{"id":2389,"date":"2026-04-24T05:55:23","date_gmt":"2026-04-24T05:55:23","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2389"},"modified":"2026-04-24T05:55:25","modified_gmt":"2026-04-24T05:55:25","slug":"cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching\/","title":{"rendered":"V\u00f2ng silicon carbide (SiC) CVD d\u00f9ng trong qu\u00e1 tr\u00ecnh kh\u1eafc plasma b\u00e1n d\u1eabn"},"content":{"rendered":"<p data-start=\"213\" data-end=\"577\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2392 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"V\u00f2ng silicon carbide (SiC) CVD d\u00f9ng trong qu\u00e1 tr\u00ecnh kh\u1eafc plasma b\u00e1n d\u1eabn\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>V\u00f2ng SiC (v\u00f2ng cacbua silic) l\u00e0 m\u1ed9t linh ki\u1ec7n hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c thi\u1ebft b\u1ecb x\u1eed l\u00fd plasma b\u00e1n d\u1eabn, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong c\u00e1c bu\u1ed3ng kh\u1eafc v\u00e0 l\u1eafng \u0111\u1ecdng. \u0110\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb cacbua silic b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD), s\u1ea3n ph\u1ea9m n\u00e0y c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n do plasma, ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 ch\u1ecbu \u0111\u01b0\u1ee3c m\u00f4i tr\u01b0\u1eddng h\u00f3a h\u1ecdc kh\u1eafc nghi\u1ec7t m\u1ed9t c\u00e1ch xu\u1ea5t s\u1eafc.<\/p>\n<p data-start=\"579\" data-end=\"989\">Trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, c\u00e1c b\u1ed9 ph\u1eadn c\u1ee7a bu\u1ed3ng x\u1eed l\u00fd li\u00ean t\u1ee5c ti\u1ebfp x\u00fac v\u1edbi c\u00e1c lo\u1ea1i kh\u00ed ph\u1ea3n \u1ee9ng nh\u01b0 c\u00e1c h\u1ee3p ch\u1ea5t ch\u1ee9a flo v\u00e0 clo (CF\u2084, SF\u2086, Cl\u2082), c\u0169ng nh\u01b0 s\u1ef1 b\u1eafn ph\u00e1 c\u1ee7a c\u00e1c ion n\u0103ng l\u01b0\u1ee3ng cao. Trong \u0111i\u1ec1u ki\u1ec7n nh\u01b0 v\u1eady, c\u00e1c b\u1ed9 ph\u1eadn silicon truy\u1ec1n th\u1ed1ng c\u00f3 xu h\u01b0\u1edbng b\u1ecb suy gi\u1ea3m ch\u1ea5t l\u01b0\u1ee3ng nhanh h\u01a1n. Ng\u01b0\u1ee3c l\u1ea1i, c\u00e1c v\u00f2ng SiC mang l\u1ea1i \u0111\u1ed9 b\u1ec1n cao h\u01a1n \u0111\u00e1ng k\u1ec3, gi\u1ea3m thi\u1ec3u s\u1ef1 h\u00ecnh th\u00e0nh h\u1ea1t b\u1ee5i v\u00e0 c\u1ea3i thi\u1ec7n \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh.<\/p>\n<p data-start=\"991\" data-end=\"1355\">Nh\u1edd \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i, kh\u1ea3 n\u0103ng d\u1eabn nhi\u1ec7t cao v\u00e0 t\u00ednh tr\u01a1 h\u00f3a h\u1ecdc, SiC CVD \u0111\u01b0\u1ee3c coi l\u00e0 m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u \u0111\u00e1ng tin c\u1eady nh\u1ea5t cho thi\u1ebft b\u1ecb b\u00e1n d\u1eabn th\u1ebf h\u1ec7 m\u1edbi. C\u00e1c v\u00f2ng SiC th\u01b0\u1eddng \u0111\u01b0\u1ee3c l\u1eafp \u0111\u1eb7t d\u01b0\u1edbi d\u1ea1ng v\u00f2ng h\u1ed9i t\u1ee5, v\u00f2ng vi\u1ec1n ho\u1eb7c v\u00f2ng b\u1ea3o v\u1ec7 bu\u1ed3ng, gi\u00fap ki\u1ec3m so\u00e1t s\u1ef1 ph\u00e2n b\u1ed1 plasma v\u00e0 b\u1ea3o v\u1ec7 c\u00e1c b\u1ed9 ph\u1eadn quan tr\u1ecdng trong bu\u1ed3ng.<\/p>\n<p data-start=\"1357\" data-end=\"1595\">C\u00e1c v\u00f2ng \u0111\u1ec7m n\u00e0y \u0111\u01b0\u1ee3c x\u1ebfp v\u00e0o danh m\u1ee5c v\u1eadt t\u01b0 ti\u00eau hao quan tr\u1ecdng trong ng\u00e0nh b\u00e1n d\u1eabn, c\u00f3 tu\u1ed5i th\u1ecd cao h\u01a1n nhi\u1ec1u so v\u1edbi c\u00e1c v\u00f2ng \u0111\u1ec7m silicon th\u00f4ng th\u01b0\u1eddng, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t ti\u00ean ti\u1ebfn v\u00e0 m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t c\u00f3 n\u0103ng su\u1ea5t cao.<\/p>\n<hr data-start=\"1597\" data-end=\"1600\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1602\" data-end=\"1622\">C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h2>\n<p><img decoding=\"async\" class=\"size-medium wp-image-2390 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul data-start=\"1623\" data-end=\"2189\">\n<li data-section-id=\"185xteb\" data-start=\"1623\" data-end=\"1725\">V\u1eadt li\u1ec7u SiC CVD c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao: \u0110\u1ea3m b\u1ea3o t\u00ednh to\u00e0n v\u1eb9n c\u1ea5u tr\u00fac tuy\u1ec7t v\u1eddi v\u00e0 m\u1ee9c \u0111\u1ed9 nhi\u1ec5m b\u1ea9n t\u1ed1i thi\u1ec3u<\/li>\n<li data-section-id=\"103qh1t\" data-start=\"1726\" data-end=\"1822\">Kh\u1ea3 n\u0103ng ch\u1ed1ng ch\u1ecbu plasma v\u01b0\u1ee3t tr\u1ed9i: Kh\u1ea3 n\u0103ng ch\u1ed1ng ch\u1ecbu v\u01b0\u1ee3t tr\u1ed9i \u0111\u1ed1i v\u1edbi plasma ch\u1ee9a flo v\u00e0 clo<\/li>\n<li data-section-id=\"19jl5gi\" data-start=\"1823\" data-end=\"1924\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao: Duy tr\u00ec hi\u1ec7u su\u1ea5t trong c\u00e1c m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<li data-section-id=\"ixqmoc\" data-start=\"1925\" data-end=\"2002\">Gi\u1ea3m thi\u1ec3u s\u1ef1 h\u00ecnh th\u00e0nh h\u1ea1t b\u1ee5i: N\u00e2ng cao hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t wafer v\u00e0 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 s\u1ea1ch c\u1ee7a quy tr\u00ecnh<\/li>\n<li data-section-id=\"nx34my\" data-start=\"2003\" data-end=\"2084\">Tu\u1ed5i th\u1ecd k\u00e9o d\u00e0i: Th\u00f4ng th\u01b0\u1eddng d\u00e0i h\u01a1n nhi\u1ec1u l\u1ea7n so v\u1edbi c\u00e1c linh ki\u1ec7n silicon<\/li>\n<li data-section-id=\"14jsdwf\" data-start=\"2085\" data-end=\"2189\">Gia c\u00f4ng ch\u00ednh x\u00e1c: Dung sai ch\u1eb7t ch\u1ebd (&lt;10 \u03bcm) \u0111\u1ec3 t\u00edch h\u1ee3p ho\u00e0n h\u1ea3o v\u00e0o c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/li>\n<\/ul>\n<hr data-start=\"2191\" data-end=\"2194\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2196\" data-end=\"2228\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2230\" data-end=\"2883\">\n<thead data-start=\"2230\" data-end=\"2259\">\n<tr data-start=\"2230\" data-end=\"2259\">\n<th class=\"\" data-start=\"2230\" data-end=\"2242\" data-col-size=\"sm\">Tham s\u1ed1<\/th>\n<th class=\"\" data-start=\"2242\" data-end=\"2259\" data-col-size=\"md\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2287\" data-end=\"2883\">\n<tr data-start=\"2287\" data-end=\"2327\">\n<td data-start=\"2287\" data-end=\"2298\" data-col-size=\"sm\">Ch\u1ea5t li\u1ec7u<\/td>\n<td data-col-size=\"md\" data-start=\"2298\" data-end=\"2327\">CVD cacbua silic (SiC)<\/td>\n<\/tr>\n<tr data-start=\"2328\" data-end=\"2348\">\n<td data-start=\"2328\" data-end=\"2337\" data-col-size=\"sm\">S\u1ef1 tinh khi\u1ebft<\/td>\n<td data-col-size=\"md\" data-start=\"2337\" data-end=\"2348\">\u2265 99,91% TP3T<\/td>\n<\/tr>\n<tr data-start=\"2349\" data-end=\"2374\">\n<td data-start=\"2349\" data-end=\"2359\" data-col-size=\"sm\">M\u1eadt \u0111\u1ed9<\/td>\n<td data-col-size=\"md\" data-start=\"2359\" data-end=\"2374\">\u2265 3,1 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"2375\" data-end=\"2408\">\n<td data-start=\"2375\" data-end=\"2392\" data-col-size=\"sm\">\u0110\u01b0\u1eddng k\u00ednh (t\u1ed1i \u0111a)<\/td>\n<td data-col-size=\"md\" data-start=\"2392\" data-end=\"2408\">T\u1ed1i \u0111a 370 mm<\/td>\n<\/tr>\n<tr data-start=\"2409\" data-end=\"2451\">\n<td data-start=\"2409\" data-end=\"2421\" data-col-size=\"sm\">\u0110\u1ed9 d\u00e0y<\/td>\n<td data-col-size=\"md\" data-start=\"2421\" data-end=\"2451\">T\u00f9y ch\u1ec9nh (th\u01b0\u1eddng t\u1eeb 5\u201330 mm)<\/td>\n<\/tr>\n<tr data-start=\"2452\" data-end=\"2487\">\n<td data-start=\"2452\" data-end=\"2472\" data-col-size=\"sm\">\u0110i\u1ec7n tr\u1edf su\u1ea5t (th\u1ea5p)<\/td>\n<td data-col-size=\"md\" data-start=\"2472\" data-end=\"2487\">&lt; 0,02 \u03a9\u00b7cm<\/td>\n<\/tr>\n<tr data-start=\"2488\" data-end=\"2528\">\n<td data-start=\"2488\" data-end=\"2511\" data-col-size=\"sm\">\u0110i\u1ec7n tr\u1edf su\u1ea5t (Trung b\u00ecnh)<\/td>\n<td data-col-size=\"md\" data-start=\"2511\" data-end=\"2528\">0,2 \u2013 25 \u03a9\u00b7cm<\/td>\n<\/tr>\n<tr data-start=\"2529\" data-end=\"2564\">\n<td data-start=\"2529\" data-end=\"2550\" data-col-size=\"sm\">\u0110i\u1ec7n tr\u1edf su\u1ea5t (cao)<\/td>\n<td data-col-size=\"md\" data-start=\"2550\" data-end=\"2564\">&gt; 100 \u03a9\u00b7cm<\/td>\n<\/tr>\n<tr data-start=\"2565\" data-end=\"2604\">\n<td data-start=\"2565\" data-end=\"2596\" data-col-size=\"sm\">\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a \u0111i\u1ec7n tr\u1edf su\u1ea5t (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2596\" data-end=\"2604\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2605\" data-end=\"2670\">\n<td data-start=\"2605\" data-end=\"2625\" data-col-size=\"sm\">T\u00ecnh tr\u1ea1ng b\u1ec1 m\u1eb7t<\/td>\n<td data-col-size=\"md\" data-start=\"2625\" data-end=\"2670\">M\u1eb7t ph\u1eb3ng (c\u00f3 th\u1ec3 \u0111\u00e1nh b\u00f3ng theo y\u00eau c\u1ea7u)<\/td>\n<\/tr>\n<tr data-start=\"2671\" data-end=\"2723\">\n<td data-start=\"2671\" data-end=\"2696\" data-col-size=\"sm\">\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2696\" data-end=\"2723\">\u2264 1,6 \u03bcm (c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh)<\/td>\n<\/tr>\n<tr data-start=\"2724\" data-end=\"2757\">\n<td data-start=\"2724\" data-end=\"2746\" data-col-size=\"sm\">\u0110\u1ed9 ch\u00ednh x\u00e1c gia c\u00f4ng<\/td>\n<td data-col-size=\"md\" data-start=\"2746\" data-end=\"2757\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2758\" data-end=\"2799\">\n<td data-start=\"2758\" data-end=\"2781\" data-col-size=\"sm\">\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n<td data-col-size=\"md\" data-start=\"2781\" data-end=\"2799\">~120\u2013200 W\/m\u00b7K<\/td>\n<\/tr>\n<tr data-start=\"2800\" data-end=\"2824\">\n<td data-start=\"2800\" data-end=\"2811\" data-col-size=\"sm\">\u0110\u1ed9 c\u1ee9ng<\/td>\n<td data-col-size=\"md\" data-start=\"2811\" data-end=\"2824\">~9,2 \u0111\u1ed9 Mohs<\/td>\n<\/tr>\n<tr data-start=\"2825\" data-end=\"2883\">\n<td data-start=\"2825\" data-end=\"2843\" data-col-size=\"sm\">Ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng<\/td>\n<td data-col-size=\"md\" data-start=\"2843\" data-end=\"2883\">Kh\u00f4ng c\u00f3 v\u1ebft n\u1ee9t, v\u1ebft s\u1ee9t m\u1ebb hay t\u1ea1p ch\u1ea5t<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2885\" data-end=\"2888\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2890\" data-end=\"2910\">\u1ee8ng d\u1ee5ng<\/h2>\n<p data-start=\"2911\" data-end=\"3025\">V\u00f2ng SiC l\u00e0 c\u00e1c b\u1ed9 ph\u1eadn thi\u1ebft y\u1ebfu trong thi\u1ebft b\u1ecb b\u00e1n d\u1eabn, n\u01a1i \u0111\u1ed9 b\u1ec1n v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng plasma \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng:<\/p>\n<ul data-start=\"3027\" data-end=\"3241\">\n<li data-section-id=\"qzqq98\" data-start=\"3027\" data-end=\"3065\">H\u1ec7 th\u1ed1ng kh\u1eafc plasma (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"3066\" data-end=\"3109\">Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD \/ PECVD)<\/li>\n<li data-section-id=\"yfc3l\" data-start=\"3110\" data-end=\"3149\">\u1ee8ng d\u1ee5ng c\u1ee7a v\u00f2ng l\u1ea5y n\u00e9t \/ v\u00f2ng vi\u1ec1n<\/li>\n<li data-section-id=\"14j8f1u\" data-start=\"3150\" data-end=\"3193\">L\u1edbp l\u00f3t bu\u1ed3ng \u0111\u1ed1t v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn b\u1ea3o v\u1ec7<\/li>\n<li data-section-id=\"1l8pbfg\" data-start=\"3194\" data-end=\"3241\">M\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd plasma m\u1eadt \u0111\u1ed9 cao<\/li>\n<\/ul>\n<p data-start=\"3243\" data-end=\"3383\">Ch\u00fang \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p cho c\u00e1c n\u00fat ti\u00ean ti\u1ebfn v\u00e0 c\u00e1c quy tr\u00ecnh \u0103n m\u00f2n kh\u1eafc nghi\u1ec7t, n\u01a1i c\u00e1c th\u00e0nh ph\u1ea7n silicon kh\u00f4ng th\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u v\u1ec1 tu\u1ed5i th\u1ecd.<\/p>\n<p data-start=\"3243\" data-end=\"3383\"><img decoding=\"async\" class=\"aligncenter wp-image-2393 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-1024x511.jpg\" alt=\"\" width=\"1024\" height=\"511\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-1024x511.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-300x150.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-768x383.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-18x9.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-600x299.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva.jpg 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3385\" data-end=\"3388\" \/>\n<h2 data-section-id=\"j4gip\" data-start=\"3390\" data-end=\"3436\">T\u1ea1i sao n\u00ean ch\u1ecdn v\u00f2ng SiC thay v\u00ec v\u00f2ng silicon?<\/h2>\n<p data-start=\"3437\" data-end=\"3702\">So v\u1edbi c\u00e1c v\u00f2ng silicon truy\u1ec1n th\u1ed1ng, c\u00e1c v\u00f2ng SiC mang l\u1ea1i s\u1ef1 c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 v\u1ec1 tu\u1ed5i th\u1ecd v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a qu\u00e1 tr\u00ecnh. M\u1eb7c d\u00f9 c\u00e1c v\u00f2ng silicon c\u00f3 chi ph\u00ed ban \u0111\u1ea7u th\u1ea5p h\u01a1n, nh\u01b0ng ch\u00fang b\u1ecb m\u00f2n nhanh h\u01a1n trong \u0111i\u1ec1u ki\u1ec7n plasma kh\u1eafc nghi\u1ec7t v\u00e0 c\u1ea7n ph\u1ea3i thay th\u1ebf th\u01b0\u1eddng xuy\u00ean h\u01a1n.<\/p>\n<p data-start=\"3704\" data-end=\"3742\">Ng\u01b0\u1ee3c l\u1ea1i, c\u00e1c v\u00f2ng SiC mang l\u1ea1i:<\/p>\n<ul data-start=\"3743\" data-end=\"3903\">\n<li data-section-id=\"17mv8nk\" data-start=\"3743\" data-end=\"3772\">Tu\u1ed5i th\u1ecd cao h\u01a1n t\u1eeb 3 \u0111\u1ebfn 10 l\u1ea7n<\/li>\n<li data-section-id=\"16lo0t8\" data-start=\"3773\" data-end=\"3820\">Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n h\u00f3a h\u1ecdc t\u1ed1t h\u01a1n<\/li>\n<li data-section-id=\"19uuz0f\" data-start=\"3821\" data-end=\"3857\">Gi\u1ea3m \u00f4 nhi\u1ec5m do h\u1ea1t b\u1ee5i<\/li>\n<li data-section-id=\"uhpkja\" data-start=\"3858\" data-end=\"3903\">Gi\u1ea3m th\u1eddi gian ng\u1eebng ho\u1ea1t \u0111\u1ed9ng v\u00e0 chi ph\u00ed b\u1ea3o tr\u00ec<\/li>\n<\/ul>\n<p data-start=\"3905\" data-end=\"4056\">Trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn cao c\u1ea5p, t\u1ed5ng chi ph\u00ed s\u1edf h\u1eefu (TCO) th\u01b0\u1eddng th\u1ea5p h\u01a1n khi s\u1eed d\u1ee5ng c\u00e1c linh ki\u1ec7n SiC, m\u1eb7c d\u00f9 chi ph\u00ed ban \u0111\u1ea7u c\u1ee7a ch\u00fang cao h\u01a1n.<\/p>\n<p data-start=\"3905\" data-end=\"4056\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"4058\" data-end=\"4061\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"4063\" data-end=\"4074\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n<p data-start=\"4076\" data-end=\"4283\">C\u00e2u h\u1ecfi 1: V\u00f2ng SiC c\u00f3 ph\u1ea3i l\u00e0 s\u1ea3n ph\u1ea9m ti\u00eau hao kh\u00f4ng?<br data-start=\"4121\" data-end=\"4124\" \/>\u0110\u00fang v\u1eady, n\u00f3 \u0111\u01b0\u1ee3c coi l\u00e0 m\u1ed9t v\u1eadt t\u01b0 ti\u00eau hao quan tr\u1ecdng trong ng\u00e0nh b\u00e1n d\u1eabn. M\u1eb7c d\u00f9 c\u00f3 tu\u1ed5i th\u1ecd cao h\u01a1n c\u00e1c b\u1ed9 ph\u1eadn l\u00e0m t\u1eeb silicon, nh\u01b0ng cu\u1ed1i c\u00f9ng n\u00f3 c\u0169ng s\u1ebd b\u1ecb m\u00f2n do ti\u1ebfp x\u00fac v\u1edbi plasma.<\/p>\n<p data-start=\"4285\" data-end=\"4492\">C\u00e2u h\u1ecfi 2: \u01afu \u0111i\u1ec3m c\u1ee7a v\u1eadt li\u1ec7u SiC CVD l\u00e0 g\u00ec?<br data-start=\"4335\" data-end=\"4338\" \/>CVD SiC c\u00f3 \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao, c\u1ea5u tr\u00fac \u0111\u1eb7c ch\u1eafc v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng ch\u1ecbu plasma v\u00e0 h\u00f3a ch\u1ea5t tuy\u1ec7t v\u1eddi, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn.<\/p>\n<p data-start=\"4494\" data-end=\"4668\">C\u00e2u h\u1ecfi 3: V\u00f2ng SiC c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh kh\u00f4ng?<br data-start=\"4533\" data-end=\"4536\" \/>\u0110\u00fang v\u1eady. \u0110\u01b0\u1eddng k\u00ednh, \u0111\u1ed9 d\u00e0y, \u0111i\u1ec7n tr\u1edf su\u1ea5t v\u00e0 b\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n \u0111\u1ec1u c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh theo b\u1ea3n v\u1ebd ho\u1eb7c y\u00eau c\u1ea7u k\u1ef9 thu\u1eadt c\u1ee7a qu\u00fd kh\u00e1ch.<\/p>\n<p data-start=\"4670\" data-end=\"4814\">C\u00e2u h\u1ecfi 4: Tu\u1ed5i th\u1ecd c\u1ee7a v\u00f2ng SiC so v\u1edbi v\u00f2ng silicon l\u00e0 bao l\u00e2u?<br data-start=\"4735\" data-end=\"4738\" \/>Th\u00f4ng th\u01b0\u1eddng, v\u00f2ng SiC c\u00f3 tu\u1ed5i th\u1ecd cao h\u01a1n t\u1eeb 3 \u0111\u1ebfn 10 l\u1ea7n, t\u00f9y thu\u1ed9c v\u00e0o \u0111i\u1ec1u ki\u1ec7n gia c\u00f4ng.<\/p>\n<p data-start=\"4816\" data-end=\"4928\">C\u00e2u h\u1ecfi 5: Th\u1eddi gian giao h\u00e0ng l\u00e0 bao l\u00e2u?<br data-start=\"4846\" data-end=\"4849\" \/>Th\u1eddi gian s\u1ea3n xu\u1ea5t th\u01b0\u1eddng m\u1ea5t t\u1eeb 4 \u0111\u1ebfn 8 tu\u1ea7n, t\u00f9y thu\u1ed9c v\u00e0o \u0111\u1ed9 ph\u1ee9c t\u1ea1p c\u1ee7a thi\u1ebft k\u1ebf v\u00e0 s\u1ed1 l\u01b0\u1ee3ng.<\/p>","protected":false},"excerpt":{"rendered":"<p>V\u00f2ng SiC (v\u00f2ng cacbua silic) l\u00e0 m\u1ed9t linh ki\u1ec7n hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c thi\u1ebft b\u1ecb x\u1eed l\u00fd plasma b\u00e1n d\u1eabn, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong c\u00e1c bu\u1ed3ng kh\u1eafc v\u00e0 l\u1eafng \u0111\u1ecdng. \u0110\u01b0\u1ee3c s\u1ea3n xu\u1ea5t t\u1eeb cacbua silic b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD), s\u1ea3n ph\u1ea9m n\u00e0y c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n do plasma, ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 ch\u1ecbu \u0111\u01b0\u1ee3c m\u00f4i tr\u01b0\u1eddng h\u00f3a h\u1ecdc kh\u1eafc nghi\u1ec7t m\u1ed9t c\u00e1ch xu\u1ea5t s\u1eafc.<\/p>","protected":false},"featured_media":2392,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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