{"id":2349,"date":"2026-04-22T06:17:36","date_gmt":"2026-04-22T06:17:36","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2349"},"modified":"2026-04-22T07:24:00","modified_gmt":"2026-04-22T07:24:00","slug":"ai200hc-d-high-beam-ion-implantation-system-for-6-8-inch-silicon-wafer-processing-and-smart-cut-applications","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/ai200hc-d-high-beam-ion-implantation-system-for-6-8-inch-silicon-wafer-processing-and-smart-cut-applications\/","title":{"rendered":"H\u1ec7 th\u1ed1ng c\u1ea5y ion ch\u00f9m cao \u00e1p Ai200HC.D d\u00e0nh cho gia c\u00f4ng t\u1ea5m silicon 6\/8 inch v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng c\u1eaft th\u00f4ng minh"},"content":{"rendered":"<p data-start=\"155\" data-end=\"421\"><img decoding=\"async\" class=\"wp-image-2350 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-300x300.png\" alt=\"\" width=\"209\" height=\"209\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System.png 1000w\" sizes=\"(max-width: 209px) 100vw, 209px\" \/>H\u1ec7 th\u1ed1ng c\u1ea5y ion Ai200HC.D (High Beam) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 6 inch v\u00e0 8 inch. \u0110\u00e2y l\u00e0 m\u1ed9t thi\u1ebft b\u1ecb c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n cao \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 ph\u1ee5c v\u1ee5 cho c\u00e1c \u1ee9ng d\u1ee5ng pha t\u1ea1p ch\u00ednh x\u00e1c v\u00e0 c\u00e1c quy tr\u00ecnh ti\u00ean ti\u1ebfn trong s\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p.<\/p>\n<p data-start=\"423\" data-end=\"698\">H\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 d\u1ea3i n\u0103ng l\u01b0\u1ee3ng t\u1eeb 5 keV \u0111\u1ebfn 180 keV, mang l\u1ea1i hi\u1ec7u su\u1ea5t ch\u00f9m tia \u1ed5n \u0111\u1ecbnh v\u00e0 \u0111\u1ed9 l\u1eb7p l\u1ea1i cao trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t. H\u1ec7 th\u1ed1ng n\u00e0y ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn tr\u00ean n\u1ec1n silicon v\u00e0 c\u00e1c quy tr\u00ecnh li\u00ean quan \u0111\u1ebfn h\u00e0n wafer ti\u00ean ti\u1ebfn, bao g\u1ed3m c\u1ea3 vi\u1ec7c t\u00edch h\u1ee3p c\u00f4ng ngh\u1ec7 Smart Cut.<\/p>\n<hr data-start=\"700\" data-end=\"703\" \/>\n<h2 data-section-id=\"1d7mrtu\" data-start=\"705\" data-end=\"716\">T\u00ednh n\u0103ng<\/h2>\n<h3 data-section-id=\"11asise\" data-start=\"718\" data-end=\"753\">Hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh \u1edf ch\u1ebf \u0111\u1ed9 \u0111\u00e8n pha<\/h3>\n<p data-start=\"754\" data-end=\"897\">H\u1ec7 th\u1ed1ng duy tr\u00ec c\u00f4ng su\u1ea5t ch\u00f9m ion \u1ed5n \u0111\u1ecbnh v\u1edbi \u0111\u1ed9 dao \u0111\u1ed9ng \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t, \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng c\u1ea5y gh\u00e9p \u1ed5n \u0111\u1ecbnh trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t li\u00ean t\u1ee5c.<\/p>\n<h3 data-section-id=\"38j0c\" data-start=\"899\" data-end=\"929\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch r\u1ed9ng r\u00e3i v\u1edbi c\u00e1c quy tr\u00ecnh<\/h3>\n<p data-start=\"930\" data-end=\"1057\">T\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh d\u1ef1a tr\u00ean silicon v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng li\u00ean quan \u0111\u1ebfn Smart Cut, \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u k\u1ef9 thu\u1eadt ti\u00ean ti\u1ebfn v\u1ec1 t\u1ea5m wafer.<\/p>\n<h3 data-section-id=\"2v7p6\" data-start=\"1059\" data-end=\"1093\">Ki\u1ec3m so\u00e1t c\u1ea5y gh\u00e9p v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/h3>\n<p data-start=\"1094\" data-end=\"1142\">\u0110\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t c\u1ea5y gh\u00e9p ch\u00ednh x\u00e1c nh\u1edd:<\/p>\n<ul data-start=\"1143\" data-end=\"1231\">\n<li data-section-id=\"1irf1o\" data-start=\"1143\" data-end=\"1166\">\u0110\u1ed9 ch\u00ednh x\u00e1c g\u00f3c \u2264 0,2\u00b0<\/li>\n<li data-section-id=\"1hml6xy\" data-start=\"1167\" data-end=\"1192\">\u0110\u1ed9 song song c\u1ee7a ch\u00f9m tia \u2264 0,3\u00b0<\/li>\n<li data-section-id=\"1danezc\" data-start=\"1193\" data-end=\"1210\">\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u \u2264 1%<\/li>\n<li data-section-id=\"mbe4el\" data-start=\"1211\" data-end=\"1231\">\u0110\u1ed9 l\u1eb7p l\u1ea1i \u2264 1%<\/li>\n<\/ul>\n<h3 data-section-id=\"8aw6q\" data-start=\"1233\" data-end=\"1263\">Kh\u1ea3 n\u0103ng x\u1eed l\u00fd kh\u1ed1i l\u01b0\u1ee3ng l\u1edbn<\/h3>\n<p data-start=\"1264\" data-end=\"1369\">C\u00f3 kh\u1ea3 n\u0103ng x\u1eed l\u00fd \u2265 220 t\u1ea5m wafer m\u1ed7i gi\u1edd, ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn c\u00f3 quy m\u00f4 t\u1eeb trung b\u00ecnh \u0111\u1ebfn l\u1edbn.<\/p>\n<h3 data-section-id=\"1e3kdu8\" data-start=\"1371\" data-end=\"1409\">Kh\u1ea3 n\u0103ng x\u1eed l\u00fd h\u00e0ng lo\u1ea1t theo m\u1ee5c ti\u00eau<\/h3>\n<p data-start=\"1410\" data-end=\"1554\">H\u1ed7 tr\u1ee3 x\u1eed l\u00fd h\u00e0ng lo\u1ea1t c\u00e1c m\u1ee5c ti\u00eau, gi\u00fap n\u00e2ng cao t\u00ednh linh ho\u1ea1t c\u1ee7a quy tr\u00ecnh v\u00e0 cho ph\u00e9p t\u00edch h\u1ee3p v\u1edbi c\u00e1c c\u00f4ng ngh\u1ec7 s\u1ea3n xu\u1ea5t t\u1ea5m silicon ti\u00ean ti\u1ebfn.<\/p>\n<p data-start=\"1410\" data-end=\"1554\"><img fetchpriority=\"high\" decoding=\"async\" class=\"aligncenter wp-image-2371 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png\" alt=\"\" width=\"1024\" height=\"388\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-300x114.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-768x291.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-600x227.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs.png 1216w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"1556\" data-end=\"1559\" \/>\n<h2 data-section-id=\"rkota4\" data-start=\"1561\" data-end=\"1582\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u00ednh<\/h2>\n<h3 data-section-id=\"rc5knr\" data-start=\"1584\" data-end=\"1606\">Th\u00f4ng s\u1ed1 quy tr\u00ecnh<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1608\" data-end=\"1813\">\n<thead data-start=\"1608\" data-end=\"1632\">\n<tr data-start=\"1608\" data-end=\"1632\">\n<th class=\"\" data-start=\"1608\" data-end=\"1615\" data-col-size=\"sm\">M\u1eb7t h\u00e0ng<\/th>\n<th class=\"\" data-start=\"1615\" data-end=\"1632\" data-col-size=\"sm\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1657\" data-end=\"1813\">\n<tr data-start=\"1657\" data-end=\"1697\">\n<td data-start=\"1657\" data-end=\"1670\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\n<td data-start=\"1670\" data-end=\"1697\" data-col-size=\"sm\">T\u1ea5m silicon c\u00f3 \u0111\u01b0\u1eddng k\u00ednh 6\u20138 inch<\/td>\n<\/tr>\n<tr data-start=\"1698\" data-end=\"1726\">\n<td data-start=\"1698\" data-end=\"1713\" data-col-size=\"sm\">Ph\u1ea1m vi n\u0103ng l\u01b0\u1ee3ng<\/td>\n<td data-start=\"1713\" data-end=\"1726\" data-col-size=\"sm\">5\u2013180 keV<\/td>\n<\/tr>\n<tr data-start=\"1727\" data-end=\"1777\">\n<td data-start=\"1727\" data-end=\"1748\" data-col-size=\"sm\">C\u00e1c th\u00e0nh ph\u1ea7n \u0111\u01b0\u1ee3c c\u1ea5y gh\u00e9p<\/td>\n<td data-start=\"1748\" data-end=\"1777\" data-col-size=\"sm\">B+, BF2+, P+, As+, N+, H+<\/td>\n<\/tr>\n<tr data-start=\"1778\" data-end=\"1813\">\n<td data-start=\"1778\" data-end=\"1791\" data-col-size=\"sm\">Ph\u1ea1m vi li\u1ec1u l\u01b0\u1ee3ng<\/td>\n<td data-start=\"1791\" data-end=\"1813\" data-col-size=\"sm\">5E11\u20131E17 ion\/cm\u00b2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"h0mtjp\" data-start=\"1815\" data-end=\"1835\">Hi\u1ec7u su\u1ea5t ch\u00f9m tia<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1837\" data-end=\"1951\">\n<thead data-start=\"1837\" data-end=\"1861\">\n<tr data-start=\"1837\" data-end=\"1861\">\n<th class=\"\" data-start=\"1837\" data-end=\"1844\" data-col-size=\"sm\">M\u1eb7t h\u00e0ng<\/th>\n<th class=\"\" data-start=\"1844\" data-end=\"1861\" data-col-size=\"sm\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1886\" data-end=\"1951\">\n<tr data-start=\"1886\" data-end=\"1921\">\n<td data-start=\"1886\" data-end=\"1903\" data-col-size=\"sm\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u1ea7m<\/td>\n<td data-start=\"1903\" data-end=\"1921\" data-col-size=\"sm\">\u2264 10% m\u1ed7i gi\u1edd<\/td>\n<\/tr>\n<tr data-start=\"1922\" data-end=\"1951\">\n<td data-start=\"1922\" data-end=\"1941\" data-col-size=\"sm\">\u0110\u1ed9 song song c\u1ee7a ch\u00f9m tia<\/td>\n<td data-start=\"1941\" data-end=\"1951\" data-col-size=\"sm\">\u2264 0,3\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"ieoahx\" data-start=\"1953\" data-end=\"1978\">\u0110\u1ed9 ch\u00ednh x\u00e1c khi c\u1ea5y gh\u00e9p<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1980\" data-end=\"2191\">\n<thead data-start=\"1980\" data-end=\"2004\">\n<tr data-start=\"1980\" data-end=\"2004\">\n<th class=\"\" data-start=\"1980\" data-end=\"1987\" data-col-size=\"sm\">M\u1eb7t h\u00e0ng<\/th>\n<th class=\"\" data-start=\"1987\" data-end=\"2004\" data-col-size=\"sm\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2029\" data-end=\"2191\">\n<tr data-start=\"2029\" data-end=\"2066\">\n<td data-start=\"2029\" data-end=\"2051\" data-col-size=\"sm\">Ph\u1ea1m vi g\u00f3c c\u1ea5y gh\u00e9p<\/td>\n<td data-start=\"2051\" data-end=\"2066\" data-col-size=\"sm\">-11\u00b0 \u0111\u1ebfn 11\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2067\" data-end=\"2094\">\n<td data-start=\"2067\" data-end=\"2084\" data-col-size=\"sm\">\u0110\u1ed9 ch\u00ednh x\u00e1c g\u00f3c<\/td>\n<td data-start=\"2084\" data-end=\"2094\" data-col-size=\"sm\">\u2264 0,2\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2095\" data-end=\"2141\">\n<td data-start=\"2095\" data-end=\"2113\" data-col-size=\"sm\">\u0110\u1ed9 \u0111\u1ed3ng nh\u1ea5t (1\u03c3)<\/td>\n<td data-start=\"2113\" data-end=\"2141\" data-col-size=\"sm\">\u2264 1% (B+, 2E14, 150 keV)<\/td>\n<\/tr>\n<tr data-start=\"2142\" data-end=\"2191\">\n<td data-start=\"2142\" data-end=\"2163\" data-col-size=\"sm\">\u0110\u1ed9 l\u1eb7p l\u1ea1i (1\u03c3)<\/td>\n<td data-start=\"2163\" data-end=\"2191\" data-col-size=\"sm\">\u2264 1% (B+, 2E14, 150 keV)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"1i84h7f\" data-start=\"2193\" data-end=\"2215\">Hi\u1ec7u su\u1ea5t h\u1ec7 th\u1ed1ng<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2217\" data-end=\"2347\">\n<thead data-start=\"2217\" data-end=\"2241\">\n<tr data-start=\"2217\" data-end=\"2241\">\n<th class=\"\" data-start=\"2217\" data-end=\"2224\" data-col-size=\"sm\">M\u1eb7t h\u00e0ng<\/th>\n<th class=\"\" data-start=\"2224\" data-end=\"2241\" data-col-size=\"sm\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2266\" data-end=\"2347\">\n<tr data-start=\"2266\" data-end=\"2304\">\n<td data-start=\"2266\" data-end=\"2279\" data-col-size=\"sm\">C\u00f4ng su\u1ea5t<\/td>\n<td data-start=\"2279\" data-end=\"2304\" data-col-size=\"sm\">\u2265 220 t\u1ea5m wafer m\u1ed7i gi\u1edd<\/td>\n<\/tr>\n<tr data-start=\"2305\" data-end=\"2347\">\n<td data-start=\"2305\" data-end=\"2322\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc thi\u1ebft b\u1ecb<\/td>\n<td data-start=\"2322\" data-end=\"2347\" data-col-size=\"sm\">5930 \u00d7 3000 \u00d7 2630 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2349\" data-end=\"2352\" \/>\n<h2 data-section-id=\"1nd7jny\" data-start=\"2354\" data-end=\"2375\">\u0110\u01a1n \u0111\u0103ng k\u00fd<\/h2>\n<h3 data-section-id=\"kkfbvw\" data-start=\"2377\" data-end=\"2422\">S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn tr\u00ean n\u1ec1n silicon<\/h3>\n<p data-start=\"2423\" data-end=\"2524\">\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb CMOS v\u00e0 thi\u1ebft b\u1ecb logic ti\u00ean ti\u1ebfn, h\u1ed7 tr\u1ee3 c\u00e1c quy tr\u00ecnh c\u1ea5y ch\u1ea5t pha t\u1ea1p ch\u00ednh x\u00e1c.<\/p>\n<h3 data-section-id=\"167rxyg\" data-start=\"2526\" data-end=\"2559\">T\u00edch h\u1ee3p quy tr\u00ecnh c\u1eaft th\u00f4ng minh<\/h3>\n<p data-start=\"2560\" data-end=\"2659\">Ph\u00f9 h\u1ee3p cho c\u00e1c quy tr\u00ecnh h\u00e0n wafer v\u00e0 chuy\u1ec3n l\u1edbp d\u1ef1a tr\u00ean c\u00e1c y\u00eau c\u1ea7u c\u1ee7a c\u00f4ng ngh\u1ec7 Smart Cut.<\/p>\n<h3 data-section-id=\"13cjew6\" data-start=\"2661\" data-end=\"2691\">K\u1ef9 thu\u1eadt ch\u1ebf t\u1ea1o wafer ti\u00ean ti\u1ebfn<\/h3>\n<p data-start=\"2692\" data-end=\"2791\">\u0110\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong vi\u1ec7c c\u1ea3i ti\u1ebfn t\u1ea5m silicon, t\u1ed1i \u01b0u h\u00f3a c\u1ea5u tr\u00fac v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb.<\/p>\n<h3 data-section-id=\"4uip35\" data-start=\"2793\" data-end=\"2826\">S\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p<\/h3>\n<p data-start=\"2827\" data-end=\"2934\">H\u1ed7 tr\u1ee3 s\u1ea3n xu\u1ea5t IC v\u1edbi kh\u1ed1i l\u01b0\u1ee3ng t\u1eeb trung b\u00ecnh \u0111\u1ebfn l\u1edbn, nh\u1edd kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t quy tr\u00ecnh \u1ed5n \u0111\u1ecbnh v\u00e0 n\u0103ng su\u1ea5t cao.<\/p>\n<hr data-start=\"2936\" data-end=\"2939\" \/>\n<h2 data-section-id=\"1r8frcv\" data-start=\"2941\" data-end=\"2970\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n<h3 data-section-id=\"1og21xu\" data-start=\"2972\" data-end=\"3022\">1. M\u00e1y Ai200HC.D h\u1ed7 tr\u1ee3 c\u00e1c k\u00edch th\u01b0\u1edbc wafer n\u00e0o?<\/h3>\n<p data-start=\"3023\" data-end=\"3145\">H\u1ec7 th\u1ed1ng n\u00e0y h\u1ed7 tr\u1ee3 c\u00e1c t\u1ea5m silicon c\u00f3 k\u00edch th\u01b0\u1edbc 6 inch v\u00e0 8 inch v\u00e0 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn th\u00f4ng d\u1ee5ng.<\/p>\n<h3 data-section-id=\"rdwc10\" data-start=\"3147\" data-end=\"3193\">2. D\u1ea3i c\u00f4ng su\u1ea5t c\u1ee7a h\u1ec7 th\u1ed1ng n\u00e0y l\u00e0 bao nhi\u00eau?<\/h3>\n<p data-start=\"3194\" data-end=\"3324\">D\u1ea3i n\u0103ng l\u01b0\u1ee3ng n\u1eb1m trong kho\u1ea3ng t\u1eeb 5 keV \u0111\u1ebfn 180 keV, h\u1ed7 tr\u1ee3 nhi\u1ec1u \u1ee9ng d\u1ee5ng c\u1ea5y ion kh\u00e1c nhau trong c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn d\u1ef1a tr\u00ean silicon.<\/p>\n<h3 data-section-id=\"nor4nw\" data-start=\"3326\" data-end=\"3391\">3. H\u1ec7 th\u1ed1ng n\u00e0y h\u1ed7 tr\u1ee3 nh\u1eefng kh\u1ea3 n\u0103ng x\u1eed l\u00fd \u0111\u1eb7c bi\u1ec7t n\u00e0o?<\/h3>\n<p data-start=\"3392\" data-end=\"3551\">H\u1ec7 th\u1ed1ng n\u00e0y t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh d\u1ef1a tr\u00ean silicon v\u00e0 c\u00f4ng ngh\u1ec7 Smart Cut, h\u1ed7 tr\u1ee3 x\u1eed l\u00fd m\u1ee5c ti\u00eau theo l\u00f4 v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng k\u1ef9 thu\u1eadt t\u1ea5m wafer ti\u00ean ti\u1ebfn.<\/p>","protected":false},"excerpt":{"rendered":"<p>H\u1ec7 th\u1ed1ng c\u1ea5y ion Ai200HC.D (High Beam) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 6 inch v\u00e0 8 inch. \u0110\u00e2y l\u00e0 m\u1ed9t thi\u1ebft b\u1ecb c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n cao \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 ph\u1ee5c v\u1ee5 cho c\u00e1c \u1ee9ng d\u1ee5ng pha t\u1ea1p ch\u00ednh x\u00e1c v\u00e0 c\u00e1c quy tr\u00ecnh ti\u00ean ti\u1ebfn trong s\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p.<\/p>","protected":false},"featured_media":2350,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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