{"id":2354,"date":"2026-04-22T06:34:59","date_gmt":"2026-04-22T06:34:59","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2354"},"modified":"2026-04-22T07:16:34","modified_gmt":"2026-04-22T07:16:34","slug":"ai300-medium-beam-high-temperature-ion-implantation-system-for-12-inch-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/ai300-medium-beam-high-temperature-ion-implantation-system-for-12-inch-wafer-processing\/","title":{"rendered":"H\u1ec7 th\u1ed1ng c\u1ea5y ion nhi\u1ec7t \u0111\u1ed9 cao Ai300 (ch\u00f9m tia trung b\u00ecnh) d\u00e0nh cho x\u1eed l\u00fd t\u1ea5m wafer 12 inch"},"content":{"rendered":"

\"H\u1ec7H\u1ec7 th\u1ed1ng c\u1ea5y ion nhi\u1ec7t \u0111\u1ed9 cao Ai300 (ch\u00f9m tia trung b\u00ecnh) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 12 inch. \u0110\u00e2y l\u00e0 thi\u1ebft b\u1ecb c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n trung b\u00ecnh \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 ph\u1ee5c v\u1ee5 c\u00e1c quy tr\u00ecnh pha t\u1ea1p ti\u00ean ti\u1ebfn trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn d\u1ef1a tr\u00ean silicon v\u00e0 b\u00e1n d\u1eabn khe n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng, bao g\u1ed3m c\u1ea3 c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t SiC.<\/p>\n

H\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 d\u1ea3i n\u0103ng l\u01b0\u1ee3ng t\u1eeb 5 keV \u0111\u1ebfn 300 keV, cho ph\u00e9p th\u1ef1c hi\u1ec7n qu\u00e1 tr\u00ecnh c\u1ea5y ion linh ho\u1ea1t, t\u1eeb vi\u1ec7c t\u1ea1o l\u1edbp ti\u1ebfp gi\u00e1p n\u00f4ng \u0111\u1ebfn c\u00e1c \u1ee9ng d\u1ee5ng pha t\u1ea1p s\u00e2u. H\u1ec7 th\u1ed1ng \u0111\u01b0\u1ee3c trang b\u1ecb b\u00e0n \u0111\u1ebf wafer c\u00f3 h\u1ec7 th\u1ed1ng s\u01b0\u1edfi nhi\u1ec7t \u0111\u1ed9 cao v\u1edbi nhi\u1ec7t \u0111\u1ed9 t\u1ed1i \u0111a l\u00ean \u0111\u1ebfn 400\u00b0C, gi\u00fap t\u0103ng c\u01b0\u1eddng qu\u00e1 tr\u00ecnh k\u00edch ho\u1ea1t ch\u1ea5t pha t\u1ea1p v\u00e0 gi\u1ea3m thi\u1ec3u t\u1ed5n th\u01b0\u01a1ng m\u1ea1ng tinh th\u1ec3 trong qu\u00e1 tr\u00ecnh c\u1ea5y ion.<\/p>\n

V\u1edbi hi\u1ec7u su\u1ea5t ch\u00f9m tia \u1ed5n \u0111\u1ecbnh, kh\u1ea3 n\u0103ng \u0111i\u1ec1u khi\u1ec3n ch\u00ednh x\u00e1c cao v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p quy m\u00f4 l\u1edbn, h\u1ec7 th\u1ed1ng Ai300 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n

\n

T\u00ednh n\u0103ng<\/h2>\n

Kh\u1ea3 n\u0103ng c\u1ea5y gh\u00e9p \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/h3>\n

\u0110\u01b0\u1ee3c trang b\u1ecb b\u00e0n \u0111\u1ebf wafer c\u00f3 h\u1ec7 th\u1ed1ng s\u01b0\u1edfi \u1ea5m, h\u1ed7 tr\u1ee3 nhi\u1ec7t \u0111\u1ed9 l\u00ean \u0111\u1ebfn 400\u00b0C, gi\u00fap n\u00e2ng cao ch\u1ea5t l\u01b0\u1ee3ng qu\u00e1 tr\u00ecnh c\u1ea5y ion v\u00e0 hi\u1ec7u qu\u1ea3 k\u00edch ho\u1ea1t ch\u1ea5t pha t\u1ea1p.<\/p>\n

D\u1ea3i c\u00f4ng su\u1ea5t r\u1ed9ng<\/h3>\n

D\u1ea3i n\u0103ng l\u01b0\u1ee3ng t\u1eeb 5\u2013300 keV h\u1ed7 tr\u1ee3 c\u1ea3 c\u00e1c quy tr\u00ecnh c\u1ea5y gh\u00e9p n\u00f4ng v\u00e0 s\u00e2u cho c\u00e1c c\u1ea5u tr\u00fac thi\u1ebft b\u1ecb ti\u00ean ti\u1ebfn.<\/p>\n

Ki\u1ec3m so\u00e1t ch\u00f9m tia v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/h3>\n

\u0110\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c cao trong qu\u00e1 tr\u00ecnh c\u1ea5y gh\u00e9p v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c g\u00f3c \u2264 0,1\u00b0, \u0111\u1ed9 song song c\u1ee7a ch\u00f9m tia \u2264 0,1\u00b0, \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u \u2264 0,5% v\u00e0 \u0111\u1ed9 l\u1eb7p l\u1ea1i \u2264 0,5%.<\/p>\n

Hi\u1ec7u su\u1ea5t x\u1eed l\u00fd kh\u1ed1i l\u01b0\u1ee3ng l\u1edbn<\/h3>\n

H\u1ed7 tr\u1ee3 c\u00f4ng su\u1ea5t x\u1eed l\u00fd l\u00ean \u0111\u1ebfn \u2265 500 t\u1ea5m wafer m\u1ed7i gi\u1edd, ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn quy m\u00f4 l\u1edbn.<\/p>\n

Kh\u1ea3 n\u0103ng ngu\u1ed3n ion ti\u00ean ti\u1ebfn<\/h3>\n

H\u1ed7 tr\u1ee3 nhi\u1ec1u nguy\u00ean t\u1ed1 \u0111\u01b0\u1ee3c c\u1ea5y gh\u00e9p, bao g\u1ed3m C, B, P, N, He v\u00e0 Ar, \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u \u0111a d\u1ea1ng c\u1ee7a quy tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n

Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch quy tr\u00ecnh LSI<\/h3>\n

Ho\u00e0n to\u00e0n t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p quy m\u00f4 l\u1edbn v\u00e0 c\u00f4ng ngh\u1ec7 ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb ti\u00ean ti\u1ebfn.<\/p>\n

\"\" \"\"<\/p>\n

\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u00ednh<\/h2>\n

Th\u00f4ng s\u1ed1 quy tr\u00ecnh<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\n12 inch<\/td>\n<\/tr>\n
Ph\u1ea1m vi n\u0103ng l\u01b0\u1ee3ng<\/td>\n5\u2013300 keV<\/td>\n<\/tr>\n
C\u00e1c th\u00e0nh ph\u1ea7n \u0111\u01b0\u1ee3c c\u1ea5y gh\u00e9p<\/td>\nC, B, P, N, He, Ar<\/td>\n<\/tr>\n
Ph\u1ea1m vi li\u1ec1u l\u01b0\u1ee3ng<\/td>\n1E11\u20131E16 ion\/cm\u00b2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Hi\u1ec7u su\u1ea5t ch\u00f9m tia<\/h3>\n
\n
\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u1ea7m<\/td>\n\u2264 10% \/ gi\u1edd (\u2264 1 l\u1ea7n gi\u00e1n \u0111o\u1ea1n ch\u00f9m tia ho\u1eb7c hi\u1ec7n t\u01b0\u1ee3ng h\u1ed3 quang m\u1ed7i gi\u1edd)<\/td>\n<\/tr>\n
\u0110\u1ed9 song song c\u1ee7a ch\u00f9m tia<\/td>\n\u2264 0,1\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u0110\u1ed9 ch\u00ednh x\u00e1c khi c\u1ea5y gh\u00e9p<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
Ph\u1ea1m vi g\u00f3c c\u1ea5y gh\u00e9p<\/td>\n0\u00b0\u201345\u00b0<\/td>\n<\/tr>\n
\u0110\u1ed9 ch\u00ednh x\u00e1c g\u00f3c<\/td>\n\u2264 0,1\u00b0<\/td>\n<\/tr>\n
\u0110\u1ed9 \u0111\u1ed3ng nh\u1ea5t (1\u03c3)<\/td>\n\u2264 0,51 TP3T (P+, 1E14, 100 keV)<\/td>\n<\/tr>\n
\u0110\u1ed9 l\u1eb7p l\u1ea1i (1\u03c3)<\/td>\n\u2264 0,5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Hi\u1ec7u su\u1ea5t h\u1ec7 th\u1ed1ng<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
C\u00f4ng su\u1ea5t<\/td>\n\u2265 500 t\u1ea5m wafer m\u1ed7i gi\u1edd<\/td>\n<\/tr>\n
Nhi\u1ec7t \u0111\u1ed9 t\u1ed1i \u0111a c\u1ee7a implant<\/td>\n400\u00b0C<\/td>\n<\/tr>\n
K\u00edch th\u01b0\u1edbc thi\u1ebft b\u1ecb<\/td>\n6400 \u00d7 3640 \u00d7 3100 mm<\/td>\n<\/tr>\n
M\u1ee9c ch\u00e2n kh\u00f4ng<\/td>\n5E-7 Torr<\/td>\n<\/tr>\n
R\u00f2 r\u1ec9 tia X<\/td>\n\u2264 0,3 \u03bcSv\/h<\/td>\n<\/tr>\n
Ch\u1ebf \u0111\u1ed9 qu\u00e9t<\/td>\nQu\u00e9t t\u0129nh \u0111i\u1ec7n ngang + qu\u00e9t c\u01a1 h\u1ecdc d\u1ecdc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

L\u0129nh v\u1ef1c \u1ee9ng d\u1ee5ng<\/h2>\n

Ch\u1ebf t\u1ea1o ch\u1ea5t b\u00e1n d\u1eabn SiC<\/h3>\n

\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb cacbua silic, h\u1ed7 tr\u1ee3 c\u00e1c quy tr\u00ecnh c\u1ea5y ion \u1edf nhi\u1ec7t \u0111\u1ed9 cao c\u1ea7n thi\u1ebft cho c\u00e1c v\u1eadt li\u1ec7u c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng.<\/p>\n

S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn tr\u00ean n\u1ec1n silicon<\/h3>\n

\u00c1p d\u1ee5ng cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t t\u1ea5m silicon 12 inch d\u00f9ng trong s\u1ea3n xu\u1ea5t CMOS v\u00e0 m\u1ea1ch t\u00edch h\u1ee3p ti\u00ean ti\u1ebfn.<\/p>\n

C\u00e1c quy tr\u00ecnh c\u1ea5y gh\u00e9p \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/h3>\n

H\u1ed7 tr\u1ee3 c\u00e1c quy tr\u00ecnh c\u1ea5y gh\u00e9p \u0111\u00f2i h\u1ecfi nhi\u1ec7t \u0111\u1ed9 t\u1ea5m wafer cao nh\u1eb1m gi\u1ea3m thi\u1ec3u khuy\u1ebft t\u1eadt v\u00e0 t\u0103ng c\u01b0\u1eddng qu\u00e1 tr\u00ecnh k\u00edch ho\u1ea1t ch\u1ea5t pha t\u1ea1p.<\/p>\n

S\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb \u0111i\u1ec7n<\/h3>\n

Ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t y\u00eau c\u1ea7u qu\u00e1 tr\u00ecnh pha t\u1ea1p ch\u00ednh x\u00e1c v\u00e0 c\u1ea5y ion n\u0103ng l\u01b0\u1ee3ng cao.<\/p>\n

S\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p ti\u00ean ti\u1ebfn<\/h3>\n

H\u1ed7 tr\u1ee3 t\u00edch h\u1ee3p quy tr\u00ecnh LSI v\u1edbi c\u00e1c y\u00eau c\u1ea7u v\u1ec1 \u0111\u1ed9 ch\u00ednh x\u00e1c cao v\u00e0 n\u0103ng su\u1ea5t cao.<\/p>\n

\n

C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n

1. H\u1ec7 th\u1ed1ng Ai300 h\u1ed7 tr\u1ee3 k\u00edch th\u01b0\u1edbc wafer n\u00e0o?<\/h3>\n

H\u1ec7 th\u1ed1ng n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c t\u1ea5m silicon 12 inch v\u00e0 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n

2. \u01afu \u0111i\u1ec3m ch\u00ednh c\u1ee7a kh\u1ea3 n\u0103ng c\u1ea5y gh\u00e9p \u1edf nhi\u1ec7t \u0111\u1ed9 cao l\u00e0 g\u00ec?<\/h3>\n

H\u1ec7 th\u1ed1ng n\u00e0y h\u1ed7 tr\u1ee3 qu\u00e1 tr\u00ecnh c\u1ea5y gh\u00e9p \u1edf nhi\u1ec7t \u0111\u1ed9 l\u00ean \u0111\u1ebfn 400\u00b0C, gi\u00fap gi\u1ea3m thi\u1ec3u t\u1ed5n th\u01b0\u01a1ng m\u1ea1ng tinh th\u1ec3, c\u1ea3i thi\u1ec7n qu\u00e1 tr\u00ecnh k\u00edch ho\u1ea1t ch\u1ea5t pha t\u1ea1p v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t t\u1ed5ng th\u1ec3 c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n

3. H\u1ec7 th\u1ed1ng n\u00e0y mang l\u1ea1i m\u1ee9c \u0111\u1ed9 ch\u00ednh x\u00e1c v\u00e0 hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t nh\u01b0 th\u1ebf n\u00e0o?<\/h3>\n

H\u1ec7 th\u1ed1ng n\u00e0y \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c g\u00f3c trong ph\u1ea1m vi 0,1 \u0111\u1ed9, \u0111\u1ed9 song song c\u1ee7a ch\u00f9m tia trong ph\u1ea1m vi 0,1 \u0111\u1ed9, c\u00f9ng \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 \u0111\u1ed9 l\u1eb7p l\u1ea1i trong ph\u1ea1m vi 0,5%, v\u1edbi c\u00f4ng su\u1ea5t x\u1eed l\u00fd l\u00ean \u0111\u1ebfn 500 t\u1ea5m wafer m\u1ed7i gi\u1edd.<\/p>","protected":false},"excerpt":{"rendered":"

H\u1ec7 th\u1ed1ng c\u1ea5y ion nhi\u1ec7t \u0111\u1ed9 cao Ai300 (ch\u00f9m tia trung b\u00ecnh) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 12 inch. \u0110\u00e2y l\u00e0 thi\u1ebft b\u1ecb c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n trung b\u00ecnh \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 ph\u1ee5c v\u1ee5 c\u00e1c quy tr\u00ecnh pha t\u1ea1p ti\u00ean ti\u1ebfn trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn d\u1ef1a tr\u00ean silicon v\u00e0 b\u00e1n d\u1eabn khe n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng, bao g\u1ed3m c\u1ea3 c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t SiC.<\/p>","protected":false},"featured_media":2357,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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