{"id":2077,"date":"2026-04-03T02:07:51","date_gmt":"2026-04-03T02:07:51","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2077"},"modified":"2026-04-03T02:09:04","modified_gmt":"2026-04-03T02:09:04","slug":"integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/","title":{"rendered":"\u9069\u7528\u65bc 6\u201d\/8\u201d \u78ca\u6676\u7247\u7684\u6574\u5408\u5f0f\u5782\u76f4\u6c23\u6d41 SiC \u78ca\u6676\u8a2d\u5099"},"content":{"rendered":"<p data-start=\"187\" data-end=\"641\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2079 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u6574\u5408\u5f0f\u5782\u76f4\u6c23\u6d41\u78b3\u5316\u77fd (SiC) \u78ca\u6676\u8a2d\u5099\u662f\u4e00\u5957\u5148\u9032\u7684\u78ca\u6676\u6210\u9577\u7cfb\u7d71\uff0c\u5c08\u70ba\u9ad8\u6548\u7387\u751f\u7522 6 \u540b\u548c 8 \u540b SiC \u78ca\u6676\u7247\u800c\u8a2d\u8a08\u3002\u6b64\u7cfb\u7d71\u5c08\u70ba\u6eff\u8db3\u529f\u7387\u534a\u5c0e\u9ad4\u88fd\u9020\u696d\u4e0d\u65b7\u589e\u9577\u7684\u9700\u6c42\u800c\u8a2d\u8a08\uff0c\u6574\u5408\u4e86\u7cbe\u78ba\u7684\u71b1\u80fd\u63a7\u5236\u3001\u6700\u4f73\u5316\u7684\u6c23\u6d41\u52d5\u614b\u4ee5\u53ca\u667a\u6167\u578b\u81ea\u52d5\u5316\uff0c\u5728\u5747\u52fb\u5ea6\u3001\u7522\u91cf\u4ee5\u53ca\u7f3a\u9677\u63a7\u5236\u65b9\u9762\u90fd\u6709\u5353\u8d8a\u7684\u8868\u73fe\u3002.<\/p>\n<p data-start=\"643\" data-end=\"982\">\u7cfb\u7d71\u7684\u6838\u5fc3\u662f\u5275\u65b0\u7684\u5782\u76f4\u6c23\u6d41\u5674\u6dcb\u982d\u8a2d\u8a08\uff0c\u53ef\u4f7f\u88fd\u7a0b\u6c23\u9ad4\u5747\u52fb\u5730\u5206\u5e03\u5728\u6676\u5713\u8868\u9762\u3002\u7d50\u5408\u591a\u5340\u6eab\u5ea6\u5834\u63a7\u5236\uff0c\u53ef\u78ba\u4fdd\u51fa\u8272\u7684\u539a\u5ea6\u5747\u52fb\u6027\u548c\u7a69\u5b9a\u7684\u647b\u96dc\u6fc3\u5ea6\uff0c\u9019\u5c0d\u65bc\u9ad8\u6027\u80fd SiC \u529f\u7387\u5143\u4ef6\u800c\u8a00\u81f3\u95dc\u91cd\u8981\u3002.<\/p>\n<p data-start=\"984\" data-end=\"1310\">\u8a72\u7cfb\u7d71\u63a1\u7528\u9ad8\u5ea6\u6574\u5408\u7684\u7d50\u69cb\uff0c\u900f\u904e EFEM \u7cfb\u7d71\u81ea\u52d5\u8655\u7406\u6676\u5713\uff0c\u4e26\u642d\u914d\u9ad8\u6eab\u6676\u5713\u50b3\u8f38\u6a5f\u5236\u3002\u9019\u6a23\u5c31\u80fd\u8207\u73fe\u4ee3\u534a\u5c0e\u9ad4\u88fd\u9020\u7dda\u7121\u7e2b\u6574\u5408\uff0c\u6e1b\u5c11\u4eba\u5de5\u5e72\u64fe\uff0c\u4e26\u63d0\u9ad8\u88fd\u7a0b\u4e00\u81f4\u6027\u548c\u4f5c\u696d\u6548\u7387\u3002.<\/p>\n<p data-start=\"1312\" data-end=\"1615\">\u70ba\u4e86\u652f\u63f4\u5de5\u696d\u898f\u6a21\u7684\u88fd\u9020\uff0c\u8a72\u8a2d\u5099\u63a1\u7528\u96d9\u8154\u914d\u7f6e\uff0c\u53ef\u9023\u7e8c\u9032\u884c\u591a\u7210\u64cd\u4f5c\u3002\u6bcf\u6708\u7522\u91cf\u8d85\u904e 1100 \u7247\u6676\u5713\uff0c\u900f\u904e\u88fd\u7a0b\u6700\u4f73\u5316\u53ef\u9054 1200 \u7247\u6676\u5713\uff0c\u975e\u5e38\u9069\u5408\u9ad8\u7522\u91cf\u7684\u751f\u7522\u74b0\u5883\u3002.<\/p>\n<p data-start=\"1617\" data-end=\"1971\">\u8a72\u8a2d\u5099\u8207 6 \u540b\u548c 8 \u540b SiC \u6676\u5713\u76f8\u5bb9\uff0c\u70ba\u5411\u66f4\u5927\u6676\u5713\u5c3a\u5bf8\u904e\u6e21\u7684\u88fd\u9020\u5546\u63d0\u4f9b\u4e86\u9748\u6d3b\u6027\u3002\u8a72\u8a2d\u5099\u5728\u539a\u5916\u5ef6\u5c64\u751f\u9577\u548c\u6e9d\u69fd\u586b\u5145\u5916\u5ef6\u65b9\u9762\u4e5f\u8868\u73fe\u51fa\u5353\u8d8a\u7684\u80fd\u529b\uff0c\u56e0\u6b64\u7279\u5225\u9069\u7528\u65bc\u5148\u9032\u7684\u9ad8\u58d3\u548c\u5927\u529f\u7387\u5143\u4ef6\u88fd\u9020\u3002.<\/p>\n<p data-start=\"1973\" data-end=\"2214\">\u6b64\u5916\uff0c\u6700\u4f73\u5316\u7684\u53cd\u61c9\u5668\u8a2d\u8a08\u53ef\u78ba\u4fdd\u4f4e\u7f3a\u9677\u5bc6\u5ea6\u3001\u63d0\u9ad8\u7522\u91cf\u53ca\u964d\u4f4e\u64c1\u6709\u6210\u672c\u3002\u5176\u5805\u56fa\u7684\u7d50\u69cb\u548c\u6613\u65bc\u7dad\u8b77\u7684\u8a2d\u8a08\u9032\u4e00\u6b65\u63d0\u9ad8\u4e86\u9577\u671f\u53ef\u9760\u6027\u548c\u904b\u884c\u7a69\u5b9a\u6027\u3002.<\/p>\n<h2 data-section-id=\"qpn8c9\" data-start=\"2221\" data-end=\"2252\"><span role=\"text\"><img decoding=\"async\" class=\"size-medium wp-image-2078 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u4e3b\u8981\u6280\u8853\u512a\u52e2<\/span><\/h2>\n<ul data-start=\"2254\" data-end=\"2704\">\n<li data-section-id=\"1q2t12k\" data-start=\"2254\" data-end=\"2321\">\u5782\u76f4\u6c23\u6d41\u82b1\u7051\u982d\u8a2d\u8a08\u53ef\u5747\u52fb\u5206\u4f48\u6c23\u9ad4<\/li>\n<li data-section-id=\"1lzu0dd\" data-start=\"2322\" data-end=\"2387\">\u591a\u5340\u6eab\u5ea6\u63a7\u5236\uff0c\u63d0\u4f9b\u7cbe\u78ba\u7684\u71b1\u80fd\u7ba1\u7406<\/li>\n<li data-section-id=\"1emeqzr\" data-start=\"2388\" data-end=\"2449\">\u9ad8\u7522\u91cf\u751f\u7522\u7684\u96d9\u5ba4\u914d\u7f6e<\/li>\n<li data-section-id=\"rs6yfl\" data-start=\"2450\" data-end=\"2499\">\u4f4e\u7f3a\u9677\u5bc6\u5ea6\u8207\u9ad8\u826f\u7387\u6548\u80fd<\/li>\n<li data-section-id=\"h9m4ox\" data-start=\"2500\" data-end=\"2550\">\u6574\u5408 EFEM \u7684\u81ea\u52d5\u5316\u6676\u5713\u8655\u7406<\/li>\n<li data-section-id=\"bze71o\" data-start=\"2551\" data-end=\"2594\">\u76f8\u5bb9\u65bc 6 \u540b\u548c 8 \u540b SiC \u6676\u5713<\/li>\n<li data-section-id=\"xhhop\" data-start=\"2595\" data-end=\"2655\">\u91dd\u5c0d\u539a\u5916\u5ef6\u548c\u6e9d\u69fd\u586b\u5145\u88fd\u7a0b\u9032\u884c\u512a\u5316<\/li>\n<li data-section-id=\"1a3549x\" data-start=\"2656\" data-end=\"2704\">\u9ad8\u53ef\u9760\u6027\u8207\u7c21\u5316\u7684\u7dad\u8b77<\/li>\n<\/ul>\n<h2 data-section-id=\"ca04ra\" data-start=\"2711\" data-end=\"2737\"><span role=\"text\">\u88fd\u7a0b\u6548\u80fd<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2739\" data-end=\"3287\">\n<thead data-start=\"2739\" data-end=\"2768\">\n<tr data-start=\"2739\" data-end=\"2768\">\n<th class=\"\" data-start=\"2739\" data-end=\"2751\" data-col-size=\"sm\">\u53c3\u6578<\/th>\n<th class=\"\" data-start=\"2751\" data-end=\"2768\" data-col-size=\"md\">\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2796\" data-end=\"3287\">\n<tr data-start=\"2796\" data-end=\"2884\">\n<td data-start=\"2796\" data-end=\"2809\" data-col-size=\"sm\">\u541e\u5410\u91cf<\/td>\n<td data-start=\"2809\" data-end=\"2884\" data-col-size=\"md\">\u22651100 \u7247\/\u6708\uff08\u96d9\u8154\u5ba4\uff09\uff0c\u9ad8\u9054 1200 \u7247\/\u6708\uff08\u6700\u4f73\u5316\uff09<\/td>\n<\/tr>\n<tr data-start=\"2885\" data-end=\"2938\">\n<td data-start=\"2885\" data-end=\"2912\" data-col-size=\"sm\">\u6676\u5713\u5c3a\u5bf8\u76f8\u5bb9\u6027<\/td>\n<td data-col-size=\"md\" data-start=\"2912\" data-end=\"2938\">6\u201d \/ 8\u201d SiC \u78ca\u6676\u7247<\/td>\n<\/tr>\n<tr data-start=\"2939\" data-end=\"2975\">\n<td data-start=\"2939\" data-end=\"2961\" data-col-size=\"sm\">\u6eab\u5ea6\u63a7\u5236<\/td>\n<td data-start=\"2961\" data-end=\"2975\" data-col-size=\"md\">\u591a\u5340\u57df<\/td>\n<\/tr>\n<tr data-start=\"2976\" data-end=\"3035\">\n<td data-start=\"2976\" data-end=\"2993\" data-col-size=\"sm\">\u6c23\u6d41\u7cfb\u7d71<\/td>\n<td data-start=\"2993\" data-end=\"3035\" data-col-size=\"md\">\u5782\u76f4\u53ef\u8abf\u5f0f\u591a\u5340\u6c23\u6d41<\/td>\n<\/tr>\n<tr data-start=\"3036\" data-end=\"3067\">\n<td data-start=\"3036\" data-end=\"3053\" data-col-size=\"sm\">\u65cb\u8f49\u901f\u5ea6<\/td>\n<td data-start=\"3053\" data-end=\"3067\" data-col-size=\"md\">0-1000 rpm<\/td>\n<\/tr>\n<tr data-start=\"3068\" data-end=\"3101\">\n<td data-start=\"3068\" data-end=\"3086\" data-col-size=\"sm\">\u6700\u5927\u6210\u9577\u7387<\/td>\n<td data-start=\"3086\" data-end=\"3101\" data-col-size=\"md\">\u226560 \u03bcm\/hour<\/td>\n<\/tr>\n<tr data-start=\"3102\" data-end=\"3163\">\n<td data-start=\"3102\" data-end=\"3125\" data-col-size=\"sm\">\u539a\u5ea6\u5747\u52fb\u6027<\/td>\n<td data-col-size=\"md\" data-start=\"3125\" data-end=\"3163\">\u22642% (\u6700\u4f73\u5316 \u22641%, \u03c3\/avg, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"3164\" data-end=\"3224\">\n<td data-start=\"3164\" data-end=\"3184\" data-col-size=\"sm\">\u647b\u96dc\u5747\u52fb\u6027<\/td>\n<td data-col-size=\"md\" data-start=\"3184\" data-end=\"3224\">\u22643% (\u6700\u4f73\u5316 \u22641.5%, \u03c3\/avg, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"3225\" data-end=\"3287\">\n<td data-start=\"3225\" data-end=\"3249\" data-col-size=\"sm\">\u6bba\u624b\u7f3a\u9677\u5bc6\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"3249\" data-end=\"3287\">\u22640.2 cm-\u00b2 (\u6700\u4f73\u5316\u81f3 0.01 cm-\u00b2)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h2 data-section-id=\"1w46w82\" data-start=\"3294\" data-end=\"3322\"><span role=\"text\">\u61c9\u7528\u5834\u666f<\/span><\/h2>\n<p data-start=\"3324\" data-end=\"3514\">\u672c\u8a2d\u5099\u5ee3\u6cdb\u61c9\u7528\u65bc\u751f\u7522\u5148\u9032\u4ee5 SiC \u70ba\u57fa\u790e\u7684\u534a\u5c0e\u9ad4\u88dd\u7f6e\uff0c\u5c24\u5176\u662f\u9700\u8981\u9ad8\u6548\u7387\u3001\u9ad8\u96fb\u58d3\u548c\u9ad8\u6563\u71b1\u6027\u80fd\u7684\u7522\u696d\uff1a<\/p>\n<ul data-start=\"3516\" data-end=\"4364\">\n<li data-section-id=\"qrtaas\" data-start=\"3516\" data-end=\"3707\">\u96fb\u52d5\u8eca (EV)<br data-start=\"3545\" data-end=\"3548\" \/>\u7528\u65bc\u751f\u7522 SiC MOSFET \u548c\u529f\u7387\u6a21\u7d44\uff0c\u7528\u65bc\u8b8a\u63db\u5668\u3001\u8eca\u8f09\u5145\u96fb\u5668\u548c DC-DC \u8f49\u63db\u5668\uff0c\u63d0\u9ad8\u80fd\u6e90\u6548\u7387\u548c\u9a45\u52d5\u7bc4\u570d\u3002.<\/li>\n<li data-section-id=\"1j97evh\" data-start=\"3709\" data-end=\"3867\">\u53ef\u518d\u751f\u80fd\u6e90\u7cfb\u7d71<br data-start=\"3739\" data-end=\"3742\" \/>\u61c9\u7528\u65bc\u5149\u96fb\u8b8a\u983b\u5668\u548c\u80fd\u6e90\u5132\u5b58\u7cfb\u7d71\uff0c\u53ef\u5be6\u73fe\u66f4\u9ad8\u7684\u8f49\u63db\u6548\u7387\u548c\u7cfb\u7d71\u53ef\u9760\u6027\u3002.<\/li>\n<li data-section-id=\"8pfhmh\" data-start=\"3869\" data-end=\"4041\">\u5de5\u696d\u96fb\u529b\u96fb\u5b50<br data-start=\"3903\" data-end=\"3906\" \/>\u9069\u7528\u65bc\u5927\u529f\u7387\u99ac\u9054\u9a45\u52d5\u5668\u3001\u5de5\u696d\u81ea\u52d5\u5316\u7cfb\u7d71\uff0c\u4ee5\u53ca\u9700\u8981\u7a69\u5b9a\u4e14\u9ad8\u6548\u904b\u4f5c\u7684\u96fb\u6e90\u4f9b\u61c9\u5668\u3002.<\/li>\n<li data-section-id=\"frfj8s\" data-start=\"4043\" data-end=\"4206\">\u8ecc\u9053\u4ea4\u901a\u8207\u96fb\u7db2<br data-start=\"4075\" data-end=\"4078\" 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