{"id":2114,"date":"2026-04-03T06:00:09","date_gmt":"2026-04-03T06:00:09","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2114"},"modified":"2026-04-03T06:03:19","modified_gmt":"2026-04-03T06:03:19","slug":"the-ten-core-semiconductor-equipment-in-2026","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/zh\/the-ten-core-semiconductor-equipment-in-2026\/","title":{"rendered":"2026 \u5e74\u5341\u5927\u6838\u5fc3\u534a\u5c0e\u9ad4\u8a2d\u5099\uff1a\u5f9e\u6280\u8853\u969c\u7919\u5230\u570b\u7522\u7a81\u7834"},"content":{"rendered":"

\u534a\u5c0e\u9ad4\u7522\u696d\u7684\u5fc3\u8df3\u7531\u9ad8\u5ea6\u7cbe\u5bc6\u7684\u6838\u5fc3\u8a2d\u5099\u7dad\u6301\uff0c\u6bcf\u53f0\u8a2d\u5099\u90fd\u50f9\u503c\u6578\u767e\u842c\u7f8e\u5143\u3002\u5de5\u7a0b\u5e2b\u900f\u904e\u7cbe\u5bc6\u7684\u8996\u7a97\u76e3\u63a7\u6bd4\u4eba\u985e\u9aee\u7d72\u9084\u8981\u7d30\u4e0a\u5343\u500d\u7684\u96fb\u8def\uff0c\u78ba\u4fdd\u73fe\u4ee3\u6676\u7247\u88fd\u9020\u7684\u6bcf\u500b\u6b65\u9a5f\u90fd\u7b26\u5408\u6700\u9ad8\u6a19\u6e96\u3002\u534a\u5c0e\u9ad4\u6280\u8853\u7684\u6bcf\u4e00\u6b21\u7a81\u7834\uff0c\u90fd\u76f4\u63a5\u4ef0\u8cf4\u9019\u4e9b\u4f4d\u65bc\u7522\u696d\u93c8\u4e0a\u6e38\u7684\u8a2d\u5099\u7684\u9032\u6b65\u3002\u5168\u7403 \u534a\u5c0e\u9ad4\u88fd\u9020\u8a2d\u5099<\/mark> <\/a>2026 \u5e74\u5e02\u5834\u5c07\u6301\u7e8c\u64f4\u5927\uff0c\u7a81\u986f\u9019\u4e9b\u6a5f\u5668\u7684\u7b56\u7565\u8207\u7d93\u6fdf\u610f\u7fa9\u3002.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

1.\u7522\u696d\u683c\u5c40\uff1a\u8a2d\u5099\u50f9\u503c\u8207\u5206\u4f48<\/h3>\n\n\n\n

\u4e00\u53f0\u6700\u5148\u9032\u7684\u6975\u7d2b\u5916\u7dda (EUV) \u5149\u523b\u6a5f\u53ef\u80fd\u8981\u82b1\u8cbb\u6578\u767e\u842c\u7f8e\u5143\uff0c\u4e26\u5305\u542b\u6578\u5341\u842c\u500b\u5143\u4ef6\uff0c\u9060\u6bd4\u6c7d\u8eca\u7684\u6838\u5fc3\u96f6\u4ef6\u8907\u96dc\u3002\u534a\u5c0e\u9ad4\u88fd\u9020\u5c31\u50cf\u4e00\u5834\u8d85\u7cbe\u5bc6\u7684\u63a5\u529b\u8cfd\uff0c\u6bcf\u500b\u88fd\u7a0b\u90fd\u4f9d\u8cf4\u7279\u5b9a\u7684\u8a2d\u5099\u3002\u524d\u7aef\u6676\u5713\u88fd\u9020\u4f54\u4e86\u5927\u90e8\u5206\u7684\u8a2d\u5099\u6295\u8cc7\uff0c\u53cd\u6620\u4e86\u9ad8\u6280\u8853\u9580\u6abb\u4ee5\u53ca\u4e0d\u540c\u5143\u4ef6\u985e\u578b\u7684\u50f9\u503c\u5206\u5e03\u4e0d\u5747\u3002.<\/p>\n\n\n\n

\u6838\u5fc3\u8a2d\u5099\u7684\u4e3b\u8981\u985e\u5225\u5305\u62ec<\/p>\n\n\n\n

\u8a2d\u5099\u985e\u578b<\/th>\u524d\u7aef\u50f9\u503c\u6240\u4f54\u7684\u6bd4\u4f8b<\/th>\u5e02\u5834\u96c6\u4e2d\u5ea6<\/th>\u570b\u5167\u72c0\u6cc1<\/th><\/tr><\/thead>
\u5e73\u7248\u5370\u5237<\/td>~24%<\/td>\u9ad8\u5ea6\u6fc3\u7e2e<\/td>\u6210\u719f\u88fd\u7a0b\u4e2d\u7684\u7a81\u7834\u968e\u6bb5<\/td><\/tr>
\u8755\u523b<\/td>~20%<\/td>\u9ad8\u5ea6\u6fc3\u7e2e<\/td>\u5feb\u901f\u7684\u570b\u5167\u9032\u5c55<\/td><\/tr>
\u8584\u819c\u6c89\u7a4d<\/td>~20%<\/td>\u6fc3\u7e2e<\/td>\u8ffd\u8d95\u968e\u6bb5<\/td><\/tr>
\u88fd\u7a0b\u63a7\u5236\u8207\u6aa2\u9a57<\/td>~11%<\/td>\u5168\u7403\u9818\u5c0e\u5ee0\u5546<\/td>\u65e9\u671f\u570b\u5167\u7a81\u7834<\/td><\/tr>
\u6676\u5713\u6e05\u6d17<\/td>~5%<\/td>\u4e2d\u5ea6<\/td>\u90e8\u5206\u5b9a\u4f4d<\/td><\/tr>
\u5316\u5b78\u6a5f\u68b0\u7814\u78e8 (CMP)<\/td>~4%<\/td>\u4e2d\u5ea6<\/td>\u570b\u5167\u6ef2\u900f\u7387\u9ad8 (>50%)<\/td><\/tr>
\u96e2\u5b50\u690d\u5165<\/td>~3%<\/td>\u9ad8\u963b\u64cb<\/td>\u5f9e 0 \u5230 1 \u570b\u5167\u6210\u5c31<\/td><\/tr>
\u5149\u963b\u5857\u5c64\u8207\u958b\u767c<\/td><3%<\/td>\u9ad8\u5ea6\u6fc3\u7e2e<\/td>\u521d\u6b65\u7a81\u7834<\/td><\/tr>
\u6c27\u5316\/\u64f4\u6563<\/td>~2%<\/td>\u6fc3\u7e2e<\/td>\u6210\u719f\u88fd\u7a0b\u7684\u570b\u5167\u8986\u84cb\u7387\u9ad8<\/td><\/tr>
\u6297\u525d\u96e2<\/td>\u5c0f\u4efd\u984d<\/td>\u76f8\u5c0d\u5206\u6563<\/td>\u8fd1\u4e4e\u5168\u570b\u6027\u66f4\u63db<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2.\u5149\u523b\u6280\u8853\uff1a\u6280\u8853\u7684\u9802\u5cf0<\/h3>\n\n\n\n

\u5149\u523b\u5c07\u96fb\u8def\u5716\u6848\u8f49\u79fb\u5230\u77fd\u6676\u5713\u4e0a\uff0c\u76f4\u63a5\u6c7a\u5b9a\u6676\u7247\u7684\u6574\u5408\u5ea6\u8207\u6548\u80fd\u6975\u9650\u3002\u6b64\u88fd\u7a0b\u4f9d\u8cf4\u7cbe\u5bc6\u7684\u5149\u5b78\u6295\u5f71\u7cfb\u7d71\uff0c\u4e26\u9075\u5faa\u745e\u5229\u6e96\u5247 (CD = k\u2081-\u03bb\/NA)\uff0c\u4ee5\u7a81\u7834\u89e3\u6790\u5ea6\u7684\u6975\u9650\u3002\u5728\u5168\u7403\u7bc4\u570d\u5167\uff0c\u5e02\u5834\u662f\u5be1\u982d\u58df\u65b7\u7684\u3002\u5be6\u73fe\u6210\u719f\u88fd\u7a0b (\u226590\u5948\u7c73) \u7684\u570b\u5167\u80fd\u529b\u4ecd\u662f\u7b56\u7565\u91cd\u9ede\uff0c\u76ee\u524d\u7684\u5de5\u4f5c\u91cd\u9ede\u5728\u65bc\u9032\u4e00\u6b65\u64f4\u5c55\u5148\u9032\u7bc0\u9ede\u7684\u80fd\u529b\u3002.<\/p>\n\n\n\n

3.\u8755\u523b\uff1a\u4e09\u7dad\u7684\u7cbe\u78ba\u6027<\/h3>\n\n\n\n

\u8755\u523b\u5c07\u7279\u5b9a\u6750\u6599\u5f9e\u5716\u6848\u63a9\u819c\u4e0b\u7684\u6676\u5713\u79fb\u9664\uff0c\u4ee5\u5f62\u6210\u8907\u96dc\u7684 3D \u7d50\u69cb\u3002\u96a8\u8457\u6676\u7247\u8a2d\u8a08\u5f9e 2D \u67b6\u69cb\u904e\u6e21\u5230 3D \u67b6\u69cb\uff0c\u8755\u523b\u6b65\u9a5f\u7684\u6578\u91cf\u548c\u91cd\u8981\u6027\u4e5f\u96a8\u4e4b\u589e\u52a0\u3002\u4e7e\u5f0f\u8755\u523b\uff0c\u5c24\u5176\u662f\u96fb\u6f3f\u8755\u523b\uff0c\u662f\u76ee\u524d\u7684\u4e3b\u6d41\u6280\u8853\u3002\u570b\u7522\u8a2d\u5099\u5728\u6b64\u9818\u57df\u5df2\u53d6\u5f97\u5feb\u901f\u9032\u5c55\uff0c\u5148\u9032\u7684\u8755\u523b\u6a5f\u53ef\u9032\u884c\u9069\u5408 3D NAND \u88fd\u9020\u7684\u9ad8\u5bec\u9ad8\u6bd4\u8655\u7406\u3002.<\/p>\n\n\n\n

4.\u8584\u819c\u6c89\u7a4d\uff1a\u5efa\u7acb\u6676\u7247\u300c\u584a\u201c<\/h3>\n\n\n\n

\u8584\u819c\u6c89\u7a4d\u53ef\u5728\u6676\u5713\u8868\u9762\u751f\u9577\u6216\u8986\u84cb\u529f\u80fd\u6750\u6599\u5c64 (\u5c0e\u9ad4\u3001\u7d55\u7de3\u9ad4\u6216\u534a\u5c0e\u9ad4)\uff0c\u5f62\u6210\u6676\u7247\u7684\u91cd\u8981\u300c\u5efa\u7bc9\u584a\u300d\u3002\u4e3b\u8981\u7684\u6c89\u7a4d\u6280\u8853\u5305\u62ec\u7269\u7406\u6c23\u76f8\u6c89\u7a4d (PVD)\u3001\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (CVD) \u548c\u539f\u5b50\u5c64\u6c89\u7a4d (ALD)\uff0c\u5176\u4e2d\u4ee5 CVD \u61c9\u7528\u6700\u70ba\u5ee3\u6cdb\u3002\u570b\u5167\u6280\u8853\u5df2\u5728 PECVD\u3001PVD \u548c MOCVD \u7cfb\u7d71\u4e0a\u53d6\u5f97\u986f\u8457\u7a81\u7834\uff0c\u6db5\u84cb\u591a\u7a2e\u91d1\u5c6c\u5316\u548c\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u61c9\u7528\u3002.<\/p>\n\n\n\n

5.\u5176\u4ed6\u95dc\u9375\u8a2d\u5099<\/h3>\n\n\n\n

\u5176\u4ed6\u5fc5\u8981\u88dd\u7f6e\u53ef\u652f\u63f4\u6676\u7247\u88fd\u9020\uff0c\u4e26\u78ba\u4fdd\u826f\u7387\u8207\u54c1\u8cea\uff1a<\/p>\n\n\n\n

    \n
  • \u88fd\u7a0b\u63a7\u5236\u8207\u6aa2\u9a57\uff1a<\/strong> \u76e3\u63a7\u5948\u7c73\u5c3a\u5ea6\u7684\u88fd\u9020\u6b65\u9a5f\u4ee5\u4fdd\u6301\u826f\u7387\u3002\u6280\u8853\u969c\u7919\u5f88\u9ad8\uff0c\u4f46\u570b\u5167\u7684\u7cfb\u7d71\u5df2\u958b\u59cb\u5f4c\u88dc\u5dee\u8ddd\u3002.<\/li>\n\n\n\n
  • \u96e2\u5b50\u690d\u5165\uff1a<\/strong> \u6539\u8b8a\u534a\u5c0e\u9ad4\u7684\u96fb\u6c23\u7279\u6027\u3002\u570b\u7522\u9ad8\u80fd\u96e2\u5b50\u690d\u5165\u5668\u5df2\u5be6\u73fe\u300c\u5f9e 0 \u5230 1\u300d\u7684\u7a81\u7834\u3002.<\/li>\n\n\n\n
  • \u5316\u5b78\u6a5f\u68b0\u7814\u78e8 (CMP)\uff1a<\/strong> \u78ba\u4fdd\u5168\u7403\u6676\u5713\u5e73\u9762\u5316\u3002\u570b\u7522 CMP \u7cfb\u7d71\u5728\u226528 \u5948\u7c73\u88fd\u7a0b\u7684\u5e02\u4f54\u7387\u73fe\u5df2\u8d85\u904e 50%\u3002.<\/li>\n\n\n\n
  • \u6676\u5713\u6e05\u6d17\uff1a<\/strong> \u7121\u7f3a\u9677\u88fd\u9020\u7684\u6574\u9ad4\u3002\u570b\u5167\u6e05\u6d17\u7cfb\u7d71\u5df2\u9054\u5230\u76f8\u5c0d\u8f03\u9ad8\u7684\u5b9a\u4f4d\u7387\u3002.<\/li>\n<\/ul>\n\n\n\n

    6.2026 \u5e74\u7684\u7522\u696d\u6a5f\u9047\u8207\u6311\u6230<\/h3>\n\n\n\n

    \u570b\u7522\u534a\u5c0e\u9ad4\u8a2d\u5099\u7684\u5d1b\u8d77\u662f\u7531\u6280\u8853\u3001\u5e02\u5834\u9700\u6c42\u548c\u653f\u7b56\u652f\u6301\u5171\u540c\u63a8\u52d5\u7684\u3002\u6676\u5713\u88fd\u9020\u8a2d\u5099\u7684\u5927\u898f\u6a21\u64f4\u5c55\u63d0\u4f9b\u4e86\u5bf6\u8cb4\u7684\u8a66\u9a57\u5834\u5730\uff0c\u800c\u570b\u5bb6\u57fa\u91d1\u5247\u52a0\u901f\u4e86\u5275\u65b0\u3002\u76ee\u524d\u7684\u7a81\u7834\u91cd\u9ede\u5728\u6210\u719f\u88fd\u7a0b (\u226528\u5948\u7c73)\uff0c\u76ee\u6a19\u662f\u9010\u6b65\u6db5\u84cb\u5148\u9032\u7bc0\u9ede\u3002\u67d0\u4e9b\u90e8\u5206\uff0c\u4f8b\u5982\u5149\u523b\u3001\u9ad8\u968e\u8a08\u91cf\u548c\u96e2\u5b50\u690d\u5165\uff0c\u4ecd\u7136\u662f\u56f0\u96e3\u7684\u6311\u6230\u3002\u534a\u5c0e\u9ad4\u8a2d\u5099\u672c\u8eab\u5c31\u662f\u8cc7\u91d1\u3001\u4eba\u624d\u548c\u6280\u8853\u5bc6\u96c6\u578b\u7684\uff0c\u9700\u8981\u9577\u671f\u7684\u767c\u5c55\u548c\u751f\u614b\u7cfb\u7d71\u7684\u5408\u4f5c\u3002.<\/p>\n\n\n\n

    \u5728\u7121\u5875\u5ba4\u5167\uff0c\u6a5f\u68b0\u624b\u81c2\u7a69\u5b9a\u5730\u5c07\u6676\u5713\u88dd\u5165\u5bb6\u7528\u8755\u523b\u6a5f\u3002\u5373\u6642\u7684\u5948\u7c73\u5c3a\u5ea6\u76e3\u63a7\u78ba\u4fdd\u4e86\u7a69\u5b9a\u7684\u53c3\u6578\u548c\u76ee\u6a19\u826f\u7387\u3002\u5de5\u7a0b\u5e2b\u5011\u8a18\u9304\u6578\u64da--\u9019\u662f\u570b\u7522\u8a2d\u5099\u6210\u529f\u9a57\u8b49\u7684\u8b49\u660e\u3002\u8207\u6b64\u540c\u6642\uff0c\u4e0b\u4e00\u4ee3\u5149\u523b\u6a5f\u7684\u539f\u578b\u6b63\u5728\u9032\u884c\u4ed4\u7d30\u7684\u6821\u6e96\uff0c\u5b83\u5011\u7684\u5149\u6e90\u767c\u51fa\u67d4\u548c\u7684\u5149\u8292\u3002\u7246\u4e0a\u7684\u6a19\u8a9e\u5beb\u8457\u300c\u6bcf\u4e00\u5948\u7c73\u7684\u9032\u6b65\uff0c\u90fd\u7531\u6211\u5011\u89aa\u624b\u4e08\u91cf\u300d\u3002\u201c<\/p>","protected":false},"excerpt":{"rendered":"

    The heartbeat of the semiconductor industry is maintained by highly sophisticated core equipment, each worth millions of dollars. Engineers monitor circuits thousands of times finer than human hair through precision windows, ensuring every step in modern chip manufacturing meets the highest standards. Every breakthrough in semiconductor technology relies directly on advances in these devices, which […]<\/p>\n","protected":false},"author":1,"featured_media":2115,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[795,792,793,343,797,276,800,706,799,798,40,721,794,350,796],"class_list":["post-2114","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-2026-trends","tag-chip-manufacturing","tag-cleaning-equipment","tag-cmp-equipment","tag-domestic-manufacturers","tag-etching-equipment","tag-high-end-equipment","tag-ion-implantation","tag-lithography-machine","tag-localization","tag-semiconductor-equipment","tag-semiconductor-industry","tag-technological-barrier","tag-thin-film-deposition","tag-wafer-fab"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/posts\/2114","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/comments?post=2114"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/posts\/2114\/revisions"}],"predecessor-version":[{"id":2116,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/posts\/2114\/revisions\/2116"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media\/2115"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media?parent=2114"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/categories?post=2114"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/tags?post=2114"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}