{"id":2335,"date":"2026-04-21T09:54:15","date_gmt":"2026-04-21T09:54:15","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2335"},"modified":"2026-06-07T05:44:06","modified_gmt":"2026-06-07T05:44:06","slug":"ceramic-disc-cleaning-and-waxing-integrated-machine-for-semiconductor-wafer-mounting-and-pre-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/ceramic-disc-cleaning-and-waxing-integrated-machine-for-semiconductor-wafer-mounting-and-pre-processing\/","title":{"rendered":"M\u00e1y l\u00e0m s\u1ea1ch v\u00e0 \u0111\u00e1nh b\u00f3ng \u0111\u0129a g\u1ed1m t\u00edch h\u1ee3p d\u00e0nh cho qu\u00e1 tr\u00ecnh l\u1eafp r\u00e1p v\u00e0 ti\u1ec1n x\u1eed l\u00fd t\u1ea5m b\u00e1n d\u1eabn"},"content":{"rendered":"

\"M\u00e1yM\u00e1y l\u00e0m s\u1ea1ch v\u00e0 ph\u1ee7 s\u00e1p t\u00edch h\u1ee3p b\u1eb1ng \u0111\u0129a g\u1ed1m l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 x\u1eed l\u00fd s\u01a1 b\u1ed9 t\u1ea5m wafer b\u00e1n d\u1eabn, t\u00edch h\u1ee3p c\u00e1c c\u00f4ng \u0111o\u1ea1n l\u00e0m s\u1ea1ch ch\u00ednh x\u00e1c, s\u1ea5y kh\u00f4 v\u00e0 ph\u1ee7 s\u00e1p (g\u1eafn) t\u1ea5m wafer v\u00e0o m\u1ed9t n\u1ec1n t\u1ea3ng duy nh\u1ea5t.<\/p>\n

Thi\u1ebft b\u1ecb n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c quy tr\u00ecnh gia c\u00f4ng SiC, Si, GaN, sapphire v\u00e0 g\u1ed1m s\u1ee9 cao c\u1ea5p, \u0111\u1ea3m b\u1ea3o vi\u1ec7c d\u00e1n wafer \u1ed5n \u0111\u1ecbnh l\u00ean \u0111\u0129a mang tr\u01b0\u1edbc khi ti\u1ebfn h\u00e0nh c\u00e1c c\u00f4ng \u0111o\u1ea1n m\u00e0i, l\u00e0m m\u1ecfng ho\u1eb7c \u0111\u00e1nh b\u00f3ng. Nh\u1edd k\u1ebft h\u1ee3p c\u00f4ng ngh\u1ec7 l\u00e0m s\u1ea1ch b\u1eb1ng s\u00f3ng si\u00eau \u00e2m v\u1edbi h\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n b\u00f4i s\u00e1p th\u00f4ng minh, h\u1ec7 th\u1ed1ng \u0111\u1ea1t \u0111\u01b0\u1ee3c t\u1ef7 l\u1ec7 thu h\u1ed3i cao l\u00ean \u0111\u1ebfn 99,91%, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh gi\u1ea3i ph\u00e1p l\u00fd t\u01b0\u1edfng cho c\u1ea3 s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t l\u1eabn c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn cao c\u1ea5p.<\/p>\n

V\u1edbi kh\u1ea3 n\u0103ng v\u1eadn h\u00e0nh ho\u00e0n to\u00e0n t\u1ef1 \u0111\u1ed9ng v\u00e0 k\u1ebft n\u1ed1i v\u1edbi h\u1ec7 th\u1ed1ng MES, m\u00e1y n\u00e0y gi\u00fap n\u00e2ng cao \u0111\u00e1ng k\u1ec3 hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t, t\u00ednh nh\u1ea5t qu\u00e1n c\u1ee7a quy tr\u00ecnh v\u00e0 kh\u1ea3 n\u0103ng truy xu\u1ea5t ngu\u1ed3n g\u1ed1c.<\/p>\n

\n

C\u00e1c t\u00ednh n\u0103ng k\u1ef9 thu\u1eadt ch\u00ednh<\/span><\/h2>\n

H\u1ec7 th\u1ed1ng l\u00e0m s\u1ea1ch v\u00e0 \u0111\u00e1nh b\u00f3ng t\u00edch h\u1ee3p<\/span><\/h3>\n
    \n
  • K\u1ebft h\u1ee3p ch\u1ee9c n\u0103ng l\u00e0m s\u1ea1ch \u0111\u0129a g\u1ed1m + hai tr\u1ea1m \u0111\u00e1nh b\u00f3ng<\/li>\n
  • Quy tr\u00ecnh m\u1ed9t b\u01b0\u1edbc: l\u00e0m s\u1ea1ch \u2192 s\u1ea5y kh\u00f4 \u2192 \u0111\u00e1nh b\u00f3ng<\/li>\n
  • Ho\u1ea1t \u0111\u1ed9ng song song gi\u00fap t\u0103ng n\u0103ng su\u1ea5t<\/li>\n<\/ul>\n

    C\u0103n ch\u1ec9nh \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ef1c cao<\/span><\/h3>\n
      \n
    • H\u1ec7 th\u1ed1ng \u0111\u1ecbnh v\u1ecb b\u1eb1ng h\u00ecnh \u1ea3nh CCD<\/li>\n
    • \u0110\u1ed9 ch\u00ednh x\u00e1c c\u0103n ch\u1ec9nh: \u00b10,02 mm<\/li>\n
    • \u0110\u1ea3m b\u1ea3o vi\u1ec7c \u0111\u1eb7t t\u1ea5m wafer ch\u00ednh x\u00e1c v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng h\u00e0n<\/li>\n<\/ul>\n

      Qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng s\u00e1p c\u00f3 ki\u1ec3m so\u00e1t<\/span><\/h3>\n
        \n
      • L\u01b0\u1ee3ng s\u00e1p: 0,8 g \u00b10,05 g m\u1ed7i mi\u1ebfng<\/li>\n
      • Ph\u00e2n b\u1ed1 \u0111\u1ed3ng \u0111\u1ec1u \u0111\u1ea3m b\u1ea3o s\u1ef1 \u1ed5n \u0111\u1ecbnh khi l\u1eafp \u0111\u1eb7t trong qu\u00e1 tr\u00ecnh m\u00e0i<\/li>\n<\/ul>\n

        Ki\u1ec3m so\u00e1t \u00e1p su\u1ea5t \u1ed5n \u0111\u1ecbnh<\/span><\/h3>\n
          \n
        • H\u1ec7 th\u1ed1ng kh\u00ed n\u00e9n duy tr\u00ec \u00e1p su\u1ea5t \u0111\u1ed3ng \u0111\u1ec1u \u1edf m\u1ee9c 5\u201310 N\/cm\u00b2<\/li>\n
        • Ng\u0103n ng\u1eeba hi\u1ec7n t\u01b0\u1ee3ng cong v\u00eanh c\u1ee7a t\u1ea5m wafer v\u00e0 c\u00e1c khuy\u1ebft t\u1eadt trong qu\u00e1 tr\u00ecnh h\u00e0n<\/li>\n<\/ul>\n

          N\u0103ng su\u1ea5t cao v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh<\/span><\/h3>\n
            \n
          • Hi\u1ec7u su\u1ea5t l\u00ean \u0111\u1ebfn 99,91%<\/li>\n
          • Gi\u00e1m s\u00e1t th\u1eddi gian th\u1ef1c v\u1edbi t\u00ednh n\u0103ng \u0111i\u1ec1u ch\u1ec9nh th\u00f4ng s\u1ed1 t\u1ef1 \u0111\u1ed9ng (d\u1ea3i dung sai \u00b13%)<\/li>\n<\/ul>\n
            \n

            Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/span><\/h2>\n
            \n
            \n\n\n\n\n\n\n\n\n
            Tham s\u1ed1<\/th>\nGi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<\/thead>\n
            K\u00edch th\u01b0\u1edbc<\/td>\n7740 \u00d7 3390 \u00d7 2300 mm<\/td>\n<\/tr>\n
            Ngu\u1ed3n \u0111i\u1ec7n<\/td>\n\u0110i\u1ec7n xoay chi\u1ec1u 380 V, 50 Hz, 90 kW<\/td>\n<\/tr>\n
            Cung c\u1ea5p kh\u00ed n\u00e9n<\/td>\n2 m\u00b3\/h, 0,4\u20130,5 MPa (kh\u00ed kh\u00f4 kh\u00f4ng ch\u1ee9a d\u1ea7u)<\/td>\n<\/tr>\n
            C\u1ea5p n\u01b0\u1edbc<\/td>\n2 t\u1ea5n\/gi\u1edd \u1edf \u00e1p su\u1ea5t 0,3 MPa, n\u01b0\u1edbc kh\u1eed ion c\u00f3 \u0111i\u1ec7n tr\u1edf su\u1ea5t \u226512 M\u03a9\u00b7cm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
            \n

            Nguy\u00ean l\u00fd ho\u1ea1t \u0111\u1ed9ng<\/span><\/h2>\n

            1. Giai \u0111o\u1ea1n l\u00e0m s\u1ea1ch b\u1eb1ng \u0111\u0129a g\u1ed1m<\/span><\/h3>\n
              \n
            • H\u1ec7 th\u1ed1ng l\u00e0m s\u1ea1ch b\u1eb1ng s\u00f3ng si\u00eau \u00e2m lo\u1ea1i b\u1ecf c\u00e1c h\u1ea1t v\u00e0 t\u1ea1p ch\u1ea5t c\u00f3 k\u00edch th\u01b0\u1edbc \u1edf m\u1ee9c micromet<\/li>\n
            • S\u1eed d\u1ee5ng n\u01b0\u1edbc DI c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao (\u226512 M\u03a9\u00b7cm)<\/li>\n
            • K\u1ebft h\u1ee3p v\u1edbi dao kh\u00ed + s\u1ea5y ch\u00e2n kh\u00f4ng, \u0111\u1ea3m b\u1ea3o kh\u00f4ng \u0111\u1ec3 l\u1ea1i c\u1eb7n<\/li>\n<\/ul>\n

              2. Quy tr\u00ecnh t\u1ea9y l\u00f4ng t\u1ef1 \u0111\u1ed9ng<\/span><\/h3>\n
                \n
              • H\u1ec7 th\u1ed1ng th\u1ecb gi\u00e1c ph\u00e1t hi\u1ec7n t\u1ecda \u0111\u1ed9 \u0111\u0129a<\/li>\n
              • \u0110\u1ea7u phun c\u00f3 th\u1ec3 l\u1eadp tr\u00ecnh gi\u00fap t\u1ea1o ra l\u1edbp s\u00e1p \u0111\u1ed3ng \u0111\u1ec1u<\/li>\n
              • T\u1ea5m wafer \u0111\u01b0\u1ee3c l\u1eafp \u0111\u1eb7t trong \u0111i\u1ec1u ki\u1ec7n \u00e1p su\u1ea5t \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t<\/li>\n<\/ul>\n

                3. \u0110i\u1ec1u khi\u1ec3n quy tr\u00ecnh th\u00f4ng minh<\/span><\/h3>\n
                  \n
                • H\u1ec7 th\u1ed1ng PLC \u0111\u1ed3ng b\u1ed9 h\u00f3a c\u00e1c m\u00f4-\u0111un l\u00e0m s\u1ea1ch v\u00e0 \u0111\u00e1nh b\u00f3ng<\/li>\n
                • H\u1ed7 tr\u1ee3 x\u1eed l\u00fd song song l\u00ean \u0111\u1ebfn 30 \u0111\u0129a m\u1ed7i gi\u1edd<\/li>\n
                • C\u1ea3m bi\u1ebfn \u0111\u1ed9 d\u00e0y theo d\u00f5i \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a s\u00e1p theo th\u1eddi gian th\u1ef1c<\/li>\n<\/ul>\n
                  \n

                  N\u0103ng l\u1ef1c s\u1ea3n xu\u1ea5t<\/span><\/h2>\n
                  \n
                  \n\n\n\n\n\n\n\n\n\n\n
                  K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/th>\n\u0110\u01b0\u1eddng k\u00ednh \u0111\u0129a<\/th>\nS\u1ed1 l\u01b0\u1ee3ng<\/th>\nTh\u1eddi gian chu k\u1ef3<\/th>\n<\/tr>\n<\/thead>\n
                  4 inch<\/td>\n\u03a6485 mm<\/td>\n11 chi\u1ebfc<\/td>\n5 ph\u00fat\/\u0111\u0129a<\/td>\n<\/tr>\n
                  4 inch<\/td>\n\u03a6576 mm<\/td>\n13 chi\u1ebfc<\/td>\n6 ph\u00fat\/\u0111\u0129a<\/td>\n<\/tr>\n
                  6 inch<\/td>\n\u03a6485 mm<\/td>\n6 chi\u1ebfc<\/td>\n3 ph\u00fat\/\u0111\u0129a<\/td>\n<\/tr>\n
                  6 inch<\/td>\n\u03a6576 mm<\/td>\n8 chi\u1ebfc<\/td>\n4 ph\u00fat\/\u0111\u0129a<\/td>\n<\/tr>\n
                  8 inch<\/td>\n\u03a6485 mm<\/td>\n3 chi\u1ebfc<\/td>\n2 ph\u00fat\/\u0111\u0129a<\/td>\n<\/tr>\n
                  8 inch<\/td>\n\u03a6576 mm<\/td>\n5 chi\u1ebfc<\/td>\n3 ph\u00fat\/\u0111\u0129a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
                  \n

                  \u1ee8ng d\u1ee5ng<\/span><\/h2>\n

                  \"\"X\u1eed l\u00fd s\u01a1 b\u1ed9 t\u1ea5m b\u00e1n d\u1eabn<\/span><\/h3>\n
                    \n
                  • G\u1eafn t\u1ea5m wafer tr\u01b0\u1edbc khi m\u00e0i \/ l\u00e0m m\u1ecfng \/ \u0111\u00e1nh b\u00f3ng<\/li>\n
                  • Ph\u00f9 h\u1ee3p v\u1edbi:\n
                      \n
                    • Silic (Si)<\/li>\n
                    • Cacbua silic (SiC)<\/li>\n
                    • Nitrua gali (GaN)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n

                      S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t<\/span><\/h3>\n
                        \n
                      • Thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t GaN, SiC<\/li>\n
                      • C\u00f4ng ngh\u1ec7 x\u1eed l\u00fd v\u1eadt li\u1ec7u n\u1ec1n ti\u00ean ti\u1ebfn<\/li>\n<\/ul>\n

                        V\u1eadt li\u1ec7u quang h\u1ecdc v\u00e0 th\u1ee7y tinh<\/span><\/h3>\n
                          \n
                        • Ch\u1ea5t n\u1ec1n sapphire<\/li>\n
                        • G\u1ed1m s\u1ee9 ch\u00ednh x\u00e1c<\/li>\n
                        • C\u00e1c b\u1ed9 ph\u1eadn quang h\u1ecdc<\/li>\n<\/ul>\n

                          MEMS v\u00e0 V\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn<\/span><\/h3>\n
                            \n
                          • Chu\u1ea9n b\u1ecb t\u1ea5m wafer trong c\u00f4ng ngh\u1ec7 ch\u1ebf t\u1ea1o vi m\u00f4<\/li>\n
                          • Ch\u1ebf bi\u1ebfn v\u1eadt li\u1ec7u chuy\u00ean d\u1ee5ng<\/li>\n<\/ul>\n
                            \n

                            \"\"Nh\u1eefng \u01b0u \u0111i\u1ec3m n\u1ed5i b\u1eadt<\/span><\/h2>\n
                              \n
                            • T\u00edch h\u1ee3p cao: L\u00e0m s\u1ea1ch + s\u1ea5y kh\u00f4 + \u0111\u00e1nh b\u00f3ng trong c\u00f9ng m\u1ed9t h\u1ec7 th\u1ed1ng<\/li>\n
                            • Hi\u1ec7u qu\u1ea3 n\u0103ng l\u01b0\u1ee3ng: T\u1ef7 l\u1ec7 t\u00e1i s\u1eed d\u1ee5ng n\u01b0\u1edbc >80%, gi\u1ea3m m\u1ee9c ti\u00eau th\u1ee5<\/li>\n
                            • C\u00f4ng su\u1ea5t cao: L\u00ean \u0111\u1ebfn 30 \u0111\u0129a\/gi\u1edd<\/li>\n
                            • S\u1eb5n s\u00e0ng cho s\u1ea3n xu\u1ea5t th\u00f4ng minh: H\u1ed7 tr\u1ee3 t\u00edch h\u1ee3p MES\/ERP<\/li>\n
                            • T\u00f9y ch\u1ec9nh linh ho\u1ea1t: H\u1ed7 tr\u1ee3 \u0111\u0129a kh\u00f4ng ti\u00eau chu\u1ea9n c\u00f3 \u0111\u01b0\u1eddng k\u00ednh t\u1eeb 300\u2013650 mm<\/li>\n
                            • Thay \u0111\u1ed5i nhanh: Th\u1eddi gian thay khu\u00f4n <3 ph\u00fat<\/li>\n<\/ul>\n
                              \n

                              Nh\u1eefng \u0111i\u1ec3m n\u1ed5i b\u1eadt v\u1ec1 hi\u1ec7u su\u1ea5t<\/span><\/h2>\n
                                \n
                              • \u0110\u1ed9 l\u1ec7ch v\u1ec1 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a s\u00e1p: \u2264\u00b13%<\/li>\n
                              • L\u01b0\u1ee3ng n\u01b0\u1edbc ti\u00eau th\u1ee5: \u22640,5 l\u00edt\/\u0111\u0129a<\/li>\n
                              • Ho\u1ea1t \u0111\u1ed9ng t\u1ef1 \u0111\u1ed9ng v\u1edbi kh\u1ea3 n\u0103ng truy xu\u1ea5t ngu\u1ed3n g\u1ed1c \u0111\u1ea7y \u0111\u1ee7<\/li>\n
                              • Ki\u1ec3m so\u00e1t quy tr\u00ecnh \u1ed5n \u0111\u1ecbnh v\u00e0 c\u00f3 th\u1ec3 l\u1eb7p l\u1ea1i<\/li>\n<\/ul>\n
                                \n

                                C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/span><\/h2>\n

                                C\u00e2u h\u1ecfi 1: L\u00e0m th\u1ebf n\u00e0o \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o l\u1ee3i su\u1ea5t cao?<\/span><\/h3>\n

                                H\u1ec7 th\u1ed1ng c\u0103n ch\u1ec9nh h\u00ecnh \u1ea3nh CCD chuy\u00ean d\u1ee5ng mang l\u1ea1i \u0111\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh v\u1ecb \u00b10,02 mm, \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng l\u1eafp \u0111\u1eb7t t\u1ea5m wafer lu\u00f4n \u1ed5n \u0111\u1ecbnh.<\/p>\n

                                C\u00e2u h\u1ecfi 2: M\u1ee9c ti\u00eau th\u1ee5 n\u01b0\u1edbc l\u00e0 bao nhi\u00eau?<\/span><\/h3>\n

                                H\u1ec7 th\u1ed1ng \u0111\u1ea1t hi\u1ec7u su\u1ea5t t\u00e1i ch\u1ebf n\u01b0\u1edbc >80%, v\u1edbi m\u1ee9c ti\u00eau th\u1ee5 ch\u1ec9 \u22640,5 l\u00edt cho m\u1ed7i \u0111\u0129a.<\/p>\n

                                C\u00e2u h\u1ecfi 3: Thi\u1ebft b\u1ecb c\u00f3 h\u1ed7 tr\u1ee3 chuy\u1ec3n \u0111\u1ed5i k\u00edch th\u01b0\u1edbc t\u1ea5m wafer nhanh kh\u00f4ng?<\/span><\/h3>\n

                                \u0110\u00fang v\u1eady, th\u01b0 vi\u1ec7n thi\u1ebft b\u1ecb th\u00f4ng minh cho ph\u00e9p t\u1ef1 \u0111\u1ed9ng chuy\u1ec3n \u0111\u1ed5i d\u1ee5ng c\u1ee5 trong v\u00f2ng 3 ph\u00fat th\u00f4ng qua giao di\u1ec7n ng\u01b0\u1eddi d\u00f9ng (HMI).<\/p>","protected":false},"excerpt":{"rendered":"

                                M\u00e1y l\u00e0m s\u1ea1ch v\u00e0 ph\u1ee7 s\u00e1p \u0111\u0129a g\u1ed1m t\u00edch h\u1ee3p l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 x\u1eed l\u00fd s\u01a1 b\u1ed9 t\u1ea5m wafer b\u00e1n d\u1eabn, t\u00edch h\u1ee3p c\u00e1c c\u00f4ng \u0111o\u1ea1n l\u00e0m s\u1ea1ch ch\u00ednh x\u00e1c, s\u1ea5y kh\u00f4 v\u00e0 ph\u1ee7 s\u00e1p (g\u1eafn) t\u1ea5m wafer v\u00e0o m\u1ed9t n\u1ec1n t\u1ea3ng duy nh\u1ea5t. Thi\u1ebft b\u1ecb n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong qu\u00e1 tr\u00ecnh x\u1eed l\u00fd SiC, Si, GaN, sapphire v\u00e0 g\u1ed1m cao c\u1ea5p, \u0111\u1ea3m b\u1ea3o s\u1ef1 g\u1eafn k\u1ebft \u1ed5n \u0111\u1ecbnh c\u1ee7a t\u1ea5m wafer v\u1edbi \u0111\u0129a mang tr\u01b0\u1edbc khi ti\u1ebfn h\u00e0nh c\u00e1c c\u00f4ng \u0111o\u1ea1n m\u00e0i, l\u00e0m m\u1ecfng ho\u1eb7c \u0111\u00e1nh b\u00f3ng.<\/p>","protected":false},"featured_media":2338,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[726],"product_tag":[1166,1175,1172,1173,1169,739,1171,1174,591,1176,1168,1170,1167],"class_list":{"0":"post-2335","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-wafer-cleaning-machine","7":"product_tag-ceramic-disc-cleaning-machine","8":"product_tag-di-water-cleaning-system","9":"product_tag-sapphire-wafer-waxing-system","10":"product_tag-semiconductor-automation-equipment","11":"product_tag-semiconductor-cleaning-system","12":"product_tag-semiconductor-manufacturing-equipment","13":"product_tag-sic-wafer-cleaning-machine","14":"product_tag-ultrasonic-cleaning-machine-semiconductor","15":"product_tag-wafer-bonding-equipment","16":"product_tag-wafer-handling-equipment","17":"product_tag-wafer-mounting-equipment","18":"product_tag-wafer-pre-processing-equipment","19":"product_tag-wafer-waxing-machine","20":"desktop-align-left","21":"tablet-align-left","22":"mobile-align-left","23":"ast-product-gallery-layout-horizontal-slider","24":"ast-product-tabs-layout-horizontal","26":"first","27":"instock","28":"shipping-taxable","29":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2335","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2335"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2335\/revisions"}],"predecessor-version":[{"id":2341,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2335\/revisions\/2341"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2338"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2335"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2335"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2335"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2335"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}