{"id":2379,"date":"2026-04-24T05:38:15","date_gmt":"2026-04-24T05:38:15","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2379"},"modified":"2026-06-11T09:57:44","modified_gmt":"2026-06-11T09:57:44","slug":"high-purity-single-crystal-silicon-electrode-for-semiconductor-plasma-etching-systems","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/high-purity-single-crystal-silicon-electrode-for-semiconductor-plasma-etching-systems\/","title":{"rendered":"\u0110i\u1ec7n c\u1ef1c silicon \u0111\u01a1n tinh th\u1ec3 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao d\u00e0nh cho h\u1ec7 th\u1ed1ng kh\u1eafc plasma b\u00e1n d\u1eabn"},"content":{"rendered":"![\"\u0110i\u1ec7n](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/qdOjBmoV8IvfXCCZyP_TScsFcvsnf_rXpW086f8iuioCNO5yQDt0Z9y7ezVD__Z9xzJIqXRfLcHey9Fywi2oJzAWqcbFTEAZfR8g7LsL3RbSqPh8llkzHKhu9Nukj7rB22Gxq5U3xKXDSW2VQzm-N5hCDNWN3CSGBxRIWYEm0DeDO8KSIBMjrAfKNQtx2jyA-300x262.jpg\")
\u0110i\u1ec7n c\u1ef1c silicon l\u00e0 m\u1ed9t th\u00e0nh ph\u1ea7n ch\u1ee9c n\u0103ng c\u1ed1t l\u00f5i \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c thi\u1ebft b\u1ecb x\u1eed l\u00fd plasma b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn, bao g\u1ed3m c\u00e1c h\u1ec7 th\u1ed1ng kh\u1eafc, l\u1eafng \u0111\u1ecdng v\u00e0 bi\u1ebfn t\u00ednh b\u1ec1 m\u1eb7t. \u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb silicon \u0111\u01a1n tinh th\u1ec3 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, n\u00f3 \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong vi\u1ec7c \u0111\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh t\u1ea1o plasma \u1ed5n \u0111\u1ecbnh, ph\u00e2n b\u1ed1 \u0111i\u1ec7n tr\u01b0\u1eddng \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 x\u1eed l\u00fd t\u1ea5m wafer ch\u00ednh x\u00e1c.<\/p>\n
Trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh v\u00e0 hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t b\u1ecb \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp b\u1edfi hi\u1ec7u su\u1ea5t c\u1ee7a c\u00e1c b\u1ed9 ph\u1eadn b\u00ean trong bu\u1ed3ng. \u0110i\u1ec7n c\u1ef1c silicon \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng r\u1ed9ng r\u00e3i nh\u1edd kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch tuy\u1ec7t v\u1eddi v\u1edbi c\u00e1c quy tr\u00ecnh d\u1ef1a tr\u00ean silicon, gi\u00fap gi\u1ea3m thi\u1ec3u r\u1ee7i ro \u00f4 nhi\u1ec5m v\u00e0 duy tr\u00ec \u0111\u1ed9 tinh khi\u1ebft cao trong quy tr\u00ecnh. So v\u1edbi \u0111i\u1ec7n c\u1ef1c kim lo\u1ea1i, v\u1eadt li\u1ec7u silicon th\u1ec3 hi\u1ec7n kh\u1ea3 n\u0103ng ch\u1ed1ng \u00f4 nhi\u1ec5m do plasma g\u00e2y ra t\u1ed1t h\u01a1n v\u00e0 mang l\u1ea1i c\u00e1c \u0111\u1eb7c t\u00ednh \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh h\u01a1n.<\/p>\n
C\u00e1c \u0111i\u1ec7n c\u1ef1c n\u00e0y th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t c\u00f3 s\u1ef1 hi\u1ec7n di\u1ec7n c\u1ee7a plasma n\u0103ng l\u01b0\u1ee3ng cao, c\u00e1c kh\u00ed ph\u1ea3n \u1ee9ng nh\u01b0 CF\u2084, SF\u2086 v\u00e0 Cl\u2082, c\u00f9ng v\u1edbi nhi\u1ec7t \u0111\u1ed9 cao. Theo th\u1eddi gian, ch\u00fang b\u1ecb m\u00e0i m\u00f2n d\u1ea7n v\u00e0 do \u0111\u00f3 \u0111\u01b0\u1ee3c ph\u00e2n lo\u1ea1i l\u00e0 c\u00e1c v\u1eadt t\u01b0 ti\u00eau hao quan tr\u1ecdng trong ng\u00e0nh b\u00e1n d\u1eabn<\/strong>, \u0111\u00f2i h\u1ecfi ph\u1ea3i thay th\u1ebf \u0111\u1ecbnh k\u1ef3 \u0111\u1ed3ng th\u1eddi v\u1eabn duy tr\u00ec hi\u1ec7u su\u1ea5t cao trong su\u1ed1t v\u00f2ng \u0111\u1eddi c\u1ee7a ch\u00fang.<\/p>\n
\nC\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h2>\n\n- V\u1eadt li\u1ec7u c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/strong>: \u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb silicon \u0111\u01a1n tinh th\u1ec3 \u0111\u1ea1t ti\u00eau chu\u1ea9n b\u00e1n d\u1eabn \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o h\u00e0m l\u01b0\u1ee3ng t\u1ea1p ch\u1ea5t \u1edf m\u1ee9c t\u1ed1i thi\u1ec3u v\u00e0 hi\u1ec7u su\u1ea5t \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh
![\"\u0110i\u1ec7n](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/53ijDEI-Hbi31uz0t_L-DHLJsiyWWfRJlHlxVX1VI2hoHMMjCcOYgDxAcs06M_S4FBCl-zPueLgyH54wg3KtodiwkAok0zCME57k1CV0QE0UhxXuTtBJZpJPZ2eY9AembejJC0C5gN2j4R_87GHMZu-o2kMW4owmMIgDwzwwhM5_TvnzGqj9V0JcNVswUNE-300x281.jpg\")
<\/li>\n- Nhi\u1ec1u t\u00f9y ch\u1ecdn v\u1ec1 \u0111i\u1ec7n tr\u1edf su\u1ea5t<\/strong>: C\u00f3 c\u00e1c lo\u1ea1i \u0111i\u1ec7n tr\u1edf su\u1ea5t th\u1ea5p, trung b\u00ecnh v\u00e0 cao \u0111\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u ki\u1ec3m so\u00e1t plasma kh\u00e1c nhau<\/li>\n
- Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch tuy\u1ec7t v\u1eddi v\u1edbi huy\u1ebft t\u01b0\u01a1ng<\/strong>: Gi\u1ea3m s\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c h\u1ea1t b\u1ee5i v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t wafer<\/li>\n
- Gia c\u00f4ng ch\u00ednh x\u00e1c<\/strong>: Dung sai ch\u1eb7t ch\u1ebd (<10 \u03bcm) cho vi\u1ec7c l\u1eafp r\u00e1p thi\u1ebft b\u1ecb b\u00e1n d\u1eabn cao c\u1ea5p<\/li>\n
- Thi\u1ebft k\u1ebf l\u1ed7 tho\u00e1t kh\u00ed theo y\u00eau c\u1ea7u<\/strong>: H\u1ed7 tr\u1ee3 ph\u00e2n ph\u1ed1i kh\u00ed \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 t\u1ed1i \u01b0u h\u00f3a m\u1eadt \u0111\u1ed9 plasma<\/li>\n
- \u0110\u1ed9 linh ho\u1ea1t b\u1ec1 m\u1eb7t<\/strong>: C\u00f3 c\u00e1c lo\u1ea1i b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng, m\u00e0i nh\u1eb5n ho\u1eb7c m\u00e0i ph\u1eb3ng t\u00f9y theo nhu c\u1ea7u s\u1eed d\u1ee5ng<\/li>\n<\/ul>\n
\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n\n
\n
\n\n\n| Tham s\u1ed1<\/th>\n | Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n |
\n\n| Ch\u1ea5t li\u1ec7u<\/td>\n | Silic \u0111\u01a1n tinh th\u1ec3<\/td>\n<\/tr>\n |
\n| S\u1ef1 tinh khi\u1ebft<\/td>\n | \u2265 99,9991% (lo\u1ea1i b\u00e1n d\u1eabn 5N)<\/td>\n<\/tr>\n |
\n| \u0110\u01b0\u1eddng k\u00ednh (t\u1ed1i \u0111a)<\/td>\n | T\u1ed1i \u0111a 480 mm<\/td>\n<\/tr>\n |
\n| \u0110\u1ed9 d\u00e0y<\/td>\n | T\u00f9y ch\u1ec9nh (th\u01b0\u1eddng t\u1eeb 5\u201350 mm t\u00f9y theo thi\u1ebft k\u1ebf)<\/td>\n<\/tr>\n |
\n| \u0110i\u1ec7n tr\u1edf su\u1ea5t (th\u1ea5p)<\/td>\n | < 0,02 \u03a9\u00b7cm<\/td>\n<\/tr>\n |
\n| \u0110i\u1ec7n tr\u1edf su\u1ea5t (Trung b\u00ecnh)<\/td>\n | 1 \u2013 4 \u03a9\u00b7cm<\/td>\n<\/tr>\n |
\n| \u0110i\u1ec7n tr\u1edf su\u1ea5t (cao)<\/td>\n | 70 \u2013 90 \u03a9\u00b7cm<\/td>\n<\/tr>\n |
\n| \u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a \u0111i\u1ec7n tr\u1edf su\u1ea5t (RRG)<\/td>\n | < 5%<\/td>\n<\/tr>\n |
\n| \u0110\u01b0\u1eddng k\u00ednh l\u1ed7 kh\u00ed<\/td>\n | 0,2 \u2013 0,8 mm (c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh)<\/td>\n<\/tr>\n |
\n| T\u00ecnh tr\u1ea1ng b\u1ec1 m\u1eb7t<\/td>\n | \u0110\u00e1nh b\u00f3ng \/ \u0110\u00e1nh nh\u00e1m \/ M\u00e0i<\/td>\n<\/tr>\n |
\n| \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (Ra)<\/td>\n | \u2264 0,8 \u03bcm (phi\u00ean b\u1ea3n m\u00e0i b\u00f3ng c\u00f3 k\u00edch th\u01b0\u1edbc nh\u1ecf h\u01a1n)<\/td>\n<\/tr>\n |
\n| \u0110\u1ed9 ch\u00ednh x\u00e1c gia c\u00f4ng<\/td>\n | < 10 \u03bcm<\/td>\n<\/tr>\n |
\n| \u0110\u1ed9 ph\u1eb3ng<\/td>\n | \u2264 30 \u03bcm (t\u00f9y theo k\u00edch th\u01b0\u1edbc)<\/td>\n<\/tr>\n |
\n| H\u00ecnh d\u1ea1ng c\u1ea1nh<\/td>\n | V\u00e1t \/ b\u00e1n k\u00ednh t\u00f9y ch\u1ec9nh<\/td>\n<\/tr>\n |
\n| Ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng<\/td>\n | Kh\u00f4ng c\u00f3 v\u1ebft n\u1ee9t, v\u1ebft x\u01b0\u1edbc, v\u1ebft b\u1ea9n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n\u1ee8ng d\u1ee5ng<\/h2>\n\u0110i\u1ec7n c\u1ef1c silicon \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn y\u00eau c\u1ea7u t\u01b0\u01a1ng t\u00e1c v\u1edbi plasma. C\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh bao g\u1ed3m:<\/p>\n \n- H\u1ec7 th\u1ed1ng kh\u1eafc plasma (ICP, RIE)<\/li>\n
- Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD \/ PECVD)<\/li>\n
- C\u00e1c quy tr\u00ecnh x\u1eed l\u00fd b\u1ec1 m\u1eb7t wafer<\/li>\n
- C\u00e1c b\u1ed9 ph\u1eadn b\u00ean trong bu\u1ed3ng b\u00e1n d\u1eabn<\/li>\n
- H\u1ec7 th\u1ed1ng ph\u00e2n ph\u1ed1i t\u0129nh \u0111i\u1ec7n ho\u1eb7c plasma<\/li>\n<\/ul>\n
Kh\u1ea3 n\u0103ng duy tr\u00ec t\u00ednh \u0111\u1ed3ng nh\u1ea5t c\u1ee7a plasma v\u00e0 gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh y\u1ebfu t\u1ed1 kh\u00f4ng th\u1ec3 thi\u1ebfu trong c\u1ea3 c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t \u1edf giai \u0111o\u1ea1n \u1ed5n \u0111\u1ecbnh l\u1eabn giai \u0111o\u1ea1n ti\u00ean ti\u1ebfn.<\/p>\n
\nT\u1ea1i sao n\u00ean ch\u1ecdn \u0111i\u1ec7n c\u1ef1c silicon?<\/h2>\n\u0110i\u1ec7n c\u1ef1c silicon mang l\u1ea1i s\u1ef1 c\u00e2n b\u1eb1ng \u0111\u1ed9c \u0111\u00e1o gi\u1eefa hi\u1ec7u qu\u1ea3 chi ph\u00ed v\u00e0 hi\u1ec7u su\u1ea5t. So v\u1edbi c\u00e1c linh ki\u1ec7n SiC, \u0111i\u1ec7n c\u1ef1c silicon c\u00f3 gi\u00e1 th\u00e0nh h\u1ee3p l\u00fd h\u01a1n v\u00e0 d\u1ec5 gia c\u00f4ng h\u01a1n, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng m\u00e0 chu k\u1ef3 thay th\u1ebf l\u00e0 ch\u1ea5p nh\u1eadn \u0111\u01b0\u1ee3c. Ngo\u00e0i ra, t\u00ednh t\u01b0\u01a1ng th\u00edch v\u1ed1n c\u00f3 c\u1ee7a ch\u00fang v\u1edbi c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t t\u1ea5m wafer silicon gi\u00fap gi\u1ea3m thi\u1ec3u r\u1ee7i ro nhi\u1ec5m ch\u00e9o, \u0111i\u1ec1u n\u00e0y c\u00f3 \u00fd ngh\u0129a quan tr\u1ecdng trong vi\u1ec7c duy tr\u00ec n\u0103ng su\u1ea5t cao c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n \u0110\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng y\u00eau c\u1ea7u tu\u1ed5i th\u1ecd cao h\u01a1n ho\u1eb7c kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n t\u1ed1t h\u01a1n, c\u00f3 th\u1ec3 xem x\u00e9t s\u1eed d\u1ee5ng \u0111i\u1ec7n c\u1ef1c SiC. Tuy nhi\u00ean, \u0111\u1ed1i v\u1edbi nhi\u1ec1u quy tr\u00ecnh b\u00e1n d\u1eabn ti\u00eau chu\u1ea9n, \u0111i\u1ec7n c\u1ef1c silicon v\u1eabn l\u00e0 gi\u1ea3i ph\u00e1p ti\u00eau chu\u1ea9n trong ng\u00e0nh.<\/p>\n ![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\") <\/p>\n
\nC\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\nC\u00e2u h\u1ecfi 1: \u0110i\u1ec7n c\u1ef1c silicon c\u00f3 ph\u1ea3i l\u00e0 b\u1ed9 ph\u1eadn ti\u00eau hao kh\u00f4ng?<\/strong>
\u0110\u00fang v\u1eady, n\u00f3 \u0111\u01b0\u1ee3c x\u1ebfp v\u00e0o danh m\u1ee5c v\u1eadt t\u01b0 ti\u00eau hao quan tr\u1ecdng trong ng\u00e0nh b\u00e1n d\u1eabn. Do ti\u1ebfp x\u00fac v\u1edbi plasma v\u00e0 c\u00e1c ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc, n\u00f3 s\u1ebd b\u1ecb m\u00f2n d\u1ea7n v\u00e0 c\u1ea7n \u0111\u01b0\u1ee3c thay th\u1ebf \u0111\u1ecbnh k\u1ef3.<\/p>\nC\u00e2u h\u1ecfi 2: T\u00f4i n\u00ean ch\u1ecdn \u0111i\u1ec7n tr\u1edf su\u1ea5t n\u00e0o?<\/strong>
\u0110i\u1ec1u n\u00e0y ph\u1ee5 thu\u1ed9c v\u00e0o y\u00eau c\u1ea7u c\u1ee7a quy tr\u00ecnh c\u1ee7a b\u1ea1n. \u0110i\u1ec7n tr\u1edf su\u1ea5t th\u1ea5p th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi \u0111\u1ed9 d\u1eabn \u0111i\u1ec7n cao, trong khi \u0111i\u1ec7n tr\u1edf su\u1ea5t cao ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng c\u00e1ch \u0111i\u1ec7n v\u00e0 m\u00f4i tr\u01b0\u1eddng plasma \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t.<\/p>\nC\u00e2u h\u1ecfi 3: C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh \u0111i\u1ec7n c\u1ef1c kh\u00f4ng?<\/strong>
\u0110\u00fang v\u1eady. K\u00edch th\u01b0\u1edbc, \u0111\u1ed9 d\u00e0y, b\u1ed1 tr\u00ed l\u1ed7 tho\u00e1t kh\u00ed, \u0111i\u1ec7n tr\u1edf su\u1ea5t v\u00e0 b\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n \u0111\u1ec1u c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh theo b\u1ea3n v\u1ebd ho\u1eb7c y\u00eau c\u1ea7u k\u1ef9 thu\u1eadt c\u1ee7a qu\u00fd kh\u00e1ch.<\/p>","protected":false},"excerpt":{"rendered":"\u0110i\u1ec7n c\u1ef1c silicon l\u00e0 m\u1ed9t th\u00e0nh ph\u1ea7n ch\u1ee9c n\u0103ng c\u1ed1t l\u00f5i \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c thi\u1ebft b\u1ecb x\u1eed l\u00fd plasma b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn, bao g\u1ed3m c\u00e1c h\u1ec7 th\u1ed1ng kh\u1eafc, l\u1eafng \u0111\u1ecdng v\u00e0 bi\u1ebfn t\u00ednh b\u1ec1 m\u1eb7t. \u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb silicon \u0111\u01a1n tinh th\u1ec3 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, n\u00f3 \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong vi\u1ec7c \u0111\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh t\u1ea1o plasma \u1ed5n \u0111\u1ecbnh, ph\u00e2n b\u1ed1 \u0111i\u1ec7n tr\u01b0\u1eddng \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 x\u1eed l\u00fd t\u1ea5m wafer ch\u00ednh x\u00e1c.<\/p>","protected":false},"featured_media":2397,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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