{"id":2327,"date":"2026-04-21T06:21:20","date_gmt":"2026-04-21T06:21:20","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2327"},"modified":"2026-04-21T06:21:21","modified_gmt":"2026-04-21T06:21:21","slug":"wafer-thinning-system-precision-back-grinding-equipment-for-si-sic-and-4-to-12-inch-semiconductor-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/wafer-thinning-system-precision-back-grinding-equipment-for-si-sic-and-4-to-12-inch-semiconductor-wafers\/","title":{"rendered":"\u9069\u7528\u65bc Si SiC \u548c 4 \u81f3 12 \u540b\u534a\u5c0e\u9ad4\u6676\u5713\u7684\u6676\u5713\u6e1b\u8584\u7cfb\u7d71\u7cbe\u5bc6\u80cc\u9762\u7814\u78e8\u8a2d\u5099"},"content":{"rendered":"

\"\u9069\u7528\u65bcWafer Thinning System \u7cbe\u5bc6\u80cc\u9762\u7814\u78e8\u8a2d\u5099\u662f\u5c08\u70ba\u5148\u9032\u534a\u5c0e\u9ad4\u88fd\u9020\u800c\u8a2d\u8a08\u7684\u9ad8\u7cbe\u5ea6\u6676\u5713\u52a0\u5de5\u89e3\u6c7a\u65b9\u6848\u3002\u5b83\u652f\u63f4 4 \u540b\u81f3 12 \u540b\u6676\u5713\uff0c\u5305\u62ec\u77fd (Si)\u3001\u78b3\u5316\u77fd (SiC)\u3001\u7837\u5316\u93b5 (GaAs)\u3001\u85cd\u5bf6\u77f3\u548c\u5176\u4ed6\u8106\u6027\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u6750\u6599\u3002.<\/p>\n

\u6b64\u7cfb\u7d71\u5c08\u70ba\u8d85\u7cbe\u5bc6\u6676\u5713\u80cc\u9762\u6e1b\u8584\u800c\u8a2d\u8a08\uff0c\u53ef\u5c07\u539a\u5ea6\u964d\u4f4e\u5230\u5fae\u7c73\u548c\u6b21\u5fae\u7c73\u7d1a\u5225\uff0c\u540c\u6642\u4fdd\u6301\u6975\u4f73\u7684\u8868\u9762\u5b8c\u6574\u6027\u3002\u5b83\u5728\u5148\u9032\u5c01\u88dd\u3001\u529f\u7387\u5143\u4ef6\u3001MEMS \u548c\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u626e\u6f14\u91cd\u8981\u89d2\u8272\u3002.<\/p>\n

\u900f\u904e\u6574\u5408\u9ad8\u525b\u6027\u7684\u6a5f\u68b0\u8a2d\u8a08\u3001\u7cbe\u5bc6\u7684 Z \u8ef8\u63a7\u5236\u53ca\u5373\u6642\u539a\u5ea6\u76e3\u63a7\uff0c\u8a72\u8a2d\u5099\u53ef\u78ba\u4fdd\u7a69\u5b9a\u4e14\u53ef\u91cd\u8907\u7684\u52a0\u5de5\u6027\u80fd\uff0c\u9069\u7528\u65bc\u5de5\u696d\u898f\u6a21\u751f\u7522\u3002.<\/p>\n

\n

\u4e3b\u8981\u6280\u8853\u7279\u6027<\/span><\/h2>\n

\u9ad8\u7cbe\u5ea6\u539a\u5ea6\u63a7\u5236<\/span><\/h3>\n
    \n
  • \u539a\u5ea6\u7cbe\u78ba\u5ea6\uff1a \u00b11 \u03bcm<\/li>\n
  • \u7e3d\u539a\u5ea6\u8b8a\u7570 (TTV)\uff1a \u22642 \u03bcm<\/li>\n
  • \u5148\u9032\u6a5f\u578b\u53ef\u5be6\u73fe\u9ad8\u9054 \u00b10.5 \u03bcm \u7684\u6b21\u5fae\u7c73\u63a7\u5236<\/li>\n<\/ul>\n

    \"\"\u5ee3\u6cdb\u7684\u6750\u6599\u76f8\u5bb9\u6027<\/span><\/h3>\n

    \u652f\u63f4\u591a\u7a2e\u534a\u5c0e\u9ad4\u548c\u8106\u6027\u6750\u6599\uff1a<\/p>\n

      \n
    • \u77fd (Si)<\/li>\n
    • \u78b3\u5316\u77fd (SiC)<\/li>\n
    • \u7837\u5316\u93b5\uff08GaAs\uff09<\/li>\n
    • \u85cd\u5bf6\u77f3 (Al\u2082O\u2083)<\/li>\n
    • \u5176\u4ed6\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u6676\u5713<\/li>\n<\/ul>\n

      \u6676\u5713\u5c3a\u5bf8\u76f8\u5bb9\u6027<\/span><\/h3>\n
        \n
      • 4 \u540b \/ 6 \u540b \/ 8 \u540b \/ 10 \u540b \/ 12 \u540b\u6676\u5713<\/li>\n
      • \u9748\u6d3b\u8655\u7406\u6a19\u6e96\u8207\u5ba2\u88fd\u5316\u57fa\u677f<\/li>\n<\/ul>\n

        \u9ad8\u7a69\u5b9a\u6027\u6a5f\u68b0\u7cfb\u7d71<\/span><\/h3>\n
          \n
        • \u9ad8\u525b\u6027\u6c23\u6d6e\u4e3b\u8ef8<\/li>\n
        • \u4f4e\u9707\u52d5\u7cbe\u5bc6\u7814\u78e8\u5e73\u53f0<\/li>\n
        • \u9032\u53e3\u6efe\u73e0\u87ba\u687f + \u7dda\u6027\u6ed1\u8ecc\u7cfb\u7d71<\/li>\n
        • \u9ad8\u7cbe\u5ea6\u4f3a\u670d\u99ac\u9054\u63a7\u5236 (0.1 \u03bcm \u89e3\u6790\u5ea6)<\/li>\n<\/ul>\n

          \u5148\u9032\u7684\u51b7\u537b\u7cfb\u7d71<\/span><\/h3>\n
            \n
          • \u6c34\u51b7\u5f0f\u4e3b\u8ef8\u7cfb\u7d71\u53ef\u78ba\u4fdd\u71b1\u7a69\u5b9a\u6027<\/li>\n
          • \u9632\u6b62\u9ad8\u901f\u78e8\u524a\u6642\u7684\u8b8a\u5f62<\/li>\n<\/ul>\n
            \n

            \u7cfb\u7d71\u7d44\u614b<\/span><\/h2>\n

            \u6676\u5713\u5207\u5272\u7cfb\u7d71\u6574\u5408\u4e86\u591a\u7a2e\u529f\u80fd\u6a21\u7d44\uff1a<\/p>\n

            1.\u7cbe\u5bc6\u7814\u78e8\u6a21\u7d44<\/span><\/h3>\n

            \u4ee5\u9ad8\u8868\u9762\u5747\u52fb\u5ea6\u57f7\u884c\u53d7\u63a7\u6750\u6599\u79fb\u9664\u3002.<\/p>\n

            2.Z \u8ef8\u7cbe\u5bc6\u63a7\u5236\u7cfb\u7d71<\/span><\/h3>\n

            \u53ef\u9032\u884c\u8d85\u7cbe\u7d30\u5782\u76f4\u8abf\u6574\uff0c\u4ee5\u9054\u5230\u4e00\u81f4\u7684\u6676\u5713\u539a\u5ea6\u3002.<\/p>\n

            3.\u539a\u5ea6\u91cf\u6e2c\u7cfb\u7d71<\/span><\/h3>\n

            \u5373\u6642\u63a5\u89f8\/\u975e\u63a5\u89f8\u6e2c\u91cf\u78ba\u4fdd\u88fd\u7a0b\u7a69\u5b9a\u6027\u3002.<\/p>\n

            4.\u771f\u7a7a\u6676\u7247\u593e\u982d<\/span><\/h3>\n

            \u5b89\u5168\u7684\u6676\u5713\u56fa\u5b9a\uff0c\u5305\u62ec\u4e0d\u898f\u5247\u6676\u5713\u7684\u5ba2\u88fd\u5316\u89e3\u6c7a\u65b9\u6848\u3002.<\/p>\n

            5.\u81ea\u52d5\u5316\u63a7\u5236\u7cfb\u7d71<\/span><\/h3>\n
              \n
            • \u5168\u81ea\u52d5 \/ \u534a\u81ea\u52d5\u64cd\u4f5c\u6a21\u5f0f<\/li>\n
            • \u64cd\u4f5c\u65e5\u8a8c\u8a18\u9304<\/li>\n
            • \u57fa\u65bc\u914d\u65b9\u7684\u88fd\u7a0b\u63a7\u5236<\/li>\n<\/ul>\n
              \n

              \"\" \u8655\u7406\u80fd\u529b<\/span><\/h2>\n

              \u8a72\u7cfb\u7d71\u5c08\u70ba\u9ad8\u6548\u80fd\u6676\u5713\u80cc\u9762\u8655\u7406\u800c\u8a2d\u8a08\uff1a<\/p>\n

                \n
              • \u77fd\u6676\u5713\u80cc\u9762\u7814\u78e8<\/li>\n
              • \u7528\u65bc\u529f\u7387\u5143\u4ef6\u7684 SiC \u6676\u5713\u6e1b\u8584<\/li>\n
              • GaN \u548c GaAs \u57fa\u677f\u6e1b\u8584<\/li>\n
              • \u85cd\u5bf6\u77f3\u6676\u5713\u7cbe\u5bc6\u8584\u5316<\/li>\n
              • \u7528\u65bc 3D \u5c01\u88dd\u7684\u8d85\u8584\u6676\u5713\u88fd\u5099<\/li>\n<\/ul>\n
                \n

                \u61c9\u7528<\/span><\/h2>\n

                1.\u529f\u7387\u534a\u5c0e\u9ad4\u5143\u4ef6<\/span><\/h3>\n

                \u7528\u65bc\u9700\u8981\u8d85\u8584\u6676\u5713\u7684 SiC MOSFET\u3001IGBT \u548c\u9ad8\u58d3\u88dd\u7f6e\u3002.<\/p>\n

                \"\"2.\u5148\u9032\u5c01\u88dd<\/span><\/h3>\n

                \u652f\u63f4\u6676\u7247\u8584\u5316\uff0c\u9069\u7528\u65bc<\/p>\n

                  \n
                • \u5012\u88dd\u6676\u7247\u5c01\u88dd<\/li>\n
                • 2.5D \/ 3D IC \u6574\u5408<\/li>\n
                • TSV (Through Silicon Via) \u88fd\u7a0b<\/li>\n<\/ul>\n

                  3.\u5316\u5408\u7269\u534a\u5c0e\u9ad4<\/span><\/h3>\n

                  \u9069\u7528\u65bc GaN\u3001GaAs \u53ca InP \u88dd\u7f6e\u88fd\u9020\u3002.<\/p>\n

                  4.LED \u8207\u5149\u96fb\u5b50<\/span><\/h3>\n

                  \u85cd\u5bf6\u77f3\u548c\u5316\u5408\u7269\u6676\u5713\u8584\u5316\uff0c\u7528\u65bc LED \u6676\u7247\u548c\u5149\u5b78\u88dd\u7f6e\u3002.<\/p>\n

                  \n

                  \u512a\u52e2<\/span><\/h2>\n
                    \n
                  • \u6210\u719f\u7a69\u5b9a\u7684\u6676\u5713\u8584\u5316\u6280\u8853<\/li>\n
                  • \u9ad8\u7cbe\u5ea6\u9032\u7d66\u78e8\u524a\u7cfb\u7d71<\/li>\n
                  • \u512a\u7570\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u63a7\u5236<\/li>\n
                  • \u9ad8 UPH (\u6a19\u6e96\u88fd\u7a0b\u9ad8\u9054\u6bcf\u5c0f\u6642 30 \u7247\u6676\u5713)<\/li>\n
                  • \u5c0d\u65bc\u8106\u6027\u548c\u786c\u8cea\u6750\u6599\u5177\u6709\u5f88\u5f37\u7684\u9069\u61c9\u6027<\/li>\n
                  • \u5168\u81ea\u52d5\u6d41\u7a0b\u6574\u5408\u80fd\u529b<\/li>\n<\/ul>\n
                    \n

                    \u8868\u73fe\u4eae\u9ede<\/span><\/h2>\n
                      \n
                    • \u6700\u5c0f\u89e3\u6790\u5ea6\uff1a0.1 \u03bcm\/s Z \u8ef8\u63a7\u5236<\/li>\n
                    • \u539a\u5ea6\u5747\u4e00\u6027\uff1a \u22641-2 \u03bcm TTV<\/li>\n
                    • \u8d85\u4f4e\u9707\u52d5\u7684\u9ad8\u901f\u4e3b\u8ef8<\/li>\n
                    • \u5373\u6642\u6d41\u7a0b\u76e3\u63a7\u8207\u8a18\u9304<\/li>\n
                    • \u76f8\u5bb9\u65bc\u7814\u767c\u8207\u5927\u91cf\u751f\u7522\u74b0\u5883<\/li>\n<\/ul>\n
                      \n

                      \u5ba2\u88fd\u5316\u9078\u9805<\/span><\/h2>\n

                      \u6211\u5011\u91dd\u5c0d\u4e0d\u540c\u7684\u5de5\u696d\u9700\u6c42\uff0c\u63d0\u4f9b\u5f48\u6027\u7684\u5ba2\u88fd\u5316\u670d\u52d9\uff1a<\/p>\n

                        \n
                      • \u5ba2\u88fd\u5316\u6676\u5713\u593e\u982d\uff08\u4e0d\u898f\u5247\u5f62\u72c0\uff09<\/li>\n
                      • \u64f4\u5927\u539a\u5ea6\u91cf\u6e2c\u7bc4\u570d\uff08\u9ad8\u9054 40 mm\uff09<\/li>\n
                      • \u88fd\u7a0b\u914d\u65b9\u5ba2\u88fd\u5316<\/li>\n
                      • \u8207\u4e0a\u6e38\/\u4e0b\u6e38\u8a2d\u5099\u7684\u81ea\u52d5\u5316\u6574\u5408<\/li>\n<\/ul>\n
                        \n

                        \u5e38\u898b\u554f\u984c<\/span><\/h2>\n

                        Q1: \u6b64\u7cfb\u7d71\u53ef\u4ee5\u8655\u7406 SiC \u6676\u5713\u55ce\uff1f<\/span><\/h3>\n

                        \u662f\u7684\uff0c\u5b83\u5c08\u9580\u91dd\u5c0d SiC \u6676\u5713\u6e1b\u8584\u548c\u80cc\u9762\u7814\u78e8\u9032\u884c\u4e86\u6700\u4f73\u5316\uff0c\u9069\u7528\u65bc\u529f\u7387\u5143\u4ef6\u61c9\u7528\u3002.<\/p>\n

                        Q2: \u53ef\u9054\u5230\u7684\u539a\u5ea6\u7cbe\u5ea6\u662f\u591a\u5c11\uff1f<\/span><\/h3>\n

                        \u6a19\u6e96\u6a5f\u578b\u53ef\u9054 \u00b11 \u03bcm\uff0c\u9ad8\u968e\u914d\u7f6e\u53ef\u9054 \u00b10.5 \u03bcm\uff0cTTV \u22641 \u03bcm\u3002.<\/p>\n

                        Q3: \u662f\u5426\u652f\u63f4\u5b8c\u5168\u81ea\u52d5\u5316\uff1f<\/span><\/h3>\n

                        \u662f\u7684\uff0c\u6839\u64da\u751f\u7522\u9700\u6c42\uff0c\u5168\u81ea\u52d5\u548c\u534a\u81ea\u52d5\u6a21\u5f0f\u5747\u53ef\u4f7f\u7528\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                        Wafer Thinning System \u7cbe\u5bc6\u80cc\u9762\u7814\u78e8\u8a2d\u5099\u662f\u5c08\u70ba\u5148\u9032\u534a\u5c0e\u9ad4\u88fd\u9020\u800c\u8a2d\u8a08\u7684\u9ad8\u7cbe\u5ea6\u6676\u5713\u52a0\u5de5\u89e3\u6c7a\u65b9\u6848\u3002\u5b83\u652f\u63f4 4 \u540b\u81f3 12 \u540b\u6676\u5713\uff0c\u5305\u62ec\u77fd (Si)\u3001\u78b3\u5316\u77fd (SiC)\u3001\u7837\u5316\u93b5 (GaAs)\u3001\u85cd\u5bf6\u77f3\u548c\u5176\u4ed6\u8106\u6027\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u6750\u6599\u3002\u6b64\u7cfb\u7d71\u5c08\u70ba\u8d85\u7cbe\u5bc6\u6676\u5713\u80cc\u9762\u524a\u8584\u800c\u8a2d\u8a08\uff0c\u53ef\u5c07\u539a\u5ea6\u964d\u4f4e\u5230\u5fae\u7c73\u548c\u6b21\u5fae\u7c73\u7d1a\u5225\uff0c\u540c\u6642\u4fdd\u6301\u6975\u4f73\u7684\u8868\u9762\u5b8c\u6574\u6027\u3002.<\/p>","protected":false},"featured_media":2330,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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