{"id":2021,"date":"2026-03-27T01:46:43","date_gmt":"2026-03-27T01:46:43","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2021"},"modified":"2026-03-27T01:46:45","modified_gmt":"2026-03-27T01:46:45","slug":"high-precision-wafer-bonding-equipment-for-si-si-sic-sic-heterogeneous-integration","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/high-precision-wafer-bonding-equipment-for-si-si-sic-sic-heterogeneous-integration\/","title":{"rendered":"\u9069\u7528\u65bc Si-Si\u3001SiC-SiC \u53ca\u7570\u8cea\u6574\u5408\u7684\u9ad8\u7cbe\u5ea6\u6676\u5713\u63a5\u5408\u8a2d\u5099"},"content":{"rendered":"

\u6676\u5713\u63a5\u5408\u8a2d\u5099\u662f\u5c08\u70ba\u5148\u9032\u534a\u5c0e\u9ad4\u5c01\u88dd\u3001\u5fae\u6a5f\u96fb\u88fd\u9020\u548c\u7b2c\u4e09\u4ee3\u534a\u5c0e\u9ad4\u6574\u5408\u6240\u8a2d\u8a08\u7684\u9ad8\u6548\u80fd\u7cfb\u7d71\u3002\u5b83\u652f\u63f4 2 \u540b\u81f3 12 \u540b\u6676\u5713\uff0c\u53ef\u5728\u5ba4\u6eab\u4e0b\u76f4\u63a5\u63a5\u5408\u53ca\u89aa\u6c34\u6027\u63a5\u5408\uff0c\u7279\u5225\u9069\u7528\u65bc Si-Si\u3001SiC-SiC \u53ca\u7570\u8cea\u6750\u6599\u63a5\u5408 (Si-SiC\u3001GaN\u3001\u85cd\u5bf6\u77f3\u7b49)\u3002.<\/p>\n

\"\"<\/p>\n

\u8a72\u7cfb\u7d71\u5c08\u70ba\u7814\u767c\u74b0\u5883\u548c\u5927\u91cf\u751f\u7522\u800c\u8a2d\u8a08\uff0c\u6574\u5408\u4e86\u8d85\u7cbe\u5bc6\u5c0d\u4f4d\u3001\u9589\u74b0\u58d3\u529b\u548c\u6eab\u5ea6\u63a7\u5236\uff0c\u4ee5\u53ca\u8d85\u9ad8\u771f\u7a7a\u63a5\u5408\u689d\u4ef6\uff0c\u53ef\u78ba\u4fdd\u9ad8\u63a5\u5408\u5f37\u5ea6\u3001\u6975\u4f73\u7684\u4ecb\u9762\u5747\u52fb\u6027\u548c\u4f4e\u7f3a\u9677\u5bc6\u5ea6\u3002.<\/p>\n

\u4e3b\u8981\u529f\u80fd<\/span><\/h1>\n

\"\"1.\u5148\u9032\u7684\u5ba4\u6eab\u9375\u5408\u6280\u8853<\/span><\/h3>\n
    \n
  • \u6d88\u9664\u71b1\u61c9\u529b\u548c\u6676\u5713\u7ff9\u66f2<\/li>\n
  • \u53ef\u7c98\u63a5\u5c0d\u6eab\u5ea6\u654f\u611f\u7684\u7570\u7a2e\u6750\u6599<\/li>\n
  • \u652f\u63f4\u89aa\u6c34\u6027\u63a5\u5408\u548c\u96fb\u6f3f\u6d3b\u5316\u63a5\u5408<\/li>\n<\/ul>\n

    2.\u8d85\u9ad8\u7cbe\u5ea6\u5c0d\u6e96<\/span><\/h3>\n
      \n
    • \u6a19\u8a18\u5c0d\u6e96\u6e96\u78ba\u5ea6\uff1a \u2264 \u00b12 \u03bcm<\/li>\n
    • \u908a\u7de3\u5c0d\u9f4a\u7cbe\u78ba\u5ea6\uff1a \u2264 \u00b150 \u03bcm<\/li>\n
    • \u53ef\u9078\u64c7\u5347\u7d1a\u81f3\u4e9e\u5fae\u7c73\u6821\u6e96\u7cfb\u7d71<\/li>\n<\/ul>\n

      3.\u9ad8\u63a5\u5408\u5f37\u5ea6\u8207\u4ecb\u9762\u54c1\u8cea<\/span><\/h3>\n
        \n
      • \u2265 2.0 J\/m\u00b2 (\u5ba4\u6eab\u4e0b\u7684 Si-Si \u76f4\u63a5\u63a5\u5408)<\/li>\n
      • \u7b49\u96e2\u5b50\u8868\u9762\u6d3b\u5316\u53ef\u9054 \u22655 J\/m\u00b2<\/li>\n
      • \u5728 UHV \u689d\u4ef6\u4e0b\u5177\u6709\u6975\u4f73\u7684\u4ecb\u9762\u6e05\u6f54\u5ea6<\/li>\n<\/ul>\n

        4.\u5ee3\u6cdb\u7684\u6750\u6599\u76f8\u5bb9\u6027<\/span><\/h3>\n

        \u652f\u63f4\u4e0b\u5217\u5404\u9805\u7684\u63a5\u5408<\/p>\n

          \n
        • \u534a\u5c0e\u9ad4\uff1aSi, SiC, GaN, GaAs, InP<\/li>\n
        • \u5149\u5b78\u6750\u6599\uff1a\u85cd\u5bf6\u77f3\u3001\u73bb\u7483<\/li>\n
        • \u529f\u80fd\u6027\u6750\u6599\uff1aLiNbO\u2083, \u947d\u77f3<\/li>\n<\/ul>\n

          5.\u5f48\u6027\u88fd\u7a0b\u80fd\u529b<\/span><\/h3>\n
            \n
          • \u6676\u5713\u5c3a\u5bf8\uff1a2\u2033 - 12\u2033<\/li>\n
          • \u8207\u4e0d\u898f\u5247\u5f62\u72c0\u7684\u6a23\u54c1\u76f8\u5bb9<\/li>\n
          • \u9078\u8cfc\u6a21\u7d44\uff1a\u9810\u71b1\/\u9000\u706b (RT-500\u00b0C)<\/li>\n<\/ul>\n

            \u6280\u8853\u898f\u683c<\/span><\/h1>\n
            \n
            \n\n\n\n\n\n\n\n\n\n\n\n\n
            \u53c3\u6578<\/th>\n\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n
            \u63a5\u5408\u65b9\u6cd5<\/td>\n\u76f4\u63a5\u63a5\u5408 \/ \u7b49\u96e2\u5b50\u6d3b\u5316\u63a5\u5408<\/td>\n<\/tr>\n
            \u6676\u5713\u5c3a\u5bf8<\/td>\n2\u2033 - 12\u2033<\/td>\n<\/tr>\n
            \u58d3\u529b\u7bc4\u570d<\/td>\n0 - 10 MPa<\/td>\n<\/tr>\n
            \u6700\u5927\u58d3\u529b<\/td>\n100 kN<\/td>\n<\/tr>\n
            \u6eab\u5ea6\u7bc4\u570d<\/td>\n\u5ba4\u6eab - 500\u00b0C\uff08\u53ef\u9078\uff09<\/td>\n<\/tr>\n
            \u771f\u7a7a\u5ea6<\/td>\n\u2264 5 \u00d7 10-\u2076 Torr<\/td>\n<\/tr>\n
            \u5c0d\u6e96\u7cbe\u5ea6<\/td>\n\u2264 \u00b12 \u03bcm (Mark), \u2264 \u00b150 \u03bcm (Edge)<\/td>\n<\/tr>\n
            \u63a5\u5408\u5f37\u5ea6<\/td>\n\u2265 2.0 J\/m\u00b2 (RT Si-Si)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

            \"\"\u667a\u6167\u578b\u63a7\u5236\u7cfb\u7d71<\/span><\/h1>\n
              \n
            • \u5de5\u696d\u7d1a\u89f8\u63a7\u5f0f\u4eba\u6a5f\u4ecb\u9762<\/li>\n
            • \u652f\u63f4 50+ \u500b\u88fd\u7a0b\u914d\u65b9\u5132\u5b58<\/li>\n
            • \u5373\u6642\u58d3\u529b-\u6eab\u5ea6\u9589\u74b0\u63a7\u5236<\/li>\n
            • \u7a69\u5b9a\u4e14\u53ef\u91cd\u8907\u7684\u88fd\u7a0b\u6548\u80fd<\/li>\n<\/ul>\n

              \u5b89\u5168\u6027\u8207\u53ef\u9760\u6027<\/span><\/h1>\n
                \n
              • \u4e09\u91cd\u806f\u9396\u4fdd\u8b77\uff08\u58d3\u529b\/\u6eab\u5ea6\/\u771f\u7a7a\uff09<\/li>\n
              • \u7dca\u6025\u505c\u6b62\u7cfb\u7d71<\/li>\n
              • \u5c08\u70ba 100 \u7d1a\u7121\u5875\u5ba4\u76f8\u5bb9\u6027\u800c\u8a2d\u8a08<\/li>\n<\/ul>\n

                \u53ef\u9078\u914d\u7f6e<\/span><\/h1>\n
                  \n
                • \u6a5f\u5668\u4eba\u6676\u5713\u8655\u7406\u7cfb\u7d71<\/li>\n
                • SECS\/GEM \u901a\u8a0a\u4ecb\u9762 (\u53ef\u8207\u6676\u5713\u5ee0\u6574\u5408)<\/li>\n
                • \u7dda\u4e0a\u6aa2\u6e2c\u6a21\u7d44<\/li>\n
                • \u7b49\u96e2\u5b50\u8868\u9762\u6d3b\u5316\u88dd\u7f6e<\/li>\n<\/ul>\n

                  \u5178\u578b\u61c9\u7528<\/span><\/h1>\n

                  1.MEMS \u5c01\u88dd<\/span><\/h3>\n

                  \u52a0\u901f\u5ea6\u8a08\u548c\u9640\u87ba\u5100\u7b49\u611f\u6e2c\u5668\u7684\u5bc6\u5c01\u8a2d\u8a08<\/p>\n

                  2.3D IC \u6574\u5408<\/span><\/h3>\n

                  \u7528\u65bc TSV \u548c\u5148\u9032\u5c01\u88dd\u7684\u6676\u5713\u5806\u758a<\/p>\n

                  3.\u8907\u5408\u534a\u5c0e\u9ad4\u5143\u4ef6<\/span><\/h3>\n

                  GaN \/ SiC \u529f\u7387\u5143\u4ef6\u63a5\u5408\u548c\u5c64\u8f49\u63db<\/p>\n

                  4.CMOS \u5f71\u50cf\u611f\u6e2c\u5668 (CIS)<\/span><\/h3>\n

                  CMOS \u6676\u5713\u8207\u5149\u5b78\u57fa\u677f\u7684\u4f4e\u6eab\u63a5\u5408<\/p>\n

                  5.\u751f\u7269\u6676\u7247\u8207\u5fae\u6d41\u9ad4<\/span><\/h3>\n

                  \u9069\u7528\u65bc\u5be6\u9a57\u5ba4\u55ae\u6676\u7247\u88dd\u7f6e\u7684\u53ef\u9760\u63a5\u5408<\/p>\n

                  \u88fd\u7a0b\u7bc4\u4f8b<\/span><\/h1>\n

                  LiNbO\u2083 - SiC \u6676\u5713\u63a5\u5408 (\u5ba4\u6eab)<\/p>\n

                    \n
                  • \u9054\u5230\u5805\u56fa\u4e14\u5747\u52fb\u7684\u63a5\u5408\u4ecb\u9762<\/li>\n
                  • \u7d93\u6a6b\u65b7\u9762 TEM \u6210\u50cf\u9a57\u8b49<\/li>\n
                  • \u9069\u7528\u65bc\u9ad8\u983b\u8207\u5149\u96fb\u61c9\u7528<\/li>\n<\/ul>\n

                    \u554f\u8207\u7b54<\/span><\/h1>\n

                    Q1: \u70ba\u4f55\u8981\u9078\u64c7\u5ba4\u6eab\u6676\u7247\u63a5\u5408\u800c\u975e\u71b1\u63a5\u5408\uff1f<\/span><\/h3>\n

                    \u5ba4\u6eab\u63a5\u5408\u53ef\u907f\u514d\u71b1\u932f\u4f4d\u548c\u61c9\u529b\uff0c\u56e0\u6b64\u975e\u5e38\u9069\u7528\u65bc\u7570\u8cea\u6750\u6599\uff0c\u4e26\u53ef\u63d0\u9ad8\u5148\u9032\u5c01\u88dd\u7684\u826f\u7387\u3002.<\/p>\n

                    Q2: \u54ea\u4e9b\u6750\u6599\u53ef\u4ee5\u9032\u884c\u9ecf\u5408\uff1f<\/span><\/h3>\n

                    \u672c\u7cfb\u7d71\u652f\u63f4\u591a\u7a2e\u6750\u6599\uff0c\u5305\u62ec<\/p>\n

                      \n
                    • \u534a\u5c0e\u9ad4\uff1aSi, SiC, GaN<\/li>\n
                    • \u6c27\u5316\u7269\uff1aSiO\u2082\u3001LiNbO\u2083<\/li>\n
                    • \u91d1\u5c6c\uff1a\u9285\u3001\u91d1<\/li>\n<\/ul>\n

                      \u70ba\u4f55\u9078\u64c7\u6b64\u7cfb\u7d71<\/span><\/h1>\n
                        \n
                      • \u5728 SiC \u529f\u7387\u5143\u4ef6\u88fd\u9020\u904e\u7a0b\u4e2d\u7d93\u904e\u9a57\u8b49\u7684\u6548\u80fd<\/li>\n
                      • \u900f\u904e\u5be6\u9a57\u5ba4\u6e2c\u8a66\u548c TEM \u5206\u6790\u9a57\u8b49\u63a5\u5408\u5f37\u5ea6<\/li>\n
                      • \u5c08\u70ba\u7814\u7a76\u6a5f\u69cb\u548c\u5de5\u696d\u6676\u5713\u5ee0\u8a2d\u8a08<\/li>\n
                      • \u6a21\u7d44\u5316\u67b6\u69cb\u53ef\u78ba\u4fdd\u9577\u671f\u7684\u53ef\u64f4\u5145\u6027\u53ca\u53ef\u5347\u7d1a\u6027<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"

                        \u6676\u5713\u63a5\u5408\u8a2d\u5099\u662f\u5c08\u70ba\u5148\u9032\u534a\u5c0e\u9ad4\u5c01\u88dd\u3001\u5fae\u6a5f\u96fb\u88fd\u9020\u53ca\u7b2c\u4e09\u4ee3\u534a\u5c0e\u9ad4\u6574\u5408\u6240\u8a2d\u8a08\u7684\u9ad8\u6548\u80fd\u7cfb\u7d71\u3002.<\/p>","protected":false},"featured_media":2024,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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