{"id":2536,"date":"2026-06-08T05:27:34","date_gmt":"2026-06-08T05:27:34","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2536"},"modified":"2026-06-14T18:33:48","modified_gmt":"2026-06-14T18:33:48","slug":"12-inch-glass-wafer-for-advanced-semiconductor-mems-applications","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/12-inch-glass-wafer-for-advanced-semiconductor-mems-applications\/","title":{"rendered":"T\u1ea5m wafer th\u1ee7y tinh 12 inch d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn v\u00e0 MEMS ti\u00ean ti\u1ebfn"},"content":{"rendered":"

\"T\u1ea5mT\u1ea5m wafer th\u1ee7y tinh 12 inch (300 mm) l\u00e0 m\u1ed9t ch\u1ea5t n\u1ec1n cao c\u1ea5p \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn, c\u00e1c thi\u1ebft b\u1ecb MEMS, h\u1ec7 th\u1ed1ng quang h\u1ecdc v\u00e0 \u0111\u00f3ng g\u00f3i c\u1ea5p wafer (WLP \/ FOWLP). Khi m\u1ee9c \u0111\u1ed9 t\u00edch h\u1ee3p c\u1ee7a c\u00e1c thi\u1ebft b\u1ecb ti\u1ebfp t\u1ee5c gia t\u0103ng v\u00e0 c\u1ea5u tr\u00fac \u0111\u00f3ng g\u00f3i ng\u00e0y c\u00e0ng ph\u1ee9c t\u1ea1p, c\u00e1c t\u1ea5m wafer th\u1ee7y tinh c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn \u0111ang tr\u1edf th\u00e0nh m\u1ed9t gi\u1ea3i ph\u00e1p thay th\u1ebf quan tr\u1ecdng cho c\u00e1c ch\u1ea5t n\u1ec1n silicon truy\u1ec1n th\u1ed1ng.<\/p>\n

So v\u1edbi c\u00e1c \u0111\u1ecbnh d\u1ea1ng t\u1ea5m wafer c\u00f3 k\u00edch th\u01b0\u1edbc nh\u1ecf h\u01a1n, t\u1ea5m wafer th\u1ee7y tinh 12 inch mang l\u1ea1i hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t cao h\u01a1n \u0111\u00e1ng k\u1ec3, kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng t\u1ed1t h\u01a1n cho s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t, \u0111\u1ed3ng th\u1eddi t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh quang kh\u1eafc v\u00e0 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn. Ch\u00fang \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c h\u1ec7 th\u1ed1ng \u0111i\u1ec7n t\u1eed th\u1ebf h\u1ec7 m\u1edbi, v\u1ed1n \u0111\u00f2i h\u1ecfi \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc cao, t\u1ed5n th\u1ea5t \u0111i\u1ec7n m\u00f4i th\u1ea5p, \u0111\u1ed9 trong su\u1ed1t quang h\u1ecdc xu\u1ea5t s\u1eafc v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t c\u1ef1c k\u1ef3 m\u1ecbn m\u00e0ng.<\/p>\n

C\u00e1c t\u1ea5m wafer n\u00e0y \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb c\u00e1c v\u1eadt li\u1ec7u c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao nh\u01b0 th\u1ee7y tinh borosilicat, silica nung ch\u1ea3y, th\u1ea1ch anh v\u00e0 th\u1ee7y tinh kh\u00f4ng ch\u1ee9a ki\u1ec1m, t\u00f9y thu\u1ed9c v\u00e0o y\u00eau c\u1ea7u \u1ee9ng d\u1ee5ng. M\u1ed7i t\u1ea5m wafer \u0111\u1ec1u tr\u1ea3i qua c\u00e1c quy tr\u00ecnh c\u1eaft ch\u00ednh x\u00e1c, m\u00e0i, \u0111\u00e1nh b\u00f3ng v\u00e0 l\u00e0m s\u1ea1ch \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd \u0111\u1ed9 ph\u1eb3ng, \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y v\u00e0 \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t.<\/p>\n

\n

C\u00e1c lo\u1ea1i v\u1eadt li\u1ec7u c\u00f3 s\u1eb5n cho t\u1ea5m wafer th\u1ee7y tinh 12 inch<\/strong><\/span><\/h2>\n

Th\u1ee7y tinh borosilicat (t\u1ea5m wafer 12 inch)<\/strong><\/span><\/h3>\n
    \n
  • Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1ec1 \u0111\u1ed9 gi\u00e3n n\u1edf nhi\u1ec7t v\u1edbi silicon r\u1ea5t t\u1ed1t (~3,2 ppm\/K)<\/li>\n
  • R\u1ea5t ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng h\u00e0n an\u1ed1t<\/li>\n
  • Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a ch\u1ea5t cao<\/li>\n
  • C\u00e1c t\u00ednh ch\u1ea5t c\u01a1 h\u1ecdc \u1ed5n \u0111\u1ecbnh trong qu\u00e1 tr\u00ecnh thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9 l\u1eb7p \u0111i l\u1eb7p l\u1ea1i<\/li>\n
  • \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c c\u1ea5u tr\u00fac MEMS v\u00e0 \u0111\u00f3ng g\u00f3i<\/li>\n<\/ul>\n
    \n

    Th\u1ee7y tinh th\u1ea1ch anh (mi\u1ebfng wafer 12 inch)<\/strong><\/span><\/h3>\n
      \n
    • \u0110\u1ed9 truy\u1ec1n s\u00e1ng c\u1ef1c cao (trong d\u1ea3i t\u1eeb tia c\u1ef1c t\u00edm \u0111\u1ebfn h\u1ed3ng ngo\u1ea1i)<\/li>\n
    • H\u00e0m l\u01b0\u1ee3ng t\u1ea1p ch\u1ea5t v\u00e0 OH r\u1ea5t th\u1ea5p<\/li>\n
    • Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n
    • \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t xu\u1ed1ng \u0111\u1ebfn Ra \u2264 0,5 nm<\/li>\n
    • Th\u00edch h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng MEMS quang h\u1ecdc v\u00e0 quang t\u1eed h\u1ecdc<\/li>\n<\/ul>\n
      \n

      Th\u1ea1ch anh nung ch\u1ea3y (t\u1ea5m wafer 12 inch)<\/strong><\/span><\/h3>\n
        \n
      • H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t c\u1ef1c th\u1ea5p (~0,5 ppm\/K)<\/li>\n
      • V\u1eadt li\u1ec7u t\u1ed5ng h\u1ee3p c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/li>\n
      • Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t tuy\u1ec7t v\u1eddi<\/li>\n
      • Truy\u1ec1n d\u1eabn quang >90% (d\u1ea3i b\u01b0\u1edbc s\u00f3ng 200\u20132000 nm)<\/li>\n
      • R\u1ea5t ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng quang h\u1ecdc v\u00e0 b\u00e1n d\u1eabn cao c\u1ea5p<\/li>\n<\/ul>\n
        \n

        Th\u1ee7y tinh kh\u00f4ng ch\u1ee9a ki\u1ec1m (mi\u1ebfng wafer 12 inch)<\/strong><\/span><\/h3>\n
          \n
        • Kh\u00f4ng b\u1ecb \u00f4 nhi\u1ec5m b\u1edfi kim lo\u1ea1i n\u1eb7ng (As, Sb, Ba, halogenua)<\/li>\n
        • N\u1ec1n hu\u1ef3nh quang th\u1ea5p<\/li>\n
        • \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh \u0111i\u1ec7n m\u00f4i cao<\/li>\n
        • T\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/li>\n
        • \u0110\u1ed9 b\u1ec1n h\u00f3a h\u1ecdc tuy\u1ec7t v\u1eddi<\/li>\n<\/ul>\n
          \n

          C\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u00ednh (T\u1ea5m wafer th\u1ee7y tinh 12 inch)<\/strong><\/span><\/h2>\n

          C\u00e1c th\u00f4ng s\u1ed1 k\u00edch th\u01b0\u1edbc<\/strong><\/span><\/h3>\n
            \n
          • \u0110\u01b0\u1eddng k\u00ednh t\u1ea5m wafer: 300 mm (12 inch)<\/li>\n
          • Ph\u1ea1m vi \u0111\u1ed9 d\u00e0y: 500 \u03bcm \u2013 2000 \u03bcm (c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh)<\/li>\n
          • Dung sai \u0111\u1ed9 d\u00e0y: t\u1eeb \u00b15 \u03bcm \u0111\u1ebfn \u00b120 \u03bcm<\/li>\n
          • \u0110\u1ed9 dao \u0111\u1ed9ng \u0111\u1ed9 d\u00e0y t\u1ed5ng th\u1ec3 (TTV): \u2264 10\u201315 \u03bcm (lo\u1ea1i c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao)<\/li>\n<\/ul>\n
            \n

            Ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t<\/strong><\/span><\/h3>\n
              \n
            • \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (Ra): \u2264 1,0 nm (ti\u00eau chu\u1ea9n)<\/li>\n
            • T\u00f9y ch\u1ecdn \u0111\u00e1nh b\u00f3ng si\u00eau m\u1ecbn: Ra \u2264 0,5 nm<\/li>\n
            • \u0110\u1ed9 ph\u1eb3ng b\u1ec1 m\u1eb7t: \u2264 \u03bb\/10 (ti\u00eau chu\u1ea9n cao c\u1ea5p t\u00f9y ch\u1ecdn)<\/li>\n
            • X\u1eed l\u00fd m\u00e9p: v\u00e1t c\u1ea1nh \/ bo tr\u00f2n \/ h\u00ecnh d\u1ea1ng t\u00f9y ch\u1ec9nh<\/li>\n
            • C\u00f3 s\u1eb5n lo\u1ea1i \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng hai m\u1eb7t (DSP) ho\u1eb7c m\u1ed9t m\u1eb7t (SSP)<\/li>\n<\/ul>\n

              \"\"<\/p>\n

              \n

              Hi\u1ec7u su\u1ea5t v\u1eadt li\u1ec7u (Gi\u00e1 tr\u1ecb tham kh\u1ea3o)<\/strong><\/span><\/h3>\n
              \n
              \n\n\n\n\n\n\n\n\n
              Lo\u1ea1i v\u1eadt li\u1ec7u<\/th>\nCTE (ppm\/K)<\/th>\nH\u1ed9p s\u1ed1<\/th>\nT\u00ednh n\u0103ng ch\u00ednh<\/th>\n<\/tr>\n<\/thead>\n
              Borosilicat<\/td>\n~3.2<\/td>\nTrung b\u00ecnh<\/td>\nKh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch khi li\u00ean k\u1ebft silicon<\/td>\n<\/tr>\n
              Th\u1ea1ch anh<\/td>\n~0.55<\/td>\nCao (UV\u2013IR)<\/td>\nHi\u1ec7u su\u1ea5t \u0111\u1ea1t ti\u00eau chu\u1ea9n quang h\u1ecdc<\/td>\n<\/tr>\n
              Th\u1ea1ch anh h\u1ee3p kim<\/td>\n~0.5<\/td>\n>90%<\/td>\nSi\u00eau tinh khi\u1ebft v\u00e0 \u1ed5n \u0111\u1ecbnh<\/td>\n<\/tr>\n
              Th\u1ee7y tinh kh\u00f4ng ch\u1ee9a ki\u1ec1m<\/td>\n~3\u20134<\/td>\nKh\u00f4ng \u00e1p d\u1ee5ng<\/td>\nM\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m th\u1ea5p<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
              \n

              N\u0103ng l\u1ef1c s\u1ea3n xu\u1ea5t<\/strong><\/span><\/h2>\n

              C\u00e1c t\u1ea5m wafer th\u1ee7y tinh 12 inch c\u1ee7a ch\u00fang t\u00f4i \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t trong \u0111i\u1ec1u ki\u1ec7n gia c\u00f4ng ch\u00ednh x\u00e1c ti\u00ean ti\u1ebfn:<\/p>\n

                \n
              • Gia c\u00f4ng v\u00e0 c\u1eaft l\u00e1t CNC c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/li>\n
              • \u0110\u00e1nh b\u00f3ng h\u00f3a h\u1ecdc c\u01a1 h\u1ecdc (CMP)<\/li>\n
              • C\u00f4ng ngh\u1ec7 ho\u00e0n thi\u1ec7n b\u1ec1 m\u1eb7t \u1edf c\u1ea5p \u0111\u1ed9 d\u01b0\u1edbi nanomet<\/li>\n
              • V\u1ec7 sinh v\u00e0 ki\u1ec3m tra theo ti\u00eau chu\u1ea9n ph\u00f2ng s\u1ea1ch<\/li>\n
              • Ki\u1ec3m so\u00e1t \u0111o l\u01b0\u1eddng \u0111\u1ed9 d\u00e0y v\u00e0 \u0111\u1ed9 ph\u1eb3ng<\/li>\n
              • T\u01b0\u01a1ng th\u00edch v\u1edbi ti\u00eau chu\u1ea9n SEMI \/ JEIDA (n\u1ebfu c\u00f3)<\/li>\n<\/ul>\n

                Ch\u00fang t\u00f4i h\u1ed7 tr\u1ee3 c\u1ea3 vi\u1ec7c ph\u00e1t tri\u1ec3n m\u1eabu th\u1eed v\u00e0 s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t quy m\u00f4 l\u1edbn.<\/p>\n

                \"\"<\/p>\n

                \n

                C\u00e1c \u1ee9ng d\u1ee5ng c\u1ee7a t\u1ea5m wafer th\u1ee7y tinh 12 inch<\/strong><\/span><\/h2>\n

                C\u00e1c t\u1ea5m wafer th\u1ee7y tinh 12 inch \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p ti\u00ean ti\u1ebfn th\u1ebf h\u1ec7 m\u1edbi:<\/p>\n

                  \n
                • \u0110\u00f3ng g\u00f3i \u1edf c\u1ea5p \u0111\u1ed9 t\u1ea5m b\u00e1n d\u1eabn (WLP \/ FOWLP)<\/li>\n
                • C\u1ea3m bi\u1ebfn v\u00e0 b\u1ed9 truy\u1ec1n \u0111\u1ed9ng MEMS<\/li>\n
                • M\u1ea1ch t\u00edch h\u1ee3p quang t\u1eed (PIC)<\/li>\n
                • M\u00f4-\u0111un truy\u1ec1n th\u00f4ng quang h\u1ecdc<\/li>\n
                • C\u00e1c c\u00f4ng ngh\u1ec7 hi\u1ec3n th\u1ecb ti\u00ean ti\u1ebfn (OLED \/ MicroLED)<\/li>\n
                • H\u1ec7 th\u1ed1ng c\u1ea3m bi\u1ebfn \u00f4 t\u00f4 (LiDAR, radar, h\u00ecnh \u1ea3nh)<\/li>\n
                • Biochip v\u00e0 c\u00e1c thi\u1ebft b\u1ecb ch\u1ea9n \u0111o\u00e1n y t\u1ebf<\/li>\n
                • C\u00e1c linh ki\u1ec7n t\u1ea7n s\u1ed1 cao RF v\u00e0 vi s\u00f3ng<\/li>\n
                • H\u1ec7 th\u1ed1ng quang h\u1ecdc ch\u00ednh x\u00e1c v\u00e0 n\u1ec1n t\u1ea3ng in th\u1ea1ch b\u1ea3n<\/li>\n<\/ul>\n
                  \n

                  \u01afu \u0111i\u1ec3m c\u1ee7a t\u1ea5m wafer th\u1ee7y tinh 12 inch<\/strong><\/span><\/h2>\n
                    \n
                  • T\u01b0\u01a1ng th\u00edch ho\u00e0n to\u00e0n v\u1edbi c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn 300mm<\/li>\n
                  • \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc tuy\u1ec7t v\u1eddi khi gia c\u00f4ng tr\u00ean di\u1ec7n t\u00edch l\u1edbn<\/li>\n
                  • \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t c\u1ef1c th\u1ea5p (<1 nm Ra)<\/li>\n
                  • \u0110\u1ed9 trong su\u1ed1t quang h\u1ecdc cao (t\u00f9y thu\u1ed9c v\u00e0o lo\u1ea1i v\u1eadt li\u1ec7u)<\/li>\n
                  • \u0110\u1eb7c t\u00ednh c\u00e1ch \u0111i\u1ec7n v\u01b0\u1ee3t tr\u1ed9i<\/li>\n
                  • \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc v\u00e0 nhi\u1ec7t cao<\/li>\n
                  • Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t quy m\u00f4 l\u1edbn<\/li>\n
                  • C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh \u0111\u1ed9 d\u00e0y, ch\u1ea5t li\u1ec7u v\u00e0 b\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n<\/li>\n<\/ul>\n

                    C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p (FAQ)<\/strong><\/span><\/h2>\n

                    C\u00e2u h\u1ecfi 1: Li\u1ec7u c\u00e1c t\u1ea5m wafer th\u1ee7y tinh 12 inch c\u00f3 th\u1ec3 thay th\u1ebf c\u00e1c t\u1ea5m wafer silicon trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn kh\u00f4ng?<\/strong><\/span><\/h3>\n

                    C\u00e1c t\u1ea5m wafer th\u1ee7y tinh 12 inch kh\u00f4ng th\u1ec3 thay th\u1ebf ho\u00e0n to\u00e0n c\u00e1c t\u1ea5m wafer silicon trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb ch\u1ee7 \u0111\u1ed9ng, nh\u01b0ng ch\u00fang \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u01b0 v\u1eadt li\u1ec7u n\u1ec1n ho\u1eb7c v\u1eadt li\u1ec7u mang ti\u00ean ti\u1ebfn<\/strong> trong l\u0129nh v\u1ef1c \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn, MEMS v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng quang t\u1eed. C\u00e1c t\u1ea5m wafer th\u1ee7y tinh c\u00f3 kh\u1ea3 n\u0103ng c\u00e1ch \u0111i\u1ec7n v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ed9 trong su\u1ed1t quang h\u1ecdc cao v\u00e0 t\u1ed5n hao \u0111i\u1ec7n m\u00f4i th\u1ea5p, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f3ng g\u00f3i c\u1ea5p wafer (WLP), \u0111\u00f3ng g\u00f3i c\u1ea5p wafer ph\u00e2n nh\u00e1nh (FOWLP) v\u00e0 t\u00edch h\u1ee3p quang h\u1ecdc \u2013 nh\u1eefng \u1ee9ng d\u1ee5ng kh\u00f4ng y\u00eau c\u1ea7u silicon l\u00e0m l\u1edbp b\u00e1n d\u1eabn ho\u1ea1t \u0111\u1ed9ng.<\/p>\n

                    \n

                    C\u00e2u h\u1ecfi 2: Qu\u00fd c\u00f4ng ty c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c m\u1ee9c \u0111\u1ed9 ph\u1eb3ng v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t nh\u01b0 th\u1ebf n\u00e0o \u0111\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer th\u1ee7y tinh 12 inch?<\/strong><\/span><\/h3>\n

                    \u0110\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer th\u1ee7y tinh 12 inch c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, ch\u00fang t\u00f4i c\u00f3 th\u1ec3 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ef1c cao v\u1ec1 b\u1ec1 m\u1eb7t. C\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ti\u00eau bi\u1ec3u bao g\u1ed3m:<\/p>\n

                      \n
                    • \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (Ra): \u2264 1,0 nm (lo\u1ea1i ti\u00eau chu\u1ea9n), xu\u1ed1ng \u0111\u1ebfn \u2264 0,5 nm (lo\u1ea1i si\u00eau b\u00f3ng)<\/li>\n
                    • \u0110\u1ed9 dao \u0111\u1ed9ng \u0111\u1ed9 d\u00e0y t\u1ed5ng th\u1ec3 (TTV): \u2264 10\u201315 \u03bcm t\u00f9y thu\u1ed9c v\u00e0o v\u1eadt li\u1ec7u v\u00e0 \u0111\u1ed9 d\u00e0y<\/li>\n
                    • \u0110\u1ed9 ph\u1eb3ng b\u1ec1 m\u1eb7t: xu\u1ed1ng \u0111\u1ebfn \u03bb\/10 (th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt cao c\u1ea5p t\u00f9y ch\u1ecdn)<\/li>\n<\/ul>\n

                      C\u00e1c th\u00f4ng s\u1ed1 n\u00e0y \u0111\u1ea3m b\u1ea3o kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch tuy\u1ec7t v\u1eddi v\u1edbi c\u00e1c quy tr\u00ecnh quang kh\u1eafc, h\u00e0n v\u00e0 l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng ti\u00ean ti\u1ebfn.<\/p>\n

                      \n

                      C\u00e2u h\u1ecfi 3: C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh c\u00e1c t\u1ea5m wafer th\u1ee7y tinh 12 inch cho c\u00e1c \u1ee9ng d\u1ee5ng c\u1ee5 th\u1ec3 ho\u1eb7c c\u00e1c y\u00eau c\u1ea7u quy tr\u00ecnh c\u1ee5 th\u1ec3 kh\u00f4ng?<\/strong><\/span><\/h3>\n

                      \u0110\u00fang v\u1eady. C\u00e1c t\u1ea5m wafer th\u1ee7y tinh 12 inch c\u00f3 kh\u1ea3 n\u0103ng t\u00f9y ch\u1ec9nh r\u1ea5t cao. Ch\u00fang t\u00f4i c\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh nhi\u1ec1u th\u00f4ng s\u1ed1 theo y\u00eau c\u1ea7u quy tr\u00ecnh c\u1ee7a qu\u00fd kh\u00e1ch, bao g\u1ed3m:<\/p>\n

                        \n
                      • Lo\u1ea1i v\u1eadt li\u1ec7u (borosilicat, th\u1ea1ch anh, silica nung ch\u1ea3y, th\u1ee7y tinh kh\u00f4ng ch\u1ee9a ki\u1ec1m)<\/li>\n
                      • \u0110\u1ed9 d\u00e0y (t\u1eeb 500 \u03bcm \u0111\u1ebfn 2 mm ho\u1eb7c h\u01a1n)<\/li>\n
                      • Ho\u00e0n thi\u1ec7n b\u1ec1 m\u1eb7t (\u0111\u00e1nh b\u00f3ng SSP ho\u1eb7c DSP)<\/li>\n
                      • H\u00ecnh d\u1ea1ng m\u00e9p (m\u00e9p v\u00e1t, m\u00e9p tr\u00f2n ho\u1eb7c thi\u1ebft k\u1ebf m\u00e9p theo y\u00eau c\u1ea7u)<\/li>\n
                      • \u0110\u1ed9 ph\u1eb3ng, TTV v\u00e0 m\u1ee9c \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/li>\n
                      • C\u00e1c hoa v\u0103n \u0111\u1eb7c bi\u1ec7t, v\u1ea1ch \u0111\u1ecbnh v\u1ecb ho\u1eb7c kh\u1eafc laser<\/li>\n<\/ul>\n

                        Vi\u1ec7c t\u00f9y ch\u1ec9nh \u0111\u1eb7c bi\u1ec7t quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng MEMS, h\u1ec7 th\u1ed1ng quang h\u1ecdc v\u00e0 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn, n\u01a1i m\u00e0 t\u00ednh t\u01b0\u01a1ng th\u00edch c\u1ee7a quy tr\u00ecnh s\u1ea3n xu\u1ea5t l\u00e0 y\u1ebfu t\u1ed1 then ch\u1ed1t.<\/p>","protected":false},"excerpt":{"rendered":"

                        T\u1ea5m wafer th\u1ee7y tinh 12 inch l\u00e0 v\u1eadt li\u1ec7u then ch\u1ed1t cho vi\u1ec7c \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn th\u1ebf h\u1ec7 m\u1edbi, t\u00edch h\u1ee3p MEMS v\u00e0 ph\u00e1t tri\u1ec3n h\u1ec7 th\u1ed1ng quang h\u1ecdc. Nh\u1edd s\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng quy m\u00f4 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn, ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t si\u00eau ch\u00ednh x\u00e1c v\u00e0 c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt li\u1ec7u c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh, v\u1eadt li\u1ec7u n\u00e0y \u0111ang ng\u00e0y c\u00e0ng \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p s\u1ea3n xu\u1ea5t ti\u00ean ti\u1ebfn \u0111ang t\u00ecm ki\u1ebfm c\u00e1c gi\u1ea3i ph\u00e1p thay th\u1ebf cho c\u00e1c t\u1ea5m wafer silicon truy\u1ec1n th\u1ed1ng.<\/p>","protected":false},"featured_media":2539,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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