{"id":2495,"date":"2026-05-26T05:31:18","date_gmt":"2026-05-26T05:31:18","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2495"},"modified":"2026-07-08T09:47:16","modified_gmt":"2026-07-08T09:47:16","slug":"thin-film-lithium-niobate-on-insulator-lnoi-wafers-for-integrated-photonic-applications","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/thin-film-lithium-niobate-on-insulator-lnoi-wafers-for-integrated-photonic-applications\/","title":{"rendered":"T\u1ea5m wafer LNOI (Lithium Niobate tr\u00ean ch\u1ea5t c\u00e1ch \u0111i\u1ec7n) m\u00e0ng m\u1ecfng cho c\u00e1c \u1ee9ng d\u1ee5ng quang t\u1eed t\u00edch h\u1ee3p"},"content":{"rendered":"<p data-start=\"531\" data-end=\"686\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2500 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-300x300.webp\" alt=\"T\u1ea5m wafer LNOI (Lithium Niobate tr\u00ean ch\u1ea5t c\u00e1ch \u0111i\u1ec7n) m\u00e0ng m\u1ecfng cho c\u00e1c \u1ee9ng d\u1ee5ng quang t\u1eed t\u00edch h\u1ee3p\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-300x300.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-150x150.webp 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-12x12.webp 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-600x600.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-100x100.webp 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm.webp 750w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>C\u00e1c t\u1ea5m wafer LNOI (Lithium Niobate tr\u00ean ch\u1ea5t c\u00e1ch \u0111i\u1ec7n) l\u00e0 c\u00e1c ch\u1ea5t n\u1ec1n quang t\u1eed ti\u00ean ti\u1ebfn \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c h\u1ec7 th\u1ed1ng quang h\u1ecdc t\u00edch h\u1ee3p, quang t\u1eed vi s\u00f3ng v\u00e0 h\u1ec7 th\u1ed1ng l\u01b0\u1ee3ng t\u1eed.<\/p>\n<p data-start=\"688\" data-end=\"830\">C\u1ea5u tr\u00fac n\u00e0y bao g\u1ed3m m\u1ed9t l\u1edbp m\u00e0ng m\u1ecfng niobat lithium \u0111\u01a1n tinh th\u1ec3 \u0111\u01b0\u1ee3c g\u1eafn l\u00ean m\u1ed9t l\u1edbp c\u00e1ch \u0111i\u1ec7n SiO\u2082 v\u00e0 \u0111\u01b0\u1ee3c \u0111\u1eb7t tr\u00ean m\u1ed9t \u0111\u1ebf silicon.<\/p>\n<p data-start=\"832\" data-end=\"1001\">C\u1ea5u h\u00ecnh n\u00e0y mang l\u1ea1i kh\u1ea3 n\u0103ng giam gi\u1eef quang h\u1ecdc m\u1ea1nh m\u1ebd, t\u1ed5n th\u1ea5t truy\u1ec1n d\u1eabn c\u1ef1c th\u1ea5p v\u00e0 hi\u1ec7u su\u1ea5t \u0111i\u1ec7n-quang cao, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh n\u1ec1n t\u1ea3ng quan tr\u1ecdng cho c\u00f4ng ngh\u1ec7 quang t\u1eed t\u00edch h\u1ee3p.<\/p>\n<hr data-start=\"1003\" data-end=\"1006\" \/>\n<h1 data-section-id=\"1kwwibx\" data-start=\"1008\" data-end=\"1050\">Lithium Niobate m\u00e0ng m\u1ecfng (TFLN) l\u00e0 g\u00ec?<\/h1>\n<p data-start=\"1052\" data-end=\"1197\">Lithium Niobate m\u00e0ng m\u1ecfng (TFLN) l\u00e0 m\u1ed9t l\u1edbp tinh th\u1ec3 LiNbO\u2083 c\u00f3 \u0111\u1ed9 d\u00e0y d\u01b0\u1edbi micromet, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng d\u1eabn s\u00f3ng quang h\u1ecdc v\u00e0 \u0111i\u1ec7n quang.<\/p>\n<p data-start=\"1199\" data-end=\"1334\">So v\u1edbi niobat liti d\u1ea1ng kh\u1ed1i, TFLN cho ph\u00e9p gi\u1edbi h\u1ea1n quang h\u1ecdc ch\u1eb7t ch\u1ebd h\u01a1n, k\u00edch th\u01b0\u1edbc thi\u1ebft b\u1ecb nh\u1ecf g\u1ecdn h\u01a1n v\u00e0 m\u1eadt \u0111\u1ed9 t\u00edch h\u1ee3p cao h\u01a1n.<\/p>\n<p data-start=\"1336\" data-end=\"1429\">TFLN th\u01b0\u1eddng \u0111\u01b0\u1ee3c tri\u1ec3n khai tr\u00ean c\u00e1c t\u1ea5m wafer LNOI \u0111\u1ec3 t\u1ea1o th\u00e0nh m\u1ed9t n\u1ec1n t\u1ea3ng quang t\u1eed t\u00edch h\u1ee3p ho\u00e0n ch\u1ec9nh.<\/p>\n<hr data-start=\"1431\" data-end=\"1434\" \/>\n<h1 data-section-id=\"u0ybrq\" data-start=\"1436\" data-end=\"1450\"><img decoding=\"async\" class=\"alignright wp-image-2497 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-300x300.jpg\" alt=\"T\u1ea5m wafer LNOI (Lithium Niobate tr\u00ean ch\u1ea5t c\u00e1ch \u0111i\u1ec7n) m\u00e0ng m\u1ecfng cho c\u00e1c \u1ee9ng d\u1ee5ng quang t\u1eed t\u00edch h\u1ee3p\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-300x300.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-150x150.jpg 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-12x12.jpg 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-600x600.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-100x100.jpg 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698.jpg 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h1>\n<ul data-start=\"1452\" data-end=\"1814\">\n<li data-section-id=\"13l6ndu\" data-start=\"1452\" data-end=\"1501\">M\u1ea5t m\u00e1t quang h\u1ecdc c\u1ef1c th\u1ea5p &lt; 0,05 dB\/cm \u1edf b\u01b0\u1edbc s\u00f3ng 1550 nm<\/li>\n<li data-section-id=\"2xhqbd\" data-start=\"1502\" data-end=\"1556\">H\u1ec7 s\u1ed1 \u0111i\u1ec7n quang cao (r\u2083\u2083 l\u00ean \u0111\u1ebfn 90 pm\/V)<\/li>\n<li data-section-id=\"1njhf21\" data-start=\"1557\" data-end=\"1603\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi \u1ed1ng d\u1eabn s\u00f3ng c\u00f3 k\u00edch th\u01b0\u1edbc d\u01b0\u1edbi micromet (&lt;1 \u03bcm)<\/li>\n<li data-section-id=\"dqzxa8\" data-start=\"1604\" data-end=\"1659\">T\u00edch h\u1ee3p t\u01b0\u01a1ng th\u00edch CMOS v\u1edbi c\u00e1c n\u1ec1n t\u1ea3ng Si \/ SiN<\/li>\n<li data-section-id=\"b770v8\" data-start=\"1660\" data-end=\"1714\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t cao (nhi\u1ec7t \u0111\u1ed9 Curie kho\u1ea3ng 1140\u00b0C)<\/li>\n<li data-section-id=\"1fdmwf9\" data-start=\"1715\" data-end=\"1763\">Nhi\u1ec1u ki\u1ec3u c\u1eaft tinh th\u1ec3: C\u1eaft X \/ C\u1eaft Y \/ C\u1eaft Z<\/li>\n<li data-section-id=\"c33det\" data-start=\"1764\" data-end=\"1814\">K\u00edch th\u01b0\u1edbc t\u1ea5m wafer: 3 inch \/ 4 inch \/ 6 inch \/ 8 inch<\/li>\n<\/ul>\n<hr data-start=\"1816\" data-end=\"1819\" \/>\n<h1 data-section-id=\"1ag6bp0\" data-start=\"1821\" data-end=\"1838\">C\u1ea5u tr\u00fac t\u1ea5m wafer<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1840\" data-end=\"2149\">\n<thead data-start=\"1840\" data-end=\"1871\">\n<tr data-start=\"1840\" data-end=\"1871\">\n<th class=\"last:pe-10\" data-start=\"1840\" data-end=\"1848\" data-col-size=\"sm\">L\u1edbp<\/th>\n<th class=\"last:pe-10\" data-start=\"1848\" data-end=\"1859\" data-col-size=\"sm\">Ch\u1ea5t li\u1ec7u<\/th>\n<th class=\"last:pe-10\" data-start=\"1859\" data-end=\"1871\" data-col-size=\"md\">Ch\u1ee9c n\u0103ng<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1903\" data-end=\"2149\">\n<tr data-start=\"1903\" data-end=\"1992\">\n<td data-start=\"1903\" data-end=\"1915\" data-col-size=\"sm\">L\u1edbp tr\u00ean c\u00f9ng<\/td>\n<td data-col-size=\"sm\" data-start=\"1915\" data-end=\"1941\">M\u00e0ng m\u1ecfng LiNbO\u2083 (TFLN)<\/td>\n<td data-col-size=\"md\" data-start=\"1941\" data-end=\"1992\">Ch\u1ee9c n\u0103ng quang \u0111i\u1ec7n v\u00e0 quang h\u1ecdc phi tuy\u1ebfn<\/td>\n<\/tr>\n<tr data-start=\"1993\" data-end=\"2065\">\n<td data-start=\"1993\" data-end=\"2008\" data-col-size=\"sm\">L\u1edbp gi\u1eefa<\/td>\n<td data-col-size=\"sm\" data-start=\"2008\" data-end=\"2030\">SiO\u2082 (L\u1edbp oxit ch\u00f4n ng\u1ea7m)<\/td>\n<td data-col-size=\"md\" data-start=\"2030\" data-end=\"2065\">C\u00e1ch ly v\u00e0 gi\u1edbi h\u1ea1n quang h\u1ecdc<\/td>\n<\/tr>\n<tr data-start=\"2066\" data-end=\"2149\">\n<td data-start=\"2066\" data-end=\"2081\" data-col-size=\"sm\">L\u1edbp d\u01b0\u1edbi c\u00f9ng<\/td>\n<td data-col-size=\"sm\" data-start=\"2081\" data-end=\"2106\">Silic \/ Th\u1ea1ch anh \/ Sapphire<\/td>\n<td data-col-size=\"md\" data-start=\"2106\" data-end=\"2149\">H\u1ed7 tr\u1ee3 c\u01a1 h\u1ecdc &amp; T\u01b0\u01a1ng th\u00edch CMOS<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2151\" data-end=\"2154\" \/>\n<h1 data-section-id=\"zjxypn\" data-start=\"2156\" data-end=\"2182\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h1>\n<h2 data-section-id=\"10p7424\" data-start=\"2184\" data-end=\"2207\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt c\u1ee7a t\u1ea5m wafer<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2209\" data-end=\"2388\">\n<thead data-start=\"2209\" data-end=\"2230\">\n<tr data-start=\"2209\" data-end=\"2230\">\n<th class=\"last:pe-10\" data-start=\"2209\" data-end=\"2221\" data-col-size=\"sm\">Tham s\u1ed1<\/th>\n<th class=\"last:pe-10\" data-start=\"2221\" data-end=\"2230\" data-col-size=\"sm\">Gi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2251\" data-end=\"2388\">\n<tr data-start=\"2251\" data-end=\"2286\">\n<td data-start=\"2251\" data-end=\"2268\" data-col-size=\"sm\">\u0110\u01b0\u1eddng k\u00ednh t\u1ea5m wafer<\/td>\n<td data-col-size=\"sm\" data-start=\"2268\" data-end=\"2286\">3\u2033, 4\u2033, 6\u2033, 8\u2033<\/td>\n<\/tr>\n<tr data-start=\"2287\" data-end=\"2320\">\n<td data-start=\"2287\" data-end=\"2305\" data-col-size=\"sm\">T\u1ed5ng \u0111\u1ed9 d\u00e0y<\/td>\n<td data-col-size=\"sm\" data-start=\"2305\" data-end=\"2320\">525 \u00b1 25 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2321\" data-end=\"2337\">\n<td data-start=\"2321\" data-end=\"2327\" data-col-size=\"sm\">Cung<\/td>\n<td data-col-size=\"sm\" data-start=\"2327\" data-end=\"2337\">\u00b150 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2338\" data-end=\"2355\">\n<td data-start=\"2338\" data-end=\"2345\" data-col-size=\"sm\">Warp<\/td>\n<td data-col-size=\"sm\" data-start=\"2345\" data-end=\"2355\">&lt;50 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2356\" data-end=\"2388\">\n<td data-start=\"2356\" data-end=\"2362\" data-col-size=\"sm\">T\u1ef7 l\u1ec7 cho vay tr\u00ean gi\u00e1 tr\u1ecb t\u00e0i s\u1ea3n (LTV)<\/td>\n<td data-col-size=\"sm\" data-start=\"2362\" data-end=\"2388\">&lt;1,5 \u03bcm (5\u00d75 mm\u00b2, 95%)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2390\" data-end=\"2393\" \/>\n<h2 data-section-id=\"va7zzg\" data-start=\"2395\" data-end=\"2429\">L\u1edbp m\u00e0ng m\u1ecfng niobat liti<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2431\" data-end=\"2648\">\n<thead data-start=\"2431\" data-end=\"2452\">\n<tr data-start=\"2431\" data-end=\"2452\">\n<th class=\"last:pe-10\" data-start=\"2431\" data-end=\"2443\" data-col-size=\"sm\">Tham s\u1ed1<\/th>\n<th class=\"last:pe-10\" data-start=\"2443\" data-end=\"2452\" data-col-size=\"sm\">Gi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2473\" data-end=\"2648\">\n<tr data-start=\"2473\" data-end=\"2509\">\n<td data-start=\"2473\" data-end=\"2484\" data-col-size=\"sm\">Ch\u1ea5t li\u1ec7u<\/td>\n<td data-col-size=\"sm\" data-start=\"2484\" data-end=\"2509\">LiNbO\u2083 \u0111\u01a1n tinh th\u1ec3<\/td>\n<\/tr>\n<tr data-start=\"2510\" data-end=\"2542\">\n<td data-start=\"2510\" data-end=\"2522\" data-col-size=\"sm\">\u0110\u1ed9 d\u00e0y<\/td>\n<td data-col-size=\"sm\" data-start=\"2522\" data-end=\"2542\">300 nm \u2013 1000 nm<\/td>\n<\/tr>\n<tr data-start=\"2543\" data-end=\"2575\">\n<td data-start=\"2543\" data-end=\"2566\" data-col-size=\"sm\">\u0110\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh h\u01b0\u1edbng<\/td>\n<td data-col-size=\"sm\" data-start=\"2566\" data-end=\"2575\">\u00b10,5\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2576\" data-end=\"2609\">\n<td data-start=\"2576\" data-end=\"2596\" data-col-size=\"sm\">\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td>\n<td data-start=\"2596\" data-end=\"2609\" data-col-size=\"sm\">Ra &lt; 1 nm<\/td>\n<\/tr>\n<tr data-start=\"2610\" data-end=\"2648\">\n<td data-start=\"2610\" data-end=\"2628\" data-col-size=\"sm\">C\u00e1c khuy\u1ebft t\u1eadt li\u00ean k\u1ebft<\/td>\n<td data-start=\"2628\" data-end=\"2648\" data-col-size=\"sm\">Kh\u00f4ng c\u00f3 khuy\u1ebft t\u1eadt n\u00e0o l\u1edbn h\u01a1n 1 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2650\" data-end=\"2653\" \/>\n<h2 data-section-id=\"1ats5mq\" data-start=\"2655\" data-end=\"2683\">L\u1edbp oxit ch\u00f4n ng\u1ea7m (SiO\u2082)<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2685\" data-end=\"2812\">\n<thead data-start=\"2685\" data-end=\"2706\">\n<tr data-start=\"2685\" data-end=\"2706\">\n<th class=\"last:pe-10\" data-start=\"2685\" data-end=\"2697\" data-col-size=\"sm\">Tham s\u1ed1<\/th>\n<th class=\"last:pe-10\" data-start=\"2697\" data-end=\"2706\" data-col-size=\"sm\">Gi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2727\" data-end=\"2812\">\n<tr data-start=\"2727\" data-end=\"2746\">\n<td data-start=\"2727\" data-end=\"2738\" data-col-size=\"sm\">Ch\u1ea5t li\u1ec7u<\/td>\n<td data-start=\"2738\" data-end=\"2746\" data-col-size=\"sm\">SiO\u2082<\/td>\n<\/tr>\n<tr data-start=\"2747\" data-end=\"2791\">\n<td data-start=\"2747\" data-end=\"2759\" data-col-size=\"sm\">\u0110\u1ed9 d\u00e0y<\/td>\n<td data-start=\"2759\" data-end=\"2791\" data-col-size=\"sm\">100 nm \u2013 2 \u03bcm (c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh)<\/td>\n<\/tr>\n<tr data-start=\"2792\" data-end=\"2812\">\n<td data-start=\"2792\" data-end=\"2805\" data-col-size=\"sm\">T\u00ednh \u0111\u1ed3ng nh\u1ea5t<\/td>\n<td data-col-size=\"sm\" data-start=\"2805\" data-end=\"2812\">\u00b15%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2814\" data-end=\"2817\" \/>\n<h1 data-section-id=\"67t699\" data-start=\"2819\" data-end=\"2840\"><img decoding=\"async\" class=\"alignright wp-image-2498 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-300x300.jpg\" alt=\"T\u1ea5m wafer LNOI (Lithium Niobate tr\u00ean ch\u1ea5t c\u00e1ch \u0111i\u1ec7n) m\u00e0ng m\u1ecfng cho c\u00e1c \u1ee9ng d\u1ee5ng quang t\u1eed t\u00edch h\u1ee3p\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-300x300.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-150x150.jpg 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-12x12.jpg 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-600x600.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-100x100.jpg 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002.jpg 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/h1>\n<p data-start=\"2842\" data-end=\"2907\">C\u00e1c t\u1ea5m wafer LNOI \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00e1c quy tr\u00ecnh \u0111\u1ea1t ti\u00eau chu\u1ea9n b\u00e1n d\u1eabn:<\/p>\n<ul data-start=\"2909\" data-end=\"3181\">\n<li data-section-id=\"1wtbcec\" data-start=\"2909\" data-end=\"2961\">C\u1ea5y ion \u0111\u1ec3 t\u00e1ch l\u1edbp c\u00f3 ki\u1ec3m so\u00e1t<\/li>\n<li data-section-id=\"1usb3eg\" data-start=\"2962\" data-end=\"3006\">G\u1eafn wafer l\u00ean c\u00e1c ch\u1ea5t n\u1ec1n c\u00e1ch \u0111i\u1ec7n<\/li>\n<li data-section-id=\"tp2lg8\" data-start=\"3007\" data-end=\"3063\">Qu\u00e1 tr\u00ecnh \u1ee7 nhi\u1ec7t \u0111\u1ed9 cao \u0111\u1ec3 \u1ed5n \u0111\u1ecbnh tinh th\u1ec3<\/li>\n<li data-section-id=\"1erbdy1\" data-start=\"3064\" data-end=\"3129\">\u0110\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc h\u00f3a h\u1ecdc (CMP) \u0111\u1ec3 l\u00e0m ph\u1eb3ng b\u1ec1 m\u1eb7t<\/li>\n<li data-section-id=\"1ff9571\" data-start=\"3130\" data-end=\"3181\">Ki\u1ec3m tra ch\u1ea5t l\u01b0\u1ee3ng quang h\u1ecdc v\u00e0 c\u1ea5u tr\u00fac l\u1ea7n cu\u1ed1i<\/li>\n<\/ul>\n<hr data-start=\"3183\" data-end=\"3186\" \/>\n<h1 data-section-id=\"8fe6go\" data-start=\"3188\" data-end=\"3206\">C\u00e1c \u1ee9ng d\u1ee5ng ch\u00ednh<\/h1>\n<ul data-start=\"3208\" data-end=\"3522\">\n<li data-section-id=\"1ewpgzj\" data-start=\"3208\" data-end=\"3267\">Truy\u1ec1n th\u00f4ng quang t\u1ed1c \u0111\u1ed9 cao (b\u1ed9 \u0111i\u1ec1u ch\u1ebf 100G\u2013800G)<\/li>\n<li data-section-id=\"16e2of\" data-start=\"3268\" data-end=\"3332\">Quang t\u1eed l\u01b0\u1ee3ng t\u1eed (t\u1ea1o ra photon \u0111an xen, h\u1ec7 th\u1ed1ng QKD)<\/li>\n<li data-section-id=\"1tlx3mb\" data-start=\"3333\" data-end=\"3395\">Quang t\u1eed vi s\u00f3ng (x\u1eed l\u00fd t\u00edn hi\u1ec7u t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn, h\u1ec7 th\u1ed1ng s\u00f3ng milimet)<\/li>\n<li data-section-id=\"14eg7t1\" data-start=\"3396\" data-end=\"3454\">Quang h\u1ecdc phi tuy\u1ebfn (chuy\u1ec3n \u0111\u1ed5i t\u1ea7n s\u1ed1, l\u01b0\u1ee3c quang)<\/li>\n<li data-section-id=\"1ps9unu\" data-start=\"3455\" data-end=\"3522\">H\u1ec7 th\u1ed1ng c\u1ea3m bi\u1ebfn t\u00edch h\u1ee3p (c\u00e1c b\u1ed9 c\u1ed9ng h\u01b0\u1edfng sinh h\u00f3a v\u00e0 quang h\u1ecdc)<\/li>\n<\/ul>\n<hr data-start=\"3524\" data-end=\"3527\" \/>\n<h1 data-section-id=\"ujnxut\" data-start=\"3529\" data-end=\"3567\">L\u1ee3i th\u1ebf v\u1ec1 hi\u1ec7u su\u1ea5t so v\u1edbi LiNbO\u2083 d\u1ea1ng kh\u1ed1i<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3569\" data-end=\"3884\">\n<thead data-start=\"3569\" data-end=\"3612\">\n<tr data-start=\"3569\" data-end=\"3612\">\n<th class=\"last:pe-10\" data-start=\"3569\" data-end=\"3580\" data-col-size=\"sm\">B\u1ea5t \u0111\u1ed9ng s\u1ea3n<\/th>\n<th class=\"last:pe-10\" data-start=\"3580\" data-end=\"3594\" data-col-size=\"sm\">LiNbO\u2083 d\u1ea1ng kh\u1ed1i<\/th>\n<th class=\"last:pe-10\" data-start=\"3594\" data-end=\"3612\" data-col-size=\"sm\">LNOI M\u00e0ng m\u1ecfng<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3657\" data-end=\"3884\">\n<tr data-start=\"3657\" data-end=\"3696\">\n<td data-start=\"3657\" data-end=\"3672\" data-col-size=\"sm\">M\u1ea5t m\u00e1t quang h\u1ecdc<\/td>\n<td data-col-size=\"sm\" data-start=\"3672\" data-end=\"3681\">Cao h\u01a1n<\/td>\n<td data-col-size=\"sm\" data-start=\"3681\" data-end=\"3696\">&lt;0,05 dB\/cm<\/td>\n<\/tr>\n<tr data-start=\"3697\" data-end=\"3743\">\n<td data-start=\"3697\" data-end=\"3711\" data-col-size=\"sm\">T\u00edch h\u1ee3p<\/td>\n<td data-start=\"3711\" data-end=\"3717\" data-col-size=\"sm\">Th\u1ea5p<\/td>\n<td data-start=\"3717\" data-end=\"3743\" data-col-size=\"sm\">Quang t\u1eed h\u1ecdc m\u1eadt \u0111\u1ed9 cao<\/td>\n<\/tr>\n<tr data-start=\"3744\" data-end=\"3786\">\n<td data-start=\"3744\" data-end=\"3758\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc thi\u1ebft b\u1ecb<\/td>\n<td data-start=\"3758\" data-end=\"3766\" data-col-size=\"sm\">L\u1edbn<\/td>\n<td data-start=\"3766\" data-end=\"3786\" data-col-size=\"sm\">C\u1ea5p \u0111\u1ed9 d\u01b0\u1edbi micromet<\/td>\n<\/tr>\n<tr data-start=\"3787\" data-end=\"3820\">\n<td data-start=\"3787\" data-end=\"3808\" data-col-size=\"sm\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi CMOS<\/td>\n<td data-col-size=\"sm\" data-start=\"3808\" data-end=\"3813\">Kh\u00f4ng<\/td>\n<td data-col-size=\"sm\" data-start=\"3813\" data-end=\"3820\">\u0110\u00fang<\/td>\n<\/tr>\n<tr data-start=\"3821\" data-end=\"3884\">\n<td data-start=\"3821\" data-end=\"3845\" data-col-size=\"sm\">Hi\u1ec7u su\u1ea5t \u0111i\u1ec1u ch\u1ebf<\/td>\n<td data-col-size=\"sm\" data-start=\"3845\" data-end=\"3856\">Trung b\u00ecnh<\/td>\n<td data-col-size=\"sm\" data-start=\"3856\" data-end=\"3884\">Cao (c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c V\u03c0 ~1V)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3886\" data-end=\"3889\" \/>\n<h1 data-section-id=\"1pspex7\" data-start=\"3891\" data-end=\"3914\">C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3916\" data-end=\"4162\">\n<thead data-start=\"3916\" data-end=\"3940\">\n<tr data-start=\"3916\" data-end=\"3940\">\n<th class=\"last:pe-10\" data-start=\"3916\" data-end=\"3925\" data-col-size=\"sm\">T\u00f9y ch\u1ecdn<\/th>\n<th class=\"last:pe-10\" data-start=\"3925\" data-end=\"3940\" data-col-size=\"sm\">M\u00f4 t\u1ea3<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3965\" data-end=\"4162\">\n<tr data-start=\"3965\" data-end=\"4004\">\n<td data-start=\"3965\" data-end=\"3979\" data-col-size=\"sm\">C\u1eaft pha l\u00ea<\/td>\n<td data-col-size=\"sm\" data-start=\"3979\" data-end=\"4004\">C\u1eaft theo tr\u1ee5c X \/ C\u1eaft theo tr\u1ee5c Y \/ C\u1eaft theo tr\u1ee5c Z<\/td>\n<\/tr>\n<tr data-start=\"4005\" data-end=\"4042\">\n<td data-start=\"4005\" data-end=\"4022\" data-col-size=\"sm\">\u0110\u1ed9 d\u00e0y m\u00e0ng<\/td>\n<td data-start=\"4022\" data-end=\"4042\" data-col-size=\"sm\">300 nm \u2013 1000 nm<\/td>\n<\/tr>\n<tr data-start=\"4043\" data-end=\"4081\">\n<td data-start=\"4043\" data-end=\"4055\" data-col-size=\"sm\">Ch\u1ea5t n\u1ec1n<\/td>\n<td data-start=\"4055\" data-end=\"4081\" data-col-size=\"sm\">Silic \/ Th\u1ea1ch anh \/ Sapphire<\/td>\n<\/tr>\n<tr data-start=\"4082\" data-end=\"4122\">\n<td data-start=\"4082\" data-end=\"4096\" data-col-size=\"sm\">L\u1edbp oxit<\/td>\n<td data-start=\"4096\" data-end=\"4122\" data-col-size=\"sm\">100 nm \u2013 2 \u03bcm (theo y\u00eau c\u1ea7u)<\/td>\n<\/tr>\n<tr data-start=\"4123\" data-end=\"4162\">\n<td data-start=\"4123\" data-end=\"4132\" data-col-size=\"sm\">Doping<\/td>\n<td data-start=\"4132\" data-end=\"4162\" data-col-size=\"sm\">C\u00f3 s\u1eb5n LiNbO\u2083 \u0111\u01b0\u1ee3c pha t\u1ea1p MgO<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4164\" data-end=\"4167\" \/>\n<h1 data-section-id=\"7l53zg\" data-start=\"4169\" data-end=\"4186\">Ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4188\" data-end=\"4426\">\n<thead data-start=\"4188\" data-end=\"4210\">\n<tr data-start=\"4188\" data-end=\"4210\">\n<th class=\"last:pe-10\" data-start=\"4188\" data-end=\"4200\" data-col-size=\"sm\">C\u00e2u h\u1ecfi tr\u1eafc nghi\u1ec7m<\/th>\n<th class=\"last:pe-10\" data-start=\"4200\" data-end=\"4210\" data-col-size=\"sm\">Ph\u01b0\u01a1ng ph\u00e1p<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4232\" data-end=\"4426\">\n<tr data-start=\"4232\" data-end=\"4277\">\n<td data-start=\"4232\" data-end=\"4247\" data-col-size=\"sm\">M\u1ea5t m\u00e1t quang h\u1ecdc<\/td>\n<td data-col-size=\"sm\" data-start=\"4247\" data-end=\"4277\">Th\u1eed nghi\u1ec7m truy\u1ec1n s\u00f3ng trong \u1ed1ng d\u1eabn s\u00f3ng<\/td>\n<\/tr>\n<tr data-start=\"4278\" data-end=\"4317\">\n<td data-start=\"4278\" data-end=\"4298\" data-col-size=\"sm\">\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td>\n<td data-start=\"4298\" data-end=\"4317\" data-col-size=\"sm\">\u0110o b\u1eb1ng k\u00ednh hi\u1ec3n vi l\u1ef1c nguy\u00ean t\u1eed (AFM)<\/td>\n<\/tr>\n<tr data-start=\"4318\" data-end=\"4359\">\n<td data-start=\"4318\" data-end=\"4341\" data-col-size=\"sm\">\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y<\/td>\n<td data-col-size=\"sm\" data-start=\"4341\" data-end=\"4359\">H\u1ec7 th\u1ed1ng b\u1ea3n \u0111\u1ed3<\/td>\n<\/tr>\n<tr data-start=\"4360\" data-end=\"4395\">\n<td data-start=\"4360\" data-end=\"4378\" data-col-size=\"sm\">Ch\u1ea5t l\u01b0\u1ee3ng li\u00ean k\u1ebft<\/td>\n<td data-col-size=\"sm\" data-start=\"4378\" data-end=\"4395\">Ki\u1ec3m tra h\u1ed3ng ngo\u1ea1i<\/td>\n<\/tr>\n<tr data-start=\"4396\" data-end=\"4426\">\n<td data-start=\"4396\" data-end=\"4407\" data-col-size=\"sm\">\u0110\u1ed9 ph\u1eb3ng<\/td>\n<td data-col-size=\"sm\" data-start=\"4407\" data-end=\"4426\">\u0110o l\u01b0\u1eddng t\u1ea5m wafer<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4428\" data-end=\"4431\" \/>\n<h1 data-section-id=\"vnyh67\" data-start=\"4433\" data-end=\"4457\">N\u0103ng l\u1ef1c k\u1ef9 thu\u1eadt<\/h1>\n<p data-start=\"4459\" data-end=\"4554\"><span class=\"hover:entity-accent entity-underline inline cursor-pointer align-baseline\"><span class=\"whitespace-normal\">ZMSH<\/span><\/span> cung c\u1ea5p h\u1ed7 tr\u1ee3 to\u00e0n di\u1ec7n cho qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n t\u1ea5m wafer LNOI:<\/p>\n<ul data-start=\"4556\" data-end=\"4746\">\n<li data-section-id=\"z18qgz\" data-start=\"4556\" data-end=\"4589\">T\u1ed1i \u01b0u h\u00f3a thi\u1ebft k\u1ebf m\u00e0ng m\u1ecfng<\/li>\n<li data-section-id=\"zskefu\" data-start=\"4590\" data-end=\"4627\">K\u1ef9 thu\u1eadt quy tr\u00ecnh h\u00e0n wafer<\/li>\n<li data-section-id=\"1c4k4on\" data-start=\"4628\" data-end=\"4667\">H\u1ed7 tr\u1ee3 s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb quang t\u1eed<\/li>\n<li data-section-id=\"gug1e5\" data-start=\"4668\" data-end=\"4699\">Ch\u1ebf t\u1ea1o nano (EBL \/ IBE)<\/li>\n<li data-section-id=\"k6htmy\" data-start=\"4700\" data-end=\"4746\">Ki\u1ec3m tra v\u00e0 x\u00e1c nh\u1eadn hi\u1ec7u su\u1ea5t quang h\u1ecdc<\/li>\n<\/ul>\n<p data-start=\"4748\" data-end=\"4834\">H\u1ed7 tr\u1ee3 c\u1ea3 vi\u1ec7c ch\u1ebf t\u1ea1o m\u1eabu th\u1eed nghi\u1ec7m trong nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n (R&amp;D) l\u1eabn s\u1ea3n xu\u1ea5t theo l\u00f4 nh\u1ecf c\u00f3 th\u1ec3 m\u1edf r\u1ed9ng quy m\u00f4, l\u00ean \u0111\u1ebfn t\u1ea5m wafer 8 inch.<\/p>\n<hr data-start=\"4836\" data-end=\"4839\" \/>\n<h1 data-section-id=\"1mpc0g\" data-start=\"4841\" data-end=\"4846\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h1>\n<p data-start=\"4848\" data-end=\"4996\">LNOI \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 l\u00e0m g\u00ec?<br data-start=\"4869\" data-end=\"4872\" \/>C\u00e1c t\u1ea5m wafer LNOI \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong l\u0129nh v\u1ef1c truy\u1ec1n th\u00f4ng quang h\u1ecdc, quang t\u1eed l\u01b0\u1ee3ng t\u1eed, quang h\u1ecdc phi tuy\u1ebfn v\u00e0 m\u1ea1ch quang t\u1eed t\u00edch h\u1ee3p.<\/p>\n<p data-start=\"4998\" data-end=\"5114\">\u0110\u1ed9 d\u00e0y \u0111i\u1ec3n h\u00ecnh c\u1ee7a m\u00e0ng m\u1ecfng l\u00e0 bao nhi\u00eau?<br data-start=\"5037\" data-end=\"5040\" \/>\u0110\u1ed9 d\u00e0y \u0111i\u1ec3n h\u00ecnh c\u1ee7a m\u00e0ng m\u1ecfng niobat liti dao \u0111\u1ed9ng t\u1eeb 300 nm \u0111\u1ebfn 1000 nm.<\/p>\n<p data-start=\"5116\" data-end=\"5264\">T\u1ea1i sao n\u00ean s\u1eed d\u1ee5ng LNOI thay v\u00ec niobat lithium d\u1ea1ng kh\u1ed1i?<br data-start=\"5160\" data-end=\"5163\" \/>LNOI mang l\u1ea1i m\u1ee9c t\u1ed5n th\u1ea5t quang h\u1ecdc th\u1ea5p h\u01a1n, m\u1eadt \u0111\u1ed9 t\u00edch h\u1ee3p cao h\u01a1n v\u00e0 kh\u1ea3 n\u0103ng t\u00edch h\u1ee3p quang h\u1ecdc t\u01b0\u01a1ng th\u00edch v\u1edbi CMOS.<\/p>\n<p data-start=\"5266\" data-end=\"5392\">LNOI c\u00f3 th\u1ec3 t\u00edch h\u1ee3p v\u1edbi c\u00f4ng ngh\u1ec7 quang t\u1eed silicon kh\u00f4ng?<br data-start=\"5307\" data-end=\"5310\" \/>\u0110\u00fang v\u1eady, LNOI ho\u00e0n to\u00e0n t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c n\u1ec1n t\u1ea3ng quang t\u1eed silicon v\u00e0 nitrua silicon.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"531\" data-end=\"686\">C\u00e1c t\u1ea5m wafer LNOI (Lithium Niobate tr\u00ean ch\u1ea5t c\u00e1ch \u0111i\u1ec7n) l\u00e0 c\u00e1c ch\u1ea5t n\u1ec1n quang t\u1eed ti\u00ean ti\u1ebfn \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c h\u1ec7 th\u1ed1ng quang h\u1ecdc t\u00edch h\u1ee3p, quang t\u1eed vi s\u00f3ng v\u00e0 h\u1ec7 th\u1ed1ng l\u01b0\u1ee3ng t\u1eed.<\/p>\n<p data-start=\"688\" data-end=\"830\">C\u1ea5u tr\u00fac n\u00e0y bao g\u1ed3m m\u1ed9t l\u1edbp m\u00e0ng m\u1ecfng niobat lithium \u0111\u01a1n tinh th\u1ec3 \u0111\u01b0\u1ee3c g\u1eafn l\u00ean m\u1ed9t l\u1edbp c\u00e1ch \u0111i\u1ec7n SiO\u2082 v\u00e0 \u0111\u01b0\u1ee3c \u0111\u1eb7t tr\u00ean m\u1ed9t \u0111\u1ebf silicon.<\/p>\n<p data-start=\"688\" data-end=\"830\">C\u1ea5u h\u00ecnh n\u00e0y mang l\u1ea1i kh\u1ea3 n\u0103ng giam gi\u1eef quang h\u1ecdc m\u1ea1nh m\u1ebd, t\u1ed5n th\u1ea5t truy\u1ec1n d\u1eabn c\u1ef1c th\u1ea5p v\u00e0 hi\u1ec7u su\u1ea5t \u0111i\u1ec7n-quang cao, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh n\u1ec1n t\u1ea3ng quan tr\u1ecdng cho c\u00f4ng ngh\u1ec7 quang t\u1eed t\u00edch h\u1ee3p.<\/p>\n<p data-start=\"688\" data-end=\"830\">\n<p data-start=\"688\" data-end=\"830\">","protected":false},"featured_media":2496,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[729],"product_tag":[1406,1405,1402,1401,1399,1398,1403,1404,1400,1397],"class_list":{"0":"post-2495","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-wafer","7":"product_tag-6-inch-photonic-wafer","8":"product_tag-8-inch-lnoi-wafer","9":"product_tag-electro-optic-wafer","10":"product_tag-integrated-photonics-substrate","11":"product_tag-lithium-niobate-on-insulator","12":"product_tag-lnoi-wafer","13":"product_tag-optical-communication-wafer","14":"product_tag-quantum-photonics-material","15":"product_tag-tfln-photonics","16":"product_tag-thin-film-lithium-niobate","17":"desktop-align-left","18":"tablet-align-left","19":"mobile-align-left","20":"ast-product-gallery-layout-horizontal-slider","21":"ast-product-tabs-layout-horizontal","23":"first","24":"instock","25":"shipping-taxable","26":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2495","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2495"}],"version-history":[{"count":3,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2495\/revisions"}],"predecessor-version":[{"id":2503,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2495\/revisions\/2503"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2496"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2495"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2495"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2495"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2495"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}