{"id":2342,"date":"2026-04-22T05:35:46","date_gmt":"2026-04-22T05:35:46","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2342"},"modified":"2026-04-22T07:27:32","modified_gmt":"2026-04-22T07:27:32","slug":"high-efficiency-ai80hchigh-beam-ion-implantation-equipment-for-advanced-silicon-wafer-doping","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/high-efficiency-ai80hchigh-beam-ion-implantation-equipment-for-advanced-silicon-wafer-doping\/","title":{"rendered":"Thi\u1ebft b\u1ecb c\u1ea5y ion hi\u1ec7u su\u1ea5t cao Ai80HC (ch\u1ebf \u0111\u1ed9 tia cao) d\u00e0nh cho qu\u00e1 tr\u00ecnh pha t\u1ea1p t\u1ea5m wafer silicon ti\u00ean ti\u1ebfn"},"content":{"rendered":"<p data-start=\"153\" data-end=\"528\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2343 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-300x300.png\" alt=\"Thi\u1ebft b\u1ecb c\u1ea5y ion hi\u1ec7u su\u1ea5t cao Ai80HC (ch\u1ebf \u0111\u1ed9 tia cao) d\u00e0nh cho qu\u00e1 tr\u00ecnh pha t\u1ea1p t\u1ea5m wafer silicon ti\u00ean ti\u1ebfn\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Thi\u1ebft b\u1ecb c\u1ea5y ion Ai80HC (High Beam) l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean bi\u1ec7t cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 12 inch. Thi\u1ebft b\u1ecb n\u00e0y \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 ph\u1ee5c v\u1ee5 c\u00e1c quy tr\u00ecnh pha t\u1ea1p ch\u00ednh x\u00e1c ti\u00ean ti\u1ebfn trong s\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p hi\u1ec7n \u0111\u1ea1i, mang l\u1ea1i hi\u1ec7u su\u1ea5t ch\u00f9m tia \u1ed5n \u0111\u1ecbnh, \u0111\u1ed9 l\u1eb7p l\u1ea1i cao trong quy tr\u00ecnh v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c tuy\u1ec7t v\u1eddi trong vi\u1ec7c ki\u1ec3m so\u00e1t li\u1ec1u l\u01b0\u1ee3ng.<\/p>\n<p data-start=\"530\" data-end=\"891\">H\u1ec7 th\u1ed1ng ho\u1ea1t \u0111\u1ed9ng trong d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng t\u1eeb 0,5 keV \u0111\u1ebfn 80 keV, cho ph\u00e9p \u0111i\u1ec1u ch\u1ec9nh linh ho\u1ea1t c\u00e1c \u0111i\u1ec1u ki\u1ec7n c\u1ea5y ion \u0111\u1ec3 thi\u1ebft k\u1ebf c\u00e1c m\u1ed1i n\u1ed1i \u1edf \u0111\u1ed9 s\u00e2u n\u00f4ng v\u00e0 trung b\u00ecnh. H\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 nhi\u1ec1u lo\u1ea1i ion c\u1ea5y kh\u00e1c nhau, bao g\u1ed3m \u00b9\u00b9B\u207a, \u2074\u2079BF\u2082\u207a, \u00b3\u00b9P\u207a, \u2077\u2075As\u207a, \u00b9\u2074N\u207a v\u00e0 \u00b9H\u207a, nh\u1edd \u0111\u00f3 ph\u00f9 h\u1ee3p v\u1edbi nhi\u1ec1u quy tr\u00ecnh s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb logic ti\u00ean ti\u1ebfn v\u00e0 CMOS.<\/p>\n<p data-start=\"893\" data-end=\"1243\">V\u1edbi d\u1ea3i g\u00f3c c\u1ea5y t\u1eeb 0\u00b0 \u0111\u1ebfn 45\u00b0 v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c g\u00f3c cao \u2264 0,1\u00b0, h\u1ec7 th\u1ed1ng \u0111\u1ea3m b\u1ea3o ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c s\u1ef1 ph\u00e2n b\u1ed1 ch\u1ea5t pha t\u1ea1p v\u00e0 thi\u1ebft k\u1ebf c\u1ea5u tr\u00fac ti\u1ebfp gi\u00e1p. K\u1ebft h\u1ee3p v\u1edbi \u0111\u1ed9 song song c\u1ee7a ch\u00f9m tia \u2264 0,3\u00b0 v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u \u2264 1% (1\u03c3), Ai80HC (High Beam) mang l\u1ea1i s\u1ef1 \u1ed5n \u0111\u1ecbnh qu\u00e1 tr\u00ecnh nh\u1ea5t qu\u00e1n gi\u1eefa c\u00e1c t\u1ea5m wafer c\u0169ng nh\u01b0 trong c\u00f9ng m\u1ed9t t\u1ea5m wafer.<\/p>\n<p data-start=\"1245\" data-end=\"1496\">\u0110\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t hi\u1ec7u su\u1ea5t cao, h\u1ec7 th\u1ed1ng n\u00e0y \u0111\u1ea1t c\u00f4ng su\u1ea5t \u2265 200 t\u1ea5m wafer m\u1ed7i gi\u1edd (WPH) \u0111\u1ed3ng th\u1eddi duy tr\u00ec \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh quy tr\u00ecnh nghi\u00eam ng\u1eb7t, nh\u1edd \u0111\u00f3 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn t\u01b0\u01a1ng th\u00edch v\u1edbi LSI.<\/p>\n<h2 data-section-id=\"12rj9ab\" data-start=\"1101\" data-end=\"1126\">Ki\u1ebfn tr\u00fac h\u1ec7 th\u1ed1ng<\/h2>\n<p data-start=\"1128\" data-end=\"1199\">M\u00f4 h\u00ecnh Ai80HC \u00e1p d\u1ee5ng thi\u1ebft k\u1ebf \u0111\u01b0\u1eddng d\u1eabn tia \u0111\u00e3 \u0111\u01b0\u1ee3c ho\u00e0n thi\u1ec7n v\u00e0 \u0111\u00e1ng tin c\u1eady, bao g\u1ed3m:<\/p>\n<ul data-start=\"1201\" data-end=\"1436\">\n<li data-section-id=\"1kfcth9\" data-start=\"1201\" data-end=\"1215\">Ngu\u1ed3n ion<\/li>\n<li data-section-id=\"1r1hm7c\" data-start=\"1216\" data-end=\"1237\">H\u1ec7 th\u1ed1ng chi\u1ebft xu\u1ea5t<\/li>\n<li data-section-id=\"1twz66q\" data-start=\"1238\" data-end=\"1255\">M\u00e1y ph\u00e2n t\u00edch kh\u1ed1i l\u01b0\u1ee3ng<\/li>\n<li data-section-id=\"ywuuxz\" data-start=\"1256\" data-end=\"1280\">H\u1ec7 th\u1ed1ng th\u1ea5u k\u00ednh t\u1eeb t\u00ednh<\/li>\n<li data-section-id=\"1s57tik\" data-start=\"1281\" data-end=\"1302\">\u1ed0ng gia t\u1ed1c<\/li>\n<li data-section-id=\"pg1cgy\" data-start=\"1303\" data-end=\"1336\">H\u1ec7 th\u1ed1ng qu\u00e9t t\u0129nh \u0111i\u1ec7n<\/li>\n<li data-section-id=\"1iwk7km\" data-start=\"1337\" data-end=\"1367\">Th\u1ea5u k\u00ednh \u0111\u1ecbnh h\u00ecnh ch\u00f9m tia song song<\/li>\n<li data-section-id=\"1cur4hx\" data-start=\"1368\" data-end=\"1401\">Bu\u1ed3ng x\u1eed l\u00fd (Tr\u1ea1m cu\u1ed1i)<\/li>\n<li data-section-id=\"qtlnqu\" data-start=\"1402\" data-end=\"1436\">H\u1ed9p \u0111\u1ef1ng wafer \/ H\u1ec7 th\u1ed1ng n\u1ea1p wafer<\/li>\n<\/ul>\n<p data-start=\"1438\" data-end=\"1458\">N\u00f3 \u0111\u01b0\u1ee3c trang b\u1ecb:<\/p>\n<ul data-start=\"1459\" data-end=\"1572\">\n<li data-section-id=\"1jzaueb\" data-start=\"1459\" data-end=\"1494\">B\u00e0n k\u1eb9p wafer t\u0129nh \u0111i\u1ec7n<\/li>\n<li data-section-id=\"1s8wavu\" data-start=\"1495\" data-end=\"1530\">C\u00f4ng ngh\u1ec7 ngu\u1ed3n ion c\u00f3 tu\u1ed5i th\u1ecd cao<\/li>\n<li data-section-id=\"6mih95\" data-start=\"1531\" data-end=\"1572\">H\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ea5m wafer ho\u00e0n to\u00e0n t\u1ef1 \u0111\u1ed9ng<\/li>\n<\/ul>\n<p data-start=\"1574\" data-end=\"1686\">Ki\u1ebfn tr\u00fac n\u00e0y \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh cao c\u1ee7a d\u1ea7m, gi\u1ea3m th\u1eddi gian ng\u1eebng ho\u1ea1t \u0111\u1ed9ng \u0111\u1ec3 b\u1ea3o tr\u00ec v\u00e0 n\u00e2ng cao t\u00ednh l\u1eb7p l\u1ea1i c\u1ee7a quy tr\u00ecnh.<\/p>\n<p data-start=\"1574\" data-end=\"1686\"><img decoding=\"async\" class=\"aligncenter wp-image-2371 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png\" alt=\"\" width=\"1024\" height=\"388\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-300x114.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-768x291.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-600x227.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs.png 1216w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h2 data-section-id=\"106914\" data-start=\"1693\" data-end=\"1727\">C\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u00ednh<\/h2>\n<table>\n<thead>\n<tr>\n<th>M\u1eb7t h\u00e0ng<\/th>\n<th>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\n<td>12 inch<\/td>\n<\/tr>\n<tr>\n<td>Ph\u1ea1m vi n\u0103ng l\u01b0\u1ee3ng<\/td>\n<td>0,5 \u2013 80 keV<\/td>\n<\/tr>\n<tr>\n<td>C\u00e1c th\u00e0nh ph\u1ea7n \u0111\u01b0\u1ee3c c\u1ea5y gh\u00e9p<\/td>\n<td>\u00b9\u00b9B\u207a, \u2074\u2079BF\u2082\u207a, \u00b3\u00b9P\u207a, \u2077\u2075As\u207a, \u00b9\u2074N\u207a, \u00b9H\u207a<\/td>\n<\/tr>\n<tr>\n<td>G\u00f3c c\u1ea5y gh\u00e9p<\/td>\n<td>0\u00b0 \u2013 45\u00b0<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 ch\u00ednh x\u00e1c g\u00f3c<\/td>\n<td>\u2264 0,1\u00b0<\/td>\n<\/tr>\n<tr>\n<td>Ph\u1ea1m vi li\u1ec1u l\u01b0\u1ee3ng<\/td>\n<td>5E11 \u2013 1E17 ion\/cm\u00b2<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u1ea7m<\/td>\n<td>\u2264 101 TP3T\/gi\u1edd (trong v\u00f2ng 60 ph\u00fat; s\u1ed1 l\u1ea7n ng\u1eaft tia v\u00e0 ph\u00f3ng \u0111i\u1ec7n h\u1ed3 quang \u2264 1 l\u1ea7n)<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 song song c\u1ee7a ch\u00f9m tia<\/td>\n<td>\u2264 0,3\u00b0<\/td>\n<\/tr>\n<tr>\n<td>N\u0103ng su\u1ea5t (WPH)<\/td>\n<td>\u2265 200 t\u1ea5m wafer\/gi\u1edd<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 \u0111\u1ed3ng nh\u1ea5t (1\u03c3)<\/td>\n<td>\u2264 1%<\/td>\n<\/tr>\n<tr>\n<td>\u0110\u1ed9 l\u1eb7p l\u1ea1i (1\u03c3)<\/td>\n<td>\u2264 1%<\/td>\n<\/tr>\n<tr>\n<td>Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch quy tr\u00ecnh<\/td>\n<td>T\u01b0\u01a1ng th\u00edch v\u1edbi quy tr\u00ecnh LSI<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 data-section-id=\"yb78ly\" data-start=\"2475\" data-end=\"2506\">C\u00e1c t\u00ednh n\u0103ng v\u00e0 \u01b0u \u0111i\u1ec3m ch\u00ednh<\/h2>\n<h3 data-section-id=\"13hha2k\" data-start=\"2508\" data-end=\"2541\">1. H\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n th\u00f4ng minh<\/h3>\n<p data-start=\"2542\" data-end=\"2706\">\u0110\u01b0\u1ee3c trang b\u1ecb n\u1ec1n t\u1ea3ng ph\u1ea7n m\u1ec1m tr\u1ef1c quan v\u00e0 th\u00f4ng minh, gi\u00fap \u0111\u01a1n gi\u1ea3n h\u00f3a quy tr\u00ecnh v\u1eadn h\u00e0nh, ch\u1ea9n \u0111o\u00e1n s\u1ef1 c\u1ed1 nhanh ch\u00f3ng v\u00e0 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh cao c\u1ee7a h\u1ec7 th\u1ed1ng trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/p>\n<h3 data-section-id=\"1cy4f9q\" data-start=\"2713\" data-end=\"2740\">2. Ngu\u1ed3n ion c\u00f3 tu\u1ed5i th\u1ecd cao<\/h3>\n<p data-start=\"2741\" data-end=\"2863\">S\u1eed d\u1ee5ng thi\u1ebft k\u1ebf ngu\u1ed3n ion ti\u00ean ti\u1ebfn v\u1edbi tu\u1ed5i th\u1ecd \u2265500 gi\u1edd, gi\u00fap gi\u1ea3m \u0111\u00e1ng k\u1ec3 th\u1eddi gian ng\u1eebng ho\u1ea1t \u0111\u1ed9ng v\u00e0 chi ph\u00ed b\u1ea3o tr\u00ec.<\/p>\n<h3 data-section-id=\"4euk5j\" data-start=\"2870\" data-end=\"2903\">3. Kh\u1ea3 n\u0103ng ch\u1ea9n \u0111o\u00e1n ch\u00f9m tia<\/h3>\n<p data-start=\"2904\" data-end=\"2988\">H\u1ec7 th\u1ed1ng \u0111o h\u00ecnh d\u1ea1ng ch\u00f9m tia 2D t\u00edch h\u1ee3p, c\u00f3 kh\u1ea3 n\u0103ng theo d\u00f5i ch\u00ednh x\u00e1c:<\/p>\n<ul data-start=\"2989\" data-end=\"3019\">\n<li data-section-id=\"1ct5xfp\" data-start=\"2989\" data-end=\"3003\">\u0110\u1ed9 r\u1ed9ng ch\u00f9m tia<\/li>\n<li data-section-id=\"1vm2uvw\" data-start=\"3004\" data-end=\"3019\">Chi\u1ec1u cao d\u1ea7m<\/li>\n<\/ul>\n<p data-start=\"3021\" data-end=\"3092\">\u0110i\u1ec1u n\u00e0y gi\u00fap n\u00e2ng cao \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a qu\u00e1 tr\u00ecnh c\u1ea5y gh\u00e9p v\u00e0 t\u0103ng c\u01b0\u1eddng t\u00ednh l\u1eb7p l\u1ea1i c\u1ee7a quy tr\u00ecnh.<\/p>\n<h3 data-section-id=\"qq9ajq\" data-start=\"3099\" data-end=\"3132\">4. Hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t cao<\/h3>\n<p data-start=\"3133\" data-end=\"3310\">M\u00e1y Ai80HC mang l\u1ea1i hi\u1ec7u su\u1ea5t th\u00f4ng l\u01b0\u1ee3ng cao h\u01a1n 1,5 l\u1ea7n so v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng th\u00f4ng th\u01b0\u1eddng, khi\u1ebfn n\u00f3 tr\u1edf n\u00ean ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn quy m\u00f4 l\u1edbn.<\/p>\n<h3 data-section-id=\"1h2ge5m\" data-start=\"3317\" data-end=\"3357\">5. Ch\u1ee9c n\u0103ng c\u1ea5y gh\u00e9p m\u1eabu n\u00e2ng cao<\/h3>\n<p data-start=\"3358\" data-end=\"3429\">H\u1ed7 tr\u1ee3 qu\u00e1 tr\u00ecnh c\u1ea5y ion theo m\u1eabu, cho ph\u00e9p ph\u00e2n b\u1ed1 li\u1ec1u trong:<\/p>\n<ul data-start=\"3430\" data-end=\"3488\">\n<li data-section-id=\"fqh2r6\" data-start=\"3430\" data-end=\"3450\">C\u00e1c v\u00f9ng h\u00ecnh tr\u00f2n<\/li>\n<li data-section-id=\"1aoby05\" data-start=\"3451\" data-end=\"3488\">Ph\u00e2n \u0111o\u1ea1n t\u1ea5m wafer theo \u00f4<\/li>\n<\/ul>\n<p data-start=\"3490\" data-end=\"3502\">\u0110i\u1ec1u n\u00e0y cho ph\u00e9p:<\/p>\n<ul data-start=\"3503\" data-end=\"3617\">\n<li data-section-id=\"chxy3y\" data-start=\"3503\" data-end=\"3552\">Nhi\u1ec1u \u0111i\u1ec1u ki\u1ec7n x\u1eed l\u00fd tr\u00ean m\u1ed9t t\u1ea5m wafer<\/li>\n<li data-section-id=\"z1xkzj\" data-start=\"3553\" data-end=\"3589\">Gi\u1ea3m chi ph\u00ed ph\u00e1t tri\u1ec3n quy tr\u00ecnh<\/li>\n<li data-section-id=\"15uh0gh\" data-start=\"3590\" data-end=\"3617\">N\u00e2ng cao hi\u1ec7u qu\u1ea3 nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n<\/li>\n<\/ul>\n<p data-start=\"3619\" data-end=\"3780\">V\u00ed d\u1ee5: M\u1ed9t t\u1ea5m wafer duy nh\u1ea5t c\u00f3 th\u1ec3 \u0111\u1ed3ng th\u1eddi \u0111\u01b0\u1ee3c x\u1eed l\u00fd theo b\u1ed1n \u0111i\u1ec1u ki\u1ec7n c\u1ea5y ion kh\u00e1c nhau tr\u00ean b\u1ed1n g\u00f3c ph\u1ea7n t\u01b0, gi\u00fap \u0111\u1ea9y nhanh \u0111\u00e1ng k\u1ec3 qu\u00e1 tr\u00ecnh t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh.<\/p>\n<h2 data-section-id=\"18zz1hm\" data-start=\"3787\" data-end=\"3810\">\u0110\u01a1n \u0111\u0103ng k\u00fd<\/h2>\n<ul data-start=\"3812\" data-end=\"4005\">\n<li data-section-id=\"16inq9u\" data-start=\"3812\" data-end=\"3839\">S\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb CMOS<\/li>\n<li data-section-id=\"xjegvm\" data-start=\"3840\" data-end=\"3875\">S\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p logic ti\u00ean ti\u1ebfn<\/li>\n<li data-section-id=\"1xlm3tz\" data-start=\"3876\" data-end=\"3906\">Ph\u01b0\u01a1ng ph\u00e1p pha t\u1ea1p trong ch\u1ea5t b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t<\/li>\n<li data-section-id=\"1ursyu4\" data-start=\"3907\" data-end=\"3959\">C\u00e1c d\u00e2y chuy\u1ec1n th\u1eed nghi\u1ec7m trong l\u0129nh v\u1ef1c nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n ch\u1ea5t b\u00e1n d\u1eabn<\/li>\n<li data-section-id=\"1k6v1m6\" data-start=\"3960\" data-end=\"4005\">S\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p tr\u00ean n\u1ec1n silicon<\/li>\n<\/ul>\n<h2 data-section-id=\"1idaiwr\" data-start=\"58\" data-end=\"95\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p (FAQ)<\/h2>\n<h3 data-section-id=\"squ7m7\" data-start=\"97\" data-end=\"166\">1. H\u1ec7 th\u1ed1ng Ai80HC (High Beam) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf cho k\u00edch th\u01b0\u1edbc wafer n\u00e0o?<\/h3>\n<p data-start=\"167\" data-end=\"381\">H\u1ec7 th\u1ed1ng c\u1ea5y ion Ai80HC (High Beam) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t t\u1ea5m wafer silicon 12 inch, nh\u1edd \u0111\u00f3 ph\u00f9 h\u1ee3p v\u1edbi quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn v\u00e0 s\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p quy m\u00f4 l\u1edbn.<\/p>\n<h3 data-section-id=\"foelcb\" data-start=\"388\" data-end=\"458\">2. Ph\u1ea1m vi c\u00f4ng su\u1ea5t v\u00e0 kh\u1ea3 n\u0103ng x\u1eed l\u00fd c\u1ee7a h\u1ec7 th\u1ed1ng n\u00e0y l\u00e0 g\u00ec?<\/h3>\n<p data-start=\"459\" data-end=\"716\">H\u1ec7 th\u1ed1ng ho\u1ea1t \u0111\u1ed9ng trong d\u1ea3i n\u0103ng l\u01b0\u1ee3ng t\u1eeb 0,5 keV \u0111\u1ebfn 80 keV, h\u1ed7 tr\u1ee3 c\u1ea3 qu\u00e1 tr\u00ecnh c\u1ea5y ion \u1edf \u0111\u1ed9 s\u00e2u n\u00f4ng v\u00e0 trung b\u00ecnh. H\u1ec7 th\u1ed1ng n\u00e0y t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh LSI, bao g\u1ed3m vi\u1ec7c h\u00ecnh th\u00e0nh ti\u1ebfp \u0111i\u1ec3m n\u00f4ng v\u00e0 thi\u1ebft k\u1ebf c\u1ef1c ngu\u1ed3n\/c\u1ef1c tho\u00e1t trong c\u00e1c c\u1ea5u tr\u00fac thi\u1ebft b\u1ecb ti\u00ean ti\u1ebfn.<\/p>\n<h3 data-section-id=\"jluc3f\" data-start=\"723\" data-end=\"792\">3. H\u1ec7 th\u1ed1ng n\u00e0y mang l\u1ea1i m\u1ee9c \u0111\u1ed9 ch\u00ednh x\u00e1c v\u00e0 \u1ed5n \u0111\u1ecbnh nh\u01b0 th\u1ebf n\u00e0o?<\/h3>\n<p data-start=\"793\" data-end=\"850\">Ai80HC (Ch\u1ebf \u0111\u1ed9 chi\u1ebfu s\u00e1ng m\u1ea1nh) \u0111\u1ea3m b\u1ea3o t\u00ednh nh\u1ea5t qu\u00e1n cao trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t nh\u1edd:<\/p>\n<ul data-start=\"851\" data-end=\"965\">\n<li data-section-id=\"8ldlzj\" data-start=\"851\" data-end=\"878\">\u0110\u1ed9 ch\u00ednh x\u00e1c g\u00f3c \u2264 0,1\u00b0<\/li>\n<li data-section-id=\"nyztaj\" data-start=\"879\" data-end=\"905\">\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u (1\u03c3) \u2264 1%<\/li>\n<li data-section-id=\"ai4v3y\" data-start=\"906\" data-end=\"935\">\u0110\u1ed9 l\u1eb7p l\u1ea1i (1\u03c3) \u2264 1%<\/li>\n<li data-section-id=\"1hjdqzq\" data-start=\"936\" data-end=\"965\">\u0110\u1ed9 song song c\u1ee7a ch\u00f9m tia \u2264 0,3\u00b0<\/li>\n<\/ul>\n<p data-start=\"967\" data-end=\"1069\">C\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt n\u00e0y \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh gi\u1eefa c\u00e1c t\u1ea5m wafer v\u00e0 gi\u00fap \u0111\u1ea1t \u0111\u01b0\u1ee3c n\u0103ng su\u1ea5t cao trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn.<\/p>","protected":false},"excerpt":{"rendered":"<p>H\u1ec7 th\u1ed1ng c\u1ea5y ion d\u00f2ng Ai80HC (High Beam) l\u00e0 m\u1ed9t thi\u1ebft b\u1ecb c\u1ea5y ion d\u00f2ng \u0111i\u1ec7n cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean bi\u1ec7t cho c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn s\u1eed d\u1ee5ng t\u1ea5m silicon 12 inch. Thi\u1ebft b\u1ecb n\u00e0y \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 ph\u1ee5c v\u1ee5 c\u00e1c quy tr\u00ecnh pha t\u1ea1p ch\u00ednh x\u00e1c ti\u00ean ti\u1ebfn trong s\u1ea3n xu\u1ea5t m\u1ea1ch t\u00edch h\u1ee3p hi\u1ec7n \u0111\u1ea1i, mang l\u1ea1i hi\u1ec7u su\u1ea5t ch\u00f9m tia \u1ed5n \u0111\u1ecbnh, \u0111\u1ed9 l\u1eb7p l\u1ea1i quy tr\u00ecnh cao v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c ki\u1ec3m so\u00e1t li\u1ec1u l\u01b0\u1ee3ng xu\u1ea5t s\u1eafc.<\/p>","protected":false},"featured_media":2343,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1177],"product_tag":[1160,1183,1179,1182,1178,1181,1180,1185,1184,890],"class_list":{"0":"post-2342","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-ion-implantation-equipment","7":"product_tag-12-inch-wafer-equipment","8":"product_tag-cmos-process-equipment","9":"product_tag-high-current-ion-implanter","10":"product_tag-ion-implantation-machine","11":"product_tag-ion-implantation-system","12":"product_tag-lsi-manufacturing-equipment","13":"product_tag-semiconductor-doping-equipment","14":"product_tag-semiconductor-fabrication-equipment","15":"product_tag-shallow-junction-implantation","16":"product_tag-silicon-wafer-processing","17":"desktop-align-left","18":"tablet-align-left","19":"mobile-align-left","20":"ast-product-gallery-layout-horizontal-slider","21":"ast-product-gallery-with-no-image","22":"ast-product-tabs-layout-horizontal","24":"first","25":"instock","26":"shipping-taxable","27":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2342","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2342"}],"version-history":[{"count":4,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2342\/revisions"}],"predecessor-version":[{"id":2376,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2342\/revisions\/2376"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2343"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2342"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2342"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2342"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2342"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}