\u8907\u7684\u88fd\u7a0b\u63a7\u5236<\/li>\n<\/ul>\n
                                \n

                                \u5e38\u898b\u554f\u984c<\/span><\/h2>\n

                                Q1: \u5982\u4f55\u78ba\u4fdd\u9ad8\u6536\u76ca\u7387\uff1f<\/span><\/h3>\n

                                \u5c08\u7528\u7684 CCD \u8996\u89ba\u6821\u6e96\u7cfb\u7d71\u53ef\u63d0\u4f9b \u00b10.02 mm \u7684\u5b9a\u4f4d\u7cbe\u5ea6\uff0c\u78ba\u4fdd\u4e00\u81f4\u7684\u6676\u5713\u5b89\u88dd\u54c1\u8cea\u3002.<\/p>\n

                                Q2: \u7528\u6c34\u91cf\u662f\u591a\u5c11\uff1f<\/span><\/h3>\n

                                \u7cfb\u7d71\u53ef\u9054\u5230 >80% \u7684\u6c34\u5faa\u74b0\u4f7f\u7528\u91cf\uff0c\u6bcf\u5f35\u5149\u789f\u7684\u6d88\u8017\u91cf\u4f4e\u81f3 \u2264 0.5 L\u3002.<\/p>\n

                                Q3: \u662f\u5426\u652f\u63f4\u5feb\u901f\u6676\u5713\u5c3a\u5bf8\u5207\u63db\uff1f<\/span><\/h3>\n

                                \u662f\u7684\uff0c\u667a\u6167\u578b\u593e\u5177\u5eab\u53ef\u5728 3 \u5206\u9418\u5167\u900f\u904e\u4eba\u6a5f\u4ecb\u9762\u81ea\u52d5\u5207\u63db\u6a21\u5177\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                                Ceramic Disc Cleaning and Waxing Integrated Machine \u662f\u5c08\u70ba\u534a\u5c0e\u9ad4\u6676\u5713\u524d\u8655\u7406\u800c\u8a2d\u8a08\u7684\u9ad8\u6548\u7387\u81ea\u52d5\u5316\u7cfb\u7d71\uff0c\u5c07\u7cbe\u5bc6\u6e05\u6d17\u3001\u4e7e\u71e5\u548c\u6676\u5713\u6253\u881f\uff08\u9472\u5d4c\uff09\u6574\u5408\u5728\u55ae\u4e00\u5e73\u53f0\u4e0a\u3002\u6b64\u8a2d\u5099\u5ee3\u6cdb\u61c9\u7528\u65bc SiC\u3001Si\u3001GaN\u3001\u85cd\u5bf6\u77f3\u548c\u5148\u9032\u9676\u74f7\u8655\u7406\uff0c\u53ef\u78ba\u4fdd\u5728\u7814\u78e8\u3001\u6e1b\u8584\u6216\u62cb\u5149\u88fd\u7a0b\u4e4b\u524d\uff0c\u6676\u5713\u8207\u8f09\u9ad4\u5713\u7247\u7684\u7a69\u5b9a\u63a5\u5408\u3002.<\/p>","protected":false},"featured_media":2338,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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