{"id":2112,"date":"2026-04-03T05:44:04","date_gmt":"2026-04-03T05:44:04","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2112"},"modified":"2026-04-03T05:44:13","modified_gmt":"2026-04-03T05:44:13","slug":"silicon-carbide-sic-epitaxy-equipment-and-industry-overview","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/zh\/silicon-carbide-sic-epitaxy-equipment-and-industry-overview\/","title":{"rendered":"\u78b3\u5316\u77fd (SiC) \u78ca\u6676\u8a2d\u5099\u8207\u7522\u696d\u6982\u6cc1"},"content":{"rendered":"<p>\u534a\u5c0e\u9ad4\u5916\u5ef6\u662f\u6307\u5728\u77fd\u6216\u78b3\u5316\u77fd (SiC) \u57fa\u677f\u4e0a\u751f\u9577\u55ae\u6676\u8584\u819c\u7684\u88fd\u7a0b\u3002\u78ca\u6676\u5c64\u8207\u57fa\u677f\u5177\u6709\u76f8\u540c\u7684\u6676\u9ad4\u53d6\u5411\uff0c\u53ef\u4ee5\u4f7f\u7528\u76f8\u540c\u7684\u6750\u6599 (\u540c\u7cfb\u5916\u5ef6) \u6216\u4e0d\u540c\u7684\u6750\u6599 (\u7570\u7cfb\u5916\u5ef6) \u751f\u9577\u3002\u5c0d\u65bc\u9ad8\u983b\u548c\u9ad8\u529f\u7387\u88dd\u7f6e\uff0c\u78ca\u6676\u751f\u9577\u6709\u52a9\u65bc\u512a\u5316\u88dd\u7f6e\u6548\u80fd\uff1a\u9ad8\u963b\u7387\u78ca\u6676\u5c64\u53ef\u63d0\u4f9b\u9ad8\u64ca\u7a7f\u96fb\u58d3\uff0c\u800c\u4f4e\u963b\u7387\u57fa\u677f\u5247\u53ef\u964d\u4f4e\u4e32\u806f\u96fb\u963b\uff0c\u5f9e\u800c\u964d\u4f4e\u98fd\u548c\u96fb\u58d3\u3002\u78ca\u6676\u5c64\u53ef\u647b\u96dc\u70ba P \u578b\u6216 N \u578b\uff0c\u5f62\u6210\u5141\u8a31\u55ae\u5411\u96fb\u6d41\u7684 PN \u7d50\uff0c\u5f9e\u800c\u5be6\u73fe\u6574\u6d41\u3002SiC \u78ca\u6676\u88ab\u5ee3\u6cdb\u61c9\u7528\u65bc\u96fb\u529b\u96fb\u5b50\u3001\u5c04\u983b (RF) \u88dd\u7f6e\u548c\u5149\u96fb\u61c9\u7528\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png\" alt=\"\" class=\"wp-image-2091\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png 1000w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">1.SiC \u7522\u696d\u93c8\u8207\u50f9\u503c\u5206\u4f48<\/h3>\n\n\n\n<p>SiC \u5143\u4ef6\u7522\u696d\u93c8\u5305\u542b\u4e09\u500b\u4e3b\u8981\u74b0\u7bc0\uff1a\u57fa\u677f\u3001\u78ca\u6676\u548c\u5143\u4ef6\u88fd\u9020 (\u8a2d\u8a08\u3001\u88fd\u9020\u548c\u5c01\u88dd)\u3002\u57fa\u677f\u548c\u5916\u5ef6\u968e\u6bb5\u7d04\u4f54\u50f9\u503c\u93c8\u7684 70%\uff0c\u800c\u4e0b\u6e38\u5143\u4ef6\u52a0\u5de5\u50c5\u4f54 30%\u3002\u9019\u8207\u50b3\u7d71\u77fd\u6676\u5713\u5143\u4ef6\u5f62\u6210\u5c0d\u6bd4\uff0c\u5f8c\u6676\u5713\u88fd\u7a0b\u4f54\u4e86\u5927\u90e8\u5206\u7684\u751f\u7522\u6210\u672c\u3002\u4e0a\u6e38\u7684\u9ad8\u50f9\u503c\u96c6\u4e2d\u7a81\u986f\u4e86\u57fa\u677f\u548c\u78ca\u6676\u6280\u8853\u7684\u7b56\u7565\u91cd\u8981\u6027\u3002.<\/p>\n\n\n\n<p><strong>\u57fa\u677f\u90e8\u5206<\/strong> \u6d89\u53ca\u6676\u9ad4\u6210\u9577\u3001\u6676\u5713\u5207\u7247\u3001\u7814\u78e8\u548c\u62cb\u5149\u3002\u6676\u9ad4\u6210\u9577\u53ef\u900f\u904e\u7269\u7406\u6c23\u76f8\u8f38\u9001 (PVT)\u3001\u9ad8\u6eab\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d (HTCVD) \u6216\u6db2\u76f8\u5916\u5ef6 (LPE) \u4f86\u5be6\u73fe\u3002\u6676\u5713\u5207\u7247\u4f7f\u7528\u7dda\u92f8\u3001\u947d\u77f3\u7dda\u3001\u96f7\u5c04\u6216\u51b7\u5206\u96e2\u65b9\u6cd5\uff0c\u800c\u5316\u5b78\u6a5f\u68b0\u7814\u78e8 (CMP) \u5247\u53ef\u78ba\u4fdd\u5e73\u5766\u3001\u7121\u7455\u75b5\u7684\u8868\u9762\u9069\u5408\u5916\u5ef6\u751f\u9577\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.SiC \u57fa\u677f\u751f\u7522\u88fd\u7a0b<\/h3>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u6676\u9ad4\u751f\u9577\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>PVT\uff1a<\/strong> SiC \u6676\u9ad4\u751f\u9577\u7684\u4e3b\u6d41\u65b9\u6cd5\u3002\u8a2d\u5099\u76f8\u5c0d\u7c21\u55ae\uff0c\u64cd\u4f5c\u6210\u672c\u4f4e\uff0c\u88fd\u7a0b\u63a7\u5236\u7c21\u55ae\u76f4\u63a5\u3002.<\/li>\n\n\n\n<li><strong>HTCVD\uff1a<\/strong> \u53ef\u751f\u7522\u9ad8\u7d14\u5ea6\u7684\u6676\u9ad4\uff0c\u4f46\u6210\u9577\u901f\u5ea6\u8f03\u6162\u3001\u7522\u91cf\u8f03\u4f4e\u3001\u6210\u672c\u8f03\u9ad8\u3002.<\/li>\n\n\n\n<li><strong>LPE\uff1a<\/strong> \u53ef\u751f\u7522\u9ad8\u54c1\u8cea\u3001\u4f4e\u7f3a\u9677\u7684\u6676\u9ad4\uff0c\u4f46\u751f\u9577\u901f\u5ea6\u548c\u5c3a\u5bf8\u6709\u9650\u3002.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u6676\u5713\u5207\u7247\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u7dda\u92f8\uff1a<\/strong> \u9ad8\u7522\u91cf\u3001\u4f4e\u6210\u672c\u7684\u6a19\u6e96\u65b9\u6cd5\u3002.<\/li>\n\n\n\n<li><strong>\u947d\u77f3\u7dda\u8207\u96f7\u5c04\u5207\u7247\uff1a<\/strong> \u63d0\u4f9b\u66f4\u9ad8\u7684\u6548\u7387\u3001\u6e1b\u5c11\u6750\u6599\u640d\u8017\uff0c\u4e26\u5177\u6709\u74b0\u4fdd\u6548\u76ca\u3002.<\/li>\n\n\n\n<li><strong>\u51b7\u5206\u96e2\uff1a<\/strong> \u4f7f\u7528\u5167\u90e8\u6750\u6599\u61c9\u529b\u5206\u96e2\u6676\u5713\uff0c\u640d\u5931\u6700\u5c0f\u3002.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u7814\u78e8\u548c\u62cb\u5149\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>CMP\uff1a<\/strong> \u9019\u662f\u5be6\u73fe\u9ad8\u5e73\u5766\u5ea6\u3001\u7121\u7455\u75b5\u6676\u5713\u8868\u9762\u7684\u4e3b\u8981\u65b9\u6cd5\uff0c\u5c0d\u65bc\u9ad8\u54c1\u8cea\u7684\u78ca\u6676\u975e\u5e38\u91cd\u8981\u3002.<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\">3.\u78ca\u6676\u88fd\u7a0b\u8207\u8a2d\u5099<\/h3>\n\n\n\n<p>\u5916\u5ef6\u751f\u9577\u662f\u78b3\u5316\u77fd\u5143\u4ef6\u88fd\u9020\u7684\u95dc\u9375\u6b65\u9a5f\u3002\u8207\u50b3\u7d71\u7684\u77fd\u5143\u4ef6\u4e0d\u540c\uff0cSiC\u5143\u4ef6\u7121\u6cd5\u76f4\u63a5\u5728\u57fa\u677f\u4e0a\u52a0\u5de5\u3002\u5728\u5143\u4ef6\u88fd\u9020\u4e4b\u524d\uff0c\u5fc5\u9808\u5148\u5728\u57fa\u677f\u4e0a\u751f\u9577\u9ad8\u54c1\u8cea\u7684\u55ae\u6676\u78ca\u6676\u5c64\u3002.<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u5916\u5ef6\u985e\u578b\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>Homoepitaxy\uff1a<\/strong> \u5728\u5c0e\u96fb\u78b3\u5316\u77fd\u57fa\u677f\u4e0a\u751f\u9577\u78b3\u5316\u77fd\uff0c\u7528\u65bc\u4f4e\u529f\u7387\u88dd\u7f6e\u3001\u5c04\u983b\u548c\u5149\u96fb\u61c9\u7528\u3002.<\/li>\n\n\n\n<li><strong>Heteroepitaxy\uff1a<\/strong> \u5728\u534a\u7d55\u7de3\u7684 SiC \u57fa\u677f\u4e0a\u751f\u9577 GaN\uff0c\u7528\u65bc\u9ad8\u529f\u7387\u88dd\u7f6e\u3002.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u78ca\u6676\u8a2d\u5099\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>CVD\uff08\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d\uff09\uff1a<\/strong> \u6c23\u614b\u524d\u5c0e\u9ad4\u5728\u52a0\u71b1\u7684 SiC \u57fa\u677f\u4e0a\u53cd\u61c9\uff0c\u6c89\u7a4d\u5916\u5ef6\u5c64\u3002.<\/li>\n\n\n\n<li><strong>MOCVD (Metal-Organic CVD)\uff1a<\/strong> \u4f7f\u7528\u91d1\u5c6c\u6709\u6a5f\u524d\u9a45\u9ad4\uff0c\u53ef\u5728\u8f03\u4f4e\u6eab\u5ea6\u4e0b\u9032\u884c\u6c89\u7a4d\uff0c\u4e26\u70ba\u8907\u96dc\u7d50\u69cb\u63d0\u4f9b\u8d85\u8584\u5c64\u3002.<\/li>\n\n\n\n<li><strong>LPE\uff1a<\/strong> \u5c07\u6e90\u6750\u6599\u6eb6\u89e3\u5728\u7194\u878d\u91d1\u5c6c\u6eb6\u5291\u4e2d\uff0c\u4e26\u5728\u51b7\u537b\u5f8c\u6c89\u7a4d\u5230\u57fa\u677f\u4e0a\u3002.<\/li>\n\n\n\n<li><strong>MBE\uff08\u5206\u5b50\u675f\u78ca\u6676\uff09\uff1a<\/strong> \u5728\u8d85\u9ad8\u771f\u7a7a\u4e0b\u6c89\u7a4d\u539f\u5b50\u5c64\uff0c\u53ef\u7cbe\u78ba\u63a7\u5236\u8584\u819c\u539a\u5ea6\u8207\u6210\u5206\u3002.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u5916\u5ef6\u5f8c\u6676\u5713\u5207\u5272\uff1a<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u6a5f\u68b0\u5207\u5272<\/strong> \u548c <strong>\u96f7\u5c04\u5207\u5272<\/strong> \u5f88\u5e38\u898b\u3002.<\/li>\n\n\n\n<li><strong>\u96f7\u5c04\u5207\u5272<\/strong> \u5c07\u9ad8\u80fd\u91cf\u8108\u885d\u96c6\u4e2d\u5728\u5c0f\u5340\u57df\uff0c\u4f7f\u6750\u6599\u6607\u83ef\u6216\u6539\u8cea\uff0c\u6e1b\u5c11\u5207\u53e3\u640d\u8017\u548c\u88c2\u7e2b\u5f62\u6210\u3002.<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\">4.\u5e02\u5834\u8207\u6280\u8853\u8da8\u52e2<\/h3>\n\n\n\n<p>SiC \u78ca\u6676\u548c\u57fa\u677f\u751f\u7522\u4ecd\u7136\u662f\u5168\u7403\u534a\u5c0e\u9ad4\u7522\u696d\u4e2d\u7684\u6280\u8853\u5bc6\u96c6\u578b\u7522\u696d\u3002\u672a\u4f86\u8da8\u52e2\u5305\u62ec\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5c07\u57fa\u677f\u5c3a\u5bf8\u5f9e 6 \u540b\u589e\u52a0\u5230 8 \u540b\u6216\u66f4\u5927\uff0c\u4ee5\u964d\u4f4e\u55ae\u4f4d\u6210\u672c\u3002.<\/li>\n\n\n\n<li>\u589e\u5f37\u5916\u5ef6\u8a2d\u5099\u7684\u9ad8\u7cbe\u5ea6\u3001\u4f4e\u7f3a\u9677\u5bc6\u5ea6\u548c\u539f\u5b50\u5c64\u63a7\u5236\uff0c\u4ee5\u6eff\u8db3\u9ad8\u529f\u7387\u548c\u9ad8\u983b\u7387\u7684\u8981\u6c42\u3002.<\/li>\n\n\n\n<li>\u63a8\u52d5\u5207\u5272\u6280\u8853\u671d\u5411\u975e\u63a5\u89f8\u3001\u4f4e\u640d\u5931\u96f7\u5c04\u548c\u51b7\u5206\u96e2\u7684\u65b9\u6cd5\u767c\u5c55\u3002.<\/li>\n\n\n\n<li>\u63a8\u52d5\u570b\u5167\u53ca\u5168\u7403\u8a2d\u5099\u81ea\u4e3b\u5316\uff0c\u7279\u5225\u662f\u5728\u78ca\u6676\u7210\u53ca\u9ad8\u7cbe\u5bc6\u5207\u5272\u7cfb\u7d71\u65b9\u9762\u3002.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">5.\u7e3d\u7d50<\/h3>\n\n\n\n<p><a href=\"https:\/\/www.zmsh-semitech.com\/zh\/%e7%94%a2%e5%93%81\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/\"><mark style=\"background-color:rgba(0, 0, 0, 0)\" class=\"has-inline-color has-ast-global-color-1-color\">SiC \u78ca\u6676\u8a2d\u5099 <\/mark><\/a>\u662f\u88fd\u9020\u9ad8\u529f\u7387\u3001RF \u548c\u5149\u96fb\u5143\u4ef6\u7684\u5fc5\u8981\u689d\u4ef6\u3002\u57fa\u677f\u3001\u78ca\u6676\u5c64\u548c\u5207\u5272\u8a2d\u5099\u7684\u54c1\u8cea\u76f4\u63a5\u5f71\u97ff\u88dd\u7f6e\u6548\u80fd\u548c\u7522\u696d\u7af6\u722d\u529b\u3002\u96a8\u8457\u5927\u529f\u7387\u88dd\u7f6e\u7684\u9700\u6c42\u65e5\u76ca\u589e\u52a0\uff0c\u78ca\u6676\u6280\u8853\u7684\u6301\u7e8c\u9032\u6b65\u548c\u672c\u5730\u5316\u5c07\u5728\u534a\u5c0e\u9ad4\u50f9\u503c\u93c8\u4e2d\u626e\u6f14\u8d8a\u4f86\u8d8a\u91cd\u8981\u7684\u89d2\u8272\u3002.<\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>Semiconductor epitaxy refers to the process of growing single-crystal thin films on silicon or silicon carbide (SiC) substrates. The epitaxial layer shares the same crystal orientation as the substrate and can be grown using either the same material (homoepitaxy) or different materials (heteroepitaxy). For high-frequency and high-power devices, epitaxial growth helps optimize device performance: high-resistivity [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2091,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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