{"id":2253,"date":"2026-04-15T05:46:37","date_gmt":"2026-04-15T05:46:37","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2253"},"modified":"2026-04-20T01:22:42","modified_gmt":"2026-04-20T01:22:42","slug":"2-inch-quartz-wafer-dsp-ssp-polished-substrate-for-mems-semiconductor-optical-use","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/2-inch-quartz-wafer-dsp-ssp-polished-substrate-for-mems-semiconductor-optical-use\/","title":{"rendered":"\u9069\u7528\u65bc MEMS\u3001\u534a\u5c0e\u9ad4\u53ca\u5149\u5b78\u7528\u9014\u7684 2 \u540b\u77f3\u82f1\u6676\u5713 DSP\/SSP \u7814\u78e8\u57fa\u677f"},"content":{"rendered":"

\u7522\u54c1\u7e3d\u89bd<\/strong><\/h2>\n

\"\u9069\u7528\u65bc2 \u540b\u77f3\u82f1\u6676\u7247\u662f\u4ee5\u9ad8\u7d14\u5ea6\u4e8c\u6c27\u5316\u77fd (SiO\u2082) \u88fd\u6210\u7684\u534a\u5c0e\u9ad4\u7d1a\u57fa\u677f\u3002\u5b83\u900f\u904e CNC \u5207\u5272\u548c\u96f7\u5c04\u62cb\u5149\u7b49\u7cbe\u5bc6\u52a0\u5de5\u6280\u8853\u9054\u5230\u5fae\u7c73\u7d1a\u7684\u5e73\u9762\u5ea6\u3002\u9019\u4e9b\u6676\u5713\u7b26\u5408 SEMI \u6a19\u6e96\uff0c\u4e26\u652f\u63f4\u5c3a\u5bf8\u548c\u539a\u5ea6\u7684\u5ba2\u88fd\u5316 (\u00b10.02 mm \u516c\u5dee)\uff0c\u56e0\u6b64\u9069\u7528\u65bc\u5149\u96fb\u3001MEMS (\u5fae\u6a5f\u96fb\u7cfb\u7d71) \u548c\u534a\u5c0e\u9ad4\u5c01\u88dd\u3002.<\/p>\n

\u798f\u8000\u63d0\u4f9b\u975e\u6a19\u6e96\u5e7e\u4f55\u5f62\u72c0\u7684\u5ba2\u88fd\u5316\u751f\u7522\uff0c\u5305\u62ec\u81ea\u7531\u5f62\u72c0\u3001\u539a\u5ea6\u5206\u7d1a\uff0c\u4ee5\u53ca\u5148\u9032\u7684\u8868\u9762\u8655\u7406\uff0c\u4f8b\u5982\u6297\u53cd\u5c04 (AR) \u5857\u5c64\u548c\u758f\u6c34\u819c\u3002\u5168\u88fd\u7a0b\u54c1\u8cea\u63a7\u5236\u53ef\u78ba\u4fdd\u7e3d\u539a\u5ea6\u8b8a\u5316 (TTV) <0.005 mm\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6 Ra <1.5 nm\u3002\u5c0f\u6279\u91cf\u539f\u578b\u88fd\u4f5c\uff08\u6700\u5c11 10 \u4ef6\uff09\u548c\u5feb\u901f\u4ea4\u8ca8\u9078\u9805\u9069\u7528\u65bc\u6642\u9593\u7dca\u8feb\u7684\u5c08\u6848\u3002.<\/p>\n

\u898f\u683c<\/strong><\/h1>\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u53c3\u6578<\/th>\n\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n
\u76f4\u5f91<\/td>\n2 \u540b (50.8 \u516c\u91d0)<\/td>\n<\/tr>\n
\u539a\u5ea6\u7bc4\u570d<\/td>\n0.1 mm - 1.0 mm<\/td>\n<\/tr>\n
\u6750\u6599\u7d14\u5ea6<\/td>\n\u226599.99%<\/td>\n<\/tr>\n
\u8868\u9762\u7c97\u5ea6 (Ra)<\/td>\n\u22645 nm<\/td>\n<\/tr>\n
\u7e3d\u539a\u5ea6\u8b8a\u5316<\/td>\n\u226410 \u03bcm<\/td>\n<\/tr>\n
\u900f\u5c04\u7387 (@193 nm)<\/td>\n>90%<\/td>\n<\/tr>\n
\u71b1\u81a8\u8139\u4fc2\u6578<\/td>\n~0.55\u00d710-\u2076\/\u00b0C<\/td>\n<\/tr>\n
\u8edf\u5316\u9ede<\/td>\n~1665\u00b0C<\/td>\n<\/tr>\n
\u5305\u88dd<\/td>\n100 \u7d1a\u7121\u5875\u5ba4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n
\u4e3b\u8981\u7279\u6027<\/strong><\/div>\n<\/div>\n

1 \u5149\u5b78\u5353\u8d8a<\/p>\n

    \n
  • \n

    \u5ee3\u8b5c\u900f\u5c04\u7387\uff1a\u7d2b\u5916\u7dda\u7bc4\u570d (185-3500 \u5948\u7c73) \u5167 >90%\uff0c\u5177\u6709\u512a\u7570\u7684\u77ed\u6ce2\u7d2b\u5916\u7dda\u6548\u80fd (185 \u5948\u7c73)\u3002.\"2<\/p>\n<\/li>\n

  • \n

    \u4f4e\u71b1\u81a8\u8139\uff1aCTE ~0.52\u00d710-\u2076\/\u00b0C (5-35\u00b0C)\uff0c\u53ef\u627f\u53d7\u9ad8\u9054 1100\u00b0C \u7684\u9577\u671f\u6eab\u5ea6\u548c 1450\u00b0C \u7684\u77ed\u671f\u66b4\u9732\u3002.<\/p>\n<\/li>\n<\/ul>\n

    2 \u6a5f\u68b0\u548c\u5316\u5b78\u7a69\u5b9a\u6027<\/p>\n

      \n
    • \n

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    • \n

      \u8010\u8150\u8755\u6027\uff1a\u8010\u9178\u6027\u6bd4\u9676\u74f7\u9ad8 30 \u500d\uff0c\u9069\u7528\u65bc\u56b4\u82db\u7684\u5316\u5b78\u74b0\u5883\u3002.<\/p>\n<\/li>\n<\/ul>\n

      3 \u96fb\u6c23\u7d55\u7de3<\/p>\n

        \n
      • \n

        \u96fb\u963b\u7387\u8d85\u904e 10\u00b9\u2078 \u03a9-cm\uff0c\u9ad8\u983b\u4ecb\u8cea\u640d\u8017\u4f4e\uff0c\u662f RF \u96fb\u8def\u548c\u611f\u6e2c\u5668\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/p>\n<\/li>\n<\/ul>\n

        \u4e3b\u8981\u61c9\u7528<\/strong><\/h1>\n

        1 \u534a\u5c0e\u9ad4\u88fd\u9020<\/p>\n

          \n
        • \n

          \u7528\u65bc CMOS \u5f71\u50cf\u611f\u6e2c\u5668\u548c RFID \u6676\u7247\u5c01\u88dd\u7684\u57fa\u677f\uff0c\u652f\u63f4\u6676\u5713\u7d1a\u5c01\u88dd (WLP)\uff0c\u4ee5\u9054\u5230\u66f4\u9ad8\u7684\u6574\u5408\u5ea6\u3002.<\/p>\n<\/li>\n

        • \n

          \u78ba\u4fdd\u5fae\u578b\u5143\u4ef6\u7d50\u69cb\u7a69\u5b9a\u6027\u7684 MEMS \u88dd\u7f6e\u57fa\u677f (\u4f8b\u5982\u58d3\u529b\u611f\u6e2c\u5668\u3001\u52a0\u901f\u5ea6\u8a08)\u3002.<\/p>\n<\/li>\n<\/ul>\n

          2 \u5149\u96fb\u7cfb\u7d71<\/p>\n

            \n
          • \n

            UV \u96f7\u5c04\u7a97\u548c\u5149\u7e96\u901a\u8a0a\u8026\u5408\u5668\uff0c\u5229\u7528\u512a\u7570\u7684 UV \u7a7f\u900f\u6027\u3002.<\/p>\n<\/li>\n

          • \n

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            3 \u91ab\u7642\u8207\u7814\u7a76<\/p>\n

              \n
            • \n

              \u7528\u65bc\u5167\u8996\u93e1\u6210\u50cf\u7cfb\u7d71\u7684\u9ad8\u6eab\u5149\u5b78\u5143\u4ef6\u3002.<\/p>\n<\/li>\n

            • \n

              \u5be6\u9a57\u5ba4\u53cd\u61c9\u5668\u7684\u8010\u71b1\u89c0\u5bdf\u7a97\u3002.<\/p>\n<\/li>\n<\/ul>\n

              4 \u584a\u5c08\u7528\u77f3\u82f1\u7a97\u53e3\u677f<\/p>\n

                \n
              • \n

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              • \n

                \u659c\u5207\u7a97\u53e3\u53ef\u5c07\u53cd\u5c04\u640d\u5931\u964d\u81f3\u6700\u4f4e\u3002.<\/p>\n<\/li>\n

              • \n

                \u9069\u7528\u65bc\u591a\u611f\u6e2c\u5668\u6574\u5408\u7684\u901a\u5b54\u8996\u7a97\u3002.<\/p>\n<\/li>\n

              • \n

                \u5feb\u901f\u539f\u578b\u88fd\u4f5c\uff1a3-5 \u5929\u5b8c\u6210\u6a23\u54c1\uff0c\u5c0f\u6279\u91cf\u751f\u7522 <500 \u4ef6\uff0c\u53ef\u9078\u771f\u7a7a\u5857\u5c64 (AR \u6216\u53cd\u5c04\u5857\u5c64)\uff0c\u7528\u65bc\u7814\u7a76\u548c\u8ecd\u4e8b\u61c9\u7528\u3002.<\/p>\n<\/li>\n<\/ul>\n

                \u5e38\u898b\u554f\u984c<\/strong><\/h1>\n

                1 \u70ba\u4f55\u9078\u64c7 2 \u540b\u77f3\u82f1\u6676\u7247\uff1f<\/strong>
                2 \u540b\u77f3\u82f1\u6676\u5713\u662f\u7531\u9ad8\u7d14\u5ea6\u4e8c\u6c27\u5316\u77fd (SiO\u2082) \u88fd\u6210\u7684\u534a\u5c0e\u9ad4\u7d1a\u57fa\u677f\u3002\u5b83\u5011\u4f7f\u7528\u7cbe\u5bc6 CNC \u5207\u5272\u548c\u96f7\u5c04\u62cb\u5149\u6280\u8853\u9054\u5230\u5fae\u7c73\u7d1a\u7684\u5e73\u9762\u5ea6\u3002\u9019\u4e9b\u6676\u5713\u652f\u63f4\u5ba2\u88fd\u5316\u5c3a\u5bf8\u548c\u539a\u5ea6 (\u00b10.02 mm)\uff0c\u4e26\u7b26\u5408 SEMI \u6a19\u6e96\uff0c\u662f\u5149\u96fb\u3001MEMS \u548c\u534a\u5c0e\u9ad4\u5c01\u88dd\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/p>\n

                2 2 \u540b\u77f3\u82f1\u6676\u7247\u7684\u4e3b\u8981\u61c9\u7528\u70ba\u4f55\uff1f<\/strong>
                \u5b83\u5011\u4e3b\u8981\u7528\u65bc\u534a\u5c0e\u9ad4\u88fd\u9020\uff08CMOS \u5f71\u50cf\u611f\u6e2c\u5668\u3001RFID \u6676\u7247\u5c01\u88dd\uff09\u3001UV \u96f7\u5c04\u7a97\u53e3\u3001\u5149\u7e96\u901a\u8a0a\u8026\u5408\u5668\u4ee5\u53ca\u822a\u592a\u5149\u5b78\u5143\u4ef6\u3002\u6297\u53cd\u5c04\u5857\u5c64\u7b49\u5ba2\u88fd\u5316\u8868\u9762\u8655\u7406\u53ef\u63d0\u5347\u9ad8\u7cbe\u5bc6\u7cfb\u7d71\u7684\u6548\u80fd\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                2 \u540b\u77f3\u82f1\u6676\u7247\u662f\u4ee5\u9ad8\u7d14\u5ea6\u4e8c\u6c27\u5316\u77fd (SiO\u2082) \u88fd\u6210\u7684\u534a\u5c0e\u9ad4\u7d1a\u57fa\u677f\u3002\u5b83\u900f\u904e CNC \u5207\u5272\u548c\u96f7\u5c04\u62cb\u5149\u7b49\u7cbe\u5bc6\u52a0\u5de5\u6280\u8853\u9054\u5230\u5fae\u7c73\u7d1a\u7684\u5e73\u9762\u5ea6\u3002\u9019\u4e9b\u6676\u5713\u7b26\u5408 SEMI \u6a19\u6e96\uff0c\u4e26\u652f\u63f4\u5c3a\u5bf8\u548c\u539a\u5ea6\u7684\u5ba2\u88fd\u5316 (\u00b10.02 mm \u516c\u5dee)\uff0c\u56e0\u6b64\u9069\u7528\u65bc\u5149\u96fb\u3001MEMS (\u5fae\u6a5f\u96fb\u7cfb\u7d71) 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