{"id":2196,"date":"2026-04-14T06:34:45","date_gmt":"2026-04-14T06:34:45","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2196"},"modified":"2026-04-14T06:34:48","modified_gmt":"2026-04-14T06:34:48","slug":"2-inch-6h-n-silicon-carbide-wafer","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/2-inch-6h-n-silicon-carbide-wafer\/","title":{"rendered":"2 \u540b 6H-N \u78b3\u5316\u77fd\u6676\u5713"},"content":{"rendered":"

\"22 \u540b 6H-N \u78b3\u5316\u77fd\u6676\u5713\u662f\u5c08\u70ba\u7814\u7a76\u8207\u88dd\u7f6e\u5c64\u7d1a\u61c9\u7528\u6240\u8a2d\u8a08\u7684\u55ae\u6676\u57fa\u677f\u30026H \u591a\u6676\u578b\u5177\u6709\u516d\u89d2\u6676\u9ad4\u7d50\u69cb\uff0c\u53ef\u5728\u56b4\u82db\u7684\u689d\u4ef6\u4e0b\u63d0\u4f9b\u7a69\u5b9a\u7684\u96fb\u5c0e\u7387\u548c\u826f\u597d\u7684\u6563\u71b1\u6548\u80fd\u3002.<\/p>\n

6H-SiC \u64c1\u6709\u7d04 3.02 eV \u7684\u5e36\u9699\uff0c\u53ef\u5728\u50b3\u7d71\u77fd\u6750\u8cea\u7121\u6cd5\u904b\u4f5c\u7684\u74b0\u5883\u4e2d\u904b\u4f5c\uff0c\u7279\u5225\u662f\u5728\u9ad8\u58d3\u3001\u9ad8\u6eab\u548c\u9ad8\u983b\u7684\u689d\u4ef6\u4e0b\u3002\u9019\u4f7f\u5f97\u5b83\u9069\u7528\u65bc\u65e9\u671f\u88dd\u7f6e\u539f\u578b\u3001\u6750\u6599\u6e2c\u8a66\u548c\u7279\u6b8a\u96fb\u5b50\u5143\u4ef6\u88fd\u9020\u3002.<\/p>\n

ZMSH SiC \u6676\u5713\u63a1\u7528\u53d7\u63a7\u6676\u9ad4\u751f\u9577\u6280\u8853\u88fd\u9020\uff0c\u4ee5\u78ba\u4fdd\u4e00\u81f4\u7684\u96fb\u963b\u7387\u3001\u4f4e\u7f3a\u9677\u5bc6\u5ea6\u548c\u9ad8\u8868\u9762\u54c1\u8cea\u3002\u9019\u4e9b\u53c3\u6578\u5c0d\u65bc\u78ba\u4fdd\u53ef\u91cd\u8907\u7684\u5be6\u9a57\u7d50\u679c\u548c\u7a69\u5b9a\u7684\u88dd\u7f6e\u6548\u80fd\u81f3\u95dc\u91cd\u8981\u3002.<\/p>\n

\u4e3b\u8981\u529f\u80fd<\/h2>\n

N \u578b\u5c0e\u96fb\u7d50\u69cb<\/h3>\n

\u6676\u5713\u647b\u96dc\u70ba N \u578b\uff0c\u63d0\u4f9b\u7a69\u5b9a\u7684\u96fb\u5b50\u50b3\u5c0e\u901a\u8def\uff0c\u9069\u5408\u534a\u5c0e\u9ad4\u5143\u4ef6\u88fd\u9020\u548c\u96fb\u6c23\u7279\u6027\u5be6\u9a57\u3002.<\/p>\n

\u5bec\u5e36\u9699\u534a\u5c0e\u9ad4\u6750\u6599<\/h3>\n

SiC \u64c1\u6709 ~3.02 eV \u7684\u5e36\u9699\uff0c\u76f8\u8f03\u65bc\u77fd\u53ef\u652f\u63f4\u66f4\u9ad8\u7684\u96fb\u5834\u5f37\u5ea6\uff0c\u53ef\u5be6\u73fe\u9ad8\u96fb\u58d3\u64cd\u4f5c\u4e26\u63d0\u9ad8\u5143\u4ef6\u6548\u7387\u3002.<\/p>\n

\u9ad8\u5c0e\u71b1\u6027<\/h3>\n

SiC \u5177\u6709\u512a\u7570\u7684\u71b1\u50b3\u5c0e\u6027\uff0c\u80fd\u5920\u6709\u6548\u5730\u5f9e\u6709\u6e90\u5143\u4ef6\u5340\u57df\u6563\u71b1\u3002\u9019\u53ef\u6539\u5584\u88dd\u7f6e\u7684\u53ef\u9760\u6027\uff0c\u4e26\u5ef6\u9577\u9ad8\u529f\u7387\u61c9\u7528\u7684\u64cd\u4f5c\u58fd\u547d\u3002.<\/p>\n

\u9ad8\u6a5f\u68b0\u5f37\u5ea6<\/h3>\n

SiC \u6676\u5713\u7684\u83ab\u6c0f\u786c\u5ea6\u7d04\u70ba 9.2\uff0c\u5728\u88fd\u9020\u904e\u7a0b\u4e2d\u5177\u6709\u5f88\u5f37\u7684\u6297\u6a5f\u68b0\u640d\u50b7\u3001\u8868\u9762\u78e8\u640d\u548c\u52a0\u5de5\u61c9\u529b\u7684\u80fd\u529b\u3002.<\/p>\n

\u9ad8\u64ca\u7a7f\u96fb\u5834<\/h3>\n

\u9ad8\u64ca\u7a7f\u96fb\u5834\u5f37\u5ea6\u53ef\u4f7f\u88dd\u7f6e\u7d50\u69cb\u7dca\u6e4a\uff0c\u540c\u6642\u7dad\u6301\u9ad8\u96fb\u58d3\u8010\u53d7\u6027\uff0c\u4f7f SiC \u6210\u70ba\u5148\u9032\u529f\u7387\u96fb\u5b50\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/p>\n

\u6280\u8853\u898f\u683c<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u53c3\u6578<\/th>\n\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n
\u6750\u8cea<\/td>\n\u55ae\u6676\u78b3\u5316\u77fd<\/td>\n<\/tr>\n
\u54c1\u724c<\/td>\nZMSH<\/td>\n<\/tr>\n
\u591a\u91cd\u985e\u578b<\/td>\n6H-N<\/td>\n<\/tr>\n
\u76f4\u5f91<\/td>\n2 \u540b (50.8 \u516c\u91d0)<\/td>\n<\/tr>\n
\u539a\u5ea6<\/td>\n350 \u03bcm \/ 650 \u03bcm<\/td>\n<\/tr>\n
\u96fb\u5c0e\u985e\u578b<\/td>\nN \u578b<\/td>\n<\/tr>\n
\u8868\u9762\u8655\u7406<\/td>\nCMP \u62cb\u5149\u77fd\u9762<\/td>\n<\/tr>\n
C\u9762\u8655\u7406<\/td>\n\u6a5f\u68b0\u62cb\u5149<\/td>\n<\/tr>\n
\u8868\u9762\u7c97\u7cd9\u5ea6<\/td>\nRa < 0.2 nm (\u77fd\u9762)<\/td>\n<\/tr>\n
\u96fb\u963b\u7387<\/td>\n0.015 - 0.028 \u03a9-cm<\/td>\n<\/tr>\n
\u984f\u8272<\/td>\n\u900f\u660e \/ \u6dfa\u7da0\u8272<\/td>\n<\/tr>\n
\u5305\u88dd<\/td>\n\u55ae\u6676\u5713\u5bb9\u5668<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

6H-SiC \u7684\u6750\u6599\u7279\u6027<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u8ca1\u7522<\/th>\n\u50f9\u503c<\/th>\n<\/tr>\n<\/thead>\n
\u6676\u683c\u53c3\u6578<\/td>\na = 3.073 \u00c5, c = 15.117 \u00c5<\/td>\n<\/tr>\n
\u83ab\u6c0f\u786c\u5ea6<\/td>\n\u2248 9.2<\/td>\n<\/tr>\n
\u5bc6\u5ea6<\/td>\n3.21 g\/cm\u00b3<\/td>\n<\/tr>\n
\u71b1\u81a8\u8139\u4fc2\u6578<\/td>\n4-5 \u00d710-\u2076 \/K<\/td>\n<\/tr>\n
\u6298\u5c04\u7387 (750 \u5948\u7c73)<\/td>\nn\u2080 = 2.60, n\u2091 = 2.65<\/td>\n<\/tr>\n
\u4ecb\u96fb\u5e38\u6578<\/td>\n\u2248 9.66<\/td>\n<\/tr>\n
\u71b1\u50b3\u5c0e<\/td>\n~3.7-3.9 W\/cm-K<\/td>\n<\/tr>\n
\u5e36\u9699<\/td>\n3.02 eV<\/td>\n<\/tr>\n
\u5206\u89e3\u96fb\u5834<\/td>\n3-5 \u00d710\u2076 V\/cm<\/td>\n<\/tr>\n
\u98fd\u548c\u6f02\u79fb\u901f\u5ea6<\/td>\n2.0 \u00d710\u2075 m\/s<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u9019\u4e9b\u56fa\u6709\u7684\u7269\u7406\u7279\u6027\u4f7f 6H-SiC \u9069\u5408\u9700\u8981\u5728\u6975\u7aef\u96fb\u6c23\u548c\u71b1\u689d\u4ef6\u4e0b\u4fdd\u6301\u7a69\u5b9a\u6548\u80fd\u7684\u61c9\u7528\u3002.<\/p>\n

\"2\u88fd\u9020\u904e\u7a0b<\/h2>\n

SiC \u55ae\u6676\u77fd\u6676\u5713\u901a\u5e38\u4f7f\u7528 \u7269\u7406\u6c23\u76f8\u50b3\u8f38 (PVT) \u65b9\u6cd5<\/strong>, \u662f\u4e00\u7a2e\u6210\u719f\u7684\u5bec\u5e36\u9699\u534a\u5c0e\u9ad4\u6676\u9ad4\u751f\u9577\u5de5\u696d\u88fd\u7a0b\u3002.<\/p>\n

\u5728\u6b64\u88fd\u7a0b\u4e2d\uff0c\u9ad8\u7d14\u5ea6\u7684 SiC \u539f\u7269\u6599\u6703\u5728 2000\u00b0C \u4ee5\u4e0a\u7684\u6eab\u5ea6\u4e0b\u6607\u83ef\u3002\u84b8\u6c23\u7269\u8cea\u900f\u904e\u7cbe\u5fc3\u63a7\u5236\u7684\u71b1\u68af\u5ea6\u50b3\u9001\uff0c\u4e26\u5728\u7a2e\u5b50\u6676\u9ad4\u4e0a\u518d\u7d50\u6676\uff0c\u5f62\u6210\u55ae\u6676\u9320 (boule)\u3002\u751f\u9577\u5b8c\u6210\u5f8c\uff0c\u6676\u68d2\u6703\u7d93\u904e\u5207\u7247\u3001\u7814\u78e8\u3001\u62cb\u5149\u548c\u6e05\u6f54\u7b49\u6b65\u9a5f\u52a0\u5de5\u6210\u6676\u5713\u3002.<\/p>\n

\u5c0d\u65bc\u88dd\u7f6e\u61c9\u7528\uff0c\u6676\u5713\u53ef\u4ee5\u7d93\u904e\u984d\u5916\u7684 \u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD) \u5916\u5ef6\u751f\u9577<\/strong>, \uff0c\u53ef\u4ee5\u7cbe\u78ba\u63a7\u5236\u647b\u96dc\u6fc3\u5ea6\u548c\u5c64\u539a\u5ea6\u3002\u6b64\u6b65\u9a5f\u5c0d\u65bc MOSFET \u548c\u4e8c\u6975\u9ad4\u88fd\u9020\u4f86\u8aaa\u975e\u5e38\u91cd\u8981\u3002.<\/p>\n

\u61c9\u7528<\/h2>\n

\u96fb\u529b\u96fb\u5b50<\/h3>\n

2 \u540b 6H-N SiC \u6676\u5713\u7528\u65bc\u529f\u7387\u534a\u5c0e\u9ad4\u5143\u4ef6\u7684\u958b\u767c\u548c\u539f\u578b\u88fd\u4f5c\uff0c\u5305\u62ec\u4e8c\u6975\u9ad4\u3001MOSFET \u7d50\u69cb\u548c\u529f\u7387\u6a21\u7d44\u3002\u9019\u4e9b\u5143\u4ef6\u5c0d\u65bc\u80fd\u91cf\u8f49\u63db\u7cfb\u7d71\u548c\u96fb\u6e90\u7ba1\u7406\u96fb\u8def\u662f\u4e0d\u53ef\u6216\u7f3a\u7684\u3002.<\/p>\n

\u9ad8\u6eab\u96fb\u5b50<\/h3>\n

SiC \u6750\u6599\u5728\u9ad8\u6eab\u4e0b\u4ecd\u80fd\u7dad\u6301\u7a69\u5b9a\u7684\u96fb\u6c23\u6027\u80fd\uff0c\u56e0\u6b64\u9069\u7528\u65bc\u822a\u592a\u96fb\u5b50\u3001\u5de5\u696d\u76e3\u63a7\u7cfb\u7d71\u548c\u80fd\u6e90\u57fa\u790e\u8a2d\u65bd\u61c9\u7528\u3002.<\/p>\n

\u534a\u5c0e\u9ad4\u7814\u767c<\/h3>\n

\u7531\u65bc\u5176\u53ef\u7528\u6027\u548c\u6210\u672c\u6548\u76ca\uff0c2 \u540b\u6676\u5713\u88ab\u5ee3\u6cdb\u7528\u65bc\u5927\u5b78\u5be6\u9a57\u5ba4\u3001\u7814\u7a76\u6a5f\u69cb\u548c\u8a66\u7522\u74b0\u5883\u4e2d\u7684\u6750\u6599\u7814\u7a76\u548c\u88dd\u7f6e\u5be6\u9a57\u3002.<\/p>\n

\u5149\u96fb\u8207\u7279\u6b8a\u61c9\u7528<\/h3>\n

SiC \u5728\u67d0\u4e9b\u6ce2\u9577\u7bc4\u570d\u5167\u4e5f\u5177\u6709\u5149\u5b78\u900f\u660e\u6027\uff0c\u56e0\u6b64\u53ef\u4ee5\u7528\u65bc\u7279\u6b8a\u7684\u5149\u5b50\u8207\u5149\u96fb\u7814\u7a76\u61c9\u7528\u3002.<\/p>\n

\u512a\u52e2\"2<\/h2>\n

2 \u540b SiC \u6676\u5713\u5e73\u53f0\u70ba\u7814\u767c\u63d0\u4f9b\u4e86\u591a\u9805\u512a\u52e2\uff1a<\/p>\n

    \n
  • \u8207\u8f03\u5927\u5c3a\u5bf8\u7684\u6676\u5713\u76f8\u6bd4\uff0c\u6210\u672c\u8f03\u4f4e<\/li>\n
  • \u66f4\u5bb9\u6613\u8655\u7406\u5be6\u9a57\u5ba4\u898f\u6a21\u7684\u5be6\u9a57<\/li>\n
  • \u9069\u7528\u65bc\u5feb\u901f\u539f\u578b\u88fd\u4f5c\u8207\u88fd\u7a0b\u6e2c\u8a66<\/li>\n
  • \u7a69\u5b9a\u7684\u6676\u9ad4\u54c1\u8cea\u53ef\u63d0\u4f9b\u53ef\u91cd\u8907\u7684\u7d50\u679c<\/li>\n
  • \u91dd\u5c0d\u7814\u7a76\u9700\u6c42\u7684\u5f48\u6027\u5ba2\u88fd\u5316\u9078\u9805<\/li>\n<\/ul>\n

    \u5e38\u898b\u554f\u984c<\/h2>\n

    Q1: 6H-SiC \u548c 4H-SiC \u6709\u4f55\u4e0d\u540c\uff1f<\/h3>\n

    6H-SiC \u548c 4H-SiC \u662f\u4e0d\u540c\u7684\u591a\u6676\u578b\u30024H-SiC \u901a\u5e38\u63d0\u4f9b\u8f03\u9ad8\u7684\u96fb\u5b50\u9077\u79fb\u7387\uff0c\u4e26\u5ee3\u6cdb\u61c9\u7528\u65bc\u5546\u7528\u96fb\u6e90\u88dd\u7f6e\uff0c\u800c 6H-SiC \u5247\u63d0\u4f9b\u7a69\u5b9a\u7684\u96fb\u6c23\u884c\u70ba\uff0c\u5e38\u7528\u65bc\u7814\u7a76\u8207\u7279\u5b9a\u96fb\u5b50\u61c9\u7528\u3002.<\/p>\n

    Q2: \u6676\u5713\u6703\u7d93\u904e\u4ec0\u9ebc\u8868\u9762\u8655\u7406\uff1f<\/h3>\n

    Si \u9762\u4f7f\u7528\u5316\u5b78\u6a5f\u68b0\u62cb\u5149 (CMP) \u7814\u78e8\uff0c\u4ee5\u9054\u5230\u8d85\u5e73\u6ed1\u7684\u8868\u9762\u54c1\u8cea (Ra < 0.2 nm)\u3002C \u9762\u63a1\u7528\u6a5f\u68b0\u62cb\u5149\uff0c\u4ee5\u652f\u63f4\u4e0d\u540c\u7684\u52a0\u5de5\u9700\u6c42\u3002.<\/p>\n

    Q3: \u6676\u5713\u898f\u683c\u53ef\u4ee5\u5ba2\u88fd\u5316\u55ce\uff1f<\/h3>\n

    \u662f\u7684\u3002ZMSH \u53ef\u6839\u64da\u5ba2\u6236\u9700\u6c42\u63d0\u4f9b\u5ba2\u88fd\u5316\u9078\u9805\uff0c\u5305\u62ec\u539a\u5ea6\u3001\u647b\u96dc\u6fc3\u5ea6\u3001\u96fb\u963b\u7387\u7bc4\u570d\u53ca\u8868\u9762\u8655\u7406\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

    ZMSH \u63d0\u4f9b\u9ad8\u54c1\u8cea\u7684 2 \u540b 6H-N \u78b3\u5316\u77fd (SiC) \u6676\u5713\uff0c\u5c08\u70ba\u534a\u5c0e\u9ad4\u7814\u7a76\u3001\u96fb\u529b\u96fb\u5b50\u958b\u767c\u53ca\u9ad8\u6548\u80fd\u96fb\u5b50\u5143\u4ef6\u88fd\u9020\u800c\u8a2d\u8a08\u3002\u78b3\u5316\u77fd\u662f\u4e00\u7a2e\u5bec\u5e36\u9699\u534a\u5c0e\u9ad4\u6750\u6599\uff0c\u8207\u50b3\u7d71\u7684\u77fd (Si) \u57fa\u677f\u76f8\u6bd4\uff0c\u5177\u6709\u512a\u7570\u7684\u96fb\u6c23\u3001\u71b1\u548c\u6a5f\u68b0\u7279\u6027\u3002.<\/p>","protected":false},"featured_media":2197,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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