{"id":1930,"date":"2026-03-20T05:44:51","date_gmt":"2026-03-20T05:44:51","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=1930"},"modified":"2026-03-20T05:44:59","modified_gmt":"2026-03-20T05:44:59","slug":"next-generation-semiconductor-processing-equipment-trends-in-sic-gan-and-composite-materials","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/zh\/next-generation-semiconductor-processing-equipment-trends-in-sic-gan-and-composite-materials\/","title":{"rendered":"\u4e0b\u4e00\u4ee3\u534a\u5c0e\u9ad4\u88fd\u7a0b\u8a2d\u5099\uff1aSiC\u3001GaN \u53ca\u8907\u5408\u6750\u6599\u7684\u8da8\u52e2"},"content":{"rendered":"

1.\u7c21\u4ecb<\/h3>\n\n\n\n

\u96a8\u8457\u96fb\u52d5\u6c7d\u8eca\u3001\u53ef\u518d\u751f\u80fd\u6e90\u30015G \u901a\u8a0a\u548c\u9ad8\u6548\u80fd\u904b\u7b97\u7684\u5feb\u901f\u767c\u5c55\uff0c\u50b3\u7d71\u7684\u77fd\u57fa\u534a\u5c0e\u9ad4\u5728\u9ad8\u529f\u7387\u3001\u9ad8\u983b\u7387\u548c\u9ad8\u6eab\u74b0\u5883\u4e0b\u53d7\u5230\u8d8a\u4f86\u8d8a\u591a\u7684\u9650\u5236\u3002\u78b3\u5316\u77fd (SiC) \u548c\u6c2e\u5316\u93b5 (GaN) \u4f5c\u70ba\u5bec\u5e36\u9699\u534a\u5c0e\u9ad4\u6750\u6599\uff0c\u5177\u6709\u9ad8\u64ca\u7a7f\u96fb\u58d3\u3001\u512a\u7570\u7684\u71b1\u5c0e\u6027\u548c\u5353\u8d8a\u7684\u9ad8\u983b\u6027\u80fd\uff0c\u662f\u4e0b\u4e00\u4ee3\u534a\u5c0e\u9ad4\u5668\u4ef6\u7684\u6838\u5fc3\u6750\u6599\u3002.<\/p>\n\n\n\n

\u96a8\u8457\u6750\u6599\u7684\u9032\u6b65\uff0c\u534a\u5c0e\u9ad4\u52a0\u5de5\u8a2d\u5099\u4e5f\u5728\u4e0d\u65b7\u6f14\u9032\uff0c\u4ee5\u8fce\u63a5\u9019\u4e9b\u65b0\u6750\u6599\u7684\u6311\u6230\u3002\u672c\u6587\u5c07\u91dd\u5c0d\u4e0b\u4e00\u4ee3\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u8a2d\u5099\u8da8\u52e2\u3001\u4e3b\u8981\u529f\u80fd\u53ca\u672a\u4f86\u767c\u5c55\u65b9\u5411\u9032\u884c\u79d1\u5b78\u6027\u6982\u8ff0\u3002.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

2.\u77fd\u6676\u5713\u88fd\u7a0b\u8a2d\u5099<\/h3>\n\n\n\n

SiC \u6676\u5713\u5177\u6709\u6975\u9ad8\u7684\u786c\u5ea6\u3001\u5c0e\u71b1\u6027\u548c\u8106\u6027\uff0c\u5c0d\u52a0\u5de5\u8a2d\u5099\u63d0\u51fa\u4e86\u5f88\u9ad8\u7684\u8981\u6c42\u3002SiC \u6676\u5713\u88fd\u9020\u7684\u5178\u578b\u8a2d\u5099\u5305\u62ec\uff1a<\/p>\n\n\n\n

    \n
  1. \u9ad8\u6eab\u9ad8\u58d3 (PVT) \u7210<\/strong> - \u7528\u65bc\u751f\u9577\u9ad8\u54c1\u8cea\u7684\u55ae\u6676 SiC \u92fc\u9320\u3002.<\/li>\n\n\n\n
  2. \u7cbe\u5bc6\u7dda\u92f8<\/mark><\/a><\/strong> - \u5229\u7528\u947d\u77f3\u7dda\u6216\u96f7\u5c04\u5207\u5272\uff0c\u4ee5\u78ba\u4fdd\u6676\u5713\u539a\u5ea6\u548c\u5c3a\u5bf8\u7cbe\u78ba\u5ea6\u3002.<\/li>\n\n\n\n
  3. \u5316\u5b78\u6a5f\u68b0\u7814\u78e8 (CMP) \u8a2d\u5099<\/strong> - \u7528\u65bc\u5228\u5e73\u6676\u5713\u8868\u9762\uff0c\u5c07\u7f3a\u9677\u548c\u8868\u9762\u7c97\u7cd9\u5ea6\u964d\u81f3\u6700\u4f4e\u3002.<\/li>\n\n\n\n
  4. \u96f7\u5c04\u8755\u523b\u8207\u6253\u6a19\u7cfb\u7d71<\/strong> - \u7528\u65bc\u529f\u7387\u88dd\u7f6e\u548c\u5149\u96fb\u61c9\u7528\u7684\u5fae\u52a0\u5de5\u3002.<\/li>\n<\/ol>\n\n\n\n

    \u96a8\u8457 SiC \u88dd\u7f6e\u9081\u5411\u66f4\u5927\u7684\u6676\u5713\u76f4\u5f91 (\u4f8b\u5982 200mm \u548c 300mm)\uff0c\u9ad8\u7cbe\u5ea6\u5207\u5272\u3001\u62cb\u5149\u548c\u81ea\u52d5\u5316\u6676\u5713\u8655\u7406\u7cfb\u7d71\u6210\u70ba\u7522\u696d\u7684\u512a\u5148\u8003\u91cf\u3002.<\/p>\n\n\n\n

    3.GaN \u534a\u5c0e\u9ad4\u88fd\u7a0b\u8a2d\u5099<\/h3>\n\n\n\n

    \u6c2e\u5316\u93b5 (GaN) \u4e3b\u8981\u7528\u65bc\u9ad8\u983b RF \u88dd\u7f6e\u548c\u529f\u7387\u96fb\u5b50\u3002\u6c2e\u5316\u93b5\u6676\u5713\u901a\u5e38\u751f\u9577\u5728\u77fd\u6216\u85cd\u5bf6\u77f3\u57fa\u677f\u4e0a\uff0c\u56e0\u6b64\u52a0\u5de5\u8a2d\u5099\u5fc5\u9808\u80fd\u5920\u9069\u61c9\u7570\u8cea\u57fa\u677f\uff1a<\/p>\n\n\n\n

      \n
    • MOCVD\uff08\u91d1\u5c6c\u6709\u6a5f\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d\uff09\u7cfb\u7d71<\/strong> - GaN \u8584\u819c\u751f\u9577\u7684\u6838\u5fc3\u8a2d\u5099\uff0c\u63a7\u5236\u539a\u5ea6\u548c\u647b\u96dc\u7cbe\u5ea6\u3002.<\/li>\n\n\n\n
    • ICP \u4e7e\u5f0f\u8755\u523b\u6a5f<\/strong> - \u7528\u65bc\u5177\u6709\u9ad8\u7e31\u6a6b\u6bd4\u548c\u5e73\u6ed1\u5074\u58c1\u7684\u5fae\u7d50\u69cb\u5716\u6848\u88fd\u4f5c\u3002.<\/li>\n\n\n\n
    • \u81ea\u52d5\u5316\u6676\u5713\u8655\u7406\u7cfb\u7d71<\/strong> - \u6e1b\u5c11\u6613\u788e GaN \u6676\u5713\u7684\u7834\u640d\u4e26\u63d0\u9ad8\u826f\u7387\u3002.<\/li>\n<\/ul>\n\n\n\n

      GaN \u8a2d\u5099\u7684\u8da8\u52e2\u8457\u91cd\u65bc\u5c0f\u6279\u91cf\u9ad8\u7cbe\u5bc6\u88fd\u9020\u3001\u4f4e\u7f3a\u9677\u7387\u548c\u591a\u57fa\u677f\u76f8\u5bb9\u6027\uff0c\u4ee5\u6eff\u8db3 5G \u57fa\u7ad9\u548c\u5feb\u901f\u5145\u96fb\u96fb\u52d5\u8eca\u61c9\u7528\u7684\u9700\u6c42\u3002.<\/p>\n\n\n\n

      4.\u8907\u5408\u6750\u6599\u8207\u4e0b\u4e00\u4ee3\u8a2d\u5099<\/h3>\n\n\n\n

      \u8d85\u8d8a SiC \u548c GaN\u3001, \u8907\u5408\u534a\u5c0e\u9ad4\u6750\u6599<\/strong> (\u4f8b\u5982\uff0cSiC\/GaN \u6df7\u5408\u88dd\u7f6e\u3001\u591a\u5c64\u7570\u8cea\u7d50\u69cb\uff09\u6b63\u5728\u51fa\u73fe\u3002\u8907\u5408\u6750\u6599\u70ba\u8a2d\u5099\u5e36\u4f86\u4e86\u65b0\u7684\u6311\u6230\uff1a<\/p>\n\n\n\n

        \n
      1. \u591a\u6750\u8cea\u76f8\u5bb9\u6027<\/strong> - \u8a2d\u5099\u5fc5\u9808\u5728\u76f8\u540c\u7684\u5de5\u4f5c\u6d41\u7a0b\u4e2d\u8655\u7406\u4e0d\u540c\u786c\u5ea6\u548c\u71b1\u81a8\u8139\u4fc2\u6578\u7684\u6750\u6599\u3002.<\/li>\n\n\n\n
      2. \u9ad8\u7cbe\u5ea6\u5c0d\u6e96\u8207\u5c01\u88dd<\/strong> - \u5948\u7c73\u7d1a\u5c0d\u4f4d\u662f\u7570\u8cea\u6574\u5408\u7684\u95dc\u9375\u3002.<\/li>\n\n\n\n
      3. \u9032\u968e\u76e3\u6e2c\u8207\u63a7\u5236<\/strong> - \u7dda\u4e0a\u6aa2\u6e2c\u3001AI \u8996\u89ba\u8b58\u5225\u548c\u6eab\u5ea6\u63a7\u5236\u78ba\u4fdd\u88fd\u7a0b\u7a69\u5b9a\u6027\u3002.<\/li>\n<\/ol>\n\n\n\n

        \u9019\u4e9b\u9700\u6c42\u9a45\u4f7f\u8a2d\u5099\u671d\u5411\u6a21\u7d44\u5316\u3001\u667a\u6167\u578b\u53ca\u8907\u5408\u6750\u6599\u76f8\u5bb9\u8a2d\u8a08\u7684\u65b9\u5411\u767c\u5c55\u3002.<\/p>\n\n\n\n

        5.\u81ea\u52d5\u5316\u8207\u667a\u6167\u578b\u8a2d\u5099<\/h3>\n\n\n\n

        \u672a\u4f86\u534a\u5c0e\u9ad4\u8a2d\u5099\u7684\u767c\u5c55\u5f37\u8abf\u81ea\u52d5\u5316\u8207\u667a\u6167\u5316\uff1a<\/p>\n\n\n\n

          \n
        • \u5de5\u696d 4.0 \u6574\u5408<\/strong> - \u6676\u5713\u548c\u8655\u7406\u53c3\u6578\u7684\u5373\u6642\u76e3\u63a7\u53ef\u5be6\u73fe\u8cc7\u6599\u5c0e\u5411\u7684\u6700\u4f73\u5316\u3002.<\/li>\n\n\n\n
        • AI \u8f14\u52a9\u63a7\u5236<\/strong> - \u6a5f\u5668\u5b78\u7fd2\u53ef\u512a\u5316\u5207\u5272\u8def\u5f91\u3001\u62cb\u5149\u58d3\u529b\u548c\u6c89\u7a4d\u53c3\u6578\uff0c\u5f9e\u800c\u63d0\u9ad8\u826f\u7387\u3002.<\/li>\n\n\n\n
        • \u6a5f\u5668\u4eba\u642c\u904b\u7cfb\u7d71<\/strong> - \u6e1b\u5c11\u4eba\u5de5\u5e72\u64fe\u3001\u63d0\u9ad8\u5b89\u5168\u6027\u4e26\u78ba\u4fdd\u91cd\u8907\u6027\uff0c\u7279\u5225\u662f\u6613\u788e\u7684 SiC \u548c GaN \u6676\u5713\u3002.<\/li>\n<\/ul>\n\n\n\n

          \u667a\u6167\u578b\u8a2d\u5099\u5c07\u6210\u70ba\u9ad8\u968e\u534a\u5c0e\u9ad4\u88fd\u9020\u7684\u6a19\u6e96\uff0c\u5e73\u8861\u751f\u7522\u529b\u3001\u7cbe\u6e96\u5ea6\u8207\u6210\u672c\u3002.<\/p>\n\n\n\n

          6.\u61c9\u7528\u524d\u666f<\/h3>\n\n\n\n
            \n
          • \u96fb\u52d5\u8eca\u8207\u518d\u751f\u80fd\u6e90<\/strong> - SiC \u529f\u7387\u5143\u4ef6\u53ef\u5927\u5e45\u964d\u4f4e\u80fd\u91cf\u640d\u8017\uff0c\u4e26\u63d0\u9ad8\u8b8a\u983b\u5668\u6548\u7387\u3002.<\/li>\n\n\n\n
          • 5G \u8207 RF \u901a\u8a0a<\/strong> - GaN \u88dd\u7f6e\u5728\u9ad8\u983b\u3001\u9ad8\u529f\u7387\u61c9\u7528\u65b9\u9762\u8868\u73fe\u512a\u7570\u3002.<\/li>\n\n\n\n
          • \u9ad8\u6548\u80fd\u904b\u7b97\u8207\u5149\u96fb\u5b50<\/strong> - \u8907\u5408\u6750\u6599\u53ef\u5be6\u73fe\u6676\u7247\u7684\u5fae\u578b\u5316\u548c\u9ad8\u6574\u5408\u5ea6\u3002.<\/li>\n<\/ul>\n\n\n\n

            \u96a8\u8457\u9700\u6c42\u7684\u6210\u9577\uff0c\u52a0\u5de5\u8a2d\u5099\u4e5f\u5c07\u4e0d\u65b7\u9032\u5316\uff0c\u63d0\u4f9b\u9ad8\u7cbe\u5ea6\u3001\u4f4e\u7f3a\u9677\u3001\u667a\u6167\u578b\u7684\u5ba2\u88fd\u5316\u89e3\u6c7a\u65b9\u6848\u3002.<\/p>\n\n\n\n

            7.\u7e3d\u7d50<\/h3>\n\n\n\n

            \u4e0b\u4e00\u4ee3\u534a\u5c0e\u9ad4\u52a0\u5de5\u8a2d\u5099\u6b63\u570d\u7e5e SiC\u3001GaN \u548c\u8907\u5408\u6750\u6599\u767c\u5c55\u3002\u4e3b\u8981\u767c\u5c55\u8da8\u52e2\u5305\u62ec<\/p>\n\n\n\n

              \n
            • \u9ad8\u7cbe\u5ea6\u5207\u5272\u8207\u62cb\u5149<\/li>\n\n\n\n
            • \u8207\u7570\u8cea\u6750\u6599\u548c\u8907\u5408\u6750\u6599\u76f8\u5bb9<\/li>\n\n\n\n
            • \u667a\u6167\u81ea\u52d5\u5316\u8207 AI \u8f14\u52a9\u63a7\u5236<\/li>\n<\/ul>\n\n\n\n

              \u6295\u8cc7\u5148\u9032\u7684\u52a0\u5de5\u8a2d\u5099\uff0c\u53ef\u8b93\u534a\u5c0e\u9ad4\u88fd\u9020\u5546\u5c07\u65b0\u6750\u6599\u7684\u6027\u80fd\u512a\u52e2\u767c\u63ee\u5230\u6975\u81f4\uff0c\u652f\u63f4\u958b\u767c\u66f4\u9ad8\u529f\u7387\u3001\u66f4\u9ad8\u983b\u7387\u3001\u66f4\u53ef\u9760\u7684\u88dd\u7f6e\u3002\u900f\u904e\u8207\u9019\u4e9b\u6280\u8853\u8da8\u52e2\u4fdd\u6301\u540c\u6b65\uff0c\u7522\u696d\u53ef\u4ee5\u52a0\u901f\u5728\u96fb\u52d5\u6c7d\u8eca\u30015G \u901a\u8a0a\u3001\u9ad8\u6548\u80fd\u904b\u7b97\u53ca\u5176\u4ed6\u65b0\u8208\u61c9\u7528\u9818\u57df\u7684\u5275\u65b0\u3002ZMSH \u7b49\u516c\u53f8\u53ef\u63d0\u4f9b\u5ba2\u88fd\u5316\u7684\u52a0\u5de5\u89e3\u6c7a\u65b9\u6848\uff0c\u5354\u52a9\u88fd\u9020\u5546\u6709\u6548\u512a\u5316 SiC \u548c GaN \u6676\u5713\u7684\u751f\u7522\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

              1. Introduction With the rapid development of electric vehicles, renewable energy, 5G communication, and high-performance computing, traditional silicon-based semiconductors are increasingly limited in high-power, high-frequency, and high-temperature environments. Silicon carbide (SiC) and gallium nitride (GaN), as wide-bandgap semiconductor materials, offer high breakdown voltage, excellent thermal conductivity, and superior high-frequency performance, making them core materials for […]<\/p>\n","protected":false},"author":1,"featured_media":1931,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[405,410,404,334,409,407,412,182,325,403,411,408,414,166,184,72,413,406],"class_list":["post-1930","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-5g-rf-devices","tag-ai-assisted-control","tag-chemical-mechanical-polishing-2","tag-cmp","tag-composite-semiconductor-materials","tag-electric-vehicle-power-devices","tag-gallium-nitride","tag-gan","tag-heterogeneous-integration","tag-high-precision-cutting","tag-icp-etching","tag-mocvd","tag-next-generation-semiconductor-equipment","tag-semiconductor-processing","tag-sic","tag-silicon-carbide","tag-smart-automation","tag-wafer-processing"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/posts\/1930","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/comments?post=1930"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/posts\/1930\/revisions"}],"predecessor-version":[{"id":1932,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/posts\/1930\/revisions\/1932"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media\/1931"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/media?parent=1930"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/categories?post=1930"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/zh\/wp-json\/wp\/v2\/tags?post=1930"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}