{"id":2048,"date":"2026-04-01T05:59:16","date_gmt":"2026-04-01T05:59:16","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2048"},"modified":"2026-04-01T06:04:59","modified_gmt":"2026-04-01T06:04:59","slug":"microfluidic-laser-equipment-for-high-precision-semiconductor-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/microfluidic-laser-equipment-for-high-precision-semiconductor-wafer-processing\/","title":{"rendered":"\u7528\u65bc\u9ad8\u7cbe\u5ea6\u534a\u5c0e\u9ad4\u6676\u5713\u52a0\u5de5\u7684\u5fae\u6d41\u9ad4\u96f7\u5c04\u8a2d\u5099"},"content":{"rendered":"

\"\"\u5fae\u6d41\u6fc0\u5149\u8a2d\u5099\u5229\u7528\u5148\u9032\u7684\u5fae\u5674\u5c04\u6fc0\u5149\u6280\u8853\uff0c\u70ba\u534a\u5c0e\u9ad4\u6676\u5713\u548c\u5176\u4ed6\u786c\u3001\u8106\u6216\u5bec\u5e36\u9699\u6750\u6599\u63d0\u4f9b\u9ad8\u7cbe\u5ea6\u3001\u4f4e\u71b1\u640d\u50b7\u7684\u52a0\u5de5\u3002\u900f\u904e\u7d50\u5408\u4e9e\u5fae\u7c73\u6c34\u5c04\u6d41\u8207\u96f7\u5c04\u5149\u675f\uff0c\u7cfb\u7d71\u53ef\u5c07\u96f7\u5c04\u80fd\u91cf\u7cbe\u78ba\u5c0e\u5f15\u81f3\u5de5\u4ef6\u8868\u9762\uff0c\u540c\u6642\u6c34\u6d41\u53ef\u6301\u7e8c\u51b7\u537b\u4e26\u6e05\u9664\u788e\u5c51\u3002\u6b64\u6280\u8853\u53ef\u6709\u6548\u89e3\u6c7a\u50b3\u7d71\u96f7\u5c04\u8207\u6a5f\u68b0\u52a0\u5de5\u5e38\u898b\u7684\u96e3\u984c\uff0c\u5305\u62ec\u71b1\u640d\u50b7\u3001\u5fae\u88c2\u7e2b\u3001\u6c61\u67d3\u3001\u9310\u5ea6\u8207\u8b8a\u5f62\u3002.<\/p>\n

\"\"\u4e3b\u8981\u529f\u80fd<\/strong><\/span><\/h2>\n
    \n
  • \u96f7\u5c04\u985e\u578b\uff1a<\/strong> \u4e8c\u6975\u9ad4\u9a45\u52d5\u56fa\u614b Nd:YAG \u96f7\u5c04\uff0c\u6ce2\u9577 532\/1064 nm\uff0c\u8108\u885d\u5bec\u5ea6 \u03bcs\/ns\uff0c\u5e73\u5747\u529f\u7387 10-200 W<\/li>\n
  • \u6c34\u5200\u7cfb\u7d71\uff1a<\/strong> \u4f4e\u58d3\u3001\u53bb\u96e2\u5b50\u904e\u6ffe\u6c34\uff1b\u8d85\u7d30\u5fae\u5674\u5c04\u5668\u5728 300 \u5df4\u58d3\u529b\u4e0b\u50c5\u6d88\u8017 1 L\/h\uff0c\u4f5c\u7528\u529b\u53ef\u5ffd\u7565\u4e0d\u8ba1 (<0.1 N)<\/li>\n
  • \u5674\u5634\uff1a<\/strong> \u85cd\u5bf6\u77f3\u6216\u947d\u77f3\uff0c\u76f4\u5f91 30-150 \u03bcm\uff0c\u7528\u65bc\u7cbe\u78ba\u7684\u96f7\u5c04\u5c0e\u5f15<\/li>\n
  • \u8f14\u52a9\u7cfb\u7d71\uff1a<\/strong> \u9ad8\u58d3\u5e6b\u6d66\u8207\u6c34\u8655\u7406\u55ae\u5143\u78ba\u4fdd\u7a69\u5b9a\u7684\u5674\u5c04\u6027\u80fd<\/li>\n
  • \u7cbe\u78ba\u5ea6\uff1a<\/strong> \u5b9a\u4f4d\u7cbe\u5ea6 \u00b15 \u03bcm\uff0c\u91cd\u8907\u5b9a\u4f4d\u7cbe\u5ea6 \u00b12 \u03bcm<\/li>\n
  • \u8655\u7406\u80fd\u529b\uff1a<\/strong> \u8868\u9762\u7c97\u7cd9\u5ea6 Ra \u22641.2-1.6 \u03bcm\uff0c\u7dda\u6027\u5207\u5272\u901f\u5ea6\u226550 mm\/s\uff0c\u958b\u53e3\u901f\u5ea6\u22651.25 mm\/s\uff0c\u5713\u5468\u5207\u5272\u22656 mm\/s<\/li>\n<\/ul>\n

    \u6280\u8853\u898f\u683c<\/strong><\/span><\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
    \u898f\u683c<\/th>\n\u9078\u9805 1<\/th>\n\u9078\u9805 2<\/th>\n<\/tr>\n<\/thead>\n
    \u53f0\u9762\u9ad4\u7a4d (mm)<\/td>\n300\u00d7300\u00d7150<\/td>\n400\u00d7400\u00d7200<\/td>\n<\/tr>\n
    \u7dda\u6027\u8ef8 XY<\/td>\n\u7dda\u6027\u99ac\u9054<\/td>\n\u7dda\u6027\u99ac\u9054<\/td>\n<\/tr>\n
    \u7dda\u6027\u8ef8 Z<\/td>\n150<\/td>\n200<\/td>\n<\/tr>\n
    \u5b9a\u4f4d\u7cbe\u5ea6 (\u03bcm)<\/td>\n\u00b15<\/td>\n\u00b15<\/td>\n<\/tr>\n
    \u91cd\u8907\u5b9a\u4f4d\u7cbe\u5ea6 (\u03bcm)<\/td>\n\u00b12<\/td>\n\u00b12<\/td>\n<\/tr>\n
    \u52a0\u901f\u5ea6 (G)<\/td>\n1<\/td>\n0.29<\/td>\n<\/tr>\n
    \u6578\u503c\u63a7\u5236<\/td>\n3 \u8ef8 \/ 3+1 \/ 3+2 \u8ef8<\/td>\n3 \u8ef8 \/ 3+1 \/ 3+2 \u8ef8<\/td>\n<\/tr>\n
    \u6ce2\u9577 (nm)<\/td>\n532\/1064<\/td>\n532\/1064<\/td>\n<\/tr>\n
    \u984d\u5b9a\u529f\u7387 (W)<\/td>\n50\/100\/200<\/td>\n50\/100\/200<\/td>\n<\/tr>\n
    \u6c34\u5c04\u6d41\u58d3\u529b (\u5df4)<\/td>\n50-100<\/td>\n50-600<\/td>\n<\/tr>\n
    \u5674\u5634\u5c3a\u5bf8 (\u03bcm)<\/td>\n30-150<\/td>\n30-150<\/td>\n<\/tr>\n
    \u6a5f\u5668\u5c3a\u5bf8 (mm)<\/td>\n1445\u00d71944\u00d72260<\/td>\n1700\u00d71500\u00d72120<\/td>\n<\/tr>\n
    \u91cd\u91cf (T)<\/td>\n2.5<\/td>\n3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    \u61c9\u7528<\/strong><\/span><\/h2>\n
      \n
    1. \u6676\u5713\u5207\u5272<\/strong>\n
        \n
      • \u6750\u6599\uff1a\u77fd (Si)\u3001\u78b3\u5316\u77fd (SiC)\u3001\u6c2e\u5316\u93b5 (GaN) \u53ca\u5176\u4ed6\u786c\u8106\u6676\u5713<\/li>\n
      • \u512a\u9ede\uff1a\u53d6\u4ee3\u50b3\u7d71\u947d\u77f3\u5200\u7247\u3001\u964d\u4f4e\u908a\u7de3\u7834\u640d (20 \u03bcm)\u3001\u5207\u5272\u901f\u5ea6\u63d0\u9ad8 30%\u3001\u53ef\u5c0d\u8d85\u8584\u6676\u5713 (<50 \u03bcm) \u9032\u884c\u96b1\u5f62\u5207\u5272<\/li>\n<\/ul>\n<\/li>\n
      • \u6676\u7247\u947d\u5b54\u8207\u5fae\u5b54\u52a0\u5de5<\/strong>\n
          \n
        • \u61c9\u7528\uff1a\u7845\u901a\u5b54 (TSV) \u947d\u5b54\u3001\u529f\u7387\u5143\u4ef6\u7684\u71b1\u5fae\u5b54\u9663\u5217<\/li>\n
        • \u7279\u9ede\uff1a\u5b54\u5f91 10-200 \u03bcm\uff0c\u6df1\u5bec\u6bd4\u9ad8\u9054 10:1\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6 Ra <0.5 \u03bcm<\/li>\n<\/ul>\n<\/li>\n
        • \u5148\u9032\u5c01\u88dd<\/strong>\n
            \n
          • \u61c9\u7528\uff1aRDL \u958b\u7a97\u3001\u6676\u5713\u7d1a\u5c01\u88dd (Fan-Out WLP)<\/li>\n
          • \u512a\u9ede\uff1a\u907f\u514d\u6a5f\u68b0\u61c9\u529b\uff0c\u63d0\u9ad8\u826f\u7387 >99.5%<\/li>\n<\/ul>\n<\/li>\n
          • \u5316\u5408\u7269\u534a\u5c0e\u9ad4\u88fd\u7a0b<\/strong>\n
              \n
            • \u6750\u6599\uff1a\u6c2e\u5316\u93b5\u3001\u78b3\u5316\u77fd\u53ca\u5176\u4ed6\u5bec\u5e36\u9699\u534a\u5c0e\u9ad4<\/li>\n
            • \u529f\u80fd\uff1a\u9598\u6975\u7f3a\u53e3\u8755\u523b\u3001\u96f7\u5c04\u9000\u706b\u3001\u7cbe\u6e96\u80fd\u91cf\u63a7\u5236\u4ee5\u9632\u6b62\u71b1\u5206\u89e3<\/li>\n<\/ul>\n<\/li>\n
            • \u7f3a\u9677\u4fee\u5fa9\u8207\u5fae\u8abf<\/strong>\n
                \n
              • \u61c9\u7528\uff1a\u8a18\u61b6\u9ad4\u96fb\u8def\u7684\u96f7\u5c04\u7194\u63a5\u3001\u5149\u5b78\u611f\u6e2c\u5668\u7684\u5fae\u900f\u93e1\u9663\u5217\u8abf\u6574<\/li>\n
              • \u7cbe\u78ba\u5ea6\uff1a\u80fd\u91cf\u63a7\u5236 \u00b11%\uff0c\u4fee\u5fa9\u5b9a\u4f4d\u8aa4\u5dee <0.1 \u03bcm<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n

                \"\"<\/p>\n

                \u91cd\u9ede\u8207\u512a\u52e2<\/strong><\/span><\/h2>\n
                  \n
                • \u51b7\u51cd\u3001\u4e7e\u6de8\u53ca\u53d7\u63a7\u7684\u52a0\u5de5\u904e\u7a0b\uff0c\u53ef\u5c07\u71b1\u640d\u3001\u5fae\u88c2\u7e2b\u53ca\u9310\u5ea6\u6e1b\u81f3\u6700\u4f4e<\/li>\n
                • \u8d85\u7d30\u6c34\u5c04\u6d41\u53ef\u78ba\u4fdd\u7cbe\u78ba\u7684\u96f7\u5c04\u5c0e\u5f15\u8207\u9ad8\u6548\u7387\u7684\u788e\u5c51\u6e05\u9664<\/li>\n
                • \u9069\u7528\u65bc\u786c\u8cea\u3001\u8106\u6027\u548c\u900f\u660e\u6750\u6599\uff0c\u4f8b\u5982 SiC\u3001GaN\u3001\u91d1\u525b\u77f3\u3001LTCC \u548c\u5149\u96fb\u6676\u9ad4<\/li>\n
                • \u8207\u9ad8\u7cbe\u5bc6\u534a\u5c0e\u9ad4\u88fd\u9020\u3001\u5148\u9032\u5c01\u88dd\u3001\u822a\u592a\u5143\u4ef6\u548c\u5fae\u96fb\u5b50\u76f8\u5bb9<\/li>\n
                • \u63d0\u9ad8\u826f\u7387\u3001\u6e1b\u5c11\u6750\u6599\u6d6a\u8cbb\u4e26\u4fdd\u6301\u6750\u6599\u7279\u6027<\/li>\n<\/ul>\n

                  \u8a8d\u8b49\u8207\u5408\u898f<\/strong><\/span><\/h2>\n
                    \n
                  • \u7b26\u5408 RoHS \u6a19\u6e96<\/li>\n
                  • \u5c08\u70ba\u9ad8\u7cbe\u5ea6\u534a\u5c0e\u9ad4\u61c9\u7528\u800c\u8a2d\u8a08<\/li>\n
                  • \u652f\u63f4\u53ef\u91cd\u73fe\u3001\u53ef\u91cd\u8907\u53ca\u81ea\u52d5\u5316\u8655\u7406<\/li>\n<\/ul>\n

                    \u5e38\u898b\u554f\u984c<\/strong><\/span><\/h2>\n

                    1.\u5fae\u6d41\u9ad4\u96f7\u5c04\u8a2d\u5099\u53ef\u8655\u7406\u54ea\u4e9b\u985e\u578b\u7684\u6750\u6599\uff1f<\/strong>
                    \u5fae\u6d41\u9ad4\u96f7\u5c04\u6280\u8853\u53ef\u7cbe\u78ba\u52a0\u5de5\u786c\u3001\u8106\u53ca\u5bec\u5e36\u9699\u534a\u5c0e\u9ad4\u6750\u6599\uff0c\u5305\u62ec\u77fd (Si)\u3001\u78b3\u5316\u77fd (SiC)\u3001\u6c2e\u5316\u93b5 (GaN)\u3001\u91d1\u525b\u77f3\u3001LTCC \u78b3\u9676\u74f7\u57fa\u677f\u3001\u5149\u96fb\u6676\u9ad4\u53ca\u5176\u4ed6\u5148\u9032\u6750\u6599\u3002\u5b83\u975e\u5e38\u9069\u5408\u9700\u8981\u6700\u5c0f\u71b1\u640d\u50b7\u548c\u9ad8\u8868\u9762\u54c1\u8cea\u7684\u61c9\u7528\u3002.<\/p>\n

                    2.\u5fae\u5674\u5c04\u96f7\u5c04\u6280\u8853\u5982\u4f55\u6539\u5584\u534a\u5c0e\u9ad4\u6676\u5713\u88fd\u9020\uff1f<\/strong>
                    \u900f\u904e\u7d50\u5408\u4e9e\u5fae\u7c73\u6c34\u5c04\u6d41\u8207\u96f7\u5c04\u5149\u675f\uff0c\u6b64\u6280\u8853\u53ef\u9054\u5230\u4e9e\u5fae\u7c73\u7cbe\u5ea6\uff0c\u540c\u6642\u5c07\u71b1\u5f71\u97ff\u5340\u3001\u6c61\u67d3\u8207\u908a\u7de3\u7834\u640d\u6e1b\u81f3\u6700\u4f4e\u3002\u5b83\u53d6\u4ee3\u4e86\u50b3\u7d71\u7684\u6a5f\u68b0\u5200\u7247\uff0c\u7528\u65bc\u5207\u5272\u3001\u947d\u5b54\u548c\u5fae\u7d50\u69cb\u52a0\u5de5\uff0c\u63d0\u9ad8\u4e86\u826f\u7387\u4e26\u6e1b\u5c11\u4e86\u6750\u6599\u6d6a\u8cbb\u3002.<\/p>\n

                    3.\u5fae\u6d41\u9ad4\u96f7\u5c04\u8a2d\u5099\u6700\u9069\u5408\u54ea\u4e9b\u61c9\u7528\uff1f<\/strong>
                    \u6b64\u8a2d\u5099\u5ee3\u6cdb\u61c9\u7528\u65bc\uff1a<\/p>\n

                      \n
                    • \u8d85\u8584\u6676\u5713\u5207\u5272\u548c\u96b1\u5f62\u5207\u5272 (<50 \u03bcm)<\/li>\n
                    • \u7528\u65bc 3D IC \u548c\u529f\u7387\u5143\u4ef6\u7684\u7845\u901a\u5b54 (TSV) \u947d\u5b54\u548c\u5fae\u5b54\u9663\u5217<\/li>\n
                    • \u5148\u9032\u5c01\u88dd\uff0c\u4f8b\u5982 RDL \u958b\u7a97\u3001\u6676\u5713\u7d1a\u5c01\u88dd (Fan-Out WLP) \u4ee5\u53ca GaN \u548c SiC \u534a\u5c0e\u9ad4\u7684\u9598\u6975\u8755\u523b\/\u96f7\u5c04\u9000\u706b<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"

                      \u5fae\u6d41\u9ad4\u96f7\u5c04\u8a2d\u5099\u5229\u7528\u5148\u9032\u7684\u5fae\u5c04\u6d41\u96f7\u5c04\u6280\u8853\uff0c\u70ba\u534a\u5c0e\u9ad4\u6676\u5713\u548c\u5176\u4ed6\u786c\u3001\u8106\u6216\u5bec\u5e36\u9699\u6750\u6599\u63d0\u4f9b\u9ad8\u7cbe\u5ea6\u3001\u4f4e\u71b1\u640d\u50b7\u7684\u52a0\u5de5\u3002.<\/p>","protected":false},"featured_media":2049,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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