{"id":2346,"date":"2026-04-22T05:56:29","date_gmt":"2026-04-22T05:56:29","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2346"},"modified":"2026-04-22T07:25:08","modified_gmt":"2026-04-22T07:25:08","slug":"ai250-medium-beam-room-temperature-ion-implantation-system-for-6-8-inch-silicon-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/ai250-medium-beam-room-temperature-ion-implantation-system-for-6-8-inch-silicon-wafer-processing\/","title":{"rendered":"H\u1ec7 th\u1ed1ng c\u1ea5y ion \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng Ai250 (ch\u00f9m tia trung b\u00ecnh) d\u00e0nh cho gia c\u00f4ng t\u1ea5m silicon 6\u20138 inch"},"content":{"rendered":"

\"\"H\u1ec7 th\u1ed1ng c\u1ea5y ion Ai250 (ch\u00f9m tia trung b\u00ecnh) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 6 inch v\u00e0 8 inch. \u0110\u00e2y l\u00e0 thi\u1ebft b\u1ecb c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n trung b\u00ecnh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p ti\u00ean ti\u1ebfn, mang l\u1ea1i hi\u1ec7u su\u1ea5t ch\u00f9m tia \u1ed5n \u0111\u1ecbnh, \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ea5y cao v\u00e0 kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t li\u1ec1u l\u01b0\u1ee3ng \u0111\u00e1ng tin c\u1eady.<\/p>\n

H\u1ec7 th\u1ed1ng n\u00e0y h\u1ed7 tr\u1ee3 d\u1ea3i n\u0103ng l\u01b0\u1ee3ng t\u1eeb 5 keV \u0111\u1ebfn 250 keV, cho ph\u00e9p th\u1ef1c hi\u1ec7n c\u00e1c \u1ee9ng d\u1ee5ng c\u1ea5y ion \u1edf c\u1ea3 \u0111\u1ed9 s\u00e2u n\u00f4ng v\u00e0 s\u00e2u. H\u1ec7 th\u1ed1ng n\u00e0y ph\u00f9 h\u1ee3p v\u1edbi nhi\u1ec1u quy tr\u00ecnh pha t\u1ea1p b\u00e1n d\u1eabn kh\u00e1c nhau v\u00e0 ho\u00e0n to\u00e0n t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c y\u00eau c\u1ea7u s\u1ea3n xu\u1ea5t LSI.<\/p>\n

\n

T\u00ednh n\u0103ng<\/h2>\n

Hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u1ea7m trung b\u00ecnh<\/h3>\n

\u0110\u1ea3m b\u1ea3o \u0111\u1ea7u ra ch\u00f9m ion \u1ed5n \u0111\u1ecbnh trong c\u00e1c chu k\u1ef3 s\u1ea3n xu\u1ea5t k\u00e9o d\u00e0i, gi\u00fap n\u00e2ng cao t\u00ednh nh\u1ea5t qu\u00e1n c\u1ee7a quy tr\u00ecnh v\u00e0 gi\u1ea3m thi\u1ec3u s\u1ef1 bi\u1ebfn \u0111\u1ed9ng.<\/p>\n

Kh\u1ea3 n\u0103ng ho\u1ea1t \u0111\u1ed9ng trong d\u1ea3i c\u00f4ng su\u1ea5t r\u1ed9ng<\/h3>\n

D\u1ea3i n\u0103ng l\u01b0\u1ee3ng t\u1eeb 5\u2013250 keV \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u c\u1ea5y gh\u00e9p linh ho\u1ea1t cho c\u00e1c c\u1ea5u tr\u00fac thi\u1ebft b\u1ecb v\u00e0 c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 kh\u00e1c nhau.<\/p>\n

Ki\u1ec3m so\u00e1t quy tr\u00ecnh v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/h3>\n

\u0110\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t c\u1ea5y gh\u00e9p v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao, bao g\u1ed3m \u0111\u1ed9 ch\u00ednh x\u00e1c g\u00f3c \u2264 0,2\u00b0, \u0111\u1ed9 song song c\u1ee7a ch\u00f9m tia \u2264 0,2\u00b0, \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u \u2264 0,5% v\u00e0 \u0111\u1ed9 l\u1eb7p l\u1ea1i \u2264 0,5%.<\/p>\n

Kh\u1ea3 n\u0103ng x\u1eed l\u00fd kh\u1ed1i l\u01b0\u1ee3ng l\u1edbn<\/h3>\n

C\u00f3 kh\u1ea3 n\u0103ng x\u1eed l\u00fd \u2265 200 t\u1ea5m wafer m\u1ed7i gi\u1edd, ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn v\u1edbi kh\u1ed1i l\u01b0\u1ee3ng t\u1eeb trung b\u00ecnh \u0111\u1ebfn l\u1edbn.<\/p>\n

Ch\u1ee9c n\u0103ng c\u1ea5y gh\u00e9p m\u1eabu<\/h3>\n

H\u1ed7 tr\u1ee3 vi\u1ec7c c\u1ea5y gh\u00e9p \u0111a v\u00f9ng v\u00e0 theo t\u1ee9 ph\u00e2n tr\u00ean c\u00f9ng m\u1ed9t t\u1ea5m wafer, gi\u00fap n\u00e2ng cao t\u00ednh linh ho\u1ea1t c\u1ee7a quy tr\u00ecnh v\u00e0 gi\u1ea3m chi ph\u00ed ph\u00e1t tri\u1ec3n.<\/p>\n

Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch quy tr\u00ecnh LSI<\/h3>\n

Ho\u00e0n to\u00e0n t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn c\u1ee7a LSI.<\/p>\n

\"\"<\/p>\n

\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u00ednh<\/h2>\n

Th\u00f4ng s\u1ed1 quy tr\u00ecnh<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\nT\u1ea5m silicon c\u00f3 \u0111\u01b0\u1eddng k\u00ednh 6\u20138 inch<\/td>\n<\/tr>\n
Ph\u1ea1m vi n\u0103ng l\u01b0\u1ee3ng<\/td>\n5\u2013250 keV<\/td>\n<\/tr>\n
C\u00e1c th\u00e0nh ph\u1ea7n \u0111\u01b0\u1ee3c c\u1ea5y gh\u00e9p<\/td>\nB+, P+, As+, Ar+, N+, H+<\/td>\n<\/tr>\n
Ph\u1ea1m vi li\u1ec1u l\u01b0\u1ee3ng<\/td>\n5E11\u20131E16 ion\/cm\u00b2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Hi\u1ec7u su\u1ea5t ch\u00f9m tia<\/h3>\n
\n
\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
D\u00f2ng \u0111i\u1ec7n t\u1ed1i \u0111a c\u1ee7a ch\u00f9m tia<\/td>\nAr+ \u2265 1300 \u03bcA \u1edf n\u0103ng l\u01b0\u1ee3ng \u2265220 keV
\nB+ \u2265 1000 \u03bcA \u1edf n\u0103ng l\u01b0\u1ee3ng \u2265220 keV
\nP+ \u2265 1300 \u03bcA \u1edf n\u0103ng l\u01b0\u1ee3ng \u2265220 keV
\nN+ \u2265 1000 \u03bcA \u1edf n\u0103ng l\u01b0\u1ee3ng \u2265220 keV<\/td>\n<\/tr>\n
\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u1ea7m<\/td>\n\u2264 151 TP3T\/gi\u1edd (s\u1ef1 gi\u00e1n \u0111o\u1ea1n ch\u00f9m tia v\u00e0 hi\u1ec7n t\u01b0\u1ee3ng h\u1ed3 quang \u2264 1 l\u1ea7n m\u1ed7i gi\u1edd)<\/td>\n<\/tr>\n
\u0110\u1ed9 song song c\u1ee7a ch\u00f9m tia<\/td>\n\u2264 0,2\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u0110\u1ed9 ch\u00ednh x\u00e1c khi c\u1ea5y gh\u00e9p<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
Ph\u1ea1m vi g\u00f3c c\u1ea5y gh\u00e9p<\/td>\n0\u00b0\u201345\u00b0<\/td>\n<\/tr>\n
\u0110\u1ed9 ch\u00ednh x\u00e1c g\u00f3c<\/td>\n\u2264 0,2\u00b0<\/td>\n<\/tr>\n
\u0110\u1ed9 \u0111\u1ed3ng nh\u1ea5t (1\u03c3)<\/td>\n\u2264 0,51 TP3T (B+, 2E14, 150 keV)<\/td>\n<\/tr>\n
\u0110\u1ed9 l\u1eb7p l\u1ea1i (1\u03c3)<\/td>\n\u2264 0,5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Hi\u1ec7u su\u1ea5t h\u1ec7 th\u1ed1ng<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n
M\u1eb7t h\u00e0ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
C\u00f4ng su\u1ea5t<\/td>\n\u2265 200 t\u1ea5m wafer m\u1ed7i gi\u1edd<\/td>\n<\/tr>\n
M\u1ee9c ch\u00e2n kh\u00f4ng<\/td>\n< 5E-7 Torr<\/td>\n<\/tr>\n
R\u00f2 r\u1ec9 tia X<\/td>\n\u2264 0,6 \u03bcSv\/h<\/td>\n<\/tr>\n
Ch\u1ebf \u0111\u1ed9 qu\u00e9t<\/td>\nQu\u00e9t t\u0129nh \u0111i\u1ec7n ngang + qu\u00e9t c\u01a1 h\u1ecdc d\u1ecdc<\/td>\n<\/tr>\n
K\u00edch th\u01b0\u1edbc thi\u1ebft b\u1ecb<\/td>\n5600 \u00d7 3300 \u00d7 2600 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

L\u0129nh v\u1ef1c \u1ee9ng d\u1ee5ng<\/h2>\n

S\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/h3>\n

\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb logic CMOS, gi\u00fap th\u1ef1c hi\u1ec7n qu\u00e1 tr\u00ecnh c\u1ea5y t\u1ea1p ch\u1ea5t ch\u00ednh x\u00e1c \u0111\u1ec3 t\u1ea1o ra c\u00e1c b\u00f3ng b\u00e1n d\u1eabn.<\/p>\n

S\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p<\/h3>\n

\u0110\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t LSI v\u00e0 IC ti\u00ean ti\u1ebfn \u0111\u00f2i h\u1ecfi kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t \u0111\u1ed9 pha t\u1ea1p v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao.<\/p>\n

S\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c \u0111i\u1ec3m n\u1ed1i n\u00f4ng v\u00e0 s\u00e2u<\/h3>\n

H\u1ed7 tr\u1ee3 c\u00e1c quy tr\u00ecnh c\u1ea5y gh\u00e9p \u0111\u1ec3 \u0111i\u1ec1u ch\u1ec9nh c\u1ef1c ngu\u1ed3n\/c\u1ef1c tho\u00e1t v\u00e0 ki\u1ec3m so\u00e1t \u0111\u1ed9 s\u00e2u ti\u1ebfp gi\u00e1p.<\/p>\n

K\u1ef9 thu\u1eadt pha t\u1ea1p<\/h3>\n

\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 \u0111i\u1ec1u ch\u1ec9nh c\u00e1c t\u00ednh ch\u1ea5t \u0111i\u1ec7n c\u1ee7a c\u00e1c t\u1ea5m silicon th\u00f4ng qua qu\u00e1 tr\u00ecnh c\u1ea5y ion ch\u00ednh x\u00e1c.<\/p>\n

Ph\u00e1t tri\u1ec3n quy tr\u00ecnh v\u00e0 Nghi\u00ean c\u1ee9u & Ph\u00e1t tri\u1ec3n<\/h3>\n

Ph\u00f9 h\u1ee3p cho vi\u1ec7c ph\u00e1t tri\u1ec3n quy tr\u00ecnh b\u00e1n d\u1eabn, s\u1ea3n xu\u1ea5t th\u1eed nghi\u1ec7m v\u00e0 ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb th\u00ed nghi\u1ec7m.<\/p>\n

\n

C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n

1. M\u00e1y Ai250 h\u1ed7 tr\u1ee3 c\u00e1c k\u00edch th\u01b0\u1edbc wafer n\u00e0o?<\/h3>\n

H\u1ec7 th\u1ed1ng n\u00e0y h\u1ed7 tr\u1ee3 c\u00e1c t\u1ea5m silicon c\u00f3 k\u00edch th\u01b0\u1edbc 6 inch v\u00e0 8 inch, v\u00e0 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn th\u00f4ng d\u1ee5ng.<\/p>\n

2. D\u1ea3i n\u0103ng l\u01b0\u1ee3ng c\u1ee7a h\u1ec7 th\u1ed1ng l\u00e0 bao nhi\u00eau?<\/h3>\n

D\u1ea3i n\u0103ng l\u01b0\u1ee3ng n\u1eb1m trong kho\u1ea3ng t\u1eeb 5 keV \u0111\u1ebfn 250 keV, h\u1ed7 tr\u1ee3 c\u1ea3 c\u00e1c quy tr\u00ecnh c\u1ea5y ion \u1edf \u0111\u1ed9 s\u00e2u n\u00f4ng v\u00e0 s\u00e2u trong s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb b\u00e1n d\u1eabn.<\/p>\n

3. H\u1ec7 th\u1ed1ng \u0111\u1ea3m b\u1ea3o m\u1ee9c \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a quy tr\u00ecnh \u1edf m\u1ee9c n\u00e0o?<\/h3>\n

H\u1ec7 th\u1ed1ng n\u00e0y \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c g\u00f3c trong ph\u1ea1m vi 0,2\u00b0, \u0111\u1ed9 song song c\u1ee7a ch\u00f9m tia trong ph\u1ea1m vi 0,2\u00b0, c\u00f9ng \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 \u0111\u1ed9 l\u1eb7p l\u1ea1i trong ph\u1ea1m vi 0,5%, t\u1eeb \u0111\u00f3 \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t \u1ed5n \u0111\u1ecbnh v\u00e0 n\u0103ng su\u1ea5t cao.<\/p>","protected":false},"excerpt":{"rendered":"

H\u1ec7 th\u1ed1ng c\u1ea5y ion Ai250 (ch\u00f9m tia trung b\u00ecnh) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 6 inch v\u00e0 8 inch. \u0110\u00e2y l\u00e0 thi\u1ebft b\u1ecb c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n trung b\u00ecnh \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p ti\u00ean ti\u1ebfn, mang l\u1ea1i hi\u1ec7u su\u1ea5t ch\u00f9m tia \u1ed5n \u0111\u1ecbnh, \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ea5y cao v\u00e0 kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t li\u1ec1u l\u01b0\u1ee3ng \u0111\u00e1ng tin c\u1eady.<\/p>","protected":false},"featured_media":2347,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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