{"id":2316,"date":"2026-04-21T06:05:44","date_gmt":"2026-04-21T06:05:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2316"},"modified":"2026-04-21T06:05:45","modified_gmt":"2026-04-21T06:05:45","slug":"ion-beam-etching-machine-for-si-sio2-and-metal-materials-in-semiconductor-fabrication","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/ion-beam-etching-machine-for-si-sio2-and-metal-materials-in-semiconductor-fabrication\/","title":{"rendered":"M\u00e1y kh\u1eafc tia ion cho c\u00e1c v\u1eadt li\u1ec7u Si, SiO\u2082 v\u00e0 kim lo\u1ea1i trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn"},"content":{"rendered":"<p data-start=\"297\" data-end=\"643\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2320 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-300x300.webp\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-300x300.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-150x150.webp 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-12x12.webp 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-600x600.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-100x100.webp 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication.webp 750w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>M\u00e1y kh\u1eafc tia ion d\u00e0nh cho c\u00e1c v\u1eadt li\u1ec7u Si, SiO\u2082 v\u00e0 kim lo\u1ea1i l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng kh\u1eafc kh\u00f4 c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf cho c\u00e1c \u1ee9ng d\u1ee5ng ch\u1ebf t\u1ea1o vi m\u00f4 v\u00e0 c\u00f4ng ngh\u1ec7 nano ti\u00ean ti\u1ebfn. S\u1eed d\u1ee5ng c\u00f4ng ngh\u1ec7 kh\u1eafc tia ion (IBE), c\u00f2n \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 phay ion, thi\u1ebft b\u1ecb n\u00e0y cho ph\u00e9p lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u v\u1edbi hi\u1ec7u su\u1ea5t cao th\u00f4ng qua qu\u00e1 tr\u00ecnh ph\u00fan x\u1ea1 thu\u1ea7n t\u00fay v\u1ec1 m\u1eb7t v\u1eadt l\u00fd.<\/p>\n<p data-start=\"645\" data-end=\"961\">Kh\u00e1c v\u1edbi c\u00e1c c\u00f4ng ngh\u1ec7 kh\u1eafc b\u1eb1ng plasma truy\u1ec1n th\u1ed1ng, c\u00f4ng ngh\u1ec7 kh\u1eafc b\u1eb1ng ch\u00f9m ion kh\u00f4ng ti\u1ebfp x\u00fac tr\u1ef1c ti\u1ebfp ch\u1ea5t n\u1ec1n v\u1edbi plasma. \u0110i\u1ec1u n\u00e0y gi\u00fap gi\u1ea3m \u0111\u00e1ng k\u1ec3 nguy c\u01a1 h\u01b0 h\u1ecfng do plasma g\u00e2y ra, \u00f4 nhi\u1ec5m v\u00e0 t\u00edch t\u1ee5 \u0111i\u1ec7n t\u00edch, khi\u1ebfn c\u00f4ng ngh\u1ec7 n\u00e0y \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p cho vi\u1ec7c s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn v\u00e0 quang h\u1ecdc nh\u1ea1y c\u1ea3m.<\/p>\n<p data-start=\"963\" data-end=\"1148\">V\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c \u1edf c\u1ea5p \u0111\u1ed9 nanomet v\u00e0 kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t quy tr\u00ecnh tuy\u1ec7t v\u1eddi, h\u1ec7 th\u1ed1ng n\u00e0y \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, x\u1eed l\u00fd m\u00e0ng m\u1ecfng v\u00e0 nghi\u00ean c\u1ee9u v\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn.<\/p>\n<hr data-start=\"1150\" data-end=\"1153\" \/>\n<h2 data-section-id=\"17sw59i\" data-start=\"1155\" data-end=\"1184\"><span role=\"text\"><img decoding=\"async\" class=\"wp-image-2324 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-300x125.png\" alt=\"\" width=\"458\" height=\"191\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-300x125.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-600x250.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7.png 680w\" sizes=\"(max-width: 458px) 100vw, 458px\" \/>C\u00e1c t\u00ednh n\u0103ng k\u1ef9 thu\u1eadt ch\u00ednh<\/span><\/h2>\n<ul data-start=\"1186\" data-end=\"1929\">\n<li data-section-id=\"7yo1gz\" data-start=\"1186\" data-end=\"1324\">\u0110\u1ed9 ch\u00ednh x\u00e1c c\u1ef1c cao<br data-start=\"1212\" data-end=\"1215\" \/>\u0110\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ph\u00e2n gi\u1ea3i kh\u1eafc \u226410 nm, \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u ti\u00ean ti\u1ebfn trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn v\u00e0 ch\u1ebf t\u1ea1o nano.<\/li>\n<li data-section-id=\"csgjgf\" data-start=\"1326\" data-end=\"1497\">Kh\u1ea3 n\u0103ng \u0103n m\u00f2n kh\u00f4ng ch\u1ecdn l\u1ecdc<br data-start=\"1364\" data-end=\"1367\" \/>Cho ph\u00e9p th\u1ef1c hi\u1ec7n qu\u00e1 tr\u00ecnh \u0103n m\u00f2n \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u, bao g\u1ed3m kim lo\u1ea1i, ch\u1ea5t b\u00e1n d\u1eabn v\u00e0 ch\u1ea5t \u0111i\u1ec7n m\u00f4i, m\u00e0 kh\u00f4ng ph\u1ee5 thu\u1ed9c v\u00e0o h\u00f3a ch\u1ea5t.<\/li>\n<li data-section-id=\"1xlwjqh\" data-start=\"1499\" data-end=\"1667\">Ki\u1ec3m so\u00e1t t\u00ednh d\u1ecb h\u01b0\u1edbng v\u00e0 h\u01b0\u1edbng<br data-start=\"1540\" data-end=\"1543\" \/>G\u00f3c ch\u00f9m ion c\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh cho ph\u00e9p t\u1ea1o ra c\u00e1c c\u1ea5u tr\u00fac \u0103n m\u00f2n c\u1ea3 d\u1ecb h\u01b0\u1edbng v\u00e0 \u0111\u1ed3ng h\u01b0\u1edbng, h\u1ed7 tr\u1ee3 vi\u1ec7c chuy\u1ec3n giao c\u00e1c m\u1eabu ph\u1ee9c t\u1ea1p.<\/li>\n<li data-section-id=\"1ialgp0\" data-start=\"1669\" data-end=\"1793\">M\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd kh\u00f4ng s\u1eed d\u1ee5ng plasma<br data-start=\"1709\" data-end=\"1712\" \/>Lo\u1ea1i b\u1ecf c\u00e1c h\u01b0 h\u1ecfng do plasma g\u00e2y ra, \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 tin c\u1eady v\u00e0 n\u0103ng su\u1ea5t cao h\u01a1n cho thi\u1ebft b\u1ecb.<\/li>\n<li data-section-id=\"1squn5z\" data-start=\"1795\" data-end=\"1929\">Ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t tuy\u1ec7t v\u1eddi<br data-start=\"1826\" data-end=\"1829\" \/>T\u1ea1o ra b\u1ec1 m\u1eb7t nh\u1eb5n m\u1ecbn v\u1edbi \u0111\u1ed9 nh\u00e1m th\u1ea5p, y\u1ebfu t\u1ed1 quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng quang h\u1ecdc v\u00e0 \u0111i\u1ec7n t\u1eed.<\/li>\n<\/ul>\n<hr data-start=\"1931\" data-end=\"1934\" \/>\n<h2 data-section-id=\"crb813\" data-start=\"1936\" data-end=\"1965\"><span role=\"text\">C\u00e1c th\u00e0nh ph\u1ea7n c\u1ed1t l\u00f5i c\u1ee7a h\u1ec7 th\u1ed1ng<\/span><\/h2>\n<p data-start=\"1967\" data-end=\"2042\">M\u1ed9t h\u1ec7 th\u1ed1ng kh\u1eafc b\u1eb1ng ch\u00f9m ion ho\u00e0n ch\u1ec9nh bao g\u1ed3m m\u1ed9t s\u1ed1 h\u1ec7 th\u1ed1ng con quan tr\u1ecdng:<\/p>\n<h3 data-section-id=\"j86wbp\" data-start=\"2044\" data-end=\"2068\"><span role=\"text\">1. H\u1ec7 th\u1ed1ng h\u00fat ch\u00e2n kh\u00f4ng<\/span><\/h3>\n<p data-start=\"2069\" data-end=\"2118\">T\u1ea1o ra m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng cao, c\u1ea7n thi\u1ebft cho:<\/p>\n<ul data-start=\"2119\" data-end=\"2193\">\n<li data-section-id=\"1vzt3vq\" data-start=\"2119\" data-end=\"2137\">\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u1ea7m<\/li>\n<li data-section-id=\"svkbf3\" data-start=\"2138\" data-end=\"2163\">Ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m<\/li>\n<li data-section-id=\"19d0yza\" data-start=\"2164\" data-end=\"2193\">Gia c\u00f4ng ch\u00ednh x\u00e1c cao<\/li>\n<\/ul>\n<h3 data-section-id=\"8jigvj\" data-start=\"2195\" data-end=\"2216\"><span role=\"text\">2. Ngu\u1ed3n ion<\/span><\/h3>\n<p data-start=\"2217\" data-end=\"2272\">T\u1ea1o ra ch\u00f9m ion n\u0103ng l\u01b0\u1ee3ng cao (th\u01b0\u1eddng l\u00e0 ion argon):<\/p>\n<ul data-start=\"2273\" data-end=\"2386\">\n<li data-section-id=\"116c4dh\" data-start=\"2273\" data-end=\"2315\">X\u00e1c \u0111\u1ecbnh t\u1ed1c \u0111\u1ed9 \u0103n m\u00f2n v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u<\/li>\n<li data-section-id=\"bdpzju\" data-start=\"2316\" data-end=\"2386\">H\u1ed7 tr\u1ee3 c\u00e1c lo\u1ea1i ngu\u1ed3n kh\u00e1c nhau nh\u01b0 ngu\u1ed3n ion RF v\u00e0 Kaufman<\/li>\n<\/ul>\n<h3 data-section-id=\"1tpsqxl\" data-start=\"2388\" data-end=\"2411\"><span role=\"text\">3. Giai \u0111o\u1ea1n l\u1ea5y m\u1eabu<\/span><\/h3>\n<ul data-start=\"2412\" data-end=\"2530\">\n<li data-section-id=\"d3z3he\" data-start=\"2412\" data-end=\"2468\">H\u1ed7 tr\u1ee3 xoay \u0111a tr\u1ee5c \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh \u0103n m\u00f2n \u0111\u1ed3ng \u0111\u1ec1u<\/li>\n<li data-section-id=\"15yipgz\" data-start=\"2469\" data-end=\"2530\">H\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n nhi\u1ec7t \u0111\u1ed9 t\u00edch h\u1ee3p gi\u00fap n\u00e2ng cao \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh<\/li>\n<\/ul>\n<h3 data-section-id=\"qoosxq\" data-start=\"2532\" data-end=\"2557\"><span role=\"text\">4. H\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n<\/span><\/h3>\n<ul data-start=\"2558\" data-end=\"2705\">\n<li data-section-id=\"1mqnqw1\" data-start=\"2558\" data-end=\"2587\">Ho\u1ea1t \u0111\u1ed9ng ho\u00e0n to\u00e0n t\u1ef1 \u0111\u1ed9ng<\/li>\n<li data-section-id=\"ymbyxd\" data-start=\"2588\" data-end=\"2643\">Cho ph\u00e9p ki\u1ec3m so\u00e1t th\u00f4ng s\u1ed1 ch\u00ednh x\u00e1c v\u00e0 \u0111\u1ea3m b\u1ea3o t\u00ednh l\u1eb7p l\u1ea1i<\/li>\n<li data-section-id=\"1kjf28e\" data-start=\"2644\" data-end=\"2705\">T\u00ednh n\u0103ng ph\u00e1t hi\u1ec7n \u0111i\u1ec3m cu\u1ed1i t\u00f9y ch\u1ecdn cho vi\u1ec7c \u0111i\u1ec1u khi\u1ec3n quy tr\u00ecnh n\u00e2ng cao<\/li>\n<\/ul>\n<h3 data-section-id=\"97rafg\" data-start=\"2707\" data-end=\"2729\"><span role=\"text\">5. Ch\u1ea5t trung h\u00f2a<\/span><\/h3>\n<ul data-start=\"2730\" data-end=\"2836\">\n<li data-section-id=\"12j0ebp\" data-start=\"2730\" data-end=\"2772\">Ng\u0103n ch\u1eb7n s\u1ef1 t\u00edch t\u1ee5 \u0111i\u1ec7n t\u00edch trong qu\u00e1 tr\u00ecnh \u0103n m\u00f2n<\/li>\n<li data-section-id=\"1o4nvb1\" data-start=\"2773\" data-end=\"2836\">R\u1ea5t c\u1ea7n thi\u1ebft cho c\u00e1c v\u1eadt li\u1ec7u c\u00e1ch nhi\u1ec7t nh\u01b0 SiO\u2082 v\u00e0 Si\u2083N\u2084<\/li>\n<\/ul>\n<hr data-start=\"2838\" data-end=\"2841\" \/>\n<h2 data-section-id=\"sgqumq\" data-start=\"2843\" data-end=\"2867\"><span role=\"text\">Nguy\u00ean l\u00fd ho\u1ea1t \u0111\u1ed9ng<\/span><\/h2>\n<p data-start=\"2869\" data-end=\"3006\"><img decoding=\"async\" class=\"size-medium wp-image-2321 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-300x235.png\" alt=\"\" width=\"300\" height=\"235\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-300x235.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-15x12.png 15w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-600x469.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Qu\u00e1 tr\u00ecnh kh\u1eafc b\u1eb1ng ch\u00f9m ion ho\u1ea1t \u0111\u1ed9ng b\u1eb1ng c\u00e1ch chi\u1ebfu m\u1ed9t ch\u00f9m ion c\u00f3 n\u0103ng l\u01b0\u1ee3ng cao v\u00e0 \u0111\u01b0\u1ee3c h\u1ed9i t\u1ee5 v\u00e0o b\u1ec1 m\u1eb7t v\u1eadt li\u1ec7u m\u1ee5c ti\u00eau trong \u0111i\u1ec1u ki\u1ec7n ch\u00e2n kh\u00f4ng.<\/p>\n<p data-start=\"3008\" data-end=\"3253\">C\u00e1c ion (th\u01b0\u1eddng l\u00e0 Ar\u207a) va ch\u1ea1m v\u1edbi c\u00e1c nguy\u00ean t\u1eed tr\u00ean b\u1ec1 m\u1eb7t, truy\u1ec1n \u0111\u1ed9ng l\u01b0\u1ee3ng v\u00e0 khi\u1ebfn c\u00e1c nguy\u00ean t\u1eed b\u1ecb b\u1eafn ra th\u00f4ng qua qu\u00e1 tr\u00ecnh ph\u00fan x\u1ea1 v\u1eadt l\u00fd. Qu\u00e1 tr\u00ecnh n\u00e0y lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u t\u1eebng l\u1edbp m\u1ed9t, cho ph\u00e9p t\u1ea1o ra c\u00e1c hoa v\u0103n ch\u00ednh x\u00e1c m\u00e0 kh\u00f4ng c\u1ea7n \u0111\u1ebfn ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc.<\/p>\n<p data-start=\"3255\" data-end=\"3296\">\u0110i\u1ec1u n\u00e0y khi\u1ebfn IBE \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p v\u1edbi:<\/p>\n<ul data-start=\"3297\" data-end=\"3403\">\n<li data-section-id=\"jy9ydi\" data-start=\"3297\" data-end=\"3333\">Chuy\u1ec3n m\u1eabu \u0111\u1ed9 ph\u00e2n gi\u1ea3i cao<\/li>\n<li data-section-id=\"1ihgsm0\" data-start=\"3334\" data-end=\"3376\">C\u00e1c v\u1eadt li\u1ec7u c\u00f3 t\u00ednh ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc th\u1ea5p<\/li>\n<li data-section-id=\"hl3mzt\" data-start=\"3377\" data-end=\"3403\">C\u1ea5u tr\u00fac nhi\u1ec1u l\u1edbp<\/li>\n<\/ul>\n<hr data-start=\"3405\" data-end=\"3408\" \/>\n<h2 data-section-id=\"gimyd4\" data-start=\"3410\" data-end=\"3440\"><span role=\"text\">Kh\u1ea3 n\u0103ng x\u1eed l\u00fd<\/span><\/h2>\n<h3 data-section-id=\"ww5vbk\" data-start=\"3442\" data-end=\"3469\"><span role=\"text\">C\u00e1c lo\u1ea1i v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c h\u1ed7 tr\u1ee3<\/span><\/h3>\n<ul data-start=\"3470\" data-end=\"3622\">\n<li data-section-id=\"4dwycu\" data-start=\"3470\" data-end=\"3504\">Kim lo\u1ea1i: Au, Pt, Cu, Ta, Al<\/li>\n<li data-section-id=\"12wc4i0\" data-start=\"3505\" data-end=\"3537\">Ch\u1ea5t b\u00e1n d\u1eabn: Si, GaAs<\/li>\n<li data-section-id=\"75kyg7\" data-start=\"3538\" data-end=\"3570\">Ch\u1ea5t \u0111i\u1ec7n m\u00f4i: SiO\u2082, Si\u2083N\u2084<\/li>\n<li data-section-id=\"1xmdv1x\" data-start=\"3571\" data-end=\"3622\">V\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn: AlN, g\u1ed1m s\u1ee9, polymer<\/li>\n<\/ul>\n<hr data-start=\"3624\" data-end=\"3627\" \/>\n<h2 data-section-id=\"12vl3dy\" data-start=\"3629\" data-end=\"3656\"><span role=\"text\">Quy tr\u00ecnh ti\u00eau bi\u1ec3u<\/span><\/h2>\n<ol data-start=\"3658\" data-end=\"4078\">\n<li data-section-id=\"1lq2akh\" data-start=\"3658\" data-end=\"3742\">Chu\u1ea9n b\u1ecb m\u1eabu<br data-start=\"3683\" data-end=\"3686\" \/>L\u00e0m s\u1ea1ch v\u00e0 l\u1eafp \u0111\u1eb7t v\u1eadt li\u1ec7u n\u1ec1n v\u00e0o bu\u1ed3ng ch\u00e2n kh\u00f4ng<\/li>\n<li data-section-id=\"1uf7qj1\" data-start=\"3744\" data-end=\"3821\">Che ph\u1ee7<br data-start=\"3758\" data-end=\"3761\" \/>S\u1eed d\u1ee5ng l\u1edbp quang nh\u1ea1y ho\u1eb7c khu\u00f4n kim lo\u1ea1i \u0111\u1ec3 x\u00e1c \u0111\u1ecbnh c\u00e1c v\u00f9ng c\u1ea7n kh\u1eafc<\/li>\n<li data-section-id=\"1sq3ygn\" data-start=\"3823\" data-end=\"3910\">T\u1ea1o ch\u00f9m ion<br data-start=\"3849\" data-end=\"3852\" \/>K\u00edch ho\u1ea1t ngu\u1ed3n ion b\u1eb1ng kh\u00ed tr\u01a1 (th\u01b0\u1eddng l\u00e0 argon)<\/li>\n<li data-section-id=\"46esbg\" data-start=\"3912\" data-end=\"4006\">Quy tr\u00ecnh kh\u1eafc<br data-start=\"3934\" data-end=\"3937\" \/>\u0110i\u1ec1u ch\u1ec9nh n\u0103ng l\u01b0\u1ee3ng ch\u00f9m tia, g\u00f3c chi\u1ebfu v\u00e0 th\u1eddi gian \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c c\u1ea5u tr\u00fac mong mu\u1ed1n<\/li>\n<li data-section-id=\"oeifr6\" data-start=\"4008\" data-end=\"4078\">Th\u00e1o kh\u1ea9u trang<br data-start=\"4027\" data-end=\"4030\" \/>Th\u00e1o m\u1eb7t n\u1ea1 \u0111\u1ec3 l\u1ed9 c\u00e1c hoa v\u0103n \u0111\u00e3 \u0111\u01b0\u1ee3c kh\u1eafc ho\u00e0n ch\u1ec9nh<\/li>\n<\/ol>\n<hr data-start=\"4080\" data-end=\"4083\" \/>\n<h2 data-section-id=\"1myoacb\" data-start=\"4085\" data-end=\"4109\"><span role=\"text\">L\u0129nh v\u1ef1c \u1ee9ng d\u1ee5ng<\/span><\/h2>\n<h3 data-section-id=\"bm5nu5\" data-start=\"4111\" data-end=\"4146\"><span role=\"text\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2322 aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-300x65.png\" alt=\"\" width=\"724\" height=\"157\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-300x65.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-18x4.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-600x130.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6.png 680w\" sizes=\"(max-width: 724px) 100vw, 724px\" \/>S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/span><\/h3>\n<ul data-start=\"4147\" data-end=\"4236\">\n<li data-section-id=\"13vctk4\" data-start=\"4147\" data-end=\"4180\">Qu\u00e1 tr\u00ecnh t\u1ea1o m\u1eabu m\u1ea1ch t\u00edch h\u1ee3p<\/li>\n<li data-section-id=\"ofwy8d\" data-start=\"4181\" data-end=\"4206\">C\u1ea5u tr\u00fac m\u00e0ng m\u1ecfng<\/li>\n<li data-section-id=\"1x3kzva\" data-start=\"4207\" data-end=\"4236\">C\u00f4ng ngh\u1ec7 ch\u1ebf t\u1ea1o n\u00fat ti\u00ean ti\u1ebfn<\/li>\n<\/ul>\n<h3 data-section-id=\"1tse075\" data-start=\"4238\" data-end=\"4261\"><span role=\"text\">Thi\u1ebft b\u1ecb quang h\u1ecdc<\/span><\/h3>\n<ul data-start=\"4262\" data-end=\"4356\">\n<li data-section-id=\"v6a7ly\" data-start=\"4262\" data-end=\"4309\">Gia c\u00f4ng ch\u00ednh x\u00e1c c\u00e1c l\u01b0\u1edbi ph\u00e2n c\u1ef1c v\u00e0 th\u1ea5u k\u00ednh<\/li>\n<li data-section-id=\"lq2w9m\" data-start=\"4310\" data-end=\"4356\">S\u1eeda \u0111\u1ed5i b\u1ec1 m\u1eb7t c\u00e1c th\u00e0nh ph\u1ea7n quang h\u1ecdc<\/li>\n<\/ul>\n<h3 data-section-id=\"1wc0my6\" data-start=\"4358\" data-end=\"4380\"><span role=\"text\">C\u00f4ng ngh\u1ec7 nano<\/span><\/h3>\n<ul data-start=\"4381\" data-end=\"4441\">\n<li data-section-id=\"178ey7v\" data-start=\"4381\" data-end=\"4441\">S\u1ea3n xu\u1ea5t d\u00e2y nano, l\u1ed7 nano v\u00e0 c\u00e1c c\u1ea5u tr\u00fac MEMS<\/li>\n<\/ul>\n<h3 data-section-id=\"krs816\" data-start=\"4443\" data-end=\"4468\"><span role=\"text\">Khoa h\u1ecdc V\u1eadt li\u1ec7u<\/span><\/h3>\n<ul data-start=\"4469\" data-end=\"4541\">\n<li data-section-id=\"18ntl16\" data-start=\"4469\" data-end=\"4506\">Ph\u00e2n t\u00edch v\u00e0 bi\u1ebfn \u0111\u1ed5i b\u1ec1 m\u1eb7t<\/li>\n<li data-section-id=\"1b8wqpz\" data-start=\"4507\" data-end=\"4541\">Chu\u1ea9n b\u1ecb l\u1edbp ph\u1ee7 ch\u1ee9c n\u0103ng<\/li>\n<\/ul>\n<hr data-start=\"4543\" data-end=\"4546\" \/>\n<h2 data-section-id=\"13lz0w7\" data-start=\"4548\" data-end=\"4591\"><span role=\"text\">\u01afu \u0111i\u1ec3m so v\u1edbi ph\u01b0\u01a1ng ph\u00e1p \u0103n m\u00f2n truy\u1ec1n th\u1ed1ng<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4593\" data-end=\"4927\">\n<thead data-start=\"4593\" data-end=\"4646\">\n<tr data-start=\"4593\" data-end=\"4646\">\n<th class=\"\" data-start=\"4593\" data-end=\"4603\" data-col-size=\"sm\">T\u00ednh n\u0103ng<\/th>\n<th class=\"\" data-start=\"4603\" data-end=\"4622\" data-col-size=\"sm\">Kh\u1eafc b\u1eb1ng ch\u00f9m ion<\/th>\n<th class=\"\" data-start=\"4622\" data-end=\"4646\" data-col-size=\"sm\">Ph\u01b0\u01a1ng ph\u00e1p kh\u1eafc ion ph\u1ea3n \u1ee9ng<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4697\" data-end=\"4927\">\n<tr data-start=\"4697\" data-end=\"4746\">\n<td data-start=\"4697\" data-end=\"4712\" data-col-size=\"sm\">Lo\u1ea1i quy tr\u00ecnh<\/td>\n<td data-start=\"4712\" data-end=\"4723\" data-col-size=\"sm\">V\u1ec1 m\u1eb7t th\u1ec3 ch\u1ea5t<\/td>\n<td data-start=\"4723\" data-end=\"4746\" data-col-size=\"sm\">V\u1eadt l\u00fd + H\u00f3a h\u1ecdc<\/td>\n<\/tr>\n<tr data-start=\"4747\" data-end=\"4805\">\n<td data-start=\"4747\" data-end=\"4765\" data-col-size=\"sm\">Ti\u1ebfp x\u00fac v\u1edbi plasma<\/td>\n<td data-start=\"4765\" data-end=\"4786\" data-col-size=\"sm\">Kh\u00f4ng ti\u1ebfp x\u00fac tr\u1ef1c ti\u1ebfp<\/td>\n<td data-start=\"4786\" data-end=\"4805\" data-col-size=\"sm\">Ti\u1ebfp x\u00fac tr\u1ef1c ti\u1ebfp<\/td>\n<\/tr>\n<tr data-start=\"4806\" data-end=\"4853\">\n<td data-start=\"4806\" data-end=\"4829\" data-col-size=\"sm\">S\u1ef1 l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u<\/td>\n<td data-start=\"4829\" data-end=\"4845\" data-col-size=\"sm\">Th\u1ea5p (\u0111\u1ed3ng \u0111\u1ec1u)<\/td>\n<td data-start=\"4845\" data-end=\"4853\" data-col-size=\"sm\">Cao<\/td>\n<\/tr>\n<tr data-start=\"4854\" data-end=\"4893\">\n<td data-start=\"4854\" data-end=\"4871\" data-col-size=\"sm\">H\u01b0 h\u1ecfng b\u1ec1 m\u1eb7t<\/td>\n<td data-start=\"4871\" data-end=\"4881\" data-col-size=\"sm\">T\u1ed1i gi\u1ea3n<\/td>\n<td data-start=\"4881\" data-end=\"4893\" data-col-size=\"sm\">C\u00f3 th\u1ec3<\/td>\n<\/tr>\n<tr data-start=\"4894\" data-end=\"4927\">\n<td data-start=\"4894\" data-end=\"4906\" data-col-size=\"sm\">\u0110\u1ed9 ch\u00ednh x\u00e1c<\/td>\n<td data-start=\"4906\" data-end=\"4919\" data-col-size=\"sm\">Si\u00eau cao<\/td>\n<td data-start=\"4919\" data-end=\"4927\" data-col-size=\"sm\">Cao<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4929\" data-end=\"4932\" \/>\n<h2 data-section-id=\"elc90z\" data-start=\"4934\" data-end=\"4944\"><span role=\"text\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/span><\/h2>\n<h3 data-section-id=\"1h3z74f\" data-start=\"4946\" data-end=\"4978\"><span role=\"text\">Kh\u1eafc b\u1eb1ng ch\u00f9m ion l\u00e0 g\u00ec?<\/span><\/h3>\n<p data-start=\"4979\" data-end=\"5122\">Kh\u1eafc b\u1eb1ng ch\u00f9m ion l\u00e0 m\u1ed9t quy tr\u00ecnh kh\u1eafc kh\u00f4, trong \u0111\u00f3 v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c lo\u1ea1i b\u1ecf th\u00f4ng qua qu\u00e1 tr\u00ecnh ph\u00fan x\u1ea1 v\u1eadt l\u00fd b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng c\u00e1c ion n\u0103ng l\u01b0\u1ee3ng cao trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng.<\/p>\n<h3 data-section-id=\"1oyreis\" data-start=\"5124\" data-end=\"5153\"><span role=\"text\">S\u1ef1 kh\u00e1c bi\u1ec7t gi\u1eefa IBE v\u00e0 RIE l\u00e0 g\u00ec?<\/span><\/h3>\n<ul data-start=\"5154\" data-end=\"5316\">\n<li data-section-id=\"6o7nxe\" data-start=\"5154\" data-end=\"5219\">IBE: ho\u00e0n to\u00e0n d\u1ef1a tr\u00ean nguy\u00ean l\u00fd v\u1eadt l\u00fd, kh\u00f4ng ti\u1ebfp x\u00fac v\u1edbi plasma, \u0111\u1ed9 ch\u00ednh x\u00e1c cao h\u01a1n<\/li>\n<li data-section-id=\"d79ynl\" data-start=\"5220\" data-end=\"5316\">RIE: k\u1ebft h\u1ee3p c\u00e1c ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc v\u1edbi plasma, c\u00f3 \u0111\u1ed9 ch\u1ecdn l\u1ecdc cao h\u01a1n nh\u01b0ng nguy c\u01a1 g\u00e2y h\u01b0 h\u1ecfng c\u0169ng cao h\u01a1n<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>M\u00e1y kh\u1eafc tia ion d\u00e0nh cho c\u00e1c v\u1eadt li\u1ec7u Si, SiO\u2082 v\u00e0 kim lo\u1ea1i l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng kh\u1eafc kh\u00f4 c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf cho c\u00e1c \u1ee9ng d\u1ee5ng ch\u1ebf t\u1ea1o vi m\u00f4 v\u00e0 c\u00f4ng ngh\u1ec7 nano ti\u00ean ti\u1ebfn. S\u1eed d\u1ee5ng c\u00f4ng ngh\u1ec7 kh\u1eafc tia ion (IBE), c\u00f2n \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 phay ion, thi\u1ebft b\u1ecb n\u00e0y cho ph\u00e9p lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u v\u1edbi hi\u1ec7u su\u1ea5t cao th\u00f4ng qua qu\u00e1 tr\u00ecnh ph\u00fan x\u1ea1 thu\u1ea7n t\u00fay v\u1ec1 m\u1eb7t v\u1eadt l\u00fd.<\/p>","protected":false},"featured_media":2320,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[728],"product_tag":[1153,1145,1147,1142,1143,1144,1150,1155,1148,1154,1146,739,1149,1152,1151],"class_list":{"0":"post-2316","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-coating-deposition-equipment","7":"product_tag-anisotropic-etching","8":"product_tag-dry-etching-system","9":"product_tag-ibe-system","10":"product_tag-ion-beam-etching","11":"product_tag-ion-beam-etching-machine","12":"product_tag-ion-milling-equipment","13":"product_tag-metal-etching-equipment","14":"product_tag-micro-nano-fabrication-equipment","15":"product_tag-nanometer-precision-etching","16":"product_tag-physical-sputtering-etching","17":"product_tag-semiconductor-etching-equipment","18":"product_tag-semiconductor-manufacturing-equipment","19":"product_tag-sio2-etching-machine","20":"product_tag-thin-film-etching","21":"product_tag-vacuum-etching-system","22":"desktop-align-left","23":"tablet-align-left","24":"mobile-align-left","25":"ast-product-gallery-layout-horizontal-slider","26":"ast-product-tabs-layout-horizontal","28":"first","29":"instock","30":"shipping-taxable","31":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2316","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2316"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2316\/revisions"}],"predecessor-version":[{"id":2326,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2316\/revisions\/2326"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2320"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2316"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2316"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2316"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2316"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}