{"id":2377,"date":"2026-04-22T07:53:59","date_gmt":"2026-04-22T07:53:59","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2377"},"modified":"2026-04-22T07:56:29","modified_gmt":"2026-04-22T07:56:29","slug":"global-ion-implantation-equipment","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/zh\/global-ion-implantation-equipment\/","title":{"rendered":"\u5168\u7403\u96e2\u5b50\u690d\u5165\u8a2d\u5099\uff1a\u6280\u8853\u3001\u5206\u985e\u8207\u5e02\u5834\u683c\u5c40"},"content":{"rendered":"<p>\u96e2\u5b50\u690d\u5165\u662f\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u6700\u91cd\u8981\u7684\u88fd\u7a0b\u4e4b\u4e00\u3002\u5b83\u900f\u904e\u5728\u534a\u5c0e\u9ad4\u6750\u6599\u4e2d\u5f15\u5165\u787c (B)\u3001\u78f7 (P) \u548c\u7837 (As) \u7b49\u647b\u96dc\u96e2\u5b50\u4f86\u7cbe\u78ba\u63a7\u5236\u96fb\u6c23\u7279\u6027\u3002.<\/p>\n\n\n\n<p>\u900f\u904e\u52a0\u901f\u9ad8\u80fd\u96e2\u5b50\u4e26\u5c07\u5176\u690d\u5165\u6676\u683c\uff0c\u96e2\u5b50\u690d\u5165\u5b9a\u7fa9\u4e86\u95dc\u9375\u5143\u4ef6\u7279\u6027\uff0c\u5305\u62ec\u7d50\u6df1\u3001\u96fb\u5c0e\u7387\u548c\u95a5\u503c\u96fb\u58d3\u3002\u9019\u662f\u5f62\u6210 PN \u7d50\u7684\u57fa\u672c\u6b65\u9a5f\uff0c\u4e26\u5ee3\u6cdb\u61c9\u7528\u65bc\u908f\u8f2f\u3001\u8a18\u61b6\u9ad4\u548c\u529f\u7387\u534a\u5c0e\u9ad4\u88dd\u7f6e\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t.png\" alt=\"\" class=\"wp-image-2361\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t.png 1000w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">\u96e2\u5b50\u690d\u5165\u904e\u7a0b<\/h2>\n\n\n\n<p>\u96e2\u5b50\u690d\u5165\u88fd\u7a0b\u6d89\u53ca\u6578\u500b\u95dc\u9375\u968e\u6bb5\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li>\u96e2\u5b50\u7522\u751f<br>\u647b\u96dc\u6c23\u9ad4\u6216\u56fa\u9ad4\u6e90\u5728\u96e2\u5b50\u6e90\u4e2d\u88ab\u96fb\u96e2\u4ee5\u7522\u751f\u5e36\u96fb\u7c92\u5b50\u3002.<\/li>\n\n\n\n<li>\u96e2\u5b50\u52a0\u901f<br>\u96e2\u5b50\u88ab\u52a0\u901f\u5230\u6307\u5b9a\u7684\u80fd\u91cf\u7b49\u7d1a\uff0c\u9019\u6c7a\u5b9a\u4e86\u690d\u5165\u6df1\u5ea6\u3002.<\/li>\n\n\n\n<li>\u8cea\u91cf\u5206\u6790<br>\u78c1\u6027\u5206\u6790\u5668\u53ef\u9078\u64c7\u6240\u9700\u7684\u96e2\u5b50\u7a2e\u985e\uff0c\u78ba\u4fdd\u5149\u675f\u7d14\u5ea6\u3002.<\/li>\n\n\n\n<li>\u5149\u675f\u6383\u63cf\u8207\u690d\u5165<br>\u96e2\u5b50\u675f\u5728\u6676\u5713\u8868\u9762\u6383\u63cf\uff0c\u4ee5\u9054\u5230\u5747\u52fb\u7684\u690d\u5165\u3002.<\/li>\n<\/ol>\n\n\n\n<p>\u690d\u5165\u5f8c\uff0c\u6676\u5713\u901a\u5e38\u6703\u9032\u884c\u9000\u706b\u8655\u7406\uff0c\u4ee5\u4fee\u5fa9\u6676\u683c\u640d\u50b7\u4e26\u555f\u7528\u647b\u96dc\u5291\u3002\u5e38\u898b\u7684\u9000\u706b\u65b9\u6cd5\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>1000-1100\u00b0C \u7684\u5feb\u901f\u71b1\u8655\u7406 (RTP)<\/li>\n\n\n\n<li>\u96f7\u5c04\u9000\u706b\u53ef\u5c40\u90e8\u52a0\u71b1\u4e26\u6e1b\u5c11\u71b1\u9810\u7b97<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u96e2\u5b50\u690d\u5165\u8a2d\u5099\u7684\u5206\u985e<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4f9d\u80fd\u91cf\u7b49\u7d1a<\/h3>\n\n\n\n<p>\u4f4e\u80fd\u91cf\u96e2\u5b50\u690d\u5165\u5668 (&lt;100 keV)<br>\u7528\u65bc\u8d85\u8584\u7d50\u3001\u6e90\u6975\/\u6f0f\u6975\u690d\u5165\u4ee5\u53ca\u5148\u9032\u7684\u908f\u8f2f\u5143\u4ef6\uff0c\u4f8b\u5982 AI \u6676\u7247\u3001CPU\u3001DRAM \u548c CIS\u3002.<\/p>\n\n\n\n<p>\u4e2d\u80fd\u96e2\u5b50\u690d\u5165\u5668 (100-300 keV)<br>\u7528\u65bc\u95be\u503c\u96fb\u58d3\u8abf\u6574\u3001\u8f15\u5ea6\u647b\u96dc\u6f0f\u6975\u7d50\u69cb\uff0c\u4ee5\u53ca SIMOX \u548c Smart Cut \u7b49\u88fd\u7a0b\u3002.<\/p>\n\n\n\n<p>\u9ad8\u80fd\u96e2\u5b50\u690d\u5165\u5668 (&gt;300 keV)<br>\u7528\u65bc\u529f\u7387\u5143\u4ef6\u3001RF \u6676\u7247\u548c\u5149\u901a\u8a0a\u5143\u4ef6\u7684\u6df1\u5ea6\u690d\u5165\uff0c\u53ef\u5be6\u73fe\u5fae\u7c73\u7d1a\u7684\u647b\u96dc\u6df1\u5ea6\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u7531\u675f\u6d41\u63d0\u4f9b<\/h3>\n\n\n\n<p>\u4f4e\u96fb\u6d41\u690d\u5165\u5668 (100 nA - 100 \u03bcA)<br>\u9069\u7528\u65bc\u9700\u8981\u7cbe\u78ba\u5291\u91cf\u63a7\u5236\u7684\u7cbe\u5bc6\u61c9\u7528\u3002.<\/p>\n\n\n\n<p>\u4e2d\u96fb\u6d41\u690d\u5165\u5668 (100 \u03bcA - 2000 \u03bcA)<br>\u5ee3\u6cdb\u61c9\u7528\u65bc\u6a19\u6e96\u534a\u5c0e\u9ad4\u88fd\u7a0b\u3002.<\/p>\n\n\n\n<p>\u9ad8\u96fb\u6d41\u690d\u5165\u5668 (2 mA - 30 mA)<br>\u5c08\u70ba\u9ad8\u5291\u91cf\u3001\u9ad8\u901a\u91cf\u61c9\u7528\u800c\u8a2d\u8a08\uff0c\u4f8b\u5982\u6e90\u6975\/\u6f0f\u6975\u690d\u5165\u3002.<\/p>\n\n\n\n<p>\u8d85\u9ad8\u96fb\u6d41\u690d\u5165\u5668 (&gt;30 mA)<br>\u7528\u65bc\u5c08\u9580\u7684\u9ad8\u7522\u91cf\u6216\u9ad8\u5291\u91cf\u751f\u7522\u74b0\u5883\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u6309\u7279\u6b8a\u529f\u80fd<\/h3>\n\n\n\n<p>\u6c27\u96e2\u5b50\u690d\u5165\u5668<br>\u7528\u65bc SOI\uff08Silicon-on-Insulator\uff09\u88fd\u9020\u3002.<\/p>\n\n\n\n<p>\u6c2b\u96e2\u5b50\u690d\u5165\u5668<br>\u61c9\u7528\u65bc\u667a\u6167\u5207\u5272\u8207\u6750\u6599\u5de5\u7a0b\u88fd\u7a0b\u3002.<\/p>\n\n\n\n<p>\u9ad8\u6eab\u96e2\u5b50\u690d\u5165\u5668<br>\u53ef\u5728\u5347\u9ad8\u7684\u6eab\u5ea6\u4e0b\u9032\u884c\u6750\u6599\u690d\u5165\uff0c\u5982 SiC \u548c\u5148\u9032\u534a\u5c0e\u9ad4\u61c9\u7528\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7cfb\u7d71\u67b6\u69cb<\/h2>\n\n\n\n<p>\u96e2\u5b50\u690d\u5165\u7cfb\u7d71\u901a\u5e38\u7531\u4e94\u500b\u4e3b\u8981\u5b50\u7cfb\u7d71\u7d44\u6210\uff1a<\/p>\n\n\n\n<p>\u6c23\u9ad4\u7cfb\u7d71<br>\u63d0\u4f9b\u4e26\u5b89\u5168\u8655\u7406\u7279\u6b8a\u6c23\u9ad4\uff0c\u4f8b\u5982\u7837\u5316\u6c2b (AsH\u2083)\u3001\u78f7\u5316\u6c2b (PH\u2083) \u53ca\u4e09\u6c1f\u5316\u787c (BF\u2083)\u3002.<\/p>\n\n\n\n<p>\u96fb\u6e90\u8207\u96fb\u6c23\u7cfb\u7d71<br>\u70ba\u96e2\u5b50\u52a0\u901f\u548c\u78c1\u5834\u7522\u751f\u63d0\u4f9b\u9ad8\u58d3\u96fb\u6e90\u3002.<\/p>\n\n\n\n<p>\u771f\u7a7a\u7cfb\u7d71<br>\u7dad\u6301\u9ad8\u771f\u7a7a\u689d\u4ef6\u4ee5\u6e1b\u5c11\u96e2\u5b50\u6563\u5c04\u548c\u6c61\u67d3\uff0c\u901a\u5e38\u4f7f\u7528\u6e26\u8f2a\u6cf5\u548c\u4f4e\u6eab\u6cf5\u3002.<\/p>\n\n\n\n<p>\u63a7\u5236\u7cfb\u7d71<br>\u7ba1\u7406\u5149\u675f\u53c3\u6578\u3001\u6676\u5713\u8655\u7406\u548c\u88fd\u7a0b\u81ea\u52d5\u5316\u3002.<\/p>\n\n\n\n<p>\u5149\u675f\u7dda\u7cfb\u7d71<br>\u8a2d\u5099\u7684\u6838\u5fc3\uff0c\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u96e2\u5b50\u6e90<\/li>\n\n\n\n<li>\u8403\u53d6\u7cfb\u7d71<\/li>\n\n\n\n<li>\u8cea\u91cf\u5206\u6790\u5100<\/li>\n\n\n\n<li>\u52a0\u901f\u7ba1<\/li>\n\n\n\n<li>\u5149\u675f\u6383\u63cf\u7cfb\u7d71<\/li>\n\n\n\n<li>\u88fd\u7a0b\u5ba4<\/li>\n<\/ul>\n\n\n\n<p>\u6b64\u7cfb\u7d71\u53ef\u5224\u65b7\u690d\u5165\u7684\u7cbe\u78ba\u5ea6\u3001\u5747\u52fb\u6027\u53ca\u6574\u9ad4\u6548\u80fd\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u5e02\u5834\u6982\u89bd<\/h2>\n\n\n\n<p>\u6839\u64da\u884c\u696d\u6578\u64da\uff0c2022 \u5e74\u5168\u7403\u96e2\u5b50\u690d\u5165\u8a2d\u5099\u5e02\u5834\u898f\u6a21\u7d04\u9054\u4eba\u6c11\u5e63 206 \u5104\u5143\u3002\u5176\u4e2d\uff0c\u4e2d\u570b\u5e02\u5834\u7d04\u4f54 66 \u5104\u4eba\u6c11\u5e63\uff0c\u7d04\u4f54\u5168\u7403\u5e02\u5834\u7684 32%\u3002.<\/p>\n\n\n\n<p>\u5728\u5340\u9694\u65b9\u9762\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u96fb\u6d41\u690d\u5165\u5668\u5728\u5e02\u5834\u4e0a\u4f54\u4e3b\u5c0e\u5730\u4f4d\uff0c\u7d04\u4f54 61<\/li>\n\n\n\n<li>\u76ee\u524d\u4e2d\u5ea6\u690d\u5165\u8005\u7d04\u4f54 20<\/li>\n\n\n\n<li>\u5176\u9918\u7684\u4efd\u984d\u7531\u9ad8\u80fd\u91cf\u548c\u5c08\u9580\u7cfb\u7d71\u6240\u6301\u6709<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u5168\u7403\u7af6\u722d\u683c\u5c40<\/h2>\n\n\n\n<p>\u96e2\u5b50\u690d\u5165\u8a2d\u5099\u5e02\u5834\u9ad8\u5ea6\u96c6\u4e2d\uff0c\u7531\u5e7e\u5bb6\u9818\u5148\u7684\u570b\u969b\u516c\u53f8\u4e3b\u5c0e\u3002.<\/p>\n\n\n\n<p>\u61c9\u7528\u6750\u6599<br>\u5728\u5168\u7403\u5e02\u5834\u4f54\u6709\u8d85\u904e 50% \u7684\u5e02\u5834\u4efd\u984d\u3002\u5176\u7522\u54c1\u7d44\u5408\u5305\u62ec\u9ad8\u96fb\u6d41\u3001\u4e2d\u96fb\u6d41\u548c\u8d85\u9ad8\u5291\u91cf\u96e2\u5b50\u690d\u5165\u7cfb\u7d71\u3002\u8a72\u516c\u53f8\u901a\u904e\u6536\u8cfc Varian Semiconductor \u978f\u56fa\u4e86\u5176\u5730\u4f4d\u3002.<\/p>\n\n\n\n<p>Axcelis Technologies<br>\u9ad8\u80fd\u96e2\u5b50\u690d\u5165\u5668\u7684\u9818\u5148\u4f9b\u61c9\u5546\uff0c\u5728\u6b64\u9818\u57df\u64c1\u6709\u7d04 55% \u7684\u5e02\u5834\u4f54\u6709\u7387\u3002\u516c\u53f8\u8ca1\u52d9\u696d\u7e3e\u8868\u73fe\u5f37\u52c1\uff0c\u4e26\u6301\u7e8c\u62d3\u5c55\u529f\u7387\u534a\u5c0e\u9ad4\u61c9\u7528\u9818\u57df\u3002.<\/p>\n\n\n\n<p>Nissin \u96e2\u5b50\u8a2d\u5099<br>\u5c08\u6ce8\u65bc\u4e2d\u7b49\u96fb\u6d41\u96e2\u5b50\u690d\u5165\u5668\uff0c\u66fe\u53c3\u8207\u4e2d\u570b\u591a\u500b\u534a\u5c0e\u9ad4\u5c08\u6848\u3002.<\/p>\n\n\n\n<p>\u4f4f\u53cb\u91cd\u5de5<br>\u4e3b\u8981\u751f\u7522\u4e2d\u7b49\u96fb\u6d41\u96e2\u5b50\u690d\u5165\u7cfb\u7d71\u3002.<\/p>\n\n\n\n<p>SEN \u516c\u53f8<br>\u63d0\u4f9b\u5168\u7cfb\u5217\u7684\u96e2\u5b50\u690d\u5165\u8a2d\u5099\uff0c\u5305\u62ec\u9ad8\u96fb\u6d41\u3001\u4e2d\u96fb\u6d41\u53ca\u9ad8\u80fd\u91cf\u7cfb\u7d71\uff0c\u4f46\u5728\u4e2d\u570b\u5927\u9678\u7684\u5e02\u5834\u4f54\u6709\u7387\u76f8\u5c0d\u8f03\u4f4e\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u570b\u5167\u88fd\u9020\u5546\u7684\u767c\u5c55<\/h2>\n\n\n\n<p>\u8fd1\u5e74\u4f86\uff0c\u4e2d\u570b\u534a\u5c0e\u9ad4\u8a2d\u5099\u88fd\u9020\u5546\u53d6\u5f97\u4e86\u9577\u8db3\u9032\u6b65\u3002\u4f8b\u5982\uff0c\u570b\u5167\u67d0\u516c\u53f8\u958b\u767c\u768412\u82f1\u5bf8\u4f4e\u6eab\u96e2\u5b50\u690d\u5165\u5668\u5df2\u6210\u529f\u4ea4\u4ed8\u7d66\u4e00\u5bb6\u9818\u5148\u7684\u908f\u8f2f\u82af\u7247\u88fd\u9020\u5546\u3002.<\/p>\n\n\n\n<p>\u672c\u5730\u516c\u53f8\u6b63\u5728\u7a4d\u6975\u958b\u767c\u9ad8\u96fb\u6d41\u3001\u4e2d\u96fb\u6d41\u548c\u9ad8\u80fd\u91cf\u96e2\u5b50\u690d\u5165\u7cfb\u7d71\u3002\u96d6\u7136\u570b\u5167\u5e02\u5834\u4ecd\u4ee5\u570b\u969b\u4f9b\u61c9\u5546\u70ba\u4e3b\uff0c\u4f46\u4e2d\u570b\u88fd\u9020\u5546\u6b63\u9010\u6b65\u5be6\u73fe\u88fd\u7a0b\u9a57\u8b49\uff0c\u4e26\u9032\u5165\u5148\u9032\u7684\u751f\u7522\u7dda\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7e3d\u7d50<\/h2>\n\n\n\n<p>\u96e2\u5b50\u690d\u5165\u4ecd\u7136\u662f\u534a\u5c0e\u9ad4\u88fd\u9020\u7684\u6838\u5fc3\u6280\u8853\uff0c\u76f4\u63a5\u5f71\u97ff\u88dd\u7f6e\u7684\u6548\u80fd\u548c\u826f\u7387\u3002\u96a8\u8457\u5148\u9032\u7bc0\u9ede\u3001SiC \u7b49\u5bec\u5e36\u9699\u6750\u6599\u4ee5\u53ca\u9ad8\u6548\u80fd\u904b\u7b97\u61c9\u7528\u7684\u5feb\u901f\u767c\u5c55\uff0c\u5c0d\u5148\u9032 <a href=\"https:\/\/www.zmsh-semitech.com\/zh\/product-category\/ion-implantation-equipment\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\u96e2\u5b50\u690d\u5165\u8a2d\u5099<\/mark><\/a> \u6301\u7e8c\u6210\u9577\u3002.<\/p>\n\n\n\n<p>\u96d6\u7136\u5168\u7403\u5e02\u5834\u4ecd\u7531\u570b\u969b\u77e5\u540d\u5ee0\u5546\u4e3b\u5c0e\uff0c\u4f46\u6301\u7e8c\u7684\u6280\u8853\u9032\u6b65\u548c\u672c\u571f\u5316\u52aa\u529b\u6b63\u5728\u91cd\u5851\u7af6\u722d\u683c\u5c40\uff0c\u5c24\u5176\u662f\u5728\u65b0\u8208\u534a\u5c0e\u9ad4\u5e02\u5834\u3002.<\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>Ion implantation is one of the most critical processes in semiconductor manufacturing. It enables precise control of electrical properties by introducing dopant ions such as boron (B), phosphorus (P), and arsenic (As) into semiconductor materials. By accelerating high-energy ions and implanting them into the crystal lattice, ion implantation defines key device characteristics, including junction depth, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2361,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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