![\"4H-N](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6_inch_silicon_carbide_sic_wafer_for_ar_glasses_mos_sbd2-300x300.webp\")
<\/p>\n6 \u540b 4H-N \u78b3\u5316\u77fd\u6676\u5713\u662f\u5c08\u70ba\u4e0b\u4e00\u4ee3\u529f\u7387\u96fb\u5b50\u88dd\u7f6e\u8a2d\u8a08\u7684\u5bec\u5e36\u9699\u534a\u5c0e\u9ad4\u57fa\u677f\u3002\u8207\u50b3\u7d71\u7684\u77fd\u6750\u6599\u76f8\u6bd4\uff0c\u78b3\u5316\u77fd\u5177\u6709\u660e\u986f\u66f4\u9ad8\u7684\u51fb\u7a7f\u96fb\u5834\u5f37\u5ea6\u3001\u512a\u7570\u7684\u71b1\u5c0e\u7387\uff0c\u4ee5\u53ca\u5728\u9ad8\u6eab\u9ad8\u96fb\u58d3\u689d\u4ef6\u4e0b\u7684\u7a69\u5b9a\u6027\u80fd\u3002.<\/p>\n
\u7d04 3.26 eV \u7684\u5bec\u5e36\u9699\u4f7f\u4ee5 SiC \u70ba\u57fa\u790e\u7684\u5143\u4ef6\u80fd\u5920\u5728\u66f4\u9ad8\u7684\u96fb\u58d3\u548c\u958b\u95dc\u983b\u7387\u4e0b\u5de5\u4f5c\uff0c\u540c\u6642\u4fdd\u6301\u8f03\u4f4e\u7684\u80fd\u91cf\u640d\u8017\u3002\u56e0\u6b64\uff0cSiC \u5df2\u7d93\u6210\u70ba\u9ad8\u6548\u7387\u96fb\u529b\u8f49\u63db\u7cfb\u7d71\u7684\u95dc\u9375\u6750\u6599\uff0c\u5305\u62ec\u96fb\u52d5\u6c7d\u8eca\u3001\u53ef\u518d\u751f\u80fd\u6e90\u7cfb\u7d71\u548c\u5de5\u696d\u96fb\u6e90\u4f9b\u61c9\u5668\u3002.<\/p>\n
6 \u540b (150 mm \u7d1a) \u6676\u5713\u898f\u683c\u662f\u76ee\u524d SiC \u88dd\u7f6e\u88fd\u9020\u7684\u4e3b\u6d41\u5de5\u696d\u6a19\u6e96\u3002\u5b83\u5728\u751f\u7522\u826f\u7387\u3001\u88fd\u7a0b\u6210\u719f\u5ea6\u548c\u6210\u672c\u6548\u76ca\u4e4b\u9593\u9054\u5230\u4e86\u6700\u4f73\u5e73\u8861\uff0c\u56e0\u6b64\u65e2\u9069\u7528\u65bc\u5927\u91cf\u751f\u7522\uff0c\u4e5f\u9069\u7528\u65bc\u5148\u9032\u7684\u7814\u7a76\u61c9\u7528\u3002.<\/p>\n
\u7531\u65bc 4H-SiC \u5177\u6709\u826f\u597d\u7684\u6676\u9ad4\u5c0d\u7a31\u6027\u548c\u96fb\u6c23\u6027\u80fd\uff0c\u56e0\u6b64\u662f\u96fb\u529b\u96fb\u5b50\u7522\u54c1\u4e2d\u4f7f\u7528\u6700\u5ee3\u6cdb\u7684\u591a\u6676\u77fd\u985e\u578b\u3002.<\/p>\n
\u4e3b\u8981\u56fa\u6709\u7279\u6027\u5305\u62ec<\/p>\n
\u9019\u4e9b\u7279\u6027\u4f7f SiC \u6210\u70ba\u9ad8\u529f\u7387\u3001\u9ad8\u6548\u7387\u534a\u5c0e\u9ad4\u88dd\u7f6e\u7684\u91cd\u8981\u6750\u6599\u3002.<\/p>\n
![\"6](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6_inch_silicon_carbide_sic_wafer_for_ar_glasses_mos_sbd4-300x300.webp\")
\u6676\u9ad4\u751f\u9577\u8207\u88fd\u9020\u904e\u7a0b<\/h2>\nSiC \u6676\u5713\u901a\u5e38\u4f7f\u7528\u7269\u7406\u6c23\u76f8\u8f38\u9001 (PVT) \u65b9\u6cd5\u88fd\u9020\uff0c\u9019\u662f\u4e00\u7a2e\u6210\u719f\u7684\u5927\u91cf SiC \u6676\u9ad4\u751f\u9577\u5de5\u696d\u88fd\u7a0b\u3002.<\/p>\n
\u5728\u9019\u500b\u88fd\u7a0b\u4e2d\uff0c\u9ad8\u7d14\u5ea6\u7684 SiC \u7c89\u672b\u6703\u5728 2000\u00b0C \u4ee5\u4e0a\u7684\u6eab\u5ea6\u4e0b\u6607\u83ef\u3002\u6c23\u76f8\u7269\u8cea\u5728\u7cbe\u5fc3\u63a7\u5236\u7684\u71b1\u68af\u5ea6\u4e0b\u8f38\u9001\uff0c\u4e26\u5728\u7a2e\u5b50\u6676\u9ad4\u4e0a\u518d\u7d50\u6676\uff0c\u5f62\u6210\u55ae\u6676\u675f\u3002.<\/p>\n
\u6676\u9ad4\u751f\u9577\u5f8c\uff0c\u6750\u6599\u6703\u7d93\u6b77\u4ee5\u4e0b\u904e\u7a0b\uff1a<\/p>\n
\u5728\u5143\u4ef6\u88fd\u9020\u65b9\u9762\uff0c\u53ef\u63a1\u7528\u984d\u5916\u7684\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD) \u78ca\u6676\u88fd\u7a0b\uff0c\u4ee5\u5f62\u6210\u5177\u6709\u53ef\u63a7\u647b\u96dc\u6fc3\u5ea6\u548c\u539a\u5ea6\u7684\u9ad8\u54c1\u8cea\u5916\u78ca\u5c64\u3002.<\/p>\n
| \u8ca1\u7522<\/th>\n | Z \u7d1a\uff08\u751f\u7522\u7d1a\uff09<\/th>\n | D \u7d1a\uff08\u5de5\u7a0b\u7d1a\uff09<\/th>\n<\/tr>\n<\/thead>\n |
|---|---|---|
| \u76f4\u5f91<\/td>\n | 149.5 - 150.0 mm<\/td>\n | 149.5 - 150.0 mm<\/td>\n<\/tr>\n |
| \u591a\u91cd\u985e\u578b<\/td>\n | 4H-SiC<\/td>\n | 4H-SiC<\/td>\n<\/tr>\n |
| \u539a\u5ea6<\/td>\n | 350 \u00b1 15 \u00b5m<\/td>\n | 350 \u00b1 25 \u00b5m<\/td>\n<\/tr>\n |
| \u96fb\u5c0e\u985e\u578b<\/td>\n | N \u578b<\/td>\n | N \u578b<\/td>\n<\/tr>\n |
| \u96e2\u8ef8\u89d2\u5ea6<\/td>\n | 4.0\u00b0 \u671d\u5411 \u00b1 0.5\u00b0<\/td>\n | 4.0\u00b0 \u671d\u5411 \u00b1 0.5\u00b0<\/td>\n<\/tr>\n |
| \u96fb\u963b\u7387<\/td>\n | 0.015 - 0.024 \u03a9-cm<\/td>\n | 0.015 - 0.028 \u03a9-cm<\/td>\n<\/tr>\n |
| \u5fae\u7ba1\u5bc6\u5ea6<\/td>\n | \u2264 0.2 cm-\u00b2<\/td>\n | \u2264 15 cm-\u00b2<\/td>\n<\/tr>\n |
| \u8868\u9762\u7c97\u5ea6 (Ra)<\/td>\n | \u2264 1 nm<\/td>\n | \u2264 1 nm<\/td>\n<\/tr>\n |
| CMP \u7c97\u7cd9\u5ea6<\/td>\n | \u2264 0.2 nm<\/td>\n | \u2264 0.5 nm<\/td>\n<\/tr>\n |
| LTV<\/td>\n | \u2264 2.5 \u00b5m<\/td>\n | \u2264 5 \u00b5m<\/td>\n<\/tr>\n |
| TTV<\/td>\n | \u2264 6 \u00b5m<\/td>\n | \u2264 15 \u00b5m<\/td>\n<\/tr>\n |
| \u5f13\u5f62<\/td>\n | \u2264 25 \u00b5m<\/td>\n | \u2264 40 \u00b5m<\/td>\n<\/tr>\n |
| \u7ff9\u66f2<\/td>\n | \u2264 35 \u00b5m<\/td>\n | \u2264 60 \u00b5m<\/td>\n<\/tr>\n |
| \u908a\u7de3\u6392\u9664<\/td>\n | 3 mm<\/td>\n | 3 mm<\/td>\n<\/tr>\n |
| \u5305\u88dd<\/td>\n | \u76d2\u5f0f \/ \u55ae\u6676\u7247<\/td>\n | \u76d2\u5f0f \/ \u55ae\u6676\u7247<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
|
![\"6](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6_inch_silicon_carbide_sic_wafer_for_ar_glasses_mos_sbd1-300x300.webp\")
\u54c1\u8cea\u63a7\u5236\u8207\u6aa2\u9a57<\/h2>\n