{"id":2084,"date":"2026-04-03T02:35:11","date_gmt":"2026-04-03T02:35:11","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2084"},"modified":"2026-04-03T02:36:56","modified_gmt":"2026-04-03T02:36:56","slug":"split-type-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/split-type-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/","title":{"rendered":"\u7528\u65bc 6\u201d\/8\u201d \u78ca\u6676\u7247\u7684\u5206\u96e2\u5f0f\u5782\u76f4\u6c23\u6d41 SiC \u78ca\u6676\u8a2d\u5099"},"content":{"rendered":"<p data-start=\"207\" data-end=\"731\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2087 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u5206\u96e2\u5f0f\u5782\u76f4\u6c23\u6d41\u78b3\u5316\u77fd (SiC) \u78ca\u6676\u8a2d\u5099\u662f\u4e00\u5957\u5148\u9032\u7684\u78ca\u6676\u6210\u9577\u7cfb\u7d71\uff0c\u5c08\u70ba\u9ad8\u6548\u7387\u751f\u7522 6 \u540b\u548c 8 \u540b SiC \u78ca\u6676\u7247\u800c\u8a2d\u8a08\u3002\u63a1\u7528\u6a21\u7d44\u5316\u5206\u96e2\u5f0f\u67b6\u69cb\uff0c\u96fb\u6e90\u4f9b\u61c9\u5668\u3001\u6392\u6c23\u6a21\u7d44\u548c EFEM\/PM\/TM \u6a21\u7d44\u53ef\u7368\u7acb\u5b89\u88dd\u5728\u7070\u8272\u5340\u57df\u6216\u593e\u5c64\u5340\u57df\u3002\u9019\u7a2e\u5f48\u6027\u53ef\u7121\u7e2b\u6574\u5408\u81f3\u73fe\u4ee3\u6676\u5713\u5ee0\u74b0\u5883\uff0c\u540c\u6642\u900f\u904e SMIF \u6a21\u7d44\u8207\u5929\u8eca\u9023\u7d50\uff0c\u7dad\u6301\u5b8c\u5168\u7684\u81ea\u52d5\u5316\u80fd\u529b\u3002.<\/p>\n<p data-start=\"733\" data-end=\"1139\">\u8a72\u8a2d\u5099\u63a1\u7528\u5275\u65b0\u7684\u5782\u76f4\u6c23\u6d41\u8a2d\u8a08\uff0c\u7d50\u5408\u591a\u5340\u6eab\u5ea6\u5834\u63a7\u5236\uff0c\u53ef\u78ba\u4fdd\u539a\u5ea6\u5747\u52fb\u4e14\u647b\u96dc\u6fc3\u5ea6\u7a69\u5b9a\uff0c\u9019\u5c0d\u65bc\u9ad8\u6027\u80fd SiC \u529f\u7387\u5143\u4ef6\u800c\u8a00\u81f3\u95dc\u91cd\u8981\u3002\u5168\u81ea\u52d5\u5316\uff08\u5305\u62ec EFEM \u6676\u5713\u8655\u7406\u548c\u9ad8\u6eab\u6676\u5713\u50b3\u8f38\uff09\u53ef\u6e1b\u5c11\u4eba\u5de5\u5e72\u64fe\u3001\u589e\u5f37\u88fd\u7a0b\u4e00\u81f4\u6027\u4e26\u63d0\u9ad8\u4f5c\u696d\u6548\u7387\u3002.<\/p>\n<p data-start=\"1141\" data-end=\"1628\">\u8a72\u7cfb\u7d71\u652f\u63f4\u96d9\u5ba4\u9023\u7e8c\u591a\u7210\u904b\u8f49\uff0c\u6bcf\u6708\u53ef\u751f\u7522\u8d85\u904e 1100 \u7247\u6676\u5713\uff0c\u900f\u904e\u88fd\u7a0b\u6700\u4f73\u5316\uff0c\u6bcf\u6708\u53ef\u751f\u7522\u9ad8\u9054 1200 \u7247\u6676\u5713\u3002\u5176\u8a2d\u8a08\u5b8c\u5168\u76f8\u5bb9\u65bc 6 \u540b\u548c 8 \u540b\u6676\u5713\uff0c\u70ba\u904e\u6e21\u5230\u66f4\u5927\u6676\u5713\u5c3a\u5bf8\u7684\u88fd\u9020\u5546\u63d0\u4f9b\u5f48\u6027\u3002\u6b64\u5916\uff0c\u8a72\u8a2d\u5099\u80fd\u5920\u9032\u884c\u9ad8\u58d3\u539a\u819c\u751f\u9577\u548c\u6e9d\u69fd\u586b\u5145\u78ca\u6676\uff0c\u56e0\u6b64\u9069\u7528\u65bc\u5148\u9032\u7684\u9ad8\u58d3\u548c\u5927\u529f\u7387 SiC \u88dd\u7f6e\u3002.<\/p>\n<p data-start=\"1630\" data-end=\"1829\">\u5805\u56fa\u7684\u5206\u96e2\u5f0f\u7d50\u69cb\u53ef\u78ba\u4fdd\u4f4e\u7f3a\u9677\u5bc6\u5ea6\u3001\u9ad8\u826f\u7387\u3001\u7c21\u5316\u7dad\u8b77\uff0c\u4ee5\u53ca\u9577\u671f\u53ef\u9760\u6027\uff0c\u5c07\u534a\u5c0e\u9ad4\u88fd\u9020\u5546\u7684\u7e3d\u64c1\u6709\u6210\u672c\u964d\u81f3\u6700\u4f4e\u3002.<\/p>\n<h3 data-section-id=\"xj0uai\" data-start=\"1836\" data-end=\"1866\"><img decoding=\"async\" class=\"size-medium wp-image-2091 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u4e3b\u8981\u6280\u8853\u512a\u52e2<\/h3>\n<ul data-start=\"1867\" data-end=\"2438\">\n<li data-section-id=\"wpnig9\" data-start=\"1867\" data-end=\"1961\">\u5206\u96e2\u5f0f\u6a21\u7d44\u8a2d\u8a08\u53ef\u7368\u7acb\u5b89\u88dd\u96fb\u6e90\u3001\u6392\u6c23\u53ca EFEM \u6a21\u7d44<\/li>\n<li data-section-id=\"151uc73\" data-start=\"1962\" data-end=\"2039\">\u5782\u76f4\u6c23\u6d41\u5674\u6dcb\u982d\u53ef\u5728\u6574\u500b\u6676\u5713\u4e0a\u5747\u52fb\u5206\u4f48\u6c23\u9ad4<\/li>\n<li data-section-id=\"1lzu0dd\" data-start=\"2040\" data-end=\"2105\">\u591a\u5340\u6eab\u5ea6\u63a7\u5236\uff0c\u63d0\u4f9b\u7cbe\u78ba\u7684\u71b1\u80fd\u7ba1\u7406<\/li>\n<li data-section-id=\"c5t7pm\" data-start=\"2106\" data-end=\"2167\">\u9069\u7528\u65bc\u9ad8\u7522\u91cf\u751f\u7522\u7684\u96d9\u5ba4\u914d\u7f6e<\/li>\n<li data-section-id=\"rs6yfl\" data-start=\"2168\" data-end=\"2217\">\u4f4e\u7f3a\u9677\u5bc6\u5ea6\u8207\u9ad8\u826f\u7387\u6548\u80fd<\/li>\n<li data-section-id=\"1rmzhz1\" data-start=\"2218\" data-end=\"2293\">\u6574\u5408 EFEM \u548c\u5929\u8eca\u7684\u5168\u81ea\u52d5\u6676\u5713\u8655\u7406<\/li>\n<li data-section-id=\"1o0wgtg\" data-start=\"2294\" data-end=\"2334\">\u76f8\u5bb9\u65bc 6 \u540b\u548c 8 \u540b SiC \u6676\u5713<\/li>\n<li data-section-id=\"1vtm55j\" data-start=\"2335\" data-end=\"2390\">\u91dd\u5c0d\u539a\u819c\u8207\u6e9d\u69fd\u586b\u5145\u78ca\u6676\u9032\u884c\u6700\u4f73\u5316<\/li>\n<li data-section-id=\"1usg9u4\" data-start=\"2391\" data-end=\"2438\">\u9ad8\u53ef\u9760\u6027\u8207\u7c21\u5316\u7dad\u8b77<\/li>\n<\/ul>\n<h3 data-section-id=\"4v9b11\" data-start=\"2445\" data-end=\"2470\">\u88fd\u7a0b\u6548\u80fd<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2472\" data-end=\"3023\">\n<thead data-start=\"2472\" data-end=\"2501\">\n<tr data-start=\"2472\" data-end=\"2501\">\n<th class=\"\" data-start=\"2472\" data-end=\"2484\" data-col-size=\"sm\">\u53c3\u6578<\/th>\n<th class=\"\" data-start=\"2484\" data-end=\"2501\" data-col-size=\"md\">\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2532\" data-end=\"3023\">\n<tr data-start=\"2532\" data-end=\"2620\">\n<td data-start=\"2532\" data-end=\"2545\" data-col-size=\"sm\">\u541e\u5410\u91cf<\/td>\n<td data-start=\"2545\" data-end=\"2620\" data-col-size=\"md\">\u22651100 \u7247\/\u6708\uff08\u96d9\u8154\u5ba4\uff09\uff0c\u9ad8\u9054 1200 \u7247\/\u6708\uff08\u6700\u4f73\u5316\uff09<\/td>\n<\/tr>\n<tr data-start=\"2621\" data-end=\"2674\">\n<td data-start=\"2621\" data-end=\"2648\" data-col-size=\"sm\">\u6676\u5713\u5c3a\u5bf8\u76f8\u5bb9\u6027<\/td>\n<td data-col-size=\"md\" data-start=\"2648\" data-end=\"2674\">6\u201d \/ 8\u201d SiC \u78ca\u6676\u7247<\/td>\n<\/tr>\n<tr data-start=\"2675\" data-end=\"2711\">\n<td data-start=\"2675\" data-end=\"2697\" data-col-size=\"sm\">\u6eab\u5ea6\u63a7\u5236<\/td>\n<td data-col-size=\"md\" data-start=\"2697\" data-end=\"2711\">\u591a\u5340\u57df<\/td>\n<\/tr>\n<tr data-start=\"2712\" data-end=\"2771\">\n<td data-start=\"2712\" data-end=\"2729\" data-col-size=\"sm\">\u6c23\u6d41\u7cfb\u7d71<\/td>\n<td data-col-size=\"md\" data-start=\"2729\" data-end=\"2771\">\u5782\u76f4\u53ef\u8abf\u5f0f\u591a\u5340\u6c23\u6d41<\/td>\n<\/tr>\n<tr data-start=\"2772\" data-end=\"2803\">\n<td data-start=\"2772\" data-end=\"2789\" data-col-size=\"sm\">\u65cb\u8f49\u901f\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2789\" data-end=\"2803\">0-1000 rpm<\/td>\n<\/tr>\n<tr data-start=\"2804\" data-end=\"2837\">\n<td data-start=\"2804\" data-end=\"2822\" data-col-size=\"sm\">\u6700\u5927\u6210\u9577\u7387<\/td>\n<td data-col-size=\"md\" data-start=\"2822\" data-end=\"2837\">\u226560 \u03bcm\/hour<\/td>\n<\/tr>\n<tr data-start=\"2838\" data-end=\"2899\">\n<td data-start=\"2838\" data-end=\"2861\" data-col-size=\"sm\">\u539a\u5ea6\u5747\u52fb\u6027<\/td>\n<td data-col-size=\"md\" data-start=\"2861\" data-end=\"2899\">\u22642% (\u6700\u4f73\u5316 \u22641%, \u03c3\/avg, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"2900\" data-end=\"2960\">\n<td data-start=\"2900\" data-end=\"2920\" data-col-size=\"sm\">\u647b\u96dc\u5747\u52fb\u6027<\/td>\n<td data-col-size=\"md\" data-start=\"2920\" data-end=\"2960\">\u22643% (\u6700\u4f73\u5316 \u22641.5%, \u03c3\/avg, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"2961\" data-end=\"3023\">\n<td data-start=\"2961\" data-end=\"2985\" data-col-size=\"sm\">\u6bba\u624b\u7f3a\u9677\u5bc6\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2985\" data-end=\"3023\">\u22640.2 cm-\u00b2 (\u6700\u4f73\u5316\u81f3 0.01 cm-\u00b2)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"mn7c2p\" data-start=\"3030\" data-end=\"3057\">\u61c9\u7528\u5834\u666f<\/h3>\n<p data-start=\"3059\" data-end=\"3280\">\u5206\u96e2\u5f0f\u5782\u76f4\u6c23\u6d41 SiC \u78ca\u6676\u8a2d\u5099\u5ee3\u6cdb\u61c9\u7528\u65bc\u9ad8\u6548\u80fd SiC \u534a\u5c0e\u9ad4\u88fd\u9020\uff0c\u5c24\u5176\u662f\u8981\u6c42\u9ad8\u6548\u7387\u3001\u9ad8\u96fb\u58d3\u53ca\u9ad8\u6563\u71b1\u6027\u80fd\u7684\u7522\u696d\uff1a<\/p>\n<p data-start=\"3282\" data-end=\"3471\"><strong data-start=\"3282\" data-end=\"3309\">\u96fb\u52d5\u8eca (EV)<\/strong><br data-start=\"3309\" data-end=\"3312\" \/>\u7528\u65bc\u751f\u7522 SiC MOSFET \u548c\u529f\u7387\u6a21\u7d44\uff0c\u7528\u65bc\u8b8a\u63db\u5668\u3001\u8eca\u8f09\u5145\u96fb\u5668\u548c DC-DC \u8f49\u63db\u5668\uff0c\u63d0\u9ad8\u80fd\u6e90\u6548\u7387\u548c\u9a45\u52d5\u7bc4\u570d\u3002.<\/p>\n<p data-start=\"3473\" data-end=\"3622\"><strong data-start=\"3473\" data-end=\"3501\">\u53ef\u518d\u751f\u80fd\u6e90\u7cfb\u7d71<\/strong><br data-start=\"3501\" data-end=\"3504\" \/>\u61c9\u7528\u65bc\u5149\u96fb\u8b8a\u983b\u5668\u548c\u80fd\u6e90\u5132\u5b58\u7cfb\u7d71\uff0c\u53ef\u5be6\u73fe\u66f4\u9ad8\u7684\u8f49\u63db\u6548\u7387\u548c\u53ef\u9760\u6027\u3002.<\/p>\n<p data-start=\"3624\" data-end=\"3794\"><strong data-start=\"3624\" data-end=\"3656\">\u5de5\u696d\u96fb\u529b\u96fb\u5b50<\/strong><br data-start=\"3656\" data-end=\"3659\" 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data-start=\"3959\" data-end=\"4113\"><img decoding=\"async\" class=\"wp-image-2080 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png\" alt=\"\" width=\"1024\" height=\"578\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-300x169.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-768x433.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-18x10.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-600x339.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application.png 1285w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h3 data-section-id=\"6toqgg\" data-start=\"4120\" data-end=\"4129\">\u5e38\u898b\u554f\u984c<\/h3>\n<p data-start=\"4131\" 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