{"id":2426,"date":"2026-04-27T05:56:44","date_gmt":"2026-04-27T05:56:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2426"},"modified":"2026-06-11T09:58:11","modified_gmt":"2026-06-11T09:58:11","slug":"ti-cu-metal-coated-silicon-wafer-titanium-copper-sputtered-wafer-for-mems-microelectronics-conductive-substrate","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/ti-cu-metal-coated-silicon-wafer-titanium-copper-sputtered-wafer-for-mems-microelectronics-conductive-substrate\/","title":{"rendered":"T\u1ea5m silicon ph\u1ee7 kim lo\u1ea1i titan-\u0111\u1ed3ng (Ti\/Cu) \u2013 T\u1ea5m silicon ph\u00fan x\u1ea1 titan-\u0111\u1ed3ng d\u00f9ng l\u00e0m ch\u1ea5t n\u1ec1n d\u1eabn \u0111i\u1ec7n cho vi \u0111i\u1ec7n t\u1eed MEMS"},"content":{"rendered":"

\"\"T\u1ea5m silicon ph\u1ee7 kim lo\u1ea1i Ti\/Cu \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf nh\u01b0 m\u1ed9t ch\u1ea5t n\u1ec1n d\u1eabn \u0111i\u1ec7n ti\u00eau chu\u1ea9n v\u00e0 t\u01b0\u01a1ng th\u00edch v\u1edbi quy tr\u00ecnh, ph\u1ee5c v\u1ee5 cho c\u00e1c \u1ee9ng d\u1ee5ng nghi\u00ean c\u1ee9u ti\u00ean ti\u1ebfn v\u00e0 c\u00f4ng nghi\u1ec7p. B\u1eb1ng c\u00e1ch k\u1ebft h\u1ee3p c\u00f4ng ngh\u1ec7 t\u1ea5m silicon v\u1edbi l\u1edbp ph\u1ee7 m\u00e0ng m\u1ecfng kim lo\u1ea1i, s\u1ea3n ph\u1ea9m n\u00e0y cung c\u1ea5p m\u1ed9t n\u1ec1n t\u1ea3ng \u1ed5n \u0111\u1ecbnh cho c\u00e1c quy tr\u00ecnh \u0111i\u1ec7n, h\u00f3a h\u1ecdc v\u00e0 ch\u1ebf t\u1ea1o vi m\u00f4.<\/p>\n

C\u1ea5u tr\u00fac c\u1ee7a h\u1ec7 th\u1ed1ng l\u1edbp ph\u1ee7 Ti\/Cu \u0111\u1ea3m b\u1ea3o c\u1ea3 \u0111\u1ed9 tin c\u1eady c\u01a1 h\u1ecdc l\u1eabn t\u00ednh d\u1eabn \u0111i\u1ec7n ch\u1ee9c n\u0103ng. H\u1ec7 th\u1ed1ng n\u00e0y \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi c\u00e1c giao di\u1ec7n kim lo\u1ea1i \u0111\u00e1ng tin c\u1eady, t\u00ednh d\u1eabn \u0111i\u1ec7n b\u1ec1 m\u1eb7t \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c k\u1ef9 thu\u1eadt ch\u1ebf t\u1ea1o b\u00e1n d\u1eabn ti\u00eau chu\u1ea9n.<\/p>\n

S\u1ea3n ph\u1ea9m n\u00e0y cho ph\u00e9p t\u00f9y ch\u1ec9nh k\u00edch th\u01b0\u1edbc t\u1ea5m wafer, lo\u1ea1i ch\u1ea5t n\u1ec1n v\u00e0 \u0111\u1ed9 d\u00e0y l\u1edbp m\u00e0ng, nh\u1edd \u0111\u00f3 ph\u00f9 h\u1ee3p cho c\u1ea3 c\u00e1c th\u00ed nghi\u1ec7m nghi\u00ean c\u1ee9u quy m\u00f4 nh\u1ecf l\u1eabn m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t th\u1eed nghi\u1ec7m.<\/p>\n

\n

\"\"C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/strong><\/span><\/h2>\n
    \n
  • Kh\u1ea3 n\u0103ng b\u00e1m d\u00ednh cao<\/strong>
    L\u1edbp k\u1ebft d\u00ednh titan gi\u00fap c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 \u0111\u1ed9 b\u00e1m d\u00ednh gi\u1eefa m\u00e0ng \u0111\u1ed3ng v\u00e0 \u0111\u1ebf silicon, t\u1eeb \u0111\u00f3 gi\u1ea3m thi\u1ec3u nguy c\u01a1 bong tr\u00f3c v\u00e0 t\u00e1ch l\u1edbp.<\/li>\n
  • \u0110\u1ed9 d\u1eabn \u0111i\u1ec7n cao<\/strong>
    L\u1edbp b\u1ec1 m\u1eb7t b\u1eb1ng \u0111\u1ed3ng mang l\u1ea1i \u0111i\u1ec7n tr\u1edf th\u1ea5p v\u00e0 hi\u1ec7u su\u1ea5t \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh cho vi\u1ec7c ki\u1ec3m tra thi\u1ebft b\u1ecb v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng d\u1eabn \u0111i\u1ec7n.<\/li>\n
  • \u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u m\u00e0u s\u1eafc tuy\u1ec7t v\u1eddi<\/strong>
    Ph\u01b0\u01a1ng ph\u00e1p ph\u00fan x\u1ea1 magnetron \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 d\u00e0y l\u1edbp ph\u1ee7 \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 b\u1ec1 m\u1eb7t nh\u1eb5n m\u1ecbn tr\u00ean to\u00e0n b\u1ed9 t\u1ea5m wafer.<\/li>\n
  • Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch quy tr\u00ecnh t\u1ed1t<\/strong>
    T\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh in th\u1ea1ch b\u1ea3n, \u0103n m\u00f2n, m\u1ea1 \u0111i\u1ec7n, l\u1eafng \u0111\u1ecdng v\u00e0 c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00eau chu\u1ea9n.<\/li>\n
  • T\u00f9y ch\u1ec9nh linh ho\u1ea1t<\/strong>
    C\u00f3 s\u1eb5n v\u1edbi nhi\u1ec1u k\u00edch th\u01b0\u1edbc t\u1ea5m wafer, lo\u1ea1i ch\u1ea5t n\u1ec1n v\u00e0 s\u1ef1 k\u1ebft h\u1ee3p \u0111\u1ed9 d\u00e0y l\u1edbp kim lo\u1ea1i kh\u00e1c nhau.<\/li>\n<\/ul>\n
    \n

    \"\"C\u1ea5u tr\u00fac \u0111i\u1ec3n h\u00ecnh<\/strong><\/span><\/h2>\n

    Ch\u1ea5t n\u1ec1n + L\u1edbp k\u1ebft d\u00ednh titan + L\u1edbp d\u1eabn \u0111i\u1ec7n \u0111\u1ed3ng<\/strong><\/p>\n

      \n
    • Ch\u1ea5t n\u1ec1n: Silicon \/ Th\u1ea1ch anh \/ K\u00ednh (t\u00f9y ch\u1ecdn)<\/li>\n
    • L\u1edbp b\u00e1m d\u00ednh: Titan (Ti)<\/li>\n
    • L\u1edbp d\u1eabn \u0111i\u1ec7n: \u0110\u1ed3ng (Cu)<\/li>\n
    • Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng: Phun x\u1ea1 Magnetron<\/li>\n<\/ul>\n

      L\u1edbp Ti \u0111\u00f3ng vai tr\u00f2 l\u00e0 l\u1edbp li\u00ean k\u1ebft giao di\u1ec7n gi\u1eefa ch\u1ea5t n\u1ec1n v\u00e0 m\u00e0ng \u0111\u1ed3ng, \u0111\u1ea3m b\u1ea3o t\u00ednh \u1ed5n \u0111\u1ecbnh v\u1ec1 c\u1ea5u tr\u00fac. L\u1edbp Cu cung c\u1ea5p b\u1ec1 m\u1eb7t d\u1eabn \u0111i\u1ec7n ch\u1ee9c n\u0103ng cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec7n v\u00e0 c\u00f4ng ngh\u1ec7 ch\u1ebf t\u1ea1o.<\/p>\n

      \n

      Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/strong><\/span><\/h2>\n
      \n
      \n\n\n\n\n\n\n\n\n\n\n\n\n
      M\u1eb7t h\u00e0ng<\/th>\nM\u00f4 t\u1ea3<\/th>\n<\/tr>\n<\/thead>\n
      K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\n2\u2033, 4\u2033, 6\u2033, 8\u2033, k\u00edch th\u01b0\u1edbc theo y\u00eau c\u1ea7u<\/td>\n<\/tr>\n
      V\u1eadt li\u1ec7u n\u1ec1n<\/td>\nSilic, Th\u1ea1ch anh, K\u00ednh BF33 (t\u00f9y ch\u1ecdn)<\/td>\n<\/tr>\n
      H\u01b0\u1edbng tinh th\u1ec3<\/td>\n, , v.v.<\/td>\n<\/tr>\n
      \u0110i\u1ec7n tr\u1edf su\u1ea5t<\/td>\nTh\u1ea5p \/ Trung b\u00ecnh \/ Cao (c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh)<\/td>\n<\/tr>\n
      \u0110\u1ed9 d\u00e0y<\/td>\n10\u201350 nm (kho\u1ea3ng th\u00f4ng th\u01b0\u1eddng)<\/td>\n<\/tr>\n
      \u0110\u1ed9 d\u00e0y c\u1ee7a cu<\/td>\n50 nm \u2013 1 \u00b5m (ph\u01b0\u01a1ng ph\u00e1p ph\u00fan x\u1ea1), d\u00e0y h\u01a1n nh\u1edd m\u1ea1 \u0111i\u1ec7n<\/td>\n<\/tr>\n
      Ph\u01b0\u01a1ng ph\u00e1p ph\u1ee7<\/td>\nPh\u01b0\u01a1ng ph\u00e1p ph\u00fan x\u1ea1 magnetron<\/td>\n<\/tr>\n
      M\u1eb7t ph\u1ee7<\/td>\nM\u1ed9t m\u1eb7t hay hai m\u1eb7t<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
      \n

      \"\"Quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/strong><\/span><\/h2>\n

      T\u1ea5m wafer ph\u1ee7 kim lo\u1ea1i Ti\/Cu \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00f4ng ngh\u1ec7 ph\u00fan x\u1ea1 magnetron ch\u00e2n kh\u00f4ng. \u0110\u1ea7u ti\u00ean, m\u1ed9t l\u1edbp titan \u0111\u01b0\u1ee3c ph\u1ee7 l\u00ean b\u1ec1 m\u1eb7t silicon \u0111\u00e3 \u0111\u01b0\u1ee3c l\u00e0m s\u1ea1ch \u0111\u1ec3 t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 b\u00e1m d\u00ednh. Sau \u0111\u00f3, m\u1ed9t l\u1edbp \u0111\u1ed3ng \u0111\u01b0\u1ee3c ph\u1ee7 l\u00ean tr\u00ean l\u1edbp m\u00e0ng titan \u0111\u1ec3 t\u1ea1o th\u00e0nh m\u1ed9t b\u1ec1 m\u1eb7t d\u1eabn \u0111i\u1ec7n \u0111\u1ed3ng nh\u1ea5t.<\/p>\n

      \u0110\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng y\u00eau c\u1ea7u l\u1edbp \u0111\u1ed3ng d\u00e0y h\u01a1n, l\u1edbp \u0111\u1ed3ng \u0111\u01b0\u1ee3c t\u1ea1o b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p ph\u00fan x\u1ea1 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m l\u1edbp n\u1ec1n cho qu\u00e1 tr\u00ecnh m\u1ea1 \u0111i\u1ec7n, cho ph\u00e9p ti\u1ebfp t\u1ee5c h\u00ecnh th\u00e0nh l\u1edbp kim lo\u1ea1i \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 d\u00e0y \u1edf m\u1ee9c micromet \u0111\u1ed3ng th\u1eddi v\u1eabn duy tr\u00ec \u0111\u1ed9 b\u00e1m d\u00ednh cao.<\/p>\n

      Quy tr\u00ecnh k\u1ebft h\u1ee3p n\u00e0y \u0111\u1ea3m b\u1ea3o c\u1ea3 ch\u1ea5t l\u01b0\u1ee3ng m\u00e0ng cao l\u1eabn kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng ch\u1ee9c n\u0103ng linh ho\u1ea1t.<\/p>\n

      \n

      \u1ee8ng d\u1ee5ng<\/strong><\/span><\/h2>\n
        \n
      • Nghi\u00ean c\u1ee9u v\u00e0 ch\u1ebf t\u1ea1o m\u1eabu th\u1eed thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/li>\n
      • Ch\u1ebf t\u1ea1o ti\u1ebfp \u0111i\u1ec3m Ohmic v\u00e0 \u0111i\u1ec7n c\u1ef1c<\/li>\n
      • Ph\u00e1t tri\u1ec3n l\u1edbp n\u1ec1n c\u1ea5u tr\u00fac vi m\u00f4 MEMS<\/li>\n
      • L\u1edbp n\u1ec1n m\u1ea1 \u0111i\u1ec7n cho c\u00e1c c\u1ea5u tr\u00fac RDL v\u00e0 \u0111\u1ed3ng d\u00e0y<\/li>\n
      • Nghi\u00ean c\u1ee9u v\u1ec1 qu\u00e1 tr\u00ecnh h\u00ecnh th\u00e0nh m\u00e0ng m\u1ecfng v\u00e0 v\u1eadt li\u1ec7u nano<\/li>\n
      • Th\u1eed nghi\u1ec7m \u0111\u1ed9 d\u1eabn \u0111i\u1ec7n b\u1ec1 m\u1eb7t v\u00e0 ph\u00e2n t\u00edch v\u1eadt li\u1ec7u<\/li>\n
      • Chu\u1ea9n b\u1ecb m\u1eabu cho SEM, AFM v\u00e0 \u0111o l\u01b0\u1eddng b\u1ec1 m\u1eb7t<\/li>\n
      • C\u1ea3m bi\u1ebfn sinh-\u0111i\u1ec7n h\u00f3a v\u00e0 n\u1ec1n t\u1ea3ng microarray<\/li>\n<\/ul>\n
        \n

        \u01afu \u0111i\u1ec3m so v\u1edbi l\u1edbp ph\u1ee7 kim lo\u1ea1i \u0111\u01a1n<\/strong><\/span><\/h2>\n

        So v\u1edbi vi\u1ec7c ph\u1ee7 \u0111\u1ed3ng tr\u1ef1c ti\u1ebfp l\u00ean silicon, c\u1ea5u tr\u00fac Ti\/Cu mang l\u1ea1i:<\/p>\n

          \n
        • \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh b\u00e1m d\u00ednh cao h\u01a1n khi ch\u1ecbu t\u00e1c \u0111\u1ed9ng c\u1ee7a nhi\u1ec7t v\u00e0 h\u00f3a ch\u1ea5t<\/li>\n
        • Gi\u1ea3m nguy c\u01a1 bong tr\u00f3c ho\u1eb7c n\u1ee9t v\u1ee1 \u0111\u1ed3ng<\/li>\n
        • N\u00e2ng cao hi\u1ec7u su\u1ea5t quy tr\u00ecnh trong c\u00e1c c\u00f4ng \u0111o\u1ea1n ch\u1ebf t\u1ea1o vi m\u00f4<\/li>\n
        • Hi\u1ec7u su\u1ea5t \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh h\u01a1n theo th\u1eddi gian<\/li>\n
        • Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch t\u1ed1t h\u01a1n v\u1edbi c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn nhi\u1ec1u b\u01b0\u1edbc<\/li>\n<\/ul>\n

          \u0110i\u1ec1u n\u00e0y khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh m\u1ed9t gi\u1ea3i ph\u00e1p \u0111\u00e1ng tin c\u1eady h\u01a1n cho c\u1ea3 c\u00e1c ph\u00f2ng th\u00ed nghi\u1ec7m nghi\u00ean c\u1ee9u l\u1eabn c\u00e1c m\u00f4i tr\u01b0\u1eddng nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n (R&D) trong ng\u00e0nh c\u00f4ng nghi\u1ec7p.<\/p>\n

          \n

          C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/strong><\/span><\/h2>\n

          C\u00e2u h\u1ecfi 1: T\u1ea1i sao l\u1ea1i s\u1eed d\u1ee5ng titan d\u01b0\u1edbi l\u1edbp ph\u1ee7 \u0111\u1ed3ng?<\/strong>
          Titan \u0111\u00f3ng vai tr\u00f2 nh\u01b0 m\u1ed9t l\u1edbp k\u1ebft d\u00ednh gi\u00fap t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 b\u00e1m d\u00ednh gi\u1eefa c\u00e1c ch\u1ea5t n\u1ec1n \u0111\u1ed3ng v\u00e0 silicon, t\u1eeb \u0111\u00f3 ng\u0103n ng\u1eeba hi\u1ec7n t\u01b0\u1ee3ng bong tr\u00f3c trong qu\u00e1 tr\u00ecnh gia c\u00f4ng v\u00e0 s\u1eed d\u1ee5ng.<\/p>\n

          C\u00e2u h\u1ecfi 2: C\u00f3 th\u1ec3 t\u0103ng \u0111\u1ed9 d\u00e0y c\u1ee7a \u0111\u1ed3ng kh\u00f4ng?<\/strong>
          \u0110\u00fang v\u1eady. \u0110\u1ed3ng ph\u00fan x\u1ea1 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m l\u1edbp n\u1ec1n cho qu\u00e1 tr\u00ecnh m\u1ea1 \u0111i\u1ec7n \u0111\u1ec3 t\u1ea1o ra c\u00e1c l\u1edbp kim lo\u1ea1i d\u00e0y h\u01a1n t\u00f9y theo y\u00eau c\u1ea7u c\u1ee7a \u1ee9ng d\u1ee5ng.<\/p>\n

          C\u00e2u h\u1ecfi 3: C\u00f3 th\u1ec3 ph\u1ee7 l\u1edbp l\u00ean c\u1ea3 hai m\u1eb7t c\u1ee7a t\u1ea5m wafer kh\u00f4ng?<\/strong>
          \u0110\u00fang v\u1eady. C\u00f3 th\u1ec3 cung c\u1ea5p c\u00e1c t\u00f9y ch\u1ecdn ph\u1ee7 m\u1ed9t m\u1eb7t ho\u1eb7c hai m\u1eb7t theo y\u00eau c\u1ea7u.<\/p>\n

          C\u00e2u h\u1ecfi 4: C\u00f3 nh\u1eefng lo\u1ea1i ch\u1ea5t n\u1ec1n n\u00e0o?<\/strong>
          Silic ti\u00eau chu\u1ea9n l\u00e0 lo\u1ea1i ph\u1ed5 bi\u1ebfn nh\u1ea5t, nh\u01b0ng c\u0169ng c\u00f3 s\u1eb5n c\u00e1c ch\u1ea5t n\u1ec1n th\u1ea1ch anh v\u00e0 th\u1ee7y tinh d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng quang h\u1ecdc ho\u1eb7c h\u00f3a h\u1ecdc \u0111\u1eb7c bi\u1ec7t.<\/p>","protected":false},"excerpt":{"rendered":"

          T\u1ea5m silicon ph\u1ee7 kim lo\u1ea1i Ti\/Cu l\u00e0 m\u1ed9t lo\u1ea1i t\u1ea5m ch\u1ee9c n\u0103ng ch\u1ea5t l\u01b0\u1ee3ng cao \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o b\u1eb1ng c\u00e1ch ph\u1ee7 m\u1ed9t l\u1edbp titan t\u1ea1o \u0111\u1ed9 b\u00e1m d\u00ednh v\u00e0 m\u1ed9t l\u1edbp \u0111\u1ed3ng d\u1eabn \u0111i\u1ec7n l\u00ean n\u1ec1n silicon th\u00f4ng qua c\u00f4ng ngh\u1ec7 ph\u00fan x\u1ea1 magnetron. L\u1edbp titan gi\u00fap c\u1ea3i thi\u1ec7n \u0111\u1ed9 b\u00e1m d\u00ednh v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a m\u00e0ng, trong khi l\u1edbp \u0111\u1ed3ng mang l\u1ea1i \u0111\u1ed9 d\u1eabn \u0111i\u1ec7n tuy\u1ec7t v\u1eddi. S\u1ea3n ph\u1ea9m n\u00e0y \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong l\u0129nh v\u1ef1c vi \u0111i\u1ec7n t\u1eed, s\u1ea3n xu\u1ea5t MEMS, nghi\u00ean c\u1ee9u trong ph\u00f2ng th\u00ed nghi\u1ec7m v\u00e0 ph\u00e1t tri\u1ec3n quy tr\u00ecnh m\u00e0ng m\u1ecfng.<\/p>","protected":false},"featured_media":2428,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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