{"id":2286,"date":"2026-04-20T01:28:55","date_gmt":"2026-04-20T01:28:55","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2286"},"modified":"2026-04-20T01:50:00","modified_gmt":"2026-04-20T01:50:00","slug":"sic-semiconductor-equipment-and-materials","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/zh\/sic-semiconductor-equipment-and-materials\/","title":{"rendered":"\u78b3\u5316\u77fd (SiC) \u534a\u5c0e\u9ad4\u8a2d\u5099\u8207\u6750\u6599"},"content":{"rendered":"<p>\u78b3\u5316\u77fd (SiC) \u662f\u7b2c\u4e09\u4ee3\u534a\u5c0e\u9ad4\u5bb6\u65cf\u7684\u4ee3\u8868\u6750\u6599\uff0c\u5df2\u6210\u70ba\u4e0b\u4e00\u4ee3\u529f\u7387\u96fb\u5b50\u3001\u9ad8\u983b\u5143\u4ef6\u548c\u5148\u9032\u5149\u5b78\u7cfb\u7d71\u7684\u57fa\u77f3\u3002\u5728 8 \u540b\u6676\u5713\u5230 12 \u540b\u6676\u5713\u7684\u8f49\u63db\uff0c\u4ee5\u53ca 14 \u540b\u57fa\u677f\u7684\u65e9\u671f\u63a2\u7d22\u9a45\u52d5\u4e0b\uff0c\u78b3\u5316\u77fd\u7522\u696d\u6b63\u7d93\u6b77\u5f9e\u55ae\u7368\u7684\u6280\u8853\u7a81\u7834\u5230\u5b8c\u5168\u6574\u5408\u7684\u4f9b\u61c9\u93c8\u6700\u4f73\u5316\u7684\u7d50\u69cb\u8f49\u578b\u3002.<\/p>\n\n\n\n<p>\u9019\u7bc7\u6587\u7ae0\u5168\u9762\u4e14\u5b78\u8853\u6027\u5730\u6982\u8ff0\u4e86\u6700\u8fd1\u5728 <a href=\"https:\/\/www.zmsh-semitech.com\/zh\/product-category\/crystal-growth-furnace\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">SiC \u6676\u9ad4\u6210\u9577<\/mark><\/a>, \u672c\u7bc0\u5c07\u91dd\u5c0d\u6676\u5713\u52a0\u5de5\u8a2d\u5099\u3001\u8a08\u91cf\u7cfb\u7d71\u3001\u57fa\u677f\u548c\u78ca\u6676\u6750\u6599\uff0c\u4ee5\u53ca\u8f14\u52a9\u88fd\u7a0b\u6280\u8853\u9032\u884c\u5206\u6790\u3002\u5b83\u9032\u4e00\u6b65\u5206\u6790\u4e86\u6676\u5713\u5c3a\u5bf8\u7e2e\u653e\u5982\u4f55\u91cd\u5851\u6210\u672c\u7d50\u69cb\u3001\u88fd\u9020\u6548\u7387\u548c\u5168\u7403\u7af6\u722d\u529b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u7c21\u4ecb\uff1a\u78b3\u5316\u77fd\u7684\u6230\u7565\u89d2\u8272<\/h2>\n\n\n\n<p>\u5728\u73fe\u4ee3\u534a\u5c0e\u9ad4\u6280\u8853\u4e2d\uff0c\u5bec\u5e36\u9699\u6750\u6599\u6b63\u5728\u91cd\u65b0\u5b9a\u7fa9\u88dd\u7f6e\u6027\u80fd\u7684\u6975\u9650\u3002\u5176\u4e2d\uff0cSiC \u56e0\u5176\u512a\u7570\u7684\u7269\u7406\u548c\u96fb\u5b50\u7279\u6027\u800c\u812b\u7a4e\u800c\u51fa\uff0c\u5305\u62ec\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5bec\u5e36\u9699 (~3.26 eV)<\/li>\n\n\n\n<li>\u9ad8\u81e8\u754c\u96fb\u5834 (~10\u00d7 \u7845)<\/li>\n\n\n\n<li>\u512a\u7570\u7684\u71b1\u50b3\u5c0e\u6027 (~3\u00d7 \u7845)<\/li>\n\n\n\n<li>\u5f37\u5927\u7684\u6297\u8f3b\u5c04\u548c\u8010\u5316\u5b78\u6027<\/li>\n<\/ul>\n\n\n\n<p>\u9019\u4e9b\u7279\u6027\u4f7f\u5f97 SiC \u5728\u96fb\u52d5\u8eca\u3001\u53ef\u518d\u751f\u80fd\u6e90\u7cfb\u7d71\u3001\u8cc7\u6599\u4e2d\u5fc3\u548c\u65b0\u8208\u5149\u5b78\u6280\u8853\u7b49\u61c9\u7528\u4e2d\u4e0d\u53ef\u6216\u7f3a\u3002.<\/p>\n\n\n\n<p>\u76ee\u524d SiC \u7522\u696d\u7684\u767c\u5c55\u6709\u5169\u500b\u4e3b\u8981\u8da8\u52e2\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6676\u5713\u5c3a\u5bf8\u64f4\u5145 (6 \u540b \u2192 8 \u540b \u2192 12 \u540b \u2192 14 \u540b)<\/strong><\/li>\n\n\n\n<li><strong>\u5f9e\u96f6\u6563\u7684\u5275\u65b0\u904e\u6e21\u5230\u5b8c\u6574\u7684\u4f9b\u61c9\u93c8\u6574\u5408<\/strong><\/li>\n<\/ol>\n\n\n\n<p>\u5230 2026 \u5e74\uff0c\u7522\u696d\u5c07\u9032\u5165\u4e00\u500b\u95dc\u9375\u968e\u6bb5\uff0c\u5be6\u9a57\u5ba4\u898f\u6a21\u7684\u6210\u679c\u5c07\u8f49\u5316\u70ba\u5927\u91cf\u751f\u7522\u7684\u80fd\u529b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"540\" height=\"496\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Wafer-size-expansion.webp\" alt=\"\" class=\"wp-image-2287\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Wafer-size-expansion.webp 540w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Wafer-size-expansion-300x276.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Wafer-size-expansion-13x12.webp 13w\" sizes=\"(max-width: 540px) 100vw, 540px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u6676\u9ad4\u751f\u9577\u8a2d\u5099\uff1aSiC \u50f9\u503c\u93c8\u7684\u57fa\u790e<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">2.1 \u7269\u7406\u6c23\u76f8\u50b3\u8f38 (PVT) \u70ba\u4e3b\u6d41\u6280\u8853<\/h3>\n\n\n\n<p>SiC \u55ae\u6676\u9ad4\u6210\u9577\u7684\u4e3b\u8981\u65b9\u6cd5\u662f\u7269\u7406\u6c23\u76f8\u8f38\u9001\u3002\u8207\u77fd\u4e0d\u540c\uff0c\u7531\u65bc SiC \u7684\u6607\u83ef\u6eab\u5ea6\u6975\u9ad8\uff0c\u56e0\u6b64\u7121\u6cd5\u5f9e\u7194\u878d\u7269\u4e2d\u751f\u9577\u3002\u53d6\u800c\u4ee3\u4e4b\u7684\u662f\uff0c\u56fa\u614b SiC \u539f\u59cb\u6750\u6599\u5728\u9ad8\u6eab\u4e0b\u6607\u83ef\u4e26\u91cd\u65b0\u7d50\u6676\u5230\u7a2e\u5b50\u6676\u9ad4\u4e0a\u3002.<\/p>\n\n\n\n<p>\u64f4\u5145\u81f3 12 \u540b\u6676\u9ad4\u7684\u4e3b\u8981\u6280\u8853\u6311\u6230\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7dad\u6301 2000\u00b0C \u4ee5\u4e0a\u7684\u71b1\u7a69\u5b9a\u6027<\/li>\n\n\n\n<li>\u63a7\u5236\u5927\u76f4\u5f91\u7684\u6eab\u5ea6\u68af\u5ea6<\/li>\n\n\n\n<li>\u78ba\u4fdd\u5747\u52fb\u7684\u84b8\u6c23\u50b3\u8f38<\/li>\n\n\n\n<li>\u5be6\u73fe\u9577\u6642\u9593\u88fd\u7a0b\u7a69\u5b9a\u6027<\/li>\n<\/ul>\n\n\n\n<p>\u6210\u529f\u904e\u6e21\u5230 12 \u540b\u6676\u9ad4\u751f\u9577\uff0c\u6a19\u8a8c\u8457\u9081\u5411\u53ef\u5ab2\u7f8e\u77fd\u751f\u614b\u7cfb\u7d71\u7684\u5de5\u696d\u898f\u6a21\u88fd\u9020\u7684\u95dc\u9375\u8f49\u8b8a\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img decoding=\"async\" width=\"750\" height=\"648\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2.webp\" alt=\"\" class=\"wp-image-2288\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2.webp 750w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2-300x259.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2-14x12.webp 14w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2-600x518.webp 600w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">2.2 \u66ff\u4ee3\u65b9\u6cd5\uff1a\u6db2\u76f8\u751f\u9577<\/h3>\n\n\n\n<p>\u9664\u4e86 PVT \u4e4b\u5916\uff0c\u6db2\u76f8\u5916\u5ef6\u53ca\u76f8\u95dc\u6db2\u76f8\u6210\u9577\u6280\u8853\u4e5f\u9010\u6f38\u53d7\u5230\u91cd\u8996\u3002\u9019\u4e9b\u65b9\u6cd5\u63d0\u4f9b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8f03\u4f4e\u7684\u7f3a\u9677\u5bc6\u5ea6<\/li>\n\n\n\n<li>\u6539\u5584\u647b\u8cea\u7d0d\u5165\u63a7\u5236<\/li>\n\n\n\n<li>p \u578b\u6750\u6599\u751f\u9577\u7684\u512a\u52e2<\/li>\n<\/ul>\n\n\n\n<p>\u5118\u7ba1\u6db2\u76f8\u65b9\u6cd5\u4ecd\u5728\u958b\u767c\u4e2d\uff0c\u4f46\u5728\u9ad8\u6548\u80fd\u548c\u7279\u6b8a\u61c9\u7528\u4e2d\u53ef\u80fd\u6703\u88dc\u8db3 PVT\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.3 \u71b1\u5834\u5de5\u7a0b\u8207\u7f3a\u9677\u63a7\u5236<\/h3>\n\n\n\n<p>SiC \u6676\u9ad4\u7684\u54c1\u8cea\u5c0d\u71b1\u5834\u5206\u4f48\u975e\u5e38\u654f\u611f\u3002\u5148\u9032\u7684\u7cfb\u7d71\u76ee\u524d\u5305\u542b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u591a\u5340\u57df\u52a0\u71b1\u914d\u7f6e<\/li>\n\n\n\n<li>\u5373\u6642\u71b1\u53cd\u994b\u63a7\u5236<\/li>\n\n\n\n<li>\u71b1-\u6d41\u9ad4\u8026\u5408\u6a21\u64ec<\/li>\n<\/ul>\n\n\n\n<p>\u9019\u4e9b\u5275\u65b0\u6280\u8853\u53ef\u5927\u5e45\u6e1b\u5c11\u5fae\u7ba1\u548c\u4f4d\u932f\u7b49\u7f3a\u9677\uff0c\u800c\u9019\u4e9b\u7f3a\u9677\u6703\u76f4\u63a5\u5f71\u97ff\u88dd\u7f6e\u7684\u826f\u7387\u548c\u53ef\u9760\u5ea6\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u6676\u5713\u52a0\u5de5\u8a2d\u5099\uff1a\u786c\u8106\u6750\u6599\u7684\u7cbe\u5bc6\u88fd\u9020<\/h2>\n\n\n\n<p>SiC \u662f\u6700\u5805\u786c\u7684\u534a\u5c0e\u9ad4\u6750\u6599\u4e4b\u4e00\uff0c\u83ab\u6c0f\u786c\u5ea6\u503c\u63a5\u8fd1 9\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.1 \u7e2e\u8584\u6280\u8853\uff1a\u9054\u5230\u6b21\u5fae\u7c73\u5747\u52fb\u5ea6<\/h3>\n\n\n\n<p>\u6676\u5713\u6e1b\u8584\u5c0d\u65bc\u88dd\u7f6e\u88fd\u9020\u548c\u71b1\u7ba1\u7406\u662f\u975e\u5e38\u91cd\u8981\u7684\u3002\u4e3b\u8981\u9032\u5c55\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u539a\u5ea6\u8b8a\u5316\u63a7\u5236\u5728 1 \u03bcm \u4ee5\u5167<\/li>\n\n\n\n<li>\u8d85\u7cbe\u5bc6\u6c23\u6d6e\u4e3b\u8ef8<\/li>\n\n\n\n<li>\u771f\u7a7a\u6216\u975c\u96fb\u6676\u5713\u8655\u7406\u7cfb\u7d71<\/li>\n<\/ul>\n\n\n\n<p>\u8584\u5316\u8207\u96f7\u5c04\u5206\u5c64\u88fd\u7a0b\u7684\u6574\u5408\u53ef\u6e1b\u5c11\u6750\u6599\u640d\u8017\u9ad8\u9054 30%\uff0c\u5927\u5e45\u63d0\u5347\u6210\u672c\u6548\u76ca\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.2 \u5207\u4e01\u548c\u5207\u5272\uff1a\u6548\u7387\u8207\u7522\u91cf\u6700\u4f73\u5316<\/h3>\n\n\n\n<p>\u4e3b\u8981\u63a1\u7528\u5169\u7a2e\u5207\u5272\u65b9\u5f0f\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u92c1\u9320\u591a\u7dda\u92f8\u5207<\/li>\n\n\n\n<li>\u52a0\u5de5\u6676\u5713\u7684\u5207\u5272<\/li>\n<\/ul>\n\n\n\n<p>\u6700\u8fd1\u7684\u5275\u65b0\u91cd\u9ede\u5728\u65bc<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u63d0\u9ad8\u6bcf\u500b\u5de5\u5177\u7684\u7522\u91cf<\/li>\n\n\n\n<li>\u6e1b\u5c11\u5207\u53e3\u640d\u8017<\/li>\n\n\n\n<li>\u76e1\u91cf\u6e1b\u5c11\u908a\u7de3\u5d29\u88c2\u548c\u8868\u9762\u4e0b\u7684\u640d\u50b7<\/li>\n<\/ul>\n\n\n\n<p>\u9019\u4e9b\u6539\u9032\u5c0d\u65bc\u64f4\u5927\u751f\u7522\u898f\u6a21\u4ee5\u6eff\u8db3\u96fb\u529b\u96fb\u5b50\u7522\u54c1\u65e5\u76ca\u589e\u9577\u7684\u9700\u6c42\u81f3\u95dc\u91cd\u8981\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image alignfull size-full\"><img decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2.png\" alt=\"\" class=\"wp-image-2144\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2.png 1000w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">3.3 \u4ee5\u96f7\u5c04\u70ba\u57fa\u790e\u7684\u5206\u96e2\u6280\u8853<\/h3>\n\n\n\n<p>\u96f7\u5c04\u52a0\u5de5\u6280\u8853\uff0c\u5305\u62ec\u96f7\u5c04\u5347\u7a7a\u8207\u6c34\u5c0e\u96f7\u5c04\u5207\u5272\uff0c\u6b63\u9010\u6f38\u6210\u70ba\u5148\u9032 SiC \u88fd\u9020\u7684\u5fc5\u8981\u6280\u8853\u3002.<\/p>\n\n\n\n<p>\u512a\u9ede\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u975e\u63a5\u89f8\u5f0f\u8655\u7406<\/li>\n\n\n\n<li>\u964d\u4f4e\u6a5f\u68b0\u61c9\u529b<\/li>\n\n\n\n<li>\u66f4\u9ad8\u7684\u6750\u6599\u5229\u7528\u7387<\/li>\n<\/ul>\n\n\n\n<p>\u9019\u4e9b\u65b9\u6cd5\u5c0d\u65bc\u8d85\u8584\u6676\u5713\u548c\u7570\u8cea\u6574\u5408\u5c24\u5176\u91cd\u8981\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u8a08\u91cf\u8207\u6aa2\u9a57\uff1a\u5be6\u73fe\u826f\u7387\u63a7\u5236<\/h2>\n\n\n\n<p>\u6aa2\u6e2c\u7cfb\u7d71\u662f\u534a\u5c0e\u9ad4\u88fd\u9020\u7684\u300c\u773c\u775b\u300d\u3002\u9ad8\u7aef SiC \u5ea6\u91cf\u8861\u8457\u91cd\u65bc\u4ee5\u4e0b\u65b9\u9762\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8868\u9762\u7f3a\u9677\u5075\u6e2c<\/li>\n\n\n\n<li>\u8868\u5c64\u4e0b\u640d\u5bb3\u5206\u6790<\/li>\n\n\n\n<li>\u78ca\u6676\u5c64\u5747\u52fb\u5ea6\u6e2c\u91cf<\/li>\n<\/ul>\n\n\n\n<p>\u570b\u5167\u8a08\u91cf\u6280\u8853\u7684\u6700\u65b0\u9032\u5c55\u7e2e\u5c0f\u4e86\u8207\u5168\u7403\u9818\u5c0e\u8005\u7684\u5dee\u8ddd\uff0c\u4f7f\u88fd\u7a0b\u63a7\u5236\u66f4\u7cbe\u6e96\uff0c\u826f\u7387\u4e5f\u66f4\u9ad8\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5.\u57fa\u677f\u548c\u5916\u5ef6\uff1a\u5f9e\u5c3a\u5bf8\u8abf\u6574\u5230\u54c1\u8cea\u6700\u4f73\u5316<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">5.1 \u57fa\u677f\u958b\u767c\uff1a12 \u540b\u6210\u719f\u8207 14 \u540b\u63a2\u7d22<\/h3>\n\n\n\n<p>\u8f49\u63db\u81f3\u8f03\u5927\u7684\u6676\u5713\u53ef\u5927\u5e45\u63d0\u5347\u88fd\u9020\u6548\u7387\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8207 6 \u540b\u6676\u5713\u76f8\u6bd4&gt;3 \u500d\u6676\u7247\u8f38\u51fa<\/li>\n\n\n\n<li>\u8207 8 \u540b\u6676\u5713\u76f8\u6bd4\u589e\u52a0 ~2.25 \u500d<\/li>\n\n\n\n<li>\u4f30\u8a08\u53ef\u964d\u4f4e\u6210\u672c\uff1a~40%<\/li>\n<\/ul>\n\n\n\n<p>\u8207\u6b64\u540c\u6642\uff0c\u65e9\u671f\u968e\u6bb5\u7684 14 \u540b\u6676\u9ad4\u958b\u767c\u986f\u793a\u4e86\u6676\u5713\u64f4\u5145\u7684\u4e0b\u4e00\u500b\u524d\u6cbf\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">5.2 \u78ca\u6676\u6210\u9577\uff1a\u88dd\u7f6e\u6548\u80fd\u7684\u6700\u7d42\u6b65\u9a5f<\/h3>\n\n\n\n<p>\u78ca\u6676\u5f62\u6210\u534a\u5c0e\u9ad4\u88dd\u7f6e\u7684\u4e3b\u52d5\u5c64\u3002\u5148\u9032\u7684\u78b3\u5316\u77fd\u78ca\u6676\u88fd\u7a0b\u53ef\u9054\u5230\u4ee5\u4e0b\u76ee\u7684\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u539a\u5ea6\u5747\u4e00\u6027 &lt;3%<\/li>\n\n\n\n<li>\u647b\u96dc\u5747\u52fb\u5ea6 \u22648%<\/li>\n\n\n\n<li>\u88dd\u7f6e\u826f\u7387 &gt;96%<\/li>\n<\/ul>\n\n\n\n<p>\u78ca\u6676\u8a2d\u5099\u8207\u57fa\u677f\u751f\u7522\u7684\u6574\u5408\u662f\u9081\u5411\u5168\u9762\u88fd\u7a0b\u6700\u4f73\u5316\u7684\u95dc\u9375\u4e00\u6b65\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png\" alt=\"\" class=\"wp-image-2091\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png 1000w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">5.3 \u65b0\u8208\u5149\u5b78\u61c9\u7528<\/h3>\n\n\n\n<p>\u9664\u4e86\u96fb\u529b\u96fb\u5b50\u7522\u54c1\u4e4b\u5916\uff0cSiC \u4e5f\u56e0\u5176\u9ad8\u6298\u5c04\u7387\u548c\u900f\u660e\u5ea6\u800c\u64f4\u5c55\u81f3\u5149\u5b78\u61c9\u7528\u9818\u57df\u3002.<\/p>\n\n\n\n<p>\u5176\u4e2d\u4e00\u9805\u986f\u8457\u7684\u5275\u65b0\u6d89\u53ca\u5230\u68af\u5ea6\u7d50\u69cb\u5149\u67f5\uff0c\u53ef\u4f7f..\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5168\u5f69\u6ce2\u5c0e\u986f\u793a\u5668<\/li>\n\n\n\n<li>\u7c21\u5316\u5149\u5b78\u67b6\u69cb<\/li>\n\n\n\n<li>AR\/VR \u7cfb\u7d71\u7684\u6548\u7387\u66f4\u9ad8<\/li>\n<\/ul>\n\n\n\n<p>\u9019\u70ba\u6d88\u8cbb\u6027\u96fb\u5b50\u7522\u54c1\u548c\u5148\u9032\u5f71\u50cf\u6280\u8853\u5e36\u4f86\u4e86\u65b0\u7684\u5546\u6a5f\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6.\u652f\u63f4\u6750\u6599\u8207\u5148\u9032\u5c01\u88dd<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">6.1 \u7814\u78e8\u8207\u7814\u78e8\u6db2\u6280\u8853<\/h3>\n\n\n\n<p>\u9ad8\u6548\u80fd\u7684\u62cb\u5149\u7814\u78e8\u6db2\u662f\u9054\u6210\u7121\u7455\u75b5\u8868\u9762\u7684\u5fc5\u8981\u689d\u4ef6\u3002\u5275\u65b0\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u591a\u6a21\u5f0f\u9846\u7c92\u5206\u6563<\/li>\n\n\n\n<li>\u5316\u5b78\u6539\u6027\u78e8\u6599<\/li>\n\n\n\n<li>\u6e1b\u5c11\u5730\u4e0b\u640d\u5bb3<\/li>\n<\/ul>\n\n\n\n<p>\u9019\u4e9b\u6280\u8853\u5c0d\u57fa\u677f\u88fd\u5099\u548c\u5149\u5b78\u61c9\u7528\u90fd\u81f3\u95dc\u91cd\u8981\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">6.2 \u5148\u9032\u5c01\u88dd\u4e2d\u7684\u71b1\u80fd\u7ba1\u7406<\/h3>\n\n\n\n<p>\u96a8\u8457\u4eba\u5de5\u667a\u6167\u8207\u9ad8\u6548\u80fd\u904b\u7b97\u7684\u529f\u7387\u5bc6\u5ea6\u4e0d\u65b7\u589e\u52a0\uff0c\u6563\u71b1\u7ba1\u7406\u5df2\u6210\u70ba\u4e00\u9805\u91cd\u8981\u7684\u6311\u6230\u3002.<\/p>\n\n\n\n<p>SiC \u56e0\u5176\u9ad8\u5c0e\u71b1\u6027\u800c\u5177\u6709\u986f\u8457\u7684\u512a\u52e2\uff0c\u4f7f\u5176\u6210\u70ba\u5f88\u6709\u524d\u9014\u7684\u5019\u9078\u6750\u6599\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6563\u71b1\u5668<\/li>\n\n\n\n<li>\u4e92\u9023\u6750\u6599<\/li>\n\n\n\n<li>\u5148\u9032\u5c01\u88dd\u57fa\u677f<\/li>\n<\/ul>\n\n\n\n<p>\u672a\u4f86\u7684\u5c01\u88dd\u67b6\u69cb\u53ef\u80fd\u6703\u66f4\u591a\u5730\u63a1\u7528\u78b3\u5316\u77fd\uff0c\u4ee5\u63d0\u9ad8\u6548\u80fd\u548c\u53ef\u9760\u6027\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">7.\u5168\u7403\u683c\u5c40\u8207\u672a\u4f86\u5c55\u671b<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">7.1 \u5927\u5c3a\u5bf8\u6676\u5713\u7af6\u722d\u52a0\u5287<\/h3>\n\n\n\n<p>\u5168\u7403\u6b63\u52a0\u901f\u671d 12 \u540b\u53ca\u66f4\u9ad8\u898f\u683c\u767c\u5c55\u3002\u4e3b\u8981\u8da8\u52e2\u5305\u62ec<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>8 \u540b\u91cf\u7522\u8207 12 \u540b\u7814\u767c\u4e26\u884c\u767c\u5c55<\/li>\n\n\n\n<li>\u589e\u52a0\u5927\u578b\u88fd\u9020\u8a2d\u65bd\u7684\u6295\u8cc7<\/li>\n\n\n\n<li>\u65e5\u76ca\u91cd\u8996\u5782\u76f4\u6574\u5408<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">7.2 \u5f9e\u898f\u6a21\u7e2e\u653e\u5230\u6210\u672c\u8f49\u63db<\/h3>\n\n\n\n<p>\u5c55\u671b\u672a\u4f86\uff0c\u6709\u5e7e\u9805\u8da8\u52e2\u5c07\u5f71\u97ff SiC \u7522\u696d\u7684\u767c\u5c55\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u91cf\u7522 12 \u540b\u6676\u5713 (2026-2027)<\/strong><\/li>\n\n\n\n<li><strong>\u64f4\u5c55\u81f3\u65b0\u61c9\u7528\uff0c\u4f8b\u5982 AI \u8cc7\u6599\u4e2d\u5fc3\u548c AR \u88dd\u7f6e<\/strong><\/li>\n\n\n\n<li><strong>\u751f\u9577\u8207\u52a0\u5de5\u6280\u8853\u7684\u591a\u6a23\u5316<\/strong><\/li>\n\n\n\n<li><strong>\u5f9e\u8a2d\u5099\u9032\u53e3\u904e\u6e21\u5230\u5168\u7403\u51fa\u53e3\u80fd\u529b<\/strong><\/li>\n<\/ol>\n\n\n\n<h2 class=\"wp-block-heading\">8.\u7e3d\u7d50<\/h2>\n\n\n\n<p>\u5728\u6676\u5713\u5c3a\u5bf8\u7e2e\u653e\u548c\u5b8c\u6574\u4f9b\u61c9\u93c8\u6574\u5408\u7684\u9a45\u52d5\u4e0b\uff0cSiC \u534a\u5c0e\u9ad4\u7522\u696d\u6b63\u7d93\u6b77\u6df1\u523b\u7684\u8f49\u578b\u3002\u5f9e 12 \u540b\u6676\u9ad4\u6210\u9577\u7684\u7a81\u7834\u5230 14 \u540b\u57fa\u677f\u7684\u65e9\u671f\u63a2\u7d22\uff0c\u5f9e\u4e9e\u5fae\u7c73\u7cbe\u5bc6\u52a0\u5de5\u5230\u5148\u9032\u78ca\u6676\u6280\u8853\uff0c\u6bcf\u4e00\u9805\u5275\u65b0\u90fd\u6709\u52a9\u65bc\u5efa\u7acb\u66f4\u6210\u719f\u3001\u66f4\u5177\u7af6\u722d\u529b\u7684\u751f\u614b\u7cfb\u7d71\u3002.<\/p>\n\n\n\n<p>\u96a8\u8457\u88fd\u9020\u6280\u8853\u7684\u4e0d\u65b7\u767c\u5c55\uff0cSiC \u5df2\u6e96\u5099\u597d\u5f9e\u9ad8\u7aef\u61c9\u7528\u7684\u5229\u57fa\u6750\u6599\u904e\u6e21\u5230\u4e3b\u6d41\u534a\u5c0e\u9ad4\u5e73\u53f0\u3002\u8a2d\u5099\u5275\u65b0\u3001\u6750\u6599\u79d1\u5b78\u548c\u88fd\u7a0b\u5de5\u7a0b\u7684\u878d\u5408\u5c07\u6700\u7d42\u6c7a\u5b9a\u9019\u4e00\u8f49\u578b\u7684\u6b65\u4f10\u3002.<\/p>\n\n\n\n<p>\u5728\u6b64\u80cc\u666f\u4e0b\uff0c\u6676\u5713\u5c3a\u5bf8\u4e0d\u518d\u53ea\u662f\u4e00\u9805\u6280\u8853\u53c3\u6578\uff0c\u5b83\u4ee3\u8868\u8457\u6548\u7387\u3001\u6210\u672c\u512a\u52e2\uff0c\u4ee5\u53ca\u5728\u5168\u7403\u534a\u5c0e\u9ad4\u7248\u5716\u4e2d\u7684\u7b56\u7565\u5b9a\u4f4d\u3002.<\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>Silicon carbide (SiC), a representative material of the third-generation semiconductor family, has emerged as a cornerstone for next-generation power electronics, high-frequency devices, and advanced optical systems. Driven by the transition from 8-inch to 12-inch wafers and early-stage exploration of 14-inch substrates, the SiC industry is undergoing a structural transformation from isolated technological breakthroughs to fully [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2144,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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