{"id":2306,"date":"2026-04-21T01:28:17","date_gmt":"2026-04-21T01:28:17","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2306"},"modified":"2026-04-21T01:28:20","modified_gmt":"2026-04-21T01:28:20","slug":"sic-coating-machine-for-precision-adhesive-deposition-in-semiconductor-applications","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/sic-coating-machine-for-precision-adhesive-deposition-in-semiconductor-applications\/","title":{"rendered":"M\u00e1y ph\u1ee7 SiC \u0111\u1ec3 b\u00f4i keo ch\u00ednh x\u00e1c trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn"},"content":{"rendered":"<p data-start=\"347\" data-end=\"797\">M\u00e1y ph\u1ee7 SiC l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng l\u1eafng \u0111\u1ecdng t\u1ef1 \u0111\u1ed9ng ho\u00e0n to\u00e0n, c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 t\u1ea1o l\u1edbp ph\u1ee7 keo \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean c\u00e1c t\u1ea5m wafer, h\u1ea1t gi\u1ed1ng SiC, gi\u1ea5y than ch\u00ec v\u00e0 t\u1ea5m than ch\u00ec. \u0110\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u kh\u1eaft khe trong l\u0129nh v\u1ef1c ch\u1ebf t\u1ea1o ch\u1ea5t b\u00e1n d\u1eabn v\u00e0 x\u1eed l\u00fd v\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn, h\u1ec7 th\u1ed1ng n\u00e0y t\u00edch h\u1ee3p c\u00f4ng ngh\u1ec7 phun si\u00eau \u00e2m, c\u0103n ch\u1ec9nh b\u1eb1ng laser v\u00e0 \u0111i\u1ec1u khi\u1ec3n ch\u1ea5t l\u1ecfng th\u00f4ng minh nh\u1eb1m \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 \u0111\u1ed3ng nh\u1ea5t v\u01b0\u1ee3t tr\u1ed9i c\u1ee7a l\u1edbp ph\u1ee7 v\u00e0 s\u1ef1 \u1ed5n \u0111\u1ecbnh trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/p>\n<p data-start=\"799\" data-end=\"1145\">Trong c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t ti\u00ean ti\u1ebfn \u2014 \u0111\u1eb7c bi\u1ec7t l\u00e0 trong qu\u00e1 tr\u00ecnh nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC v\u00e0 h\u00e0n wafer \u2014 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a l\u1edbp ph\u1ee7 c\u00f3 \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn n\u0103ng su\u1ea5t s\u1ea3n ph\u1ea9m, \u0111\u1ed9 b\u1ec1n c\u1ee7a m\u1ed1i h\u00e0n v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a c\u00e1c c\u00f4ng \u0111o\u1ea1n ti\u1ebfp theo. H\u1ec7 th\u1ed1ng n\u00e0y gi\u1ea3i quy\u1ebft nh\u1eefng th\u00e1ch th\u1ee9c \u0111\u00f3 b\u1eb1ng c\u00e1ch \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 d\u00e0y l\u1edbp ph\u1ee7 \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t, gi\u1ea3m thi\u1ec3u l\u00e3ng ph\u00ed v\u1eadt li\u1ec7u v\u00e0 duy tr\u00ec hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh gi\u1eefa c\u00e1c l\u00f4 s\u1ea3n ph\u1ea9m.<\/p>\n<p data-start=\"1147\" data-end=\"1409\">V\u1edbi ki\u1ebfn tr\u00fac m\u00f4-\u0111un v\u00e0 h\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n c\u00f3 th\u1ec3 l\u1eadp tr\u00ecnh, M\u00e1y ph\u1ee7 SiC ph\u00f9 h\u1ee3p cho c\u00e1c ho\u1ea1t \u0111\u1ed9ng ph\u00e1t tri\u1ec3n quy m\u00f4 th\u1eed nghi\u1ec7m, x\u00e1c nh\u1eadn quy tr\u00ecnh v\u00e0 s\u1ea3n xu\u1ea5t theo l\u00f4 t\u1eeb trung b\u00ecnh \u0111\u1ebfn l\u1edbn, nh\u1edd \u0111\u00f3 tr\u1edf th\u00e0nh m\u1ed9t gi\u1ea3i ph\u00e1p \u0111a n\u0103ng cho c\u1ea3 nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n (R&amp;D) l\u1eabn c\u00e1c \u1ee9ng d\u1ee5ng c\u00f4ng nghi\u1ec7p.<\/p>\n<p data-start=\"1147\" data-end=\"1409\"><img fetchpriority=\"high\" decoding=\"async\" class=\"aligncenter wp-image-2310\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications3-300x146.png\" alt=\"M\u00e1y ph\u1ee7 SiC \u0111\u1ec3 b\u00f4i keo ch\u00ednh x\u00e1c trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn\" width=\"933\" height=\"454\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications3-300x146.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications3-18x9.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications3-600x292.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications3.png 680w\" sizes=\"(max-width: 933px) 100vw, 933px\" \/><\/p>\n<hr data-start=\"1411\" data-end=\"1414\" \/>\n<h2 data-section-id=\"xvkcmt\" data-start=\"1416\" data-end=\"1448\"><span role=\"text\">Nh\u1eefng l\u1ee3i th\u1ebf k\u1ef9 thu\u1eadt c\u1ed1t l\u00f5i<\/span><\/h2>\n<h3 data-section-id=\"1fqy3o0\" data-start=\"1450\" data-end=\"1491\"><span role=\"text\">Hi\u1ec7u su\u1ea5t ph\u1ee7 \u0111\u1ed3ng \u0111\u1ec1u v\u01b0\u1ee3t tr\u1ed9i<\/span><\/h3>\n<p data-start=\"1492\" data-end=\"1846\">H\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 \u0111\u1ed9 d\u00e0y l\u1edbp ph\u1ee7 dao \u0111\u1ed9ng t\u1eeb 20 nanomet \u0111\u1ebfn h\u00e0ng ch\u1ee5c micromet, v\u1edbi \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u01b0\u1ee3t qu\u00e1 95% tr\u00ean to\u00e0n b\u1ed9 b\u1ec1 m\u1eb7t ch\u1ea5t n\u1ec1n. M\u1ee9c \u0111\u1ed9 ch\u00ednh x\u00e1c n\u00e0y gi\u00fap lo\u1ea1i b\u1ecf c\u00e1c v\u1ea5n \u0111\u1ec1 th\u01b0\u1eddng g\u1eb7p nh\u01b0 hi\u1ec7n t\u01b0\u1ee3ng t\u00edch t\u1ee5 \u1edf m\u00e9p, ph\u00e2n b\u1ed1 kh\u00f4ng \u0111\u1ec1u v\u00e0 hi\u1ec7n t\u01b0\u1ee3ng m\u1ecfng c\u1ee5c b\u1ed9, v\u1ed1n l\u00e0 nh\u1eefng v\u1ea5n \u0111\u1ec1 quan tr\u1ecdng trong qu\u00e1 tr\u00ecnh h\u00e0n wafer v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n<h3 data-section-id=\"t30xes\" data-start=\"1853\" data-end=\"1906\"><span role=\"text\">C\u00e1c k\u1ef9 thu\u1eadt x\u1eed l\u00fd n\u00e2ng cao \u0111\u1ed1i v\u1edbi ch\u1ea5t k\u1ebft d\u00ednh d\u1ea1ng h\u1ea1t<\/span><\/h3>\n<p data-start=\"1907\" data-end=\"2285\">Kh\u00e1c v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng ph\u1ee7 truy\u1ec1n th\u1ed1ng, m\u00e1y n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean bi\u1ec7t \u0111\u1ec3 x\u1eed l\u00fd c\u00e1c lo\u1ea1i keo ch\u1ee9a h\u1ea1t r\u1eafn ho\u1eb7c ch\u1ea5t \u0111\u1ed9n ch\u1ee9c n\u0103ng. H\u1ec7 th\u1ed1ng c\u1ea5p ch\u1ea5t l\u1ecfng l\u01b0u l\u01b0\u1ee3ng \u1ed5n \u0111\u1ecbnh t\u00edch h\u1ee3p, k\u1ebft h\u1ee3p v\u1edbi c\u00f4ng ngh\u1ec7 ph\u00e2n t\u00e1n th\u1eddi gian th\u1ef1c, \u0111\u1ea3m b\u1ea3o c\u00e1c h\u1ea1t \u0111\u01b0\u1ee3c ph\u00e2n b\u1ed1 \u0111\u1ec1u trong su\u1ed1t qu\u00e1 tr\u00ecnh ph\u1ee7, t\u1eeb \u0111\u00f3 ng\u0103n ng\u1eeba hi\u1ec7n t\u01b0\u1ee3ng l\u1eafng c\u1eb7n v\u00e0 t\u1eafc v\u00f2i phun.<\/p>\n<h3 data-section-id=\"13jl6jt\" data-start=\"2292\" data-end=\"2336\"><span role=\"text\">\u0110i\u1ec1u khi\u1ec3n chuy\u1ec3n \u0111\u1ed9ng v\u00e0 quy tr\u00ecnh ch\u00ednh x\u00e1c<\/span><\/h3>\n<p data-start=\"2337\" data-end=\"2633\">H\u1ec7 th\u1ed1ng n\u00e0y \u0111\u01b0\u1ee3c trang b\u1ecb m\u1ed9t n\u1ec1n t\u1ea3ng chuy\u1ec3n \u0111\u1ed9ng t\u1ecda \u0111\u1ed9 XYZ c\u00f3 th\u1ec3 l\u1eadp tr\u00ecnh ho\u00e0n to\u00e0n, cho ph\u00e9p ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c qu\u1ef9 \u0111\u1ea1o ph\u1ee7, t\u1ed1c \u0111\u1ed9 v\u00e0 m\u1eabu l\u1eafng \u0111\u1ecdng. C\u1ea5u h\u00ecnh nhi\u1ec1u v\u00f2i phun cho ph\u00e9p x\u1eed l\u00fd song song, gi\u00fap n\u00e2ng cao \u0111\u00e1ng k\u1ec3 n\u0103ng su\u1ea5t \u0111\u1ed3ng th\u1eddi duy tr\u00ec ch\u1ea5t l\u01b0\u1ee3ng ph\u1ee7 \u1ed5n \u0111\u1ecbnh.<\/p>\n<h3 data-section-id=\"1einapk\" data-start=\"2640\" data-end=\"2690\"><span role=\"text\">\u0110\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a cho c\u00e1c quy tr\u00ecnh nhi\u1ec7t \u1edf giai \u0111o\u1ea1n sau<\/span><\/h3>\n<p data-start=\"2691\" data-end=\"2800\">L\u1edbp ph\u1ee7 \u0111\u01b0\u1ee3c t\u1ea1o ra b\u1edfi h\u1ec7 th\u1ed1ng n\u00e0y mang l\u1ea1i m\u1ed9t b\u1ec1 m\u1eb7t ti\u1ebfp x\u00fac \u1ed5n \u0111\u1ecbnh v\u00e0 \u0111\u1ed3ng \u0111\u1ec1u cho c\u00e1c c\u00f4ng \u0111o\u1ea1n ti\u1ebfp theo nh\u01b0:<\/p>\n<ul data-start=\"2801\" data-end=\"2892\">\n<li data-section-id=\"pk09rq\" data-start=\"2801\" data-end=\"2821\">Kh\u1eed kh\u00ed b\u1eb1ng ch\u00e2n kh\u00f4ng<\/li>\n<li data-section-id=\"1xmeaj4\" data-start=\"2822\" data-end=\"2852\">Nung k\u1ebft \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n<li data-section-id=\"dvrdbu\" data-start=\"2853\" data-end=\"2892\">H\u00ecnh th\u00e0nh m\u00e0ng m\u1ecfng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p nhi\u1ec7t ph\u00e2n phun<\/li>\n<\/ul>\n<p data-start=\"2894\" data-end=\"3059\">B\u1eb1ng c\u00e1ch \u0111\u1ea3m b\u1ea3o t\u00ednh to\u00e0n v\u1eb9n c\u1ee7a l\u1edbp ph\u1ee7 \u1edf giai \u0111o\u1ea1n ti\u1ec1n x\u1eed l\u00fd, h\u1ec7 th\u1ed1ng n\u00e0y g\u00f3p ph\u1ea7n n\u00e2ng cao \u0111\u1ed9 b\u00e1m d\u00ednh, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 hi\u1ec7u su\u1ea5t t\u1ed5ng th\u1ec3 c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n<h3 data-section-id=\"2wyc3r\" data-start=\"3066\" data-end=\"3113\"><span role=\"text\">B\u1ea3o tr\u00ec th\u00f4ng minh v\u00e0 \u0111\u1ed9 tin c\u1eady<\/span><\/h3>\n<p data-start=\"3114\" data-end=\"3185\">\u0110\u1ec3 \u0111\u1ea3m b\u1ea3o ho\u1ea1t \u0111\u1ed9ng c\u00f4ng nghi\u1ec7p l\u00e2u d\u00e0i, h\u1ec7 th\u1ed1ng \u0111\u01b0\u1ee3c trang b\u1ecb:<\/p>\n<ul data-start=\"3186\" data-end=\"3313\">\n<li data-section-id=\"hip5f6\" data-start=\"3186\" data-end=\"3226\">V\u00f2i phun si\u00eau \u00e2m t\u1ef1 l\u00e0m s\u1ea1ch<\/li>\n<li data-section-id=\"1o4darb\" data-start=\"3227\" data-end=\"3264\">H\u1ec7 th\u1ed1ng t\u00e1i ch\u1ebf ch\u1ea5t l\u1ecfng th\u1ea3i<\/li>\n<li data-section-id=\"wo50vs\" data-start=\"3265\" data-end=\"3313\">Thi\u1ebft k\u1ebf t\u00edch h\u1ee3p h\u1ec7 th\u1ed1ng x\u1ea3 v\u00e0 l\u1ecdc<\/li>\n<\/ul>\n<p data-start=\"3315\" data-end=\"3431\">Nh\u1eefng t\u00ednh n\u0103ng n\u00e0y gi\u00fap gi\u1ea3m t\u1ea7n su\u1ea5t b\u1ea3o tr\u00ec, gi\u1ea3m thi\u1ec3u th\u1eddi gian ng\u1eebng ho\u1ea1t \u0111\u1ed9ng v\u00e0 \u0111\u1ea3m b\u1ea3o m\u00f4i tr\u01b0\u1eddng v\u1eadn h\u00e0nh s\u1ea1ch s\u1ebd v\u00e0 \u1ed5n \u0111\u1ecbnh.<\/p>\n<hr data-start=\"3433\" data-end=\"3436\" \/>\n<h2 data-section-id=\"id1bjs\" data-start=\"3438\" data-end=\"3469\"><span role=\"text\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3471\" data-end=\"4132\">\n<thead data-start=\"3471\" data-end=\"3500\">\n<tr data-start=\"3471\" data-end=\"3500\">\n<th class=\"\" data-start=\"3471\" data-end=\"3483\" data-col-size=\"sm\">Tham s\u1ed1<\/th>\n<th class=\"\" data-start=\"3483\" data-end=\"3500\" data-col-size=\"md\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3528\" data-end=\"4132\">\n<tr data-start=\"3528\" data-end=\"3573\">\n<td data-start=\"3528\" data-end=\"3549\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc m\u00e1y<\/td>\n<td data-col-size=\"md\" data-start=\"3549\" data-end=\"3573\">920 \u00d7 1060 \u00d7 1620 mm<\/td>\n<\/tr>\n<tr data-start=\"3574\" data-end=\"3630\">\n<td data-start=\"3574\" data-end=\"3599\" data-col-size=\"sm\">Di\u1ec7n t\u00edch ph\u1ee7 hi\u1ec7u qu\u1ea3<\/td>\n<td data-col-size=\"md\" data-start=\"3599\" data-end=\"3630\">500 \u00d7 500 mm (c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh)<\/td>\n<\/tr>\n<tr data-start=\"3631\" data-end=\"3675\">\n<td data-start=\"3631\" data-end=\"3646\" data-col-size=\"sm\">Ngu\u1ed3n \u0111i\u1ec7n<\/td>\n<td data-col-size=\"md\" data-start=\"3646\" data-end=\"3675\">120V \/ 220V \u00b110%, 50\u201360Hz<\/td>\n<\/tr>\n<tr data-start=\"3676\" data-end=\"3739\">\n<td data-start=\"3676\" data-end=\"3690\" data-col-size=\"sm\">Lo\u1ea1i v\u00f2i phun<\/td>\n<td data-col-size=\"md\" data-start=\"3690\" data-end=\"3739\">Si\u00eau \u00e2m, c\u00f3 nhi\u1ec1u c\u1ea5u h\u00ecnh \u0111\u1ec3 l\u1ef1a ch\u1ecdn<\/td>\n<\/tr>\n<tr data-start=\"3740\" data-end=\"3782\">\n<td data-start=\"3740\" data-end=\"3760\" data-col-size=\"sm\">\u0110\u1ed9 d\u00e0y l\u1edbp ph\u1ee7<\/td>\n<td data-col-size=\"md\" data-start=\"3760\" data-end=\"3782\">20 nm \u2013 v\u00e0i ch\u1ee5c \u00b5m<\/td>\n<\/tr>\n<tr data-start=\"3783\" data-end=\"3820\">\n<td data-start=\"3783\" data-end=\"3802\" data-col-size=\"sm\">L\u01b0u l\u01b0\u1ee3ng ch\u1ea5t l\u1ecfng<\/td>\n<td data-col-size=\"md\" data-start=\"3802\" data-end=\"3820\">0,006 \u2013 3 ml\/s<\/td>\n<\/tr>\n<tr data-start=\"3821\" data-end=\"3861\">\n<td data-start=\"3821\" data-end=\"3842\" data-col-size=\"sm\">H\u1ec7 th\u1ed1ng \u0111\u1ecbnh v\u1ecb<\/td>\n<td data-col-size=\"md\" data-start=\"3842\" data-end=\"3861\">C\u0103n ch\u1ec9nh b\u1eb1ng laser<\/td>\n<\/tr>\n<tr data-start=\"3862\" data-end=\"3904\">\n<td data-start=\"3862\" data-end=\"3879\" data-col-size=\"sm\">\u0110i\u1ec1u khi\u1ec3n chuy\u1ec3n \u0111\u1ed9ng<\/td>\n<td data-col-size=\"md\" data-start=\"3879\" data-end=\"3904\">C\u00e1c tr\u1ee5c c\u00f3 th\u1ec3 l\u1eadp tr\u00ecnh XYZ<\/td>\n<\/tr>\n<tr data-start=\"3905\" data-end=\"3963\">\n<td data-start=\"3905\" data-end=\"3923\" data-col-size=\"sm\">H\u1ec7 th\u1ed1ng ph\u00e2n ph\u1ed1i ch\u1ea5t l\u1ecfng<\/td>\n<td data-col-size=\"md\" data-start=\"3923\" data-end=\"3963\">D\u00f2ng ch\u1ea3y \u1ed5n \u0111\u1ecbnh v\u1edbi ph\u00e2n t\u00e1n tr\u1ef1c tuy\u1ebfn<\/td>\n<\/tr>\n<tr data-start=\"3964\" data-end=\"4027\">\n<td data-start=\"3964\" data-end=\"3983\" data-col-size=\"sm\">Qu\u1ea3n l\u00fd ch\u1ea5t th\u1ea3i<\/td>\n<td data-col-size=\"md\" data-start=\"3983\" data-end=\"4027\">T\u1ef1 l\u00e0m s\u1ea1ch, t\u00e1i ch\u1ebf, h\u1ec7 th\u1ed1ng x\u1ea3<\/td>\n<\/tr>\n<tr data-start=\"4028\" data-end=\"4080\">\n<td data-start=\"4028\" data-end=\"4045\" data-col-size=\"sm\">T\u00f9y ch\u1ecdn s\u01b0\u1edfi \u1ea5m<\/td>\n<td data-col-size=\"md\" data-start=\"4045\" data-end=\"4080\">T\u1ea5m gia nhi\u1ec7t b\u1eb1ng h\u1ea5p ph\u1ee5 ch\u00e2n kh\u00f4ng<\/td>\n<\/tr>\n<tr data-start=\"4081\" data-end=\"4132\">\n<td data-start=\"4081\" data-end=\"4107\" data-col-size=\"sm\">T\u00f9y ch\u1ecdn nhi\u1ec7t \u0111\u1ed9 cao<\/td>\n<td data-col-size=\"md\" data-start=\"4107\" data-end=\"4132\">B\u1ec1 m\u1eb7t gia nhi\u1ec7t l\u00ean \u0111\u1ebfn 750\u00b0C<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4134\" data-end=\"4137\" \/>\n<h2 data-section-id=\"5cs82e\" data-start=\"4139\" data-end=\"4166\"><span role=\"text\">\u1ee8ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh<\/span><\/h2>\n<h3 data-section-id=\"4qzbg\" data-start=\"4168\" data-end=\"4212\"><span role=\"text\"><img decoding=\"async\" class=\"alignleft wp-image-2311\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications2-300x159.png\" alt=\"M\u00e1y ph\u1ee7 SiC \u0111\u1ec3 b\u00f4i keo ch\u00ednh x\u00e1c trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn\" width=\"362\" height=\"192\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications2-300x159.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications2-18x10.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications2-600x318.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications2.png 680w\" sizes=\"(max-width: 362px) 100vw, 362px\" \/>S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn v\u00e0 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC<\/span><\/h3>\n<ul data-start=\"4213\" data-end=\"4309\">\n<li data-section-id=\"5viucx\" data-start=\"4213\" data-end=\"4242\">Chu\u1ea9n b\u1ecb cho qu\u00e1 tr\u00ecnh h\u00e0n wafer<\/li>\n<li data-section-id=\"16jthkl\" data-start=\"4243\" data-end=\"4264\">\u0110\u1ed9 b\u00e1m d\u00ednh c\u1ee7a h\u1ea1t SiC<\/li>\n<li data-section-id=\"oucta1\" data-start=\"4265\" data-end=\"4309\">L\u1edbp ph\u1ee7 b\u1ec1 m\u1eb7t tr\u01b0\u1edbc khi nung k\u1ebft<\/li>\n<\/ul>\n<h3 data-section-id=\"1pdad3t\" data-start=\"4316\" data-end=\"4358\"><span role=\"text\">L\u1edbp ph\u1ee7 ch\u1ee9c n\u0103ng v\u00e0 b\u1ea3o v\u1ec7<\/span><\/h3>\n<ul data-start=\"4359\" data-end=\"4463\">\n<li data-section-id=\"kfe519\" data-start=\"4359\" data-end=\"4393\">L\u1edbp ph\u1ee7 cacbua silic (SiC)<\/li>\n<li data-section-id=\"17djn6l\" data-start=\"4394\" data-end=\"4422\">L\u1edbp ph\u1ee7 d\u1ea1ng dung d\u1ecbch v\u00e0 b\u00f9n<\/li>\n<li data-section-id=\"1x1ors5\" data-start=\"4423\" data-end=\"4463\">Ch\u1ea5t c\u1ea3n quang v\u00e0 qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng<\/li>\n<\/ul>\n<h3 data-section-id=\"151gn2z\" data-start=\"4470\" data-end=\"4515\"><span role=\"text\">L\u01b0u tr\u1eef n\u0103ng l\u01b0\u1ee3ng v\u00e0 v\u1eadt li\u1ec7u linh ho\u1ea1t<\/span><\/h3>\n<ul data-start=\"4516\" data-end=\"4608\">\n<li data-section-id=\"124ey1t\" data-start=\"4516\" data-end=\"4545\">L\u1edbp ph\u1ee7 m\u00e0ng c\u00e1ch \u0111i\u1ec7n pin<\/li>\n<li data-section-id=\"tuhmd3\" data-start=\"4546\" data-end=\"4608\">X\u1eed l\u00fd ch\u1ea5t n\u1ec1n linh ho\u1ea1t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p gia nhi\u1ec7t h\u1ed7 tr\u1ee3 ch\u00e2n kh\u00f4ng<\/li>\n<\/ul>\n<h3 data-section-id=\"1y2ywd5\" data-start=\"4615\" data-end=\"4655\"><span role=\"text\">V\u1eadt li\u1ec7u th\u1ee7y tinh v\u00e0 v\u1eadt li\u1ec7u quang \u0111i\u1ec7n<\/span><\/h3>\n<ul data-start=\"4656\" data-end=\"4763\">\n<li data-section-id=\"1g4o4tz\" data-start=\"4656\" data-end=\"4703\">L\u1edbp ph\u1ee7 \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean c\u00e1c b\u1ed9 ph\u1eadn b\u1eb1ng than ch\u00ec<\/li>\n<li data-section-id=\"1hsn6wu\" data-start=\"4704\" data-end=\"4763\">Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng cho c\u00e1c \u1ee9ng d\u1ee5ng n\u0103ng l\u01b0\u1ee3ng m\u1eb7t tr\u1eddi v\u00e0 quang h\u1ecdc<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<hr data-start=\"4765\" data-end=\"4768\" \/>\n<h2 data-section-id=\"1ywcy8i\" data-start=\"4770\" data-end=\"4792\"><span role=\"text\">T\u1ea1i sao n\u00ean ch\u1ecdn ZMSH<\/span><\/h2>\n<p data-start=\"4794\" data-end=\"5099\"><img decoding=\"async\" class=\"alignright wp-image-2312 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications1-300x149.png\" alt=\"M\u00e1y ph\u1ee7 SiC \u0111\u1ec3 b\u00f4i keo ch\u00ednh x\u00e1c trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn\" width=\"300\" height=\"149\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications1-300x149.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications1-18x9.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications1-600x297.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/SiC-Coating-Machine-for-Precision-Adhesive-Deposition-in-Semiconductor-Applications1.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>ZMSH chuy\u00ean ph\u00e1t tri\u1ec3n thi\u1ebft b\u1ecb b\u00e1n d\u1eabn ch\u00ednh x\u00e1c v\u00e0 c\u00e1c gi\u1ea3i ph\u00e1p x\u1eed l\u00fd v\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn, t\u1eadp trung ch\u1ee7 y\u1ebfu v\u00e0o c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn v\u00e0 nhi\u1ec7t \u0111\u1ed9 cao. M\u1ed7i h\u1ec7 th\u1ed1ng \u0111\u1ec1u \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 l\u1eb7p l\u1ea1i cao, s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh v\u00e0 \u0111\u1ed9 tin c\u1eady v\u1eadn h\u00e0nh l\u00e2u d\u00e0i.<\/p>\n<p data-start=\"5101\" data-end=\"5124\">C\u00e1c \u01b0u \u0111i\u1ec3m ch\u00ednh bao g\u1ed3m:<\/p>\n<ul data-start=\"5125\" data-end=\"5316\">\n<li data-section-id=\"hpwvyu\" data-start=\"5125\" data-end=\"5181\">C\u00f3 kinh nghi\u1ec7m th\u1ef1c ti\u1ec5n trong l\u0129nh v\u1ef1c s\u01a1n c\u00f4ng nghi\u1ec7p<\/li>\n<li data-section-id=\"6kg24k\" data-start=\"5182\" data-end=\"5220\">C\u1ea5u h\u00ecnh h\u1ec7 th\u1ed1ng c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh<\/li>\n<li data-section-id=\"1bex5ha\" data-start=\"5260\" data-end=\"5316\">D\u1ecbch v\u1ee5 h\u1ed7 tr\u1ee3 k\u1ef9 thu\u1eadt chuy\u00ean bi\u1ec7t nh\u1eb1m t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh<\/li>\n<\/ul>\n<hr data-start=\"5318\" data-end=\"5321\" \/>\n<h2 data-section-id=\"wms0fu\" data-start=\"5323\" data-end=\"5362\"><span role=\"text\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/span><\/h2>\n<h3 data-section-id=\"msbhu1\" data-start=\"5364\" data-end=\"5427\"><span role=\"text\">H\u1ec7 th\u1ed1ng c\u00f3 th\u1ec3 x\u1eed l\u00fd c\u00e1c lo\u1ea1i keo c\u00f3 ch\u1ee9a h\u1ea1t r\u1eafn kh\u00f4ng?<\/span><\/h3>\n<p data-start=\"5428\" data-end=\"5577\">\u0110\u00fang v\u1eady. M\u00e1y s\u1eed d\u1ee5ng h\u1ec7 th\u1ed1ng ph\u00e2n ph\u1ed1i l\u01b0u l\u01b0\u1ee3ng \u1ed5n \u0111\u1ecbnh k\u1ebft h\u1ee3p ch\u1ee9c n\u0103ng ph\u00e2n t\u00e1n, \u0111\u1ea3m b\u1ea3o l\u1edbp ph\u1ee7 \u0111\u1ed3ng \u0111\u1ec1u m\u00e0 kh\u00f4ng b\u1ecb t\u1eafc ngh\u1ebdn hay l\u1eafng c\u1eb7n.<\/p>\n<h3 data-section-id=\"19edp4k\" data-start=\"5584\" data-end=\"5640\"><span role=\"text\">\u0110\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a vi\u1ec7c ki\u1ec3m so\u00e1t \u0111\u1ed9 d\u00e0y l\u1edbp ph\u1ee7 l\u00e0 bao nhi\u00eau?<\/span><\/h3>\n<p data-start=\"5641\" data-end=\"5784\">H\u1ec7 th\u1ed1ng n\u00e0y cho ph\u00e9p \u0111i\u1ec1u khi\u1ec3n v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao trong ph\u1ea1m vi t\u1eeb 20 nm \u0111\u1ebfn h\u00e0ng ch\u1ee5c micromet, \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 l\u1eb7p l\u1ea1i tuy\u1ec7t v\u1eddi gi\u1eefa c\u00e1c l\u00f4 s\u1ea3n ph\u1ea9m.<\/p>\n<h3 data-section-id=\"6ztzej\" data-start=\"5791\" data-end=\"5840\"><span role=\"text\">H\u1ed7 tr\u1ee3 nh\u1eefng lo\u1ea1i ch\u1ea5t n\u1ec1n n\u00e0o?<\/span><\/h3>\n<p data-start=\"5841\" data-end=\"5966\">N\u00f3 h\u1ed7 tr\u1ee3 nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u kh\u00e1c nhau, bao g\u1ed3m c\u00e1c t\u1ea5m wafer, h\u1ea1t gi\u1ed1ng SiC, gi\u1ea5y than ch\u00ec, t\u1ea5m than ch\u00ec v\u00e0 c\u00e1c ch\u1ea5t n\u1ec1n d\u1ebbo.<\/p>\n<h3 data-section-id=\"1w9e217\" data-start=\"5973\" data-end=\"6019\"><span role=\"text\">N\u00f3 c\u00f3 ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t kh\u00f4ng?<\/span><\/h3>\n<p data-start=\"6020\" data-end=\"6157\">\u0110\u00fang v\u1eady. H\u1ec7 th\u1ed1ng XYZ c\u00f3 th\u1ec3 l\u1eadp tr\u00ecnh v\u00e0 kh\u1ea3 n\u0103ng s\u1eed d\u1ee5ng nhi\u1ec1u v\u00f2i phun khi\u1ebfn thi\u1ebft b\u1ecb n\u00e0y tr\u1edf n\u00ean l\u00fd t\u01b0\u1edfng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t quy m\u00f4 th\u1eed nghi\u1ec7m v\u00e0 s\u1ea3n xu\u1ea5t v\u1edbi kh\u1ed1i l\u01b0\u1ee3ng trung b\u00ecnh.<\/p>\n<h3 data-section-id=\"17xsrx0\" data-start=\"6164\" data-end=\"6208\"><span role=\"text\">L\u00e0m th\u1ebf n\u00e0o \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a l\u1edbp ph\u1ee7?<\/span><\/h3>\n<p data-start=\"6209\" data-end=\"6259\">S\u1ef1 \u0111\u1ed3ng nh\u1ea5t \u0111\u01b0\u1ee3c \u0111\u1ea1t \u0111\u01b0\u1ee3c nh\u1edd s\u1ef1 k\u1ebft h\u1ee3p c\u1ee7a:<\/p>\n<ul data-start=\"6260\" data-end=\"6389\">\n<li data-section-id=\"8hhn1d\" data-start=\"6260\" data-end=\"6291\">C\u00f4ng ngh\u1ec7 phun si\u00eau \u00e2m<\/li>\n<li data-section-id=\"1du2k07\" data-start=\"6292\" data-end=\"6323\">\u0110\u1ecbnh v\u1ecb v\u00e0 c\u0103n ch\u1ec9nh b\u1eb1ng laser<\/li>\n<li data-section-id=\"1w1zkiq\" data-start=\"6324\" data-end=\"6356\">\u0110i\u1ec1u khi\u1ec3n l\u01b0u l\u01b0\u1ee3ng ch\u1ea5t l\u1ecfng \u1ed5n \u0111\u1ecbnh<\/li>\n<li data-section-id=\"1lcucl2\" data-start=\"6357\" data-end=\"6389\">\u0110\u1ed3ng b\u1ed9 h\u00f3a nhi\u1ec1u v\u00f2i phun<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p data-start=\"6415\" data-end=\"6769\">M\u00e1y ph\u1ee7 SiC l\u00e0 gi\u1ea3i ph\u00e1p \u0111\u00e1ng tin c\u1eady v\u00e0 c\u00f3 kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng, chuy\u00ean d\u00f9ng cho vi\u1ec7c ph\u1ee7 keo ch\u00ednh x\u00e1c trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn v\u00e0 v\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn. B\u1eb1ng c\u00e1ch k\u1ebft h\u1ee3p c\u00f4ng ngh\u1ec7 ph\u1ee7 si\u00eau \u00e2m v\u1edbi h\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n quy tr\u00ecnh th\u00f4ng minh, thi\u1ebft b\u1ecb n\u00e0y mang l\u1ea1i \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u, t\u00ednh \u1ed5n \u0111\u1ecbnh v\u00e0 hi\u1ec7u qu\u1ea3 c\u1ea7n thi\u1ebft cho c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t hi\u1ec7n \u0111\u1ea1i \u0111\u00f2i h\u1ecfi hi\u1ec7u su\u1ea5t cao.<\/p>","protected":false},"featured_media":2308,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[728],"product_tag":[1136,1137,1138,1135,739,1132,1141,619,1140,1139,1133,1134],"class_list":{"0":"post-2306","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-coating-deposition-equipment","7":"product_tag-adhesive-deposition-system","8":"product_tag-graphite-coating-machine","9":"product_tag-precision-coating-system","10":"product_tag-semiconductor-coating-equipment","11":"product_tag-semiconductor-manufacturing-equipment","12":"product_tag-sic-coating-machine","13":"product_tag-sic-crystal-growth-equipment","14":"product_tag-sic-wafer-bonding","15":"product_tag-spray-pyrolysis-system","16":"product_tag-thin-film-coating-equipment","17":"product_tag-ultrasonic-spray-coating","18":"product_tag-wafer-coating-system","19":"desktop-align-left","20":"tablet-align-left","21":"mobile-align-left","22":"ast-product-gallery-layout-horizontal-slider","23":"ast-product-tabs-layout-horizontal","25":"first","26":"instock","27":"shipping-taxable","28":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2306","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2306"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2306\/revisions"}],"predecessor-version":[{"id":2314,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2306\/revisions\/2314"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2308"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2306"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2306"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2306"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2306"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}