{"id":2360,"date":"2026-04-22T07:08:49","date_gmt":"2026-04-22T07:08:49","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2360"},"modified":"2026-04-22T07:13:29","modified_gmt":"2026-04-22T07:13:29","slug":"ai350ht-medium-beam-high-temperature-ion-implantation-system-for-6-8-inch-sic-and-silicon-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/ai350ht-medium-beam-high-temperature-ion-implantation-system-for-6-8-inch-sic-and-silicon-wafer-processing\/","title":{"rendered":"H\u1ec7 th\u1ed1ng c\u1ea5y ion nhi\u1ec7t \u0111\u1ed9 cao ch\u00f9m tia trung b\u00ecnh Ai350HT d\u00e0nh cho x\u1eed l\u00fd t\u1ea5m wafer SiC v\u00e0 silicon k\u00edch th\u01b0\u1edbc 6\/8 inch"},"content":{"rendered":"

\"H\u1ec7H\u1ec7 th\u1ed1ng c\u1ea5y ion nhi\u1ec7t \u0111\u1ed9 cao Ai350HT (ch\u00f9m tia trung b\u00ecnh) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 6 inch v\u00e0 8 inch, c\u0169ng nh\u01b0 c\u00e1c \u1ee9ng d\u1ee5ng trong quy tr\u00ecnh SiC. \u0110\u00e2y l\u00e0 m\u1ed9t thi\u1ebft b\u1ecb c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n trung b\u00ecnh \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 ph\u1ee5c v\u1ee5 c\u00e1c quy tr\u00ecnh pha t\u1ea1p n\u0103ng l\u01b0\u1ee3ng cao v\u00e0 nhi\u1ec7t \u0111\u1ed9 cao trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n

H\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 d\u1ea3i n\u0103ng l\u01b0\u1ee3ng t\u1eeb 5 keV \u0111\u1ebfn 350 keV, cho ph\u00e9p th\u1ef1c hi\u1ec7n c\u1ea3 c\u00e1c quy tr\u00ecnh c\u1ea5y ion \u1edf \u0111\u1ed9 s\u00e2u n\u00f4ng v\u00e0 s\u00e2u. H\u1ec7 th\u1ed1ng \u0111\u01b0\u1ee3c trang b\u1ecb m\u1ed9t \u0111\u1ebf \u0111i\u1ec7n t\u0129nh ch\u1ecbu nhi\u1ec7t cao c\u00f3 th\u1ec3 ho\u1ea1t \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 l\u00ean \u0111\u1ebfn 500\u00b0C, gi\u00fap t\u0103ng c\u01b0\u1eddng qu\u00e1 tr\u00ecnh k\u00edch ho\u1ea1t ch\u1ea5t pha t\u1ea1p v\u00e0 gi\u1ea3m thi\u1ec3u t\u1ed5n th\u01b0\u01a1ng m\u1ea1ng tinh th\u1ec3 trong qu\u00e1 tr\u00ecnh c\u1ea5y ion. K\u1ebft h\u1ee3p v\u1edbi hi\u1ec7u su\u1ea5t ch\u00f9m tia \u1ed5n \u0111\u1ecbnh v\u00e0 kh\u1ea3 n\u0103ng \u0111i\u1ec1u khi\u1ec3n ch\u00ednh x\u00e1c cao, h\u1ec7 th\u1ed1ng n\u00e0y ph\u00f9 h\u1ee3p cho c\u1ea3 s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn d\u1ef1a tr\u00ean silicon v\u00e0 ch\u1ea5t b\u00e1n d\u1eabn khe n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng.<\/p>\n

\n

T\u00ednh n\u0103ng<\/h2>\n

Kh\u1ea3 n\u0103ng c\u1ea5y gh\u00e9p \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/h3>\n

\u0110\u01b0\u1ee3c trang b\u1ecb m\u00e2m k\u1eb9p t\u0129nh \u0111i\u1ec7n ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao l\u00ean \u0111\u1ebfn 500\u00b0C, gi\u00fap n\u00e2ng cao hi\u1ec7u su\u1ea5t c\u1ea5y v\u00e0 k\u00edch ho\u1ea1t ch\u1ea5t pha t\u1ea1p cho c\u00e1c quy tr\u00ecnh ti\u00ean ti\u1ebfn.<\/p>\n

D\u1ea3i c\u00f4ng su\u1ea5t r\u1ed9ng<\/h3>\n

D\u1ea3i n\u0103ng l\u01b0\u1ee3ng t\u1eeb 5\u2013350 keV \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u c\u1ea5y gh\u00e9p linh ho\u1ea1t, t\u1eeb vi\u1ec7c h\u00ecnh th\u00e0nh l\u1edbp ti\u1ebfp gi\u00e1p n\u00f4ng \u0111\u1ebfn c\u00e1c quy tr\u00ecnh c\u1ea5y gh\u00e9p s\u00e2u.<\/p>\n

Ki\u1ec3m so\u00e1t ch\u00f9m tia v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/h3>\n

\u0110\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t c\u1ea5y gh\u00e9p ch\u00ednh x\u00e1c v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c g\u00f3c \u2264 0,2\u00b0, \u0111\u1ed9 song song c\u1ee7a ch\u00f9m tia \u2264 0,2\u00b0, \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u \u2264 0,5% v\u00e0 \u0111\u1ed9 l\u1eb7p l\u1ea1i \u2264 0,5%.<\/p>\n

Hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u1ea7m<\/h3>\n

\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a ch\u00f9m tia \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t trong ph\u1ea1m vi 10% m\u1ed7i gi\u1edd, \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng quy tr\u00ecnh \u1ed5n \u0111\u1ecbnh trong c\u00e1c chu k\u1ef3 s\u1ea3n xu\u1ea5t k\u00e9o d\u00e0i.<\/p>\n

Ngu\u1ed3n ion c\u00f3 tu\u1ed5i th\u1ecd cao<\/h3>\n

\u0110\u01b0\u1ee3c trang b\u1ecb ngu\u1ed3n ion nh\u00f4m kim lo\u1ea1i c\u00f3 tu\u1ed5i th\u1ecd \u2265150 gi\u1edd, gi\u00fap gi\u1ea3m t\u1ea7n su\u1ea5t b\u1ea3o tr\u00ec v\u00e0 n\u00e2ng cao th\u1eddi gian ho\u1ea1t \u0111\u1ed9ng.<\/p>\n

Kh\u1ea3 n\u0103ng x\u1eed l\u00fd kh\u1ed1i l\u01b0\u1ee3ng l\u1edbn<\/h3>\n

H\u1ed7 tr\u1ee3 c\u00f4ng su\u1ea5t \u2265 200 t\u1ea5m wafer m\u1ed7i gi\u1edd, ph\u00f9 h\u1ee3p v\u1edbi m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn.<\/p>\n

Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch quy tr\u00ecnh n\u00e2ng cao<\/h3>\n

T\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh SiC v\u00e0 quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn truy\u1ec1n th\u1ed1ng d\u1ef1a tr\u00ean silicon.<\/p>\n

\"\"\"\"<\/p>\n

\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u00ednh<\/h2>\n

Th\u00f4ng s\u1ed1 quy tr\u00ecnh<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\n6\u20138 inch<\/td>\n<\/tr>\n
Ph\u1ea1m vi n\u0103ng l\u01b0\u1ee3ng<\/td>\n5\u2013350 keV<\/td>\n<\/tr>\n
C\u00e1c th\u00e0nh ph\u1ea7n \u0111\u01b0\u1ee3c c\u1ea5y gh\u00e9p<\/td>\nC, Al, B, P, N, He, Ar<\/td>\n<\/tr>\n
Ph\u1ea1m vi li\u1ec1u l\u01b0\u1ee3ng<\/td>\n1E11\u20131E17 ion\/cm\u00b2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Hi\u1ec7u su\u1ea5t ch\u00f9m tia<\/h3>\n
\n
\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u1ea7m<\/td>\n\u2264 10% \/ gi\u1edd (\u2264 1 l\u1ea7n gi\u00e1n \u0111o\u1ea1n ch\u00f9m tia ho\u1eb7c hi\u1ec7n t\u01b0\u1ee3ng h\u1ed3 quang m\u1ed7i gi\u1edd)<\/td>\n<\/tr>\n
\u0110\u1ed9 song song c\u1ee7a ch\u00f9m tia<\/td>\n\u2264 0,2\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u0110\u1ed9 ch\u00ednh x\u00e1c khi c\u1ea5y gh\u00e9p<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
Ph\u1ea1m vi g\u00f3c c\u1ea5y gh\u00e9p<\/td>\n0\u00b0\u201345\u00b0<\/td>\n<\/tr>\n
\u0110\u1ed9 ch\u00ednh x\u00e1c g\u00f3c<\/td>\n\u2264 0,2\u00b0<\/td>\n<\/tr>\n
\u0110\u1ed9 \u0111\u1ed3ng nh\u1ea5t (1\u03c3)<\/td>\n\u2264 0,51 TP3T (P+, 1E14, 100 keV)<\/td>\n<\/tr>\n
\u0110\u1ed9 l\u1eb7p l\u1ea1i (1\u03c3)<\/td>\n\u2264 0,5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Hi\u1ec7u su\u1ea5t h\u1ec7 th\u1ed1ng<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
C\u00f4ng su\u1ea5t<\/td>\n\u2265 200 t\u1ea5m wafer m\u1ed7i gi\u1edd<\/td>\n<\/tr>\n
Nhi\u1ec7t \u0111\u1ed9 t\u1ed1i \u0111a c\u1ee7a m\u00e2m k\u1eb9p<\/td>\n500\u00b0C<\/td>\n<\/tr>\n
K\u00edch th\u01b0\u1edbc thi\u1ebft b\u1ecb<\/td>\n6270 \u00d7 3500 \u00d7 3000 mm<\/td>\n<\/tr>\n
M\u1ee9c ch\u00e2n kh\u00f4ng<\/td>\n5E-7 Torr<\/td>\n<\/tr>\n
R\u00f2 r\u1ec9 tia X<\/td>\n\u2264 0,3 \u03bcSv\/h<\/td>\n<\/tr>\n
Ch\u1ebf \u0111\u1ed9 qu\u00e9t<\/td>\nQu\u00e9t t\u0129nh \u0111i\u1ec7n ngang + qu\u00e9t c\u01a1 h\u1ecdc d\u1ecdc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

L\u0129nh v\u1ef1c \u1ee9ng d\u1ee5ng<\/h2>\n

S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn SiC<\/h3>\n

\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb cacbua silic \u0111\u00f2i h\u1ecfi c\u00e1c quy tr\u00ecnh c\u1ea5y ion \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n

Quy tr\u00ecnh ch\u1ebf t\u1ea1o ch\u1ea5t b\u00e1n d\u1eabn tr\u00ean n\u1ec1n silicon<\/h3>\n

\u00c1p d\u1ee5ng cho s\u1ea3n xu\u1ea5t CMOS v\u00e0 m\u1ea1ch t\u00edch h\u1ee3p tr\u00ean c\u00e1c t\u1ea5m wafer 6 inch v\u00e0 8 inch.<\/p>\n

C\u00e1c quy tr\u00ecnh c\u1ea5y gh\u00e9p \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/h3>\n

Th\u00edch h\u1ee3p cho c\u00e1c quy tr\u00ecnh y\u00eau c\u1ea7u nhi\u1ec7t \u0111\u1ed9 cao nh\u1eb1m gi\u1ea3m thi\u1ec3u t\u1ed5n th\u01b0\u01a1ng tinh th\u1ec3 v\u00e0 t\u0103ng c\u01b0\u1eddng ho\u1ea1t h\u00f3a ch\u1ea5t pha t\u1ea1p.<\/p>\n

S\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb \u0111i\u1ec7n<\/h3>\n

\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t y\u00eau c\u1ea7u qu\u00e1 tr\u00ecnh c\u1ea5y s\u00e2u v\u00e0 c\u00e1c quy tr\u00ecnh n\u0103ng l\u01b0\u1ee3ng cao.<\/p>\n

K\u1ef9 thu\u1eadt V\u1eadt li\u1ec7u N\u00e2ng cao<\/h3>\n

H\u1ed7 tr\u1ee3 qu\u00e1 tr\u00ecnh c\u1ea5y ion trong c\u00e1c v\u1eadt li\u1ec7u b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn v\u00e0 m\u00f4i tr\u01b0\u1eddng ph\u00e1t tri\u1ec3n quy tr\u00ecnh.<\/p>\n

\n

C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n

1. M\u00e1y in Ai350HT h\u1ed7 tr\u1ee3 c\u00e1c k\u00edch th\u01b0\u1edbc t\u1ea5m wafer n\u00e0o?<\/h3>\n

H\u1ec7 th\u1ed1ng n\u00e0y h\u1ed7 tr\u1ee3 c\u00e1c t\u1ea5m wafer 6 inch v\u00e0 8 inch, \u0111\u1ed3ng th\u1eddi ph\u00f9 h\u1ee3p v\u1edbi c\u1ea3 c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn d\u1ef1a tr\u00ean silicon v\u00e0 SiC.<\/p>\n

2. Nhi\u1ec7t \u0111\u1ed9 t\u1ed1i \u0111a \u0111\u01b0\u1ee3c h\u1ed7 tr\u1ee3 trong qu\u00e1 tr\u00ecnh c\u1ea5y gh\u00e9p l\u00e0 bao nhi\u00eau?<\/h3>\n

H\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 qu\u00e1 tr\u00ecnh c\u1ea5y gh\u00e9p \u1edf nhi\u1ec7t \u0111\u1ed9 cao l\u00ean \u0111\u1ebfn 500\u00b0C b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng \u0111\u1ebf t\u0129nh \u0111i\u1ec7n c\u00f3 h\u1ec7 th\u1ed1ng gia nhi\u1ec7t k\u1ebft h\u1ee3p v\u1edbi c\u01a1 ch\u1ebf k\u1eb9p c\u01a1 h\u1ecdc.<\/p>\n

3. Nh\u1eefng \u01b0u \u0111i\u1ec3m ch\u00ednh c\u1ee7a h\u1ec7 th\u1ed1ng n\u00e0y \u0111\u1ed1i v\u1edbi c\u00e1c quy tr\u00ecnh SiC l\u00e0 g\u00ec?<\/h3>\n

H\u1ec7 th\u1ed1ng n\u00e0y k\u1ebft h\u1ee3p kh\u1ea3 n\u0103ng ho\u1ea1t \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 cao, hi\u1ec7u su\u1ea5t ch\u00f9m tia \u1ed5n \u0111\u1ecbnh v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh SiC, nh\u1edd \u0111\u00f3 ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn khe n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng.<\/p>","protected":false},"excerpt":{"rendered":"

H\u1ec7 th\u1ed1ng c\u1ea5y ion nhi\u1ec7t \u0111\u1ed9 cao Ai350HT (ch\u00f9m tia trung b\u00ecnh) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 6 inch v\u00e0 8 inch, c\u0169ng nh\u01b0 c\u00e1c \u1ee9ng d\u1ee5ng trong quy tr\u00ecnh SiC. \u0110\u00e2y l\u00e0 m\u1ed9t thi\u1ebft b\u1ecb c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n trung b\u00ecnh \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 ph\u1ee5c v\u1ee5 c\u00e1c quy tr\u00ecnh pha t\u1ea1p n\u0103ng l\u01b0\u1ee3ng cao v\u00e0 nhi\u1ec7t \u0111\u1ed9 cao trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>","protected":false},"featured_media":2361,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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