{"id":2327,"date":"2026-04-21T06:21:20","date_gmt":"2026-04-21T06:21:20","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2327"},"modified":"2026-04-21T06:21:21","modified_gmt":"2026-04-21T06:21:21","slug":"wafer-thinning-system-precision-back-grinding-equipment-for-si-sic-and-4-to-12-inch-semiconductor-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/wafer-thinning-system-precision-back-grinding-equipment-for-si-sic-and-4-to-12-inch-semiconductor-wafers\/","title":{"rendered":"H\u1ec7 th\u1ed1ng l\u00e0m m\u1ecfng t\u1ea5m wafer \u2013 Thi\u1ebft b\u1ecb m\u00e0i m\u1eb7t sau ch\u00ednh x\u00e1c d\u00e0nh cho t\u1ea5m wafer silicon (Si), silicon carbide (SiC) v\u00e0 c\u00e1c t\u1ea5m wafer b\u00e1n d\u1eabn c\u00f3 k\u00edch th\u01b0\u1edbc t\u1eeb 4 \u0111\u1ebfn 12 inch"},"content":{"rendered":"

\"H\u1ec7Thi\u1ebft b\u1ecb m\u00e0i m\u1eb7t sau ch\u00ednh x\u00e1c thu\u1ed9c H\u1ec7 th\u1ed1ng l\u00e0m m\u1ecfng t\u1ea5m wafer l\u00e0 m\u1ed9t gi\u1ea3i ph\u00e1p x\u1eed l\u00fd t\u1ea5m wafer c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn. Thi\u1ebft b\u1ecb n\u00e0y h\u1ed7 tr\u1ee3 c\u00e1c t\u1ea5m wafer c\u00f3 k\u00edch th\u01b0\u1edbc t\u1eeb 4 inch \u0111\u1ebfn 12 inch, bao g\u1ed3m silicon (Si), cacbua silic (SiC), arsenua gali (GaAs), sapphire v\u00e0 c\u00e1c v\u1eadt li\u1ec7u b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t gi\u00f2n kh\u00e1c.<\/p>\n

H\u1ec7 th\u1ed1ng n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 th\u1ef1c hi\u1ec7n qu\u00e1 tr\u00ecnh m\u00e0i m\u1ecfng m\u1eb7t sau c\u1ee7a t\u1ea5m wafer v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ef1c cao, cho ph\u00e9p gi\u1ea3m \u0111\u1ed9 d\u00e0y xu\u1ed1ng m\u1ee9c micromet v\u00e0 d\u01b0\u1edbi micromet \u0111\u1ed3ng th\u1eddi v\u1eabn duy tr\u00ec \u0111\u1ed9 ho\u00e0n h\u1ea3o c\u1ee7a b\u1ec1 m\u1eb7t. H\u1ec7 th\u1ed1ng n\u00e0y \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong c\u00e1c l\u0129nh v\u1ef1c \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn, thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t, MEMS v\u00e0 s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t.<\/p>\n

Nh\u1edd t\u00edch h\u1ee3p thi\u1ebft k\u1ebf c\u01a1 kh\u00ed c\u00f3 \u0111\u1ed9 c\u1ee9ng cao, h\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n tr\u1ee5c Z ch\u00ednh x\u00e1c v\u00e0 ch\u1ee9c n\u0103ng gi\u00e1m s\u00e1t \u0111\u1ed9 d\u00e0y theo th\u1eddi gian th\u1ef1c, thi\u1ebft b\u1ecb n\u00e0y \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t gia c\u00f4ng \u1ed5n \u0111\u1ecbnh v\u00e0 c\u00f3 th\u1ec3 l\u1eb7p l\u1ea1i cho s\u1ea3n xu\u1ea5t quy m\u00f4 c\u00f4ng nghi\u1ec7p.<\/p>\n

\n

C\u00e1c t\u00ednh n\u0103ng k\u1ef9 thu\u1eadt ch\u00ednh<\/span><\/h2>\n

Ki\u1ec3m so\u00e1t \u0111\u1ed9 d\u00e0y v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/span><\/h3>\n
    \n
  • \u0110\u1ed9 ch\u00ednh x\u00e1c v\u1ec1 \u0111\u1ed9 d\u00e0y: \u00b11 \u03bcm<\/li>\n
  • \u0110\u1ed9 l\u1ec7ch \u0111\u1ed9 d\u00e0y t\u1ed5ng c\u1ed9ng (TTV): \u22642 \u03bcm<\/li>\n
  • C\u00e1c m\u1eabu cao c\u1ea5p \u0111\u1ea1t \u0111\u1ed9 ch\u00ednh x\u00e1c d\u01b0\u1edbi micromet, l\u00ean \u0111\u1ebfn \u00b10,5 \u03bcm<\/li>\n<\/ul>\n

    \"\"Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u<\/span><\/h3>\n

    H\u1ed7 tr\u1ee3 nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u b\u00e1n d\u1eabn v\u00e0 v\u1eadt li\u1ec7u d\u1ec5 v\u1ee1:<\/p>\n

      \n
    • Silic (Si)<\/li>\n
    • Cacbua silic (SiC)<\/li>\n
    • Arseni ga-li (GaAs)<\/li>\n
    • Ng\u1ecdc b\u00edch (Al\u2082O\u2083)<\/li>\n
    • C\u00e1c t\u1ea5m wafer b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t kh\u00e1c<\/li>\n<\/ul>\n

      Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1ec1 k\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/span><\/h3>\n
        \n
      • T\u1ea5m wafer 4 inch \/ 6 inch \/ 8 inch \/ 10 inch \/ 12 inch<\/li>\n
      • Kh\u1ea3 n\u0103ng x\u1eed l\u00fd linh ho\u1ea1t \u0111\u1ed1i v\u1edbi c\u1ea3 v\u1eadt li\u1ec7u n\u1ec1n ti\u00eau chu\u1ea9n v\u00e0 v\u1eadt li\u1ec7u n\u1ec1n t\u00f9y ch\u1ec9nh<\/li>\n<\/ul>\n

        H\u1ec7 th\u1ed1ng c\u01a1 kh\u00ed c\u00f3 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh cao<\/span><\/h3>\n
          \n
        • Tr\u1ee5c ch\u00ednh s\u1eed d\u1ee5ng \u1ed5 tr\u1ee5c kh\u00ed c\u00f3 \u0111\u1ed9 c\u1ee9ng cao<\/li>\n
        • B\u00e0n m\u00e0i ch\u00ednh x\u00e1c c\u00f3 \u0111\u1ed9 rung th\u1ea5p<\/li>\n
        • H\u1ec7 th\u1ed1ng v\u00edt me bi v\u00e0 thanh d\u1eabn tuy\u1ebfn t\u00ednh nh\u1eadp kh\u1ea9u<\/li>\n
        • \u0110i\u1ec1u khi\u1ec3n \u0111\u1ed9ng c\u01a1 servo c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao (\u0111\u1ed9 ph\u00e2n gi\u1ea3i 0,1 \u03bcm)<\/li>\n<\/ul>\n

          H\u1ec7 th\u1ed1ng l\u00e0m m\u00e1t ti\u00ean ti\u1ebfn<\/span><\/h3>\n
            \n
          • H\u1ec7 th\u1ed1ng tr\u1ee5c ch\u00ednh l\u00e0m m\u00e1t b\u1eb1ng n\u01b0\u1edbc \u0111\u1ea3m b\u1ea3o t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t<\/li>\n
          • Ng\u0103n ng\u1eeba bi\u1ebfn d\u1ea1ng trong qu\u00e1 tr\u00ecnh m\u00e0i t\u1ed1c \u0111\u1ed9 cao<\/li>\n<\/ul>\n
            \n

            C\u1ea5u h\u00ecnh h\u1ec7 th\u1ed1ng<\/span><\/h2>\n

            H\u1ec7 th\u1ed1ng m\u00e0i m\u1ecfng t\u1ea5m wafer t\u00edch h\u1ee3p nhi\u1ec1u m\u00f4-\u0111un ch\u1ee9c n\u0103ng:<\/p>\n

            1. M\u00f4-\u0111un m\u00e0i ch\u00ednh x\u00e1c<\/span><\/h3>\n

            Th\u1ef1c hi\u1ec7n qu\u00e1 tr\u00ecnh gia c\u00f4ng lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u c\u00f3 ki\u1ec3m so\u00e1t v\u1edbi \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u b\u1ec1 m\u1eb7t cao.<\/p>\n

            2. H\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n \u0111\u1ed9 ch\u00ednh x\u00e1c tr\u1ee5c Z<\/span><\/h3>\n

            Cho ph\u00e9p \u0111i\u1ec1u ch\u1ec9nh \u0111\u1ed9 d\u00e0y theo chi\u1ec1u d\u1ecdc c\u1ef1c k\u1ef3 ch\u00ednh x\u00e1c \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 d\u00e0y c\u1ee7a t\u1ea5m wafer lu\u00f4n \u0111\u1ed3ng \u0111\u1ec1u.<\/p>\n

            3. H\u1ec7 th\u1ed1ng \u0111o \u0111\u1ed9 d\u00e0y<\/span><\/h3>\n

            Vi\u1ec7c \u0111o l\u01b0\u1eddng theo th\u1eddi gian th\u1ef1c b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p ti\u1ebfp x\u00fac ho\u1eb7c kh\u00f4ng ti\u1ebfp x\u00fac \u0111\u1ea3m b\u1ea3o s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh.<\/p>\n

            4. \u0110\u1ea7u k\u1eb9p wafer ch\u00e2n kh\u00f4ng<\/span><\/h3>\n

            Gi\u1ea3i ph\u00e1p c\u1ed1 \u0111\u1ecbnh wafer ch\u1eafc ch\u1eafn, bao g\u1ed3m c\u00e1c gi\u1ea3i ph\u00e1p t\u00f9y ch\u1ec9nh d\u00e0nh cho c\u00e1c wafer c\u00f3 h\u00ecnh d\u1ea1ng kh\u00f4ng \u0111\u1ec1u.<\/p>\n

            5. H\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n t\u1ef1 \u0111\u1ed9ng<\/span><\/h3>\n
              \n
            • Ch\u1ebf \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ef1 \u0111\u1ed9ng ho\u00e0n to\u00e0n \/ b\u00e1n t\u1ef1 \u0111\u1ed9ng<\/li>\n
            • Ghi nh\u1eadt k\u00fd ho\u1ea1t \u0111\u1ed9ng<\/li>\n
            • \u0110i\u1ec1u khi\u1ec3n quy tr\u00ecnh d\u1ef1a tr\u00ean c\u00f4ng th\u1ee9c<\/li>\n<\/ul>\n
              \n

              \"\" Kh\u1ea3 n\u0103ng x\u1eed l\u00fd<\/span><\/h2>\n

              H\u1ec7 th\u1ed1ng n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 x\u1eed l\u00fd m\u1eb7t sau c\u1ee7a t\u1ea5m wafer v\u1edbi hi\u1ec7u su\u1ea5t cao:<\/p>\n

                \n
              • M\u00e0i m\u1eb7t sau t\u1ea5m silicon<\/li>\n
              • Qu\u00e1 tr\u00ecnh m\u00e0i m\u1ecfng t\u1ea5m wafer SiC cho c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n<\/li>\n
              • Qu\u00e1 tr\u00ecnh m\u00e0i m\u1ecfng ch\u1ea5t n\u1ec1n GaN v\u00e0 GaAs<\/li>\n
              • C\u1eaft m\u1ecfng ch\u00ednh x\u00e1c t\u1ea5m wafer sapphire<\/li>\n
              • Chu\u1ea9n b\u1ecb t\u1ea5m wafer si\u00eau m\u1ecfng cho \u0111\u00f3ng g\u00f3i 3D<\/li>\n<\/ul>\n
                \n

                \u1ee8ng d\u1ee5ng<\/span><\/h2>\n

                1. Thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t<\/span><\/h3>\n

                \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c MOSFET SiC, IGBT v\u00e0 c\u00e1c thi\u1ebft b\u1ecb cao \u00e1p y\u00eau c\u1ea7u t\u1ea5m wafer si\u00eau m\u1ecfng.<\/p>\n

                \"\"2. C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn<\/span><\/h3>\n

                H\u1ed7 tr\u1ee3 qu\u00e1 tr\u00ecnh m\u00e0i m\u1ecfng wafer cho:<\/p>\n

                  \n
                • \u0110\u00f3ng g\u00f3i chip l\u1eadt<\/li>\n
                • T\u00edch h\u1ee3p IC 2.5D \/ 3D<\/li>\n
                • Quy tr\u00ecnh TSV (Through Silicon Via)<\/li>\n<\/ul>\n

                  3. Ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t<\/span><\/h3>\n

                  \u00c1p d\u1ee5ng cho qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o c\u00e1c thi\u1ebft b\u1ecb GaN, GaAs v\u00e0 InP.<\/p>\n

                  4. \u0110\u00e8n LED v\u00e0 Quang \u0111i\u1ec7n t\u1eed<\/span><\/h3>\n

                  Qu\u00e1 tr\u00ecnh m\u00e0i m\u1ecfng t\u1ea5m wafer sapphire v\u00e0 t\u1ea5m wafer h\u1ee3p ch\u1ea5t \u0111\u1ec3 s\u1ea3n xu\u1ea5t chip LED v\u00e0 c\u00e1c thi\u1ebft b\u1ecb quang h\u1ecdc.<\/p>\n

                  \n

                  \u01afu \u0111i\u1ec3m<\/span><\/h2>\n
                    \n
                  • C\u00f4ng ngh\u1ec7 l\u00e0m m\u1ecfng t\u1ea5m wafer \u0111\u00e3 \u0111\u01b0\u1ee3c ho\u00e0n thi\u1ec7n v\u00e0 \u1ed5n \u0111\u1ecbnh<\/li>\n
                  • H\u1ec7 th\u1ed1ng m\u00e0i trong qu\u00e1 tr\u00ecnh c\u1ea5p ph\u00f4i c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/li>\n
                  • Kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t tuy\u1ec7t v\u1eddi<\/li>\n
                  • T\u1ed1c \u0111\u1ed9 x\u1eed l\u00fd cao (l\u00ean \u0111\u1ebfn 30 t\u1ea5m wafer\/gi\u1edd \u0111\u1ed1i v\u1edbi c\u00e1c quy tr\u00ecnh ti\u00eau chu\u1ea9n)<\/li>\n
                  • Kh\u1ea3 n\u0103ng th\u00edch \u1ee9ng cao v\u1edbi c\u00e1c v\u1eadt li\u1ec7u gi\u00f2n v\u00e0 c\u1ee9ng<\/li>\n
                  • Kh\u1ea3 n\u0103ng t\u00edch h\u1ee3p quy tr\u00ecnh ho\u00e0n to\u00e0n t\u1ef1 \u0111\u1ed9ng<\/li>\n<\/ul>\n
                    \n

                    Nh\u1eefng \u0111i\u1ec3m n\u1ed5i b\u1eadt v\u1ec1 hi\u1ec7u su\u1ea5t<\/span><\/h2>\n
                      \n
                    • \u0110\u1ed9 ph\u00e2n gi\u1ea3i t\u1ed1i thi\u1ec3u: 0,1 \u03bcm\/s khi \u0111i\u1ec1u khi\u1ec3n tr\u1ee5c Z<\/li>\n
                    • \u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y: \u22641\u20132 \u03bcm TTV<\/li>\n
                    • Tr\u1ee5c ch\u00ednh t\u1ed1c \u0111\u1ed9 cao v\u1edbi \u0111\u1ed9 rung c\u1ef1c th\u1ea5p<\/li>\n
                    • Gi\u00e1m s\u00e1t v\u00e0 ghi nh\u1eadt k\u00fd quy tr\u00ecnh theo th\u1eddi gian th\u1ef1c<\/li>\n
                    • T\u01b0\u01a1ng th\u00edch v\u1edbi c\u1ea3 m\u00f4i tr\u01b0\u1eddng nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n (R&D) l\u1eabn s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t<\/li>\n<\/ul>\n
                      \n

                      C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh<\/span><\/h2>\n

                      Ch\u00fang t\u00f4i cung c\u1ea5p c\u00e1c gi\u1ea3i ph\u00e1p t\u00f9y ch\u1ec9nh linh ho\u1ea1t ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c nhu c\u1ea7u c\u00f4ng nghi\u1ec7p kh\u00e1c nhau:<\/p>\n

                        \n
                      • B\u1ed9 k\u1eb9p wafer t\u00f9y ch\u1ec9nh (h\u00ecnh d\u1ea1ng kh\u00f4ng \u0111\u1ec1u)<\/li>\n
                      • Ph\u1ea1m vi \u0111o \u0111\u1ed9 d\u00e0y m\u1edf r\u1ed9ng (l\u00ean \u0111\u1ebfn 40 mm)<\/li>\n
                      • T\u00f9y ch\u1ec9nh c\u00f4ng th\u1ee9c quy tr\u00ecnh<\/li>\n
                      • T\u00edch h\u1ee3p t\u1ef1 \u0111\u1ed9ng h\u00f3a v\u1edbi c\u00e1c thi\u1ebft b\u1ecb \u1edf c\u00e1c c\u00f4ng \u0111o\u1ea1n tr\u01b0\u1edbc v\u00e0 sau<\/li>\n<\/ul>\n
                        \n

                        C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/span><\/h2>\n

                        C\u00e2u h\u1ecfi 1: H\u1ec7 th\u1ed1ng n\u00e0y c\u00f3 th\u1ec3 gia c\u00f4ng c\u00e1c t\u1ea5m wafer SiC kh\u00f4ng?<\/span><\/h3>\n

                        \u0110\u00fang v\u1eady, s\u1ea3n ph\u1ea9m n\u00e0y \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a \u0111\u1eb7c bi\u1ec7t cho qu\u00e1 tr\u00ecnh m\u00e0i m\u1ecfng v\u00e0 m\u00e0i m\u1eb7t sau c\u1ee7a t\u1ea5m wafer SiC, ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c thi\u1ebft b\u1ecb \u0111i\u1ec7n.<\/p>\n

                        C\u00e2u h\u1ecfi 2: \u0110\u1ed9 ch\u00ednh x\u00e1c v\u1ec1 \u0111\u1ed9 d\u00e0y c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c l\u00e0 bao nhi\u00eau?<\/span><\/h3>\n

                        C\u00e1c m\u1eabu ti\u00eau chu\u1ea9n \u0111\u1ea1t \u0111\u1ed9 ch\u00ednh x\u00e1c \u00b11 \u03bcm, c\u00f2n c\u00e1c c\u1ea5u h\u00ecnh cao c\u1ea5p c\u00f3 th\u1ec3 \u0111\u1ea1t \u00b10,5 \u03bcm v\u1edbi TTV \u22641 \u03bcm.<\/p>\n

                        C\u00e2u h\u1ecfi 3: N\u00f3 c\u00f3 h\u1ed7 tr\u1ee3 t\u1ef1 \u0111\u1ed9ng h\u00f3a ho\u00e0n to\u00e0n kh\u00f4ng?<\/span><\/h3>\n

                        \u0110\u00fang v\u1eady, c\u1ea3 ch\u1ebf \u0111\u1ed9 b\u1eafn li\u00ean t\u1ee5c v\u00e0 ch\u1ebf \u0111\u1ed9 b\u1eafn b\u00e1n t\u1ef1 \u0111\u1ed9ng \u0111\u1ec1u c\u00f3 s\u1eb5n t\u00f9y theo y\u00eau c\u1ea7u s\u1ea3n xu\u1ea5t.<\/p>","protected":false},"excerpt":{"rendered":"

                        H\u1ec7 th\u1ed1ng m\u00e0i m\u1ecfng m\u1eb7t sau ch\u00ednh x\u00e1c cho wafer l\u00e0 gi\u1ea3i ph\u00e1p x\u1eed l\u00fd wafer c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn. H\u1ec7 th\u1ed1ng n\u00e0y h\u1ed7 tr\u1ee3 c\u00e1c lo\u1ea1i wafer c\u00f3 k\u00edch th\u01b0\u1edbc t\u1eeb 4 inch \u0111\u1ebfn 12 inch, bao g\u1ed3m silicon (Si), cacbua silic (SiC), arsenua gali (GaAs), sapphire v\u00e0 c\u00e1c v\u1eadt li\u1ec7u b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t gi\u00f2n kh\u00e1c.H\u1ec7 th\u1ed1ng n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 m\u00e0i m\u1ecfng m\u1eb7t sau wafer v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ef1c cao, cho ph\u00e9p gi\u1ea3m \u0111\u1ed9 d\u00e0y xu\u1ed1ng m\u1ee9c micron v\u00e0 sub-micron \u0111\u1ed3ng th\u1eddi duy tr\u00ec \u0111\u1ed9 nguy\u00ean v\u1eb9n b\u1ec1 m\u1eb7t tuy\u1ec7t v\u1eddi.<\/p>","protected":false},"featured_media":2330,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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