{"id":2419,"date":"2026-04-27T02:15:07","date_gmt":"2026-04-27T02:15:07","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2419"},"modified":"2026-06-11T09:57:44","modified_gmt":"2026-06-11T09:57:44","slug":"6-inch-n-type-6h-sic-epitaxy-wafer-for-mems-uv-sensors-graphene-growth","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/6-inch-n-type-6h-sic-epitaxy-wafer-for-mems-uv-sensors-graphene-growth\/","title":{"rendered":"T\u1ea5m wafer epitaxy SiC lo\u1ea1i N 6 inch 6H d\u00f9ng cho MEMS, c\u1ea3m bi\u1ebfn tia c\u1ef1c t\u00edm v\u00e0 nu\u00f4i c\u1ea5y graphene"},"content":{"rendered":"

\"T\u1ea5mT\u1ea5m wafer epitaxy SiC lo\u1ea1i N 6H k\u00edch th\u01b0\u1edbc 6 inch l\u00e0 m\u1ed9t ch\u1ea5t n\u1ec1n b\u00e1n d\u1eabn hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf cho c\u00e1c \u1ee9ng d\u1ee5ng ti\u00ean ti\u1ebfn, bao g\u1ed3m c\u00e1c thi\u1ebft b\u1ecb MEMS, c\u1ea3m bi\u1ebfn tia c\u1ef1c t\u00edm (UV) v\u00e0 qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n graphene epitaxy. \u0110\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb c\u00e1c tinh th\u1ec3 \u0111\u01a1n tinh th\u1ec3 silicon carbide (SiC) ch\u1ea5t l\u01b0\u1ee3ng cao, t\u1ea5m wafer n\u00e0y k\u1ebft h\u1ee3p c\u00e1c t\u00ednh ch\u1ea5t \u0111i\u1ec7n, nhi\u1ec7t v\u00e0 c\u01a1 h\u1ecdc xu\u1ea5t s\u1eafc, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t m\u00e0 c\u00e1c v\u1eadt li\u1ec7u silicon th\u00f4ng th\u01b0\u1eddng kh\u00f4ng th\u1ec3 ho\u1ea1t \u0111\u1ed9ng \u0111\u00e1ng tin c\u1eady.<\/p>\n

V\u1edbi \u0111\u01b0\u1eddng k\u00ednh ti\u00eau chu\u1ea9n 150 mm (6 inch) v\u00e0 \u0111\u1ed9 d\u00e0y \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c \u1edf m\u1ee9c 350 \u00b5m, t\u1ea5m wafer n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u01a1 h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch cao v\u1edbi c\u00e1c thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i. Lo\u1ea1i tinh th\u1ec3 6H c\u00f3 kho\u1ea3ng c\u00e1ch n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng kho\u1ea3ng 2,96 eV, cho ph\u00e9p ho\u1ea1t \u0111\u1ed9ng hi\u1ec7u qu\u1ea3 trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n nhi\u1ec7t \u0111\u1ed9 cao, b\u1ee9c x\u1ea1 m\u1ea1nh v\u00e0 m\u00f4i tr\u01b0\u1eddng h\u00f3a h\u1ecdc kh\u1eafc nghi\u1ec7t.<\/p>\n

M\u1ed7i t\u1ea5m wafer \u0111\u01b0\u1ee3c x\u1eed l\u00fd \u0111\u1ec3 t\u1ea1o ra b\u1ec1 m\u1eb7t s\u1eb5n s\u00e0ng cho qu\u00e1 tr\u00ecnh epitaxy b\u1eb1ng c\u00f4ng ngh\u1ec7 \u0110\u00e1nh b\u00f3ng H\u00f3a h\u1ecdc-C\u01a1 h\u1ecdc (CMP) ti\u00ean ti\u1ebfn. \u0110i\u1ec1u n\u00e0y \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t c\u1ef1c th\u1ea5p, h\u1ea1n ch\u1ebf t\u1ed1i \u0111a t\u1ed5n th\u01b0\u01a1ng b\u00ean d\u01b0\u1edbi b\u1ec1 m\u1eb7t v\u00e0 t\u1ea1o \u0111i\u1ec1u ki\u1ec7n t\u1ed1i \u01b0u cho c\u00e1c quy tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp epitaxy nh\u01b0 Ph\u1ee7 h\u00f3a h\u1ecdc t\u1eeb h\u01a1i (CVD). K\u1ebft qu\u1ea3 l\u00e0 hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n, n\u0103ng su\u1ea5t cao h\u01a1n v\u00e0 \u0111\u1ed9 tin c\u1eady \u0111\u01b0\u1ee3c n\u00e2ng cao cho c\u00e1c \u1ee9ng d\u1ee5ng quan tr\u1ecdng.<\/p>\n

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\"T\u1ea5mC\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/strong><\/span><\/h3>\n

B\u1ec1 m\u1eb7t s\u1eb5n s\u00e0ng cho qu\u00e1 tr\u00ecnh epitaxy nh\u1eb1m \u0111\u1ea1t \u0111\u01b0\u1ee3c s\u1ef1 ph\u00e1t tri\u1ec3n ch\u1ea5t l\u01b0\u1ee3ng cao<\/strong>
T\u1ea5m wafer \u0111\u01b0\u1ee3c cung c\u1ea5p v\u1edbi b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CMP s\u00e1ng b\u00f3ng nh\u01b0 g\u01b0\u01a1ng, \u0111\u1ea1t \u0111\u1ed9 nh\u00e1m d\u01b0\u1edbi m\u1ee9c nanomet. \u0110i\u1ec1u n\u00e0y \u0111\u1ea3m b\u1ea3o kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch tuy\u1ec7t v\u1eddi v\u1edbi c\u00e1c quy tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong qu\u00e1 tr\u00ecnh h\u00ecnh th\u00e0nh graphene v\u00e0 s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb nh\u1ea1y c\u1ea3m v\u1edbi tia UV.<\/p>\n

\u0110\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a cho c\u00e1c thi\u1ebft b\u1ecb MEMS v\u00e0 m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t<\/strong>
T\u1ea5m wafer epitaxy SiC lo\u1ea1i N 6H k\u00edch th\u01b0\u1edbc 6 inch th\u1ec3 hi\u1ec7n \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, duy tr\u00ec hi\u1ec7u su\u1ea5t ho\u1ea1t \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 v\u01b0\u1ee3t qu\u00e1 500\u00b0C. Nh\u1edd \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao v\u00e0 t\u00ednh tr\u01a1 h\u00f3a h\u1ecdc, s\u1ea3n ph\u1ea9m n\u00e0y r\u1ea5t ph\u00f9 h\u1ee3p cho c\u00e1c thi\u1ebft b\u1ecb MEMS ho\u1ea1t \u0111\u1ed9ng trong c\u00e1c m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t nh\u01b0 h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5, n\u0103ng l\u01b0\u1ee3ng v\u00e0 h\u1ec7 th\u1ed1ng gi\u00e1m s\u00e1t c\u00f4ng nghi\u1ec7p.<\/p>\n

Kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng cho c\u00e1c \u1ee9ng d\u1ee5ng c\u1ea3m bi\u1ebfn tia c\u1ef1c t\u00edm<\/strong>
V\u1edbi kho\u1ea3ng c\u00e1ch d\u1ea3i c\u1ea5m kho\u1ea3ng 2,96 eV, t\u1ea5m wafer n\u00e0y c\u00f3 \u0111\u1ed9 nh\u1ea1y t\u1ef1 nhi\u00ean v\u1edbi \u00e1nh s\u00e1ng c\u1ef1c t\u00edm nh\u01b0ng l\u1ea1i kh\u00f4ng nh\u1ea1y c\u1ea3m v\u1edbi c\u00e1c b\u01b0\u1edbc s\u00f3ng trong v\u00f9ng \u00e1nh s\u00e1ng nh\u00ecn th\u1ea5y. \u0110i\u1ec1u n\u00e0y khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u l\u00fd t\u01b0\u1edfng cho c\u00e1c c\u1ea3m bi\u1ebfn tia c\u1ef1c t\u00edm kh\u00f4ng nh\u1ea1y c\u1ea3m v\u1edbi \u00e1nh s\u00e1ng m\u1eb7t tr\u1eddi, \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong ph\u00e1t hi\u1ec7n ng\u1ecdn l\u1eeda, gi\u00e1m s\u00e1t m\u00f4i tr\u01b0\u1eddng v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng qu\u1ed1c ph\u00f2ng.<\/p>\n

Hi\u1ec7u su\u1ea5t \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh<\/strong>
Vi\u1ec7c pha t\u1ea1p nit\u01a1 \u0111\u1ea3m b\u1ea3o t\u00ednh d\u1eabn \u0111i\u1ec7n lo\u1ea1i N \u0111\u00e1ng tin c\u1eady, gi\u00fap duy tr\u00ec c\u00e1c \u0111\u1eb7c t\u00ednh \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh v\u00e0 h\u00ecnh th\u00e0nh ti\u1ebfp x\u00fac ohmic b\u1ec1n v\u1eefng. \u0110i\u1ec1u n\u00e0y l\u00e0 y\u1ebfu t\u1ed1 thi\u1ebft y\u1ebfu \u0111\u1ed1i v\u1edbi c\u00e1c thi\u1ebft b\u1ecb c\u1ea3m bi\u1ebfn ch\u00ednh x\u00e1c v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng quang \u0111i\u1ec7n t\u1eed.<\/p>\n

\u0110i\u1ec1u khi\u1ec3n h\u01b0\u1edbng tinh th\u1ec3<\/strong>
T\u1ea5m wafer c\u00f3 g\u00f3c l\u1ec7ch tr\u1ee5c 4\u00b0 so v\u1edbi h\u01b0\u1edbng (\u00b10,5\u00b0), gi\u00fap th\u00fac \u0111\u1ea9y qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 epitaxial theo ki\u1ec3u b\u01b0\u1edbc v\u00e0 gi\u1ea3m thi\u1ec3u khuy\u1ebft t\u1eadt b\u1ec1 m\u1eb7t. \u0110i\u1ec1u n\u00e0y gi\u00fap n\u00e2ng cao \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 kh\u1ea3 n\u0103ng l\u1eb7p l\u1ea1i trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb.<\/p>\n

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\u1ee8ng d\u1ee5ng<\/strong><\/span><\/h3>\n

C\u00e1c thi\u1ebft b\u1ecb MEMS trong \u0111i\u1ec1u ki\u1ec7n kh\u1eafc nghi\u1ec7t<\/strong>
T\u1ea5m wafer SiC lo\u1ea1i N 6H c\u00f3 k\u00edch th\u01b0\u1edbc 6 inch \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c c\u1ea3m bi\u1ebfn MEMS nh\u01b0 c\u1ea3m bi\u1ebfn \u00e1p su\u1ea5t v\u00e0 c\u1ea3m bi\u1ebfn gia t\u1ed1c, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 ho\u1ea1t \u0111\u1ed9ng trong m\u00f4i tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 ch\u1ecbu t\u1ea3i tr\u1ecdng l\u1edbn. C\u00e1c thi\u1ebft b\u1ecb n\u00e0y \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong l\u0129nh v\u1ef1c th\u0103m d\u00f2 d\u1ea7u kh\u00ed, h\u1ec7 th\u1ed1ng \u00f4 t\u00f4 v\u00e0 gi\u00e1m s\u00e1t tuabin h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5.<\/p>\n

C\u1ea3m bi\u1ebfn tia UV t\u00edch h\u1ee3p trong r\u00e8m che n\u1eafng<\/strong>
Nh\u1edd kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng, t\u1ea5m wafer n\u00e0y r\u1ea5t l\u00fd t\u01b0\u1edfng \u0111\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c c\u1ea3m bi\u1ebfn quang tia c\u1ef1c t\u00edm c\u00f3 kh\u1ea3 n\u0103ng ph\u00e1t hi\u1ec7n ch\u00ednh x\u00e1c b\u1ee9c x\u1ea1 tia c\u1ef1c t\u00edm m\u00e0 kh\u00f4ng b\u1ecb nhi\u1ec5u t\u1eeb \u00e1nh s\u00e1ng kh\u1ea3 ki\u1ebfn. Kh\u1ea3 n\u0103ng n\u00e0y l\u00e0 y\u1ebfu t\u1ed1 thi\u1ebft y\u1ebfu \u0111\u1ed1i v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng ph\u00e1t hi\u1ec7n ng\u1ecdn l\u1eeda v\u00e0 c\u00e1c c\u00f4ng ngh\u1ec7 c\u1ea3m bi\u1ebfn quang h\u1ecdc ti\u00ean ti\u1ebfn.<\/p>\n

Ch\u1ea5t n\u1ec1n ph\u00e1t tri\u1ec3n graphene<\/strong>
T\u1ea5m wafer \u0111\u00f3ng vai tr\u00f2 l\u00e0 ch\u1ea5t n\u1ec1n ch\u1ea5t l\u01b0\u1ee3ng cao cho qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n graphene theo ph\u01b0\u01a1ng ph\u00e1p epitactic. Trong \u0111i\u1ec1u ki\u1ec7n ch\u00e2n kh\u00f4ng nhi\u1ec7t \u0111\u1ed9 cao, c\u00e1c nguy\u00ean t\u1eed silic bay h\u01a1i tr\u1ef1c ti\u1ebfp t\u1eeb b\u1ec1 m\u1eb7t SiC, \u0111\u1ec3 l\u1ea1i c\u00e1c l\u1edbp graphene c\u00f3 c\u1ea5u tr\u00fac \u0111\u1ec1u \u0111\u1eb7n. Qu\u00e1 tr\u00ecnh n\u00e0y \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed ti\u00ean ti\u1ebfn, c\u00e1c thi\u1ebft b\u1ecb t\u1ed1c \u0111\u1ed9 cao v\u00e0 nghi\u00ean c\u1ee9u l\u01b0\u1ee3ng t\u1eed.<\/p>\n

H\u1ec7 th\u1ed1ng quang \u0111i\u1ec7n t\u1eed ti\u00ean ti\u1ebfn<\/strong>
\u0110\u1ed9 trong su\u1ed1t quang h\u1ecdc v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh v\u1eadt li\u1ec7u c\u1ee7a 6H-SiC khi\u1ebfn n\u00f3 tr\u1edf n\u00ean ph\u00f9 h\u1ee3p cho c\u00e1c thi\u1ebft b\u1ecb quang \u0111i\u1ec7n t\u1eed chuy\u00ean d\u1ee5ng, bao g\u1ed3m \u0111i-\u1ed1t quang tia c\u1ef1c t\u00edm v\u00e0 c\u00e1c linh ki\u1ec7n t\u1ea7n s\u1ed1 cao.<\/p>\n

\"\"<\/p>\n

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Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/strong><\/span><\/h3>\n
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\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
B\u1ea5t \u0111\u1ed9ng s\u1ea3n<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
Ch\u1ea5t li\u1ec7u<\/td>\nTh\u1ea1ch anh \u0111\u01a1n tinh th\u1ec3 SiC<\/td>\n<\/tr>\n
\u0110\u01b0\u1eddng k\u00ednh<\/td>\n150 mm (6 inch)<\/td>\n<\/tr>\n
\u0110\u1ed9 d\u00e0y<\/td>\n350 \u00b5m<\/td>\n<\/tr>\n
Lo\u1ea1i h\u00ecnh<\/td>\n6 gi\u1edd<\/td>\n<\/tr>\n
Lo\u1ea1i \u0111\u1ed9 d\u1eabn \u0111i\u1ec7n<\/td>\nLo\u1ea1i N (ph\u1ee5 gia nit\u01a1)<\/td>\n<\/tr>\n
Bu\u1ed5i gi\u1edbi thi\u1ec7u<\/td>\n4\u00b0 h\u01b0\u1edbng v\u1ec1 ph\u00eda \u00b10,5\u00b0<\/td>\n<\/tr>\n
B\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n<\/td>\nSSP \/ DSP \/ CMP \/ MP<\/td>\n<\/tr>\n
Ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t<\/td>\nS\u1eb5n s\u00e0ng cho qu\u00e1 tr\u00ecnh epitaxy (\u0111\u00e3 \u0111\u01b0\u1ee3c m\u00e0i b\u00f3ng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CMP)<\/td>\n<\/tr>\n
Kho\u1ea3ng c\u00e1ch n\u0103ng l\u01b0\u1ee3ng<\/td>\n~2,96 eV<\/td>\n<\/tr>\n
Tr\u1ecdng t\u00e2m c\u1ee7a \u1ee9ng d\u1ee5ng<\/td>\nC\u1ea3m bi\u1ebfn MEMS \/ C\u1ea3m bi\u1ebfn tia UV \/ Qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n graphene<\/td>\n<\/tr>\n
Bao b\u00ec<\/td>\nH\u1ed9p \u0111\u1ef1ng b\u0103ng cassette ho\u1eb7c h\u1ed9p \u0111\u1ef1ng t\u1ea5m wafer \u0111\u01a1n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
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C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh<\/strong><\/span><\/h3>\n

Ch\u00fang t\u00f4i cung c\u1ea5p c\u00e1c d\u1ecbch v\u1ee5 t\u00f9y ch\u1ec9nh linh ho\u1ea1t \u0111\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u c\u1ee5 th\u1ec3 v\u1ec1 quy tr\u00ecnh v\u00e0 \u1ee9ng d\u1ee5ng. C\u00e1c t\u00f9y ch\u1ecdn c\u00f3 s\u1eb5n bao g\u1ed3m:<\/p>\n

    \n
  • \u0110\u1ed9 d\u00e0y t\u1ea5m wafer t\u00f9y ch\u1ec9nh<\/li>\n
  • C\u00e1c g\u00f3c c\u1eaft th\u1eeba kh\u00e1c nhau (theo tr\u1ee5c ho\u1eb7c theo h\u01b0\u1edbng t\u00f9y ch\u1ec9nh)<\/li>\n
  • Ki\u1ec3m so\u00e1t n\u1ed3ng \u0111\u1ed9 ch\u1ea5t ph\u1ee5 gia v\u00e0 \u0111i\u1ec7n tr\u1edf su\u1ea5t<\/li>\n
  • B\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n v\u00e0 c\u1ea5p \u0111\u1ed9 \u0111\u00e1nh b\u00f3ng<\/li>\n<\/ul>\n

    \u0110i\u1ec1u n\u00e0y \u0111\u1ea3m b\u1ea3o t\u00ednh t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh epitaksi v\u00e0 c\u1ea5u tr\u00fac thi\u1ebft b\u1ecb kh\u00e1c nhau, cho d\u00f9 l\u00e0 trong nghi\u00ean c\u1ee9u, ch\u1ebf t\u1ea1o m\u1eabu th\u1eed hay s\u1ea3n xu\u1ea5t th\u1eed nghi\u1ec7m.<\/p>\n

    \n

    C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/strong><\/span><\/h3>\n

    C\u00e2u h\u1ecfi 1: Thu\u1eadt ng\u1eef \u201cepi-ready\u201d c\u00f3 \u00fd ngh\u0129a g\u00ec \u0111\u1ed1i v\u1edbi t\u1ea5m wafer n\u00e0y?<\/strong>
    A: \u0110i\u1ec1u n\u00e0y c\u00f3 ngh\u0129a l\u00e0 b\u1ec1 m\u1eb7t t\u1ea5m wafer \u0111\u00e3 \u0111\u01b0\u1ee3c m\u00e0i b\u00f3ng ch\u00ednh x\u00e1c b\u1eb1ng c\u00f4ng ngh\u1ec7 CMP \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 nh\u00e1m c\u1ef1c th\u1ea5p, gi\u00fap n\u00f3 c\u00f3 th\u1ec3 s\u1eed d\u1ee5ng ngay cho qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 epitaxial m\u00e0 kh\u00f4ng c\u1ea7n x\u1eed l\u00fd th\u00eam.<\/p>\n

    C\u00e2u h\u1ecfi 2: T\u1ea1i sao l\u1ea1i s\u1eed d\u1ee5ng 6H-SiC thay v\u00ec c\u00e1c d\u1ea1ng tinh th\u1ec3 kh\u00e1c?<\/strong>
    A: 6H-SiC mang l\u1ea1i nh\u1eefng l\u1ee3i th\u1ebf trong vi\u1ec7c ph\u00e1t hi\u1ec7n tia c\u1ef1c t\u00edm, nu\u00f4i c\u1ea5y graphene v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng quang h\u1ecdc nh\u1edd kho\u1ea3ng c\u00e1ch n\u0103ng l\u01b0\u1ee3ng v\u00e0 c\u1ea5u tr\u00fac tinh th\u1ec3 c\u1ee7a n\u00f3.<\/p>\n

    C\u00e2u h\u1ecfi 3: T\u1ea5m wafer n\u00e0y c\u00f3 ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p kh\u00f4ng?<\/strong>
    A: \u0110\u00fang v\u1eady, c\u00e1c t\u1ea5m wafer 6 inch \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong s\u1ea3n xu\u1ea5t th\u1eed nghi\u1ec7m v\u00e0 nghi\u00ean c\u1ee9u ph\u00e1t tri\u1ec3n (R&D) ti\u00ean ti\u1ebfn, t\u00f9y thu\u1ed9c v\u00e0o c\u1ea5p \u0111\u1ed9 ch\u1ea5t l\u01b0\u1ee3ng v\u00e0 y\u00eau c\u1ea7u \u1ee9ng d\u1ee5ng.<\/p>\n

    C\u00e2u h\u1ecfi 4: T\u00f4i c\u00f3 th\u1ec3 y\u00eau c\u1ea7u c\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt t\u00f9y ch\u1ec9nh kh\u00f4ng?<\/strong>
    A: V\u00e2ng, ch\u00fang t\u00f4i h\u1ed7 tr\u1ee3 t\u00f9y ch\u1ec9nh to\u00e0n di\u1ec7n, bao g\u1ed3m \u0111\u1ed9 d\u00e0y, h\u01b0\u1edbng, n\u1ed3ng \u0111\u1ed9 t\u1ea1p ch\u1ea5t v\u00e0 x\u1eed l\u00fd b\u1ec1 m\u1eb7t.<\/p>\n

    \n

    T\u1ea1i sao n\u00ean ch\u1ecdn t\u1ea5m wafer epitaxy SiC lo\u1ea1i N 6H 6 inch n\u00e0y<\/strong><\/span><\/h3>\n

    T\u1ea5m wafer n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 mang l\u1ea1i hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh, ch\u1ea5t l\u01b0\u1ee3ng v\u1eadt li\u1ec7u cao v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch tuy\u1ec7t v\u1eddi v\u1edbi c\u00e1c quy tr\u00ecnh b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn. \u0110\u00e2y l\u00e0 gi\u1ea3i ph\u00e1p l\u00fd t\u01b0\u1edfng cho c\u00e1c k\u1ef9 s\u01b0 v\u00e0 nh\u00e0 nghi\u00ean c\u1ee9u \u0111ang t\u00ecm ki\u1ebfm ch\u1ea5t n\u1ec1n \u0111\u00e1ng tin c\u1eady cho c\u00e1c \u1ee9ng d\u1ee5ng MEMS, c\u1ea3m bi\u1ebfn tia UV v\u00e0 c\u00e1c c\u00f4ng ngh\u1ec7 d\u1ef1a tr\u00ean graphene.<\/p>","protected":false},"excerpt":{"rendered":"

    T\u1ea5m wafer epitaxy SiC lo\u1ea1i N 6H k\u00edch th\u01b0\u1edbc 6 inch l\u00e0 m\u1ed9t ch\u1ea5t n\u1ec1n b\u00e1n d\u1eabn hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf cho c\u00e1c \u1ee9ng d\u1ee5ng ti\u00ean ti\u1ebfn, bao g\u1ed3m c\u00e1c thi\u1ebft b\u1ecb MEMS, c\u1ea3m bi\u1ebfn tia c\u1ef1c t\u00edm (UV) v\u00e0 qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n graphene epitaxy. \u0110\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb c\u00e1c tinh th\u1ec3 \u0111\u01a1n tinh th\u1ec3 silicon carbide (SiC) ch\u1ea5t l\u01b0\u1ee3ng cao, t\u1ea5m wafer n\u00e0y k\u1ebft h\u1ee3p c\u00e1c t\u00ednh ch\u1ea5t \u0111i\u1ec7n, nhi\u1ec7t v\u00e0 c\u01a1 h\u1ecdc xu\u1ea5t s\u1eafc, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t m\u00e0 c\u00e1c v\u1eadt li\u1ec7u silicon th\u00f4ng th\u01b0\u1eddng kh\u00f4ng th\u1ec3 ho\u1ea1t \u0111\u1ed9ng \u0111\u00e1ng tin c\u1eady.<\/p>","protected":false},"featured_media":2420,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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