{"id":1968,"date":"2026-03-23T06:01:20","date_gmt":"2026-03-23T06:01:20","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=1968"},"modified":"2026-03-23T06:03:52","modified_gmt":"2026-03-23T06:03:52","slug":"lpcvd-%e6%b0%a7%e5%8c%96%e7%88%90","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/zh\/product\/lpcvd-oxidation-furnace\/","title":{"rendered":"\u9069\u7528\u65bc\u5148\u9032\u534a\u5c0e\u9ad4\u88fd\u9020\u7684 6\/8\/12 \u540b LPCVD \u6c27\u5316\u7210 \u9ad8\u5747\u52fb\u5ea6\u8584\u819c\u6c89\u7a4d\u6280\u8853"},"content":{"rendered":"

6\/8\/12-Inch LPCVD \u6c27\u5316\u7210\u662f\u6700\u5148\u9032\u7684\u534a\u5c0e\u9ad4\u88fd\u9020\u5de5\u5177\uff0c\u5c08\u70ba\u7cbe\u78ba\u3001\u5747\u52fb\u7684\u8584\u819c\u6c89\u7a4d\u800c\u8a2d\u8a08\u3002\u5b83\u5ee3\u6cdb\u61c9\u7528\u65bc\u5728\u6676\u5713\u4e0a\u751f\u9577\u9ad8\u54c1\u8cea\u7684\u591a\u6676\u77fd\u3001\u6c2e\u5316\u77fd\u548c\u6c27\u5316\u77fd\u5c64\uff0c\u78ba\u4fdd\u529f\u7387\u534a\u5c0e\u9ad4\u3001\u5148\u9032\u57fa\u677f\u548c\u5176\u4ed6\u9ad8\u7cbe\u5bc6\u61c9\u7528\u7684\u7a69\u5b9a\u6548\u80fd\u3002.<\/p>\n

\u6b64\u8a2d\u5099\u7d50\u5408\u4e86\u5148\u9032\u7684\u4f4e\u58d3\u6c89\u7a4d\u6280\u8853\u3001\u667a\u6167\u578b\u6eab\u5ea6\u63a7\u5236\u53ca\u8d85\u6f54\u6de8\u88fd\u7a0b\u8a2d\u8a08\uff0c\u53ef\u9054\u5230\u5353\u8d8a\u7684\u8584\u819c\u5747\u52fb\u6027\u53ca\u9ad8\u7522\u91cf\u3002\u5176\u5782\u76f4\u53cd\u61c9\u5668\u914d\u7f6e\u53ef\u5be6\u73fe\u9ad8\u6548\u7387\u7684\u6279\u6b21\u8655\u7406\uff0c\u800c\u5176\u71b1\u6c89\u7a4d\u88fd\u7a0b\u5247\u53ef\u907f\u514d\u7b49\u96e2\u5b50\u9020\u6210\u7684\u640d\u5bb3\uff0c\u4f7f\u5176\u6210\u70ba\u9598\u6975\u96fb\u4ecb\u8cea\u5f62\u6210\u3001\u61c9\u529b\u7de9\u885d\u5c64\u548c\u4fdd\u8b77\u6027\u6c27\u5316\u7269\u7b49\u95dc\u9375\u88fd\u7a0b\u7684\u7406\u60f3\u9078\u64c7\u3002.<\/p>\n

\"\"<\/p>\n

\n

\u4e3b\u8981\u512a\u52e2<\/strong><\/span><\/h2>\n
    \n
  • \u9ad8\u5747\u52fb\u6027\u8584\u819c\u6c89\u7a4d\uff1a<\/strong> \u4f4e\u58d3\u74b0\u5883\uff080.1-10 Torr\uff09\u53ef\u78ba\u4fdd\u6676\u5713\u8207\u6676\u5713\u4e4b\u9593\u53ca\u6676\u5713\u5167\u7684\u5747\u52fb\u6027\u9054\u5230 \u00b11.5%\uff0c\u9019\u5c0d\u65bc\u9ad8\u6548\u80fd\u5143\u4ef6\u88fd\u9020\u4f86\u8aaa\u81f3\u95dc\u91cd\u8981\u3002.<\/li>\n
  • \u5782\u76f4\u53cd\u61c9\u5668\u8a2d\u8a08\uff1a<\/strong> \u6bcf\u6279\u53ef\u8655\u7406 150-200 \u7247\u6676\u5713\uff0c\u63d0\u9ad8\u4e86\u5de5\u696d\u898f\u6a21\u534a\u5c0e\u9ad4\u88fd\u9020\u7684\u7522\u91cf\u548c\u751f\u7522\u6548\u7387\u3002.<\/li>\n
  • \u71b1\u6c89\u7a4d\u88fd\u7a0b (500-900\u00b0C)\uff1a<\/strong> \u63d0\u4f9b\u6eab\u548c\u3001\u7121\u96fb\u6f3f\u6c89\u7a4d\uff0c\u53ef\u4fdd\u8b77\u654f\u611f\u57fa\u677f\u4e26\u7dad\u6301\u9ad8\u8584\u819c\u54c1\u8cea\u3002.<\/li>\n
  • \u667a\u6167\u578b\u6eab\u5ea6\u63a7\u5236\uff1a<\/strong> \u5373\u6642\u76e3\u63a7\u8207\u8abf\u6574\uff0c\u7cbe\u78ba\u5ea6\u9054 \u00b11\u00b0C\uff0c\u63d0\u4f9b\u7a69\u5b9a\u3001\u53ef\u91cd\u8907\u7684\u7d50\u679c\u3002.<\/li>\n
  • \u8d85\u6f54\u6de8\u7684\u88fd\u7a0b\u5ba4\uff1a<\/strong> \u6700\u5c0f\u5316\u5fae\u7c92\u6c61\u67d3\uff0c\u652f\u63f4 SiC \u53ca\u5176\u4ed6\u5148\u9032\u6676\u5713\u6750\u6599\u3002.<\/li>\n
  • \u53ef\u81ea\u8a02\u7d44\u614b\uff1a<\/strong> \u9748\u6d3b\u7684\u8a2d\u8a08\u53ef\u6eff\u8db3\u5404\u7a2e\u88fd\u7a0b\u9700\u6c42\uff0c\u5305\u62ec\u4e7e\u5f0f\u6216\u6fd5\u5f0f\u6c27\u5316\u4ee5\u53ca\u4e0d\u540c\u7684\u6676\u5713\u5c3a\u5bf8\u3002.<\/li>\n<\/ul>\n

    \u6280\u8853\u898f\u683c<\/strong><\/span><\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n\n\n
    \u7279\u9ede<\/th>\n\u898f\u683c<\/th>\n<\/tr>\n<\/thead>\n
    \u6676\u5713\u5c3a\u5bf8<\/td>\n6\/8\/12 \u82f1\u540b<\/td>\n<\/tr>\n
    \u76f8\u5bb9\u6750\u6599<\/td>\n\u591a\u6676\u77fd\u3001\u6c2e\u5316\u77fd\u3001\u6c27\u5316\u77fd<\/td>\n<\/tr>\n
    \u6c27\u5316\u985e\u578b<\/td>\n\u4e7e\u6c27 \/ \u6fd5\u6c27 (DCE\u3001HCL)<\/td>\n<\/tr>\n
    \u88fd\u7a0b\u6eab\u5ea6\u7bc4\u570d<\/td>\n500\u00b0C-900\u00b0C<\/td>\n<\/tr>\n
    \u6046\u6eab\u5340<\/td>\n\u2265800 mm<\/td>\n<\/tr>\n
    \u6eab\u5ea6\u63a7\u5236\u7cbe\u5ea6<\/td>\n\u00b11\u00b0C<\/td>\n<\/tr>\n
    \u5fae\u7c92\u63a7\u5236<\/td>\n0.32\u03bcm), 0.32\u03bcm), 0.226\u03bcm)<\/td>\n<\/tr>\n
    \u8584\u819c\u539a\u5ea6<\/td>\nNIT1500 \u00b150 \u00c5<\/td>\n<\/tr>\n
    \u5747\u4e00\u6027<\/td>\n\u6676\u5713\u5167 <2.5%\u3001\u6676\u5713\u9593 <2.5%\u3001\u6279\u6b21\u9593 <2%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    \u7522\u54c1\u7279\u8272<\/strong><\/span><\/h2>\n
      \n
    • \u81ea\u52d5\u5316\u6676\u5713\u8655\u7406\u78ba\u4fdd\u9ad8\u5b89\u5168\u6027\u548c\u904b\u4f5c\u6548\u7387\u3002.<\/li>\n
    • \u8d85\u6f54\u6de8\u7684\u88fd\u7a0b\u5ba4\u53ef\u964d\u4f4e\u6c61\u67d3\u98a8\u96aa\uff0c\u4e26\u7dad\u6301\u4e00\u81f4\u7684\u8584\u819c\u54c1\u8cea\u3002.<\/li>\n
    • \u512a\u7570\u7684\u8584\u819c\u539a\u5ea6\u5747\u52fb\u6027\u53ef\u652f\u63f4\u5148\u9032\u7684\u7bc0\u9ede\u88fd\u9020\u3002.<\/li>\n
    • \u5373\u6642\u667a\u6167\u578b\u6eab\u5ea6\u8207\u58d3\u529b\u63a7\u5236\u53ef\u7cbe\u78ba\u8abf\u6574\u88fd\u7a0b\u3002.<\/li>\n
    • SiC \u6676\u5713\u652f\u67b6\u53ef\u6e1b\u5c11\u6469\u64e6\u548c\u5fae\u7c92\u7684\u7522\u751f\uff0c\u5ef6\u9577\u6676\u5713\u7684\u4f7f\u7528\u58fd\u547d\u3002.<\/li>\n
    • \u6a21\u7d44\u5316\u8a2d\u8a08\u53ef\u91dd\u5c0d\u4e0d\u540c\u7684\u61c9\u7528\u548c\u88fd\u7a0b\u9700\u6c42\u9032\u884c\u5ba2\u88fd\u5316\u3002.<\/li>\n<\/ul>\n

      \u6c89\u7a4d\u88fd\u7a0b\u539f\u7406\"\"<\/strong><\/span><\/h2>\n
        \n
      1. \u74e6\u65af\u7c21\u4ecb\uff1a<\/strong> \u53cd\u61c9\u6c23\u9ad4\u5728\u4f4e\u58d3\u689d\u4ef6\u4e0b\uff080.25-1 Torr\uff09\u5c0e\u5165\u7ba1\u5167\u3002.<\/li>\n
      2. \u8868\u9762\u64f4\u6563\uff1a<\/strong> \u5206\u5b50\u53ef\u5728\u6676\u5713\u8868\u9762\u81ea\u7531\u64f4\u6563\uff0c\u78ba\u4fdd\u8986\u84cb\u7bc4\u570d\u5747\u52fb\u3002.<\/li>\n
      3. \u5438\u9644\uff1a<\/strong> \u53cd\u61c9\u7269\u5728\u5316\u5b78\u53cd\u61c9\u524d\u6703\u9644\u8457\u5728\u6676\u5713\u8868\u9762\u3002.<\/li>\n
      4. \u5316\u5b78\u53cd\u61c9\uff1a<\/strong> \u71b1\u5206\u89e3\u53ef\u76f4\u63a5\u5728\u57fa\u677f\u4e0a\u5f62\u6210\u6240\u9700\u7684\u8584\u819c\u3002.<\/li>\n
      5. \u526f\u7522\u54c1\u6e05\u9664\uff1a<\/strong> \u975e\u53cd\u61c9\u6027\u6c23\u9ad4\u6703\u88ab\u6392\u7a7a\uff0c\u4ee5\u4fdd\u6301\u7d14\u5ea6\u548c\u9632\u6b62\u5e72\u64fe\u3002.<\/li>\n
      6. \u96fb\u5f71\u5f62\u6210\uff1a<\/strong> \u53cd\u61c9\u751f\u6210\u7269\u9010\u6f38\u7d2f\u7a4d\uff0c\u5f62\u6210\u5747\u52fb\u3001\u7a69\u5b9a\u7684\u8584\u819c\u5c64\u3002.<\/li>\n<\/ol>\n

        \u61c9\u7528<\/strong><\/span><\/h2>\n
          \n
        • \u5c4f\u853d\u6c27\u5316\u5c64\uff1a<\/strong> \u4fdd\u8b77\u77fd\u6676\u5713\u514d\u53d7\u6c61\u67d3\uff0c\u4e26\u5728\u647b\u96dc\u88fd\u7a0b\u4e2d\u6e1b\u5c11\u96e2\u5b50\u901a\u9053\u3002.<\/li>\n<\/ul>\n

          \"\"<\/p>\n

            \n
          • \u588a\u6c27\u5316\u5c64\uff1a<\/strong> \u53ef\u4f5c\u70ba\u77fd\u5c64\u8207\u6c2e\u5316\u77fd\u5c64\u4e4b\u9593\u7684\u61c9\u529b\u7de9\u885d\u5340\uff0c\u9632\u6b62\u6676\u5713\u958b\u88c2\u4e26\u63d0\u6607\u826f\u7387\u3002.<\/li>\n<\/ul>\n

            \"\"<\/p>\n

              \n
            • \u9598\u6975\u6c27\u5316\u5c64\uff1a<\/strong> \u5728 MOS \u7d50\u69cb\u4e2d\u63d0\u4f9b\u4ecb\u8cea\u5c64\uff0c\u78ba\u4fdd\u7cbe\u78ba\u7684\u96fb\u6d41\u50b3\u5c0e\u548c\u5834\u6548\u63a7\u5236\u3002.<\/li>\n<\/ul>\n

              \"\"<\/p>\n

              \u7cfb\u7d71\u7d44\u614b<\/strong><\/span><\/h2>\n
                \n
              • \u5782\u76f4 LPCVD\uff1a<\/strong> \u88fd\u7a0b\u6c23\u9ad4\u81ea\u4e0a\u800c\u4e0b\u6d41\u52d5\uff0c\u53ef\u5728\u6279\u6b21\u4e2d\u7684\u6240\u6709\u6676\u5713\u4e0a\u5be6\u73fe\u5747\u52fb\u6c89\u7a4d\u3002.<\/li>\n<\/ul>\n

                \"\"<\/p>\n

                  \n
                • \u6c34\u5e73 LPCVD\uff1a<\/strong> \u6c23\u9ad4\u6cbf\u8457\u57fa\u677f\u7684\u9577\u5ea6\u6d41\u52d5\uff0c\u9069\u7528\u65bc\u9023\u7e8c\u3001\u5927\u91cf\u7684\u751f\u7522\uff0c\u4f46\u6c89\u7a4d\u539a\u5ea6\u5728\u9760\u8fd1\u9032\u6c23\u53e3\u4e00\u5074\u53ef\u80fd\u6703\u7565\u6709\u8b8a\u5316\u3002.<\/li>\n<\/ul>\n

                  \"\"<\/p>\n

                  \u5e38\u898b\u554f\u984c<\/strong><\/span><\/h2>\n

                  Q1: LPCVD \u4e3b\u8981\u7528\u65bc\u4f55\u7a2e\u7528\u9014\uff1f<\/strong>
                  \u7b54\uff1aLPCVD \u662f\u4e00\u7a2e\u4f4e\u58d3\u8584\u819c\u6c89\u7a4d\u88fd\u7a0b\uff0c\u5ee3\u6cdb\u7528\u65bc\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u7684\u591a\u6676\u77fd\u3001\u6c2e\u5316\u77fd\u548c\u6c27\u5316\u77fd\u7684\u6c89\u7a4d\uff0c\u53ef\u88fd\u9020\u51fa\u5747\u52fb\u4e14\u9ad8\u54c1\u8cea\u7684\u8584\u819c\uff0c\u7528\u65bc\u5148\u9032\u7684\u88dd\u7f6e\u88fd\u9020\u3002.<\/p>\n

                  Q2: LPCVD \u8207 PECVD \u6709\u4f55\u4e0d\u540c\uff1f<\/strong>
                  \u7b54\uff1aLPCVD \u4f9d\u8cf4\u4f4e\u58d3\u4e0b\u7684\u71b1\u6d3b\u5316\u4f86\u88fd\u9020\u9ad8\u7d14\u5ea6\u8584\u819c\uff0c\u800c PECVD \u5247\u4f7f\u7528\u4f4e\u6eab\u4e0b\u7684\u96fb\u6f3f\u4f86\u52a0\u5feb\u6c89\u7a4d\u901f\u5ea6\uff0c\u4f46\u901a\u5e38\u8584\u819c\u54c1\u8cea\u6703\u7565\u5dee\u3002.<\/p>\n

                  Q3: \u6b64 LPCVD \u6c27\u5316\u7210\u8207\u54ea\u4e9b\u6676\u5713\u5c3a\u5bf8\u548c\u6750\u6599\u76f8\u5bb9\uff1f<\/strong>
                  \u7b54\uff1a\u672c\u7210\u652f\u63f4 6 \u540b\u30018 \u540b\u548c 12 \u540b\u6676\u5713\uff0c\u4e26\u8207\u591a\u6676\u77fd\u3001\u6c2e\u5316\u77fd\u3001\u6c27\u5316\u77fd\u548c SiC \u6676\u5713\u76f8\u5bb9\uff0c\u70ba\u5404\u7a2e\u534a\u5c0e\u9ad4\u61c9\u7528\u63d0\u4f9b\u5f48\u6027\u3002.<\/p>\n

                  Q4: LPCVD \u6c27\u5316\u7210\u53ef\u4ee5\u91dd\u5c0d\u7279\u5b9a\u88fd\u7a0b\u9032\u884c\u5ba2\u88fd\u5316\u55ce\uff1f<\/strong>
                  \u7b54\uff1a\u662f\u7684\uff0c\u8a72\u7cfb\u7d71\u63d0\u4f9b\u6a21\u7d44\u5316\u914d\u7f6e\uff0c\u5305\u62ec\u53ef\u8abf\u6eab\u5340\u3001\u6c23\u6d41\u63a7\u5236\u548c\u6c27\u5316\u6a21\u5f0f\uff08\u4e7e\u5f0f\u6216\u6fd5\u5f0f\uff09\uff0c\u53ef\u6eff\u8db3\u7814\u7a76\u548c\u5de5\u696d\u898f\u6a21\u751f\u7522\u7684\u5404\u7a2e\u88fd\u7a0b\u8981\u6c42\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                  6\/8\/12-Inch 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