{"id":2400,"date":"2026-04-24T06:21:19","date_gmt":"2026-04-24T06:21:19","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2400"},"modified":"2026-04-24T06:21:22","modified_gmt":"2026-04-24T06:21:22","slug":"precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching\/","title":{"rendered":"V\u00f2ng silicon ch\u00ednh x\u00e1c (\u0111\u01a1n tinh th\u1ec3 \/ \u0111a tinh th\u1ec3) d\u00f9ng trong qu\u00e1 tr\u00ecnh kh\u1eafc plasma b\u00e1n d\u1eabn"},"content":{"rendered":"<p data-start=\"228\" data-end=\"558\">\u00a0\u00a0<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2404 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"V\u00f2ng silicon ch\u00ednh x\u00e1c (\u0111\u01a1n tinh th\u1ec3 \/ \u0111a tinh th\u1ec3) d\u00f9ng trong qu\u00e1 tr\u00ecnh kh\u1eafc plasma b\u00e1n d\u1eabn\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>V\u00f2ng silicon (Si Ring) l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong thi\u1ebft b\u1ecb x\u1eed l\u00fd plasma b\u00e1n d\u1eabn, \u0111\u00f3ng vai tr\u00f2 l\u00e0 v\u00f2ng h\u1ed9i t\u1ee5, v\u00f2ng vi\u1ec1n ho\u1eb7c l\u1edbp l\u00f3t bu\u1ed3ng. N\u00f3 \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong vi\u1ec7c ki\u1ec3m so\u00e1t s\u1ef1 ph\u00e2n b\u1ed1 plasma, c\u1ea3i thi\u1ec7n \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a qu\u00e1 tr\u00ecnh \u0103n m\u00f2n v\u00e0 b\u1ea3o v\u1ec7 c\u00e1c b\u1ed9 ph\u1eadn quan tr\u1ecdng trong bu\u1ed3ng kh\u1ecfi ti\u1ebfp x\u00fac tr\u1ef1c ti\u1ebfp v\u1edbi plasma n\u0103ng l\u01b0\u1ee3ng cao.<\/p>\n<p data-start=\"560\" data-end=\"882\">\u0110\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb silicon \u0111\u01a1n tinh th\u1ec3 ho\u1eb7c silicon \u0111a tinh th\u1ec3 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, c\u00e1c v\u00f2ng silicon mang l\u1ea1i kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch tuy\u1ec7t v\u1eddi v\u1edbi c\u00e1c quy tr\u00ecnh gia c\u00f4ng t\u1ea5m silicon. Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1eadt li\u1ec7u v\u1ed1n c\u00f3 n\u00e0y gi\u00fap gi\u1ea3m \u0111\u00e1ng k\u1ec3 nguy c\u01a1 nhi\u1ec5m b\u1ea9n, khi\u1ebfn c\u00e1c v\u00f2ng silicon tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn \u01b0u ti\u00ean trong nhi\u1ec1u m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn.<\/p>\n<p data-start=\"884\" data-end=\"1239\">Trong qu\u00e1 tr\u00ecnh v\u1eadn h\u00e0nh, c\u00e1c v\u00f2ng silicon ti\u1ebfp x\u00fac v\u1edbi plasma ph\u1ea3n \u1ee9ng \u0111\u01b0\u1ee3c t\u1ea1o ra b\u1edfi c\u00e1c lo\u1ea1i kh\u00ed nh\u01b0 CF\u2084, SF\u2086, NF\u2083 v\u00e0 Cl\u2082. Nh\u1eefng \u0111i\u1ec1u ki\u1ec7n n\u00e0y d\u1ea7n d\u1ea7n g\u00e2y ra s\u1ef1 m\u00e0i m\u00f2n v\u1eadt li\u1ec7u v\u00e0 suy gi\u1ea3m ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t. Do \u0111\u00f3, c\u00e1c v\u00f2ng silicon \u0111\u01b0\u1ee3c x\u1ebfp v\u00e0o danh m\u1ee5c v\u1eadt t\u01b0 ti\u00eau hao quan tr\u1ecdng trong ng\u00e0nh b\u00e1n d\u1eabn, \u0111\u00f2i h\u1ecfi ph\u1ea3i thay th\u1ebf \u0111\u1ecbnh k\u1ef3 \u0111\u1ec3 duy tr\u00ec hi\u1ec7u su\u1ea5t quy tr\u00ecnh v\u00e0 n\u0103ng su\u1ea5t \u1edf m\u1ee9c t\u1ed1i \u01b0u.<\/p>\n<p data-start=\"1241\" data-end=\"1430\">So v\u1edbi v\u00f2ng SiC, v\u00f2ng silicon c\u00f3 hi\u1ec7u qu\u1ea3 chi ph\u00ed cao h\u01a1n v\u00e0 d\u1ec5 gia c\u00f4ng h\u01a1n, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng m\u00e0 chu k\u1ef3 thay th\u1ebf l\u00e0 ch\u1ea5p nh\u1eadn \u0111\u01b0\u1ee3c v\u00e0 vi\u1ec7c ki\u1ec3m so\u00e1t chi ph\u00ed l\u00e0 y\u1ebfu t\u1ed1 quan tr\u1ecdng.<\/p>\n<hr data-start=\"1432\" data-end=\"1435\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1437\" data-end=\"1457\">C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h2>\n<ul data-start=\"1458\" data-end=\"2054\">\n<li data-section-id=\"1wvx41j\" data-start=\"1458\" data-end=\"1549\">V\u1eadt li\u1ec7u silicon c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao: C\u00f3 s\u1eb5n \u1edf d\u1ea1ng \u0111\u01a1n tinh th\u1ec3 v\u00e0 \u0111a tinh th\u1ec3<\/li>\n<li data-section-id=\"16rlosp\" data-start=\"1550\" data-end=\"1653\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch quy tr\u00ecnh tuy\u1ec7t v\u1eddi: L\u00fd t\u01b0\u1edfng cho qu\u00e1 tr\u00ecnh x\u1eed l\u00fd t\u1ea5m silicon v\u1edbi nguy c\u01a1 nhi\u1ec5m b\u1ea9n th\u1ea5p<\/li>\n<li data-section-id=\"h5tu82\" data-start=\"1654\" data-end=\"1727\">T\u00ednh ch\u1ea5t \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh: Gi\u00fap duy tr\u00ec h\u00e0nh vi \u1ed5n \u0111\u1ecbnh c\u1ee7a plasma<\/li>\n<li data-section-id=\"qwtj7n\" data-start=\"1728\" data-end=\"1814\">Gia c\u00f4ng ch\u00ednh x\u00e1c: Dung sai ch\u1eb7t ch\u1ebd (&lt;10 \u03bcm) cho c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/li>\n<li data-section-id=\"cd4ksl\" data-start=\"1815\" data-end=\"1903\">Nhi\u1ec1u t\u00f9y ch\u1ecdn \u0111i\u1ec7n tr\u1edf su\u1ea5t: Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c y\u00eau c\u1ea7u \u0111i\u1ec1u khi\u1ec3n plasma kh\u00e1c nhau<\/li>\n<li data-section-id=\"vfz8a3\" data-start=\"1904\" data-end=\"1984\">Gi\u1ea3i ph\u00e1p ti\u1ebft ki\u1ec7m chi ph\u00ed: Chi ph\u00ed ban \u0111\u1ea7u th\u1ea5p h\u01a1n so v\u1edbi c\u00e1c gi\u1ea3i ph\u00e1p thay th\u1ebf s\u1eed d\u1ee5ng SiC<\/li>\n<li data-section-id=\"1q6rj8k\" data-start=\"1985\" data-end=\"2054\">H\u1ed7 tr\u1ee3 thi\u1ebft k\u1ebf theo y\u00eau c\u1ea7u: C\u00f3 th\u1ec3 cung c\u1ea5p c\u00e1c h\u00ecnh d\u1ea1ng v\u00e0 k\u00edch th\u01b0\u1edbc ph\u1ee9c t\u1ea1p<\/li>\n<\/ul>\n<hr data-start=\"2056\" data-end=\"2059\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2061\" data-end=\"2093\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2095\" data-end=\"2793\">\n<thead data-start=\"2095\" data-end=\"2124\">\n<tr data-start=\"2095\" data-end=\"2124\">\n<th class=\"\" data-start=\"2095\" data-end=\"2107\" data-col-size=\"sm\">Tham s\u1ed1<\/th>\n<th class=\"\" data-start=\"2107\" data-end=\"2124\" data-col-size=\"md\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2152\" data-end=\"2793\">\n<tr data-start=\"2152\" data-end=\"2215\">\n<td data-start=\"2152\" data-end=\"2163\" data-col-size=\"sm\">Ch\u1ea5t li\u1ec7u<\/td>\n<td data-col-size=\"md\" data-start=\"2163\" data-end=\"2215\">Silic \u0111\u01a1n tinh th\u1ec3 \/ Silic \u0111a tinh th\u1ec3<\/td>\n<\/tr>\n<tr data-start=\"2216\" data-end=\"2263\">\n<td data-start=\"2216\" data-end=\"2225\" data-col-size=\"sm\">S\u1ef1 tinh khi\u1ebft<\/td>\n<td data-col-size=\"md\" data-start=\"2225\" data-end=\"2263\">\u2265 99,9991% (lo\u1ea1i b\u00e1n d\u1eabn 5N)<\/td>\n<\/tr>\n<tr data-start=\"2264\" data-end=\"2297\">\n<td data-start=\"2264\" data-end=\"2281\" data-col-size=\"sm\">\u0110\u01b0\u1eddng k\u00ednh (t\u1ed1i \u0111a)<\/td>\n<td data-col-size=\"md\" data-start=\"2281\" data-end=\"2297\">T\u1ed1i \u0111a 480 mm<\/td>\n<\/tr>\n<tr data-start=\"2298\" data-end=\"2340\">\n<td data-start=\"2298\" data-end=\"2310\" data-col-size=\"sm\">\u0110\u1ed9 d\u00e0y<\/td>\n<td data-col-size=\"md\" data-start=\"2310\" data-end=\"2340\">T\u00f9y ch\u1ec9nh (th\u01b0\u1eddng t\u1eeb 5\u201330 mm)<\/td>\n<\/tr>\n<tr data-start=\"2341\" data-end=\"2376\">\n<td data-start=\"2341\" data-end=\"2361\" data-col-size=\"sm\">\u0110i\u1ec7n tr\u1edf su\u1ea5t (th\u1ea5p)<\/td>\n<td data-col-size=\"md\" data-start=\"2361\" data-end=\"2376\">&lt; 0,02 \u03a9\u00b7cm<\/td>\n<\/tr>\n<tr data-start=\"2377\" data-end=\"2414\">\n<td data-start=\"2377\" data-end=\"2400\" data-col-size=\"sm\">\u0110i\u1ec7n tr\u1edf su\u1ea5t (Trung b\u00ecnh)<\/td>\n<td data-col-size=\"md\" data-start=\"2400\" data-end=\"2414\">1 \u2013 4 \u03a9\u00b7cm<\/td>\n<\/tr>\n<tr data-start=\"2415\" data-end=\"2452\">\n<td data-start=\"2415\" data-end=\"2436\" data-col-size=\"sm\">\u0110i\u1ec7n tr\u1edf su\u1ea5t (cao)<\/td>\n<td data-col-size=\"md\" data-start=\"2436\" data-end=\"2452\">70 \u2013 90 \u03a9\u00b7cm<\/td>\n<\/tr>\n<tr data-start=\"2453\" data-end=\"2492\">\n<td data-start=\"2453\" data-end=\"2484\" data-col-size=\"sm\">\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a \u0111i\u1ec7n tr\u1edf su\u1ea5t (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2484\" data-end=\"2492\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2493\" data-end=\"2543\">\n<td data-start=\"2493\" data-end=\"2513\" data-col-size=\"sm\">T\u00ecnh tr\u1ea1ng b\u1ec1 m\u1eb7t<\/td>\n<td data-col-size=\"md\" data-start=\"2513\" data-end=\"2543\">\u0110\u00e1nh b\u00f3ng \/ \u0110\u00e1nh nh\u00e1m \/ M\u00e0i<\/td>\n<\/tr>\n<tr data-start=\"2544\" data-end=\"2605\">\n<td data-start=\"2544\" data-end=\"2569\" data-col-size=\"sm\">\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2569\" data-end=\"2605\">\u2264 0,8 \u03bcm (\u0111\u1ed1i v\u1edbi b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng c\u00f3 th\u1ec3 th\u1ea5p h\u01a1n)<\/td>\n<\/tr>\n<tr data-start=\"2606\" data-end=\"2639\">\n<td data-start=\"2606\" data-end=\"2628\" data-col-size=\"sm\">\u0110\u1ed9 ch\u00ednh x\u00e1c gia c\u00f4ng<\/td>\n<td data-col-size=\"md\" data-start=\"2628\" data-end=\"2639\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2640\" data-end=\"2682\">\n<td data-start=\"2640\" data-end=\"2651\" data-col-size=\"sm\">\u0110\u1ed9 ph\u1eb3ng<\/td>\n<td data-col-size=\"md\" data-start=\"2651\" data-end=\"2682\">\u2264 30 \u03bcm (t\u00f9y theo k\u00edch th\u01b0\u1edbc)<\/td>\n<\/tr>\n<tr data-start=\"2683\" data-end=\"2728\">\n<td data-start=\"2683\" data-end=\"2695\" data-col-size=\"sm\">Lo\u1ea1i c\u1ea1nh<\/td>\n<td data-col-size=\"md\" data-start=\"2695\" data-end=\"2728\">C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh g\u00f3c v\u00e1t \/ b\u00e1n k\u00ednh<\/td>\n<\/tr>\n<tr data-start=\"2729\" data-end=\"2793\">\n<td data-start=\"2729\" data-end=\"2747\" data-col-size=\"sm\">Ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng<\/td>\n<td data-col-size=\"md\" data-start=\"2747\" data-end=\"2793\">Kh\u00f4ng c\u00f3 v\u1ebft n\u1ee9t, v\u1ebft s\u1ee9t m\u1ebb, v\u1ebft x\u01b0\u1edbc hay v\u1ebft b\u1ea9n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2795\" data-end=\"2798\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2800\" data-end=\"2820\">\u1ee8ng d\u1ee5ng<\/h2>\n<p data-start=\"2821\" data-end=\"2903\">V\u00f2ng silicon \u0111\u00f3ng vai tr\u00f2 thi\u1ebft y\u1ebfu trong nhi\u1ec1u m\u00f4i tr\u01b0\u1eddng ch\u1ebf t\u1ea1o b\u00e1n d\u1eabn kh\u00e1c nhau:<\/p>\n<ul data-start=\"2905\" data-end=\"3108\">\n<li data-section-id=\"qzqq98\" data-start=\"2905\" data-end=\"2943\">H\u1ec7 th\u1ed1ng kh\u1eafc plasma (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"2944\" data-end=\"2987\">Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD \/ PECVD)<\/li>\n<li data-section-id=\"1hekjdg\" data-start=\"2988\" data-end=\"3025\">C\u00e1c b\u1ed9 ph\u1eadn c\u1ee7a v\u00f2ng l\u1ea5y n\u00e9t \/ v\u00f2ng vi\u1ec1n<\/li>\n<li data-section-id=\"y1zl6l\" data-start=\"3026\" data-end=\"3065\">C\u00e1c b\u1ed9 ph\u1eadn b\u1ea3o v\u1ec7 bu\u1ed3ng v\u00e0 l\u1edbp l\u00f3t<\/li>\n<li data-section-id=\"83pt8g\" data-start=\"3066\" data-end=\"3108\">C\u00e1c \u1ee9ng d\u1ee5ng ki\u1ec3m so\u00e1t plasma \u1edf m\u00e9p t\u1ea5m wafer<\/li>\n<\/ul>\n<p data-start=\"3110\" data-end=\"3235\">Ch\u00fang \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i \u1edf c\u1ea3 c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 \u0111\u00e3 ho\u00e0n thi\u1ec7n l\u1eabn c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 trung gian, n\u01a1i \u0111\u00f2i h\u1ecfi hi\u1ec7u qu\u1ea3 chi ph\u00ed v\u00e0 hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh.<\/p>\n<p data-start=\"3110\" data-end=\"3235\"><img decoding=\"async\" class=\"aligncenter wp-image-2406 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg\" alt=\"V\u00f2ng silicon ch\u00ednh x\u00e1c (\u0111\u01a1n tinh th\u1ec3 \/ \u0111a tinh th\u1ec3) d\u00f9ng trong qu\u00e1 tr\u00ecnh kh\u1eafc plasma b\u00e1n d\u1eabn\" width=\"1024\" height=\"681\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-300x199.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-768x510.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1536x1021.jpg 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-600x399.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0.jpg 2048w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3237\" data-end=\"3240\" \/>\n<h2 data-section-id=\"1misgzs\" data-start=\"3242\" data-end=\"3274\">\u01afu \u0111i\u1ec3m &amp; \u0110\u1ecbnh v\u1ecb<\/h2>\n<p data-start=\"3275\" data-end=\"3371\">V\u00f2ng \u0111\u1ec7m silicon mang l\u1ea1i s\u1ef1 c\u00e2n b\u1eb1ng gi\u1eefa hi\u1ec7u su\u1ea5t v\u00e0 chi ph\u00ed. So v\u1edbi v\u00f2ng \u0111\u1ec7m SiC:<\/p>\n<ul data-start=\"3373\" data-end=\"3681\">\n<li data-section-id=\"qgkkrh\" data-start=\"3373\" data-end=\"3449\">Chi ph\u00ed th\u1ea5p h\u01a1n: L\u00fd t\u01b0\u1edfng cho c\u00e1c tr\u01b0\u1eddng h\u1ee3p c\u1ea7n ti\u1ebft ki\u1ec7m chi ph\u00ed ho\u1eb7c ph\u1ea3i thay th\u1ebf th\u01b0\u1eddng xuy\u00ean<\/li>\n<li data-section-id=\"fe5ihf\" data-start=\"3450\" data-end=\"3533\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch t\u1ed1t v\u1edbi quy tr\u00ecnh: \u0110\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c quy tr\u00ecnh d\u1ef1a tr\u00ean silicon<\/li>\n<li data-section-id=\"1wgvfgt\" data-start=\"3534\" data-end=\"3604\">S\u1ea3n xu\u1ea5t linh ho\u1ea1t: D\u1ec5 d\u00e0ng gia c\u00f4ng th\u00e0nh c\u00e1c thi\u1ebft k\u1ebf ph\u1ee9c t\u1ea1p<\/li>\n<li data-section-id=\"1855g4l\" data-start=\"3605\" data-end=\"3681\">Hi\u1ec7u su\u1ea5t \u0111\u00e1ng tin c\u1eady: \u0110\u00e3 \u0111\u01b0\u1ee3c ch\u1ee9ng minh trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn quy m\u00f4 l\u1edbn<\/li>\n<\/ul>\n<p data-start=\"3683\" data-end=\"3894\">Tuy nhi\u00ean, trong \u0111i\u1ec1u ki\u1ec7n plasma c\u1ef1c k\u1ef3 kh\u1eafc nghi\u1ec7t, v\u00f2ng silicon c\u00f3 th\u1ec3 b\u1ecb m\u00f2n nhanh h\u01a1n v\u00f2ng SiC. Do \u0111\u00f3, vi\u1ec7c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u c\u1ea7n d\u1ef1a tr\u00ean c\u01b0\u1eddng \u0111\u1ed9 qu\u00e1 tr\u00ecnh, tu\u1ed5i th\u1ecd d\u1ef1 ki\u1ebfn v\u00e0 c\u00e1c y\u1ebfu t\u1ed1 chi ph\u00ed.<\/p>\n<p data-start=\"3683\" data-end=\"3894\"><img decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"3896\" data-end=\"3899\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"3901\" data-end=\"3912\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n<p data-start=\"3914\" data-end=\"4070\">C\u00e2u h\u1ecfi 1: V\u00f2ng silicon c\u00f3 ph\u1ea3i l\u00e0 s\u1ea3n ph\u1ea9m ti\u00eau hao kh\u00f4ng?<br data-start=\"3963\" data-end=\"3966\" \/>\u0110\u00fang v\u1eady. N\u00f3 \u0111\u01b0\u1ee3c coi l\u00e0 m\u1ed9t lo\u1ea1i v\u1eadt t\u01b0 ti\u00eau hao quan tr\u1ecdng trong ng\u00e0nh b\u00e1n d\u1eabn do b\u1ecb m\u00e0i m\u00f2n d\u1ea7n trong m\u00f4i tr\u01b0\u1eddng plasma.<\/p>\n<p data-start=\"4072\" data-end=\"4291\">C\u00e2u h\u1ecfi 2: S\u1ef1 kh\u00e1c bi\u1ec7t gi\u1eefa v\u00f2ng silicon \u0111\u01a1n tinh th\u1ec3 v\u00e0 v\u00f2ng silicon \u0111a tinh th\u1ec3 l\u00e0 g\u00ec?<br data-start=\"4160\" data-end=\"4163\" \/>Silic \u0111\u01a1n tinh th\u1ec3 mang l\u1ea1i \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 t\u00ednh ch\u1ea5t \u0111i\u1ec7n t\u1ed1t h\u01a1n, trong khi silic \u0111a tinh th\u1ec3 l\u1ea1i c\u00f3 hi\u1ec7u qu\u1ea3 v\u1ec1 chi ph\u00ed h\u01a1n.<\/p>\n<p data-start=\"4293\" data-end=\"4452\">C\u00e2u h\u1ecfi 3: V\u00f2ng silicon c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh kh\u00f4ng?<br data-start=\"4336\" data-end=\"4339\" \/>\u0110\u00fang v\u1eady. K\u00edch th\u01b0\u1edbc, \u0111\u1ed9 d\u00e0y, \u0111i\u1ec7n tr\u1edf su\u1ea5t, b\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n v\u00e0 h\u00ecnh d\u1ea1ng \u0111\u1ec1u c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh theo b\u1ea3n v\u1ebd c\u1ee7a qu\u00fd kh\u00e1ch.<\/p>\n<p data-start=\"4454\" data-end=\"4622\">C\u00e2u h\u1ecfi 4: Bao l\u00e2u th\u00ec c\u1ea7n thay v\u00f2ng silicon m\u1ed9t l\u1ea7n?<br data-start=\"4509\" data-end=\"4512\" \/>\u0110i\u1ec1u n\u00e0y ph\u1ee5 thu\u1ed9c v\u00e0o \u0111i\u1ec1u ki\u1ec7n qu\u00e1 tr\u00ecnh, nh\u01b0ng th\u00f4ng th\u01b0\u1eddng t\u1ea7n su\u1ea5t thay th\u1ebf cao h\u01a1n so v\u1edbi v\u00f2ng SiC do \u0111i\u1ec7n tr\u1edf plasma th\u1ea5p h\u01a1n.<\/p>\n<p data-start=\"4624\" data-end=\"4743\">C\u00e2u h\u1ecfi 5: Th\u1eddi gian giao h\u00e0ng th\u00f4ng th\u01b0\u1eddng l\u00e0 bao l\u00e2u?<br data-start=\"4662\" data-end=\"4665\" \/>Th\u1eddi gian s\u1ea3n xu\u1ea5t th\u01b0\u1eddng m\u1ea5t t\u1eeb 3 \u0111\u1ebfn 5 tu\u1ea7n, t\u00f9y thu\u1ed9c v\u00e0o y\u00eau c\u1ea7u k\u1ef9 thu\u1eadt v\u00e0 s\u1ed1 l\u01b0\u1ee3ng.<\/p>","protected":false},"excerpt":{"rendered":"<p>V\u00f2ng silicon (Si Ring) l\u00e0 m\u1ed9t b\u1ed9 ph\u1eadn \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong thi\u1ebft b\u1ecb x\u1eed l\u00fd plasma b\u00e1n d\u1eabn, \u0111\u00f3ng vai tr\u00f2 l\u00e0 v\u00f2ng h\u1ed9i t\u1ee5, v\u00f2ng vi\u1ec1n ho\u1eb7c l\u1edbp l\u00f3t bu\u1ed3ng. N\u00f3 \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong vi\u1ec7c ki\u1ec3m so\u00e1t s\u1ef1 ph\u00e2n b\u1ed1 plasma, c\u1ea3i thi\u1ec7n \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a qu\u00e1 tr\u00ecnh \u0103n m\u00f2n v\u00e0 b\u1ea3o v\u1ec7 c\u00e1c b\u1ed9 ph\u1eadn quan tr\u1ecdng trong bu\u1ed3ng kh\u1ecfi ti\u1ebfp x\u00fac tr\u1ef1c ti\u1ebfp v\u1edbi plasma n\u0103ng l\u01b0\u1ee3ng cao.<\/p>","protected":false},"featured_media":2404,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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