\n\u0110\u1ed9 tinh khi\u1ebft c\u1ef1c cao (\u226599,991%)<\/strong>: Gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m trong c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn v\u00e0 quang h\u1ecdc.<\/p>\n<\/li>\n\n\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i<\/strong>: \u0110i\u1ec3m n\u00f3ng ch\u1ea3y ~1683\u00b0C, c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c nhi\u1ec7t \u0111\u1ed9 l\u00ean \u0111\u1ebfn 1450\u00b0C trong th\u1eddi gian ng\u1eafn \u0111\u1ed1i v\u1edbi c\u00e1c quy tr\u00ecnh nhi\u1ec7t \u0111\u1ed9 cao.![\"\"](\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/8inch_quartz_wafer_diameter_200mm_ttv_10_m_ra_1_0_nm_for_high_precision_sensors4-300x300.jpg\")
<\/p>\n<\/li>\n\nH\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t c\u1ef1c th\u1ea5p (0,55 \u00d7 10\u207b\u2076\/K)<\/strong>: \u0110\u1ea3m b\u1ea3o \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc khi ch\u1ecbu t\u00e1c \u0111\u1ed9ng c\u1ee7a nhi\u1ec7t.<\/p>\n<\/li>\n\nKh\u1ea3 n\u0103ng truy\u1ec1n d\u1eabn quang h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i<\/strong>: D\u1ea3i tia c\u1ef1c t\u00edm v\u00e0 h\u1ed3ng ngo\u1ea1i (UV-IR) t\u1eeb 185 nm \u0111\u1ebfn 2,5 \u00b5m, l\u00fd t\u01b0\u1edfng cho quang kh\u1eafc, quang h\u1ecdc laser v\u00e0 c\u1ea3m bi\u1ebfn tia c\u1ef1c t\u00edm.<\/p>\n<\/li>\n\nCh\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t cao<\/strong>: Ra \u22641,0 nm v\u00e0 TTV \u226410 \u00b5m \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 t\u00edch h\u1ee3p c\u1ea3m bi\u1ebfn ch\u00ednh x\u00e1c.<\/p>\n<\/li>\n\nKh\u1ea3 n\u0103ng ch\u1ecbu h\u00f3a ch\u1ea5t<\/strong>: Ch\u1ecbu \u0111\u01b0\u1ee3c h\u1ea7u h\u1ebft c\u00e1c lo\u1ea1i axit (tr\u1eeb HF) v\u00e0 ki\u1ec1m, th\u00edch h\u1ee3p cho qu\u00e1 tr\u00ecnh \u0103n m\u00f2n \u01b0\u1edbt v\u00e0 c\u00e1c m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t.<\/p>\n<\/li>\n\nKh\u1ea3 n\u0103ng ch\u1ed1ng b\u1ee9c x\u1ea1 v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh \u0111i\u1ec7n m\u00f4i<\/strong>: H\u1ed7 tr\u1ee3 c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5 v\u00e0 v\u1eadt l\u00fd n\u0103ng l\u01b0\u1ee3ng cao.<\/p>\n<\/li>\n\nH\u00ecnh d\u1ea1ng v\u00e0 k\u00edch th\u01b0\u1edbc c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh<\/strong>: C\u00e1c t\u1ea5m wafer h\u00ecnh tr\u00f2n, h\u00ecnh vu\u00f4ng, h\u00ecnh v\u00f2ng ho\u1eb7c h\u00ecnh qu\u1ea1t, c\u00f3 th\u1ec3 t\u00f9y ch\u1ecdn d\u1ecbch v\u1ee5 \u0111\u00e1nh b\u00f3ng, ph\u1ee7 l\u1edbp AR\/IR\/DLC v\u00e0 gia c\u00f4ng vi c\u01a1 \u0111i\u1ec7n t\u1eed.<\/p>\n<\/li>\n<\/ul>\n\u1ee8ng d\u1ee5ng<\/strong><\/h3>\n\n
\n
\n\n\n| Ng\u00e0nh c\u00f4ng nghi\u1ec7p<\/th>\n | \u0110\u01a1n \u0111\u0103ng k\u00fd<\/th>\n | L\u1ee3i \u00edch<\/th>\n<\/tr>\n<\/thead>\n |
\n\n| B\u00e1n d\u1eabn<\/td>\n | Ch\u1ea5t n\u1ec1n cho khu\u00f4n quang, \u0111\u1ebf kh\u1eafc, \u0111\u1ec7m \u0111\u00e1nh b\u00f3ng CMP<\/td>\n | \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao, t\u1ef7 l\u1ec7 khuy\u1ebft t\u1eadt c\u1ef1c th\u1ea5p, \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 ch\u00ednh x\u00e1c trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t chip<\/td>\n<\/tr>\n |
\n| N\u0103ng l\u01b0\u1ee3ng m\u1eb7t tr\u1eddi<\/td>\n | T\u1ea5m wafer d\u00f9ng trong quy tr\u00ecnh PECVD, ch\u1ea5t n\u1ec1n \u0111\u1ec3 l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng<\/td>\n | Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t, gi\u00fap n\u00e2ng cao hi\u1ec7u su\u1ea5t c\u1ee7a t\u1ebf b\u00e0o quang \u0111i\u1ec7n<\/td>\n<\/tr>\n |
\n| Quang \u0111i\u1ec7n t\u1eed<\/td>\n | Ch\u1ea5t n\u1ec1n LED\/LD, c\u1eeda s\u1ed5 laser, c\u1ea3m bi\u1ebfn quang h\u1ecdc<\/td>\n | \u0110\u1ed9 truy\u1ec1n qua tia UV-IR cao, \u0111\u1ed9 t\u1ef1 ph\u00e1t quang th\u1ea5p, gi\u00fap n\u00e2ng cao hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb<\/td>\n<\/tr>\n |
\n| Quang h\u1ecdc ch\u00ednh x\u00e1c<\/td>\n | Ch\u1ea5t n\u1ec1n th\u1ea5u k\u00ednh, l\u0103ng k\u00ednh, b\u1ed9 chia tia, c\u1eeda s\u1ed5 h\u1ed3ng ngo\u1ea1i<\/td>\n | \u0110\u1ed9 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p, \u0111\u1ed9 \u0111\u1ed3ng nh\u1ea5t cao, \u0111\u1ea3m b\u1ea3o t\u00ednh \u1ed5n \u0111\u1ecbnh quang h\u1ecdc<\/td>\n<\/tr>\n |
\n| Nghi\u00ean c\u1ee9u & Ph\u00f2ng th\u00ed nghi\u1ec7m<\/td>\n | B\u1ee9c x\u1ea1 synchrotron, c\u00e1c th\u00ed nghi\u1ec7m VUV, c\u00e1c thi\u1ebft b\u1ecb d\u00f2 n\u0103ng l\u01b0\u1ee3ng cao<\/td>\n | Ch\u1ed1ng b\u1ee9c x\u1ea1, ch\u1ecbu \u0111\u01b0\u1ee3c \u0111i\u1ec1u ki\u1ec7n kh\u1eafc nghi\u1ec7t<\/td>\n<\/tr>\n |
\n| H\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5<\/td>\n | C\u1eeda s\u1ed5 quang h\u1ecdc v\u1ec7 tinh, t\u1ea5m quan s\u00e1t ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao<\/td>\n | Kh\u1ea3 n\u0103ng ch\u1ecbu s\u1ed1c nhi\u1ec7t, \u0111\u1ed9 tin c\u1eady \u0111\u1ea1t ti\u00eau chu\u1ea9n v\u0169 tr\u1ee5<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/strong><\/h3>\n\n \n \n\n\n| Tham s\u1ed1<\/th>\n | Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n | \n\n| Ch\u1ea5t li\u1ec7u<\/td>\n | Th\u1ea1ch anh t\u1ed5ng h\u1ee3p (SiO\u2082 \u226599,991%)<\/td>\n<\/tr>\n | \n| \u0110\u01b0\u1eddng k\u00ednh<\/td>\n | 200 mm (8 inch)<\/td>\n<\/tr>\n | \n| Ph\u1ea1m vi \u0111\u1ed9 d\u00e0y<\/td>\n | 100 \u00b5m \u2013 3000 \u00b5m (c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh)<\/td>\n<\/tr>\n | \n| \u0110\u1ed9 dao \u0111\u1ed9ng t\u1ed5ng th\u1ec3 v\u1ec1 \u0111\u1ed9 d\u00e0y (TTV)<\/td>\n | \u226410 \u00b5m<\/td>\n<\/tr>\n | \n| \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (Ra)<\/td>\n | \u22641,0 nm<\/td>\n<\/tr>\n | \n| T\u1ed5ng h\u00e0m l\u01b0\u1ee3ng t\u1ea1p ch\u1ea5t<\/td>\n | \u22642,0 \u00b5g\/g<\/td>\n<\/tr>\n | \n| H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t<\/td>\n | 0,55 \u00d7 10\u207b\u2076\/K (20\u2013300\u00b0C)<\/td>\n<\/tr>\n | \n| Kh\u1ea3 n\u0103ng ch\u1ecbu nhi\u1ec7t<\/td>\n | \u0110i\u1ec3m n\u00f3ng ch\u1ea3y: 1683\u00b0C, trong th\u1eddi gian ng\u1eafn l\u00ean \u0111\u1ebfn 1450\u00b0C<\/td>\n<\/tr>\n | \n| \u0110\u1ed9 truy\u1ec1n qua tia UV<\/td>\n | >90% (200\u2013260 nm)<\/td>\n<\/tr>\n | \n| \u0110\u1ed9 ph\u1eb3ng b\u1ec1 m\u1eb7t<\/td>\n | \u0110\u1ed9 ch\u00ednh x\u00e1c cao, TTV \u226410 \u00b5m<\/td>\n<\/tr>\n | \n| T\u00f9y ch\u1ecdn h\u00ecnh d\u1ea1ng<\/td>\n | H\u00ecnh tr\u00f2n (ti\u00eau chu\u1ea9n), c\u00f3 s\u1eb5n c\u00e1c h\u00ecnh d\u1ea1ng t\u00f9y ch\u1ec9nh<\/td>\n<\/tr>\n | \n| Ch\u1ee9ng ch\u1ec9<\/td>\n | RoHS, ISO 9001<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n![\"\"](\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/8inch_quartz_wafer_diameter_200mm_ttv_10_m_ra_1_0_nm_for_high_precision_sensors3-300x300.jpg\") C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/strong><\/h3>\n\n- \n
H\u1ecfi: \u0110\u1ed9 d\u00e0y ti\u00eau chu\u1ea9n c\u1ee7a m\u1ed9t t\u1ea5m th\u1ea1ch anh 8 inch l\u00e0 bao nhi\u00eau?<\/strong>
A:<\/strong> \u0110\u1ed9 d\u00e0y ti\u00eau chu\u1ea9n l\u00e0 0,5\u20131,0 mm, v\u1edbi c\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh l\u00ean \u0111\u1ebfn 10 mm d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng chuy\u00ean d\u1ee5ng trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn v\u00e0 quang h\u1ecdc.<\/p>\n<\/li>\n- \n
C\u00e2u h\u1ecfi: T\u1ea1i sao n\u00ean ch\u1ecdn t\u1ea5m th\u1ea1ch anh nung ch\u1ea3y thay v\u00ec t\u1ea5m silicon?<\/strong>
A:<\/strong> T\u1ea5m th\u1ea1ch anh nung ch\u1ea3y c\u00f3 \u0111\u1ed9 trong su\u1ed1t v\u1edbi tia UV v\u01b0\u1ee3t tr\u1ed9i, \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t cao h\u01a1n (l\u00ean \u0111\u1ebfn 1730\u00b0C), kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c quy tr\u00ecnh in th\u1ea1ch b\u1ea3n c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao v\u00e0 c\u00e1c quy tr\u00ecnh x\u1eed l\u00fd kh\u1eafc nghi\u1ec7t.<\/p>\n<\/li>\n- \n
H\u1ecfi: FUYAO c\u00f3 th\u1ec3 cung c\u1ea5p c\u00e1c lo\u1ea1i wafer c\u00f3 h\u00ecnh d\u1ea1ng v\u00e0 x\u1eed l\u00fd b\u1ec1 m\u1eb7t theo y\u00eau c\u1ea7u kh\u00f4ng?<\/strong>
A:<\/strong> \u0110\u00fang v\u1eady. C\u00e1c l\u1ef1a ch\u1ecdn bao g\u1ed3m c\u00e1c t\u1ea5m wafer h\u00ecnh tr\u00f2n, h\u00ecnh vu\u00f4ng, h\u00ecnh v\u00f2ng, h\u00ecnh qu\u1ea1t, v\u1edbi c\u00e1c ph\u01b0\u01a1ng ph\u00e1p x\u1eed l\u00fd b\u1ec1 m\u1eb7t nh\u01b0 \u0111\u00e1nh b\u00f3ng quang h\u1ecdc, ph\u1ee7 l\u1edbp AR\/IR\/DLC, khoan l\u1ed7 v\u00e0 t\u1ea1o r\u00e3nh.<\/p>\n<\/li>\n<\/ol>","protected":false},"excerpt":{"rendered":"T\u1ea5m wafer th\u1ea1ch anh nung ch\u1ea3y 8 inch l\u00e0 ch\u1ea5t n\u1ec1n th\u1ea1ch anh t\u1ed5ng h\u1ee3p c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao (SiO\u2082 \u226599,991%) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh ri\u00eang cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c cao trong c\u00e1c h\u1ec7 th\u1ed1ng b\u00e1n d\u1eabn, MEMS, quang h\u1ecdc v\u00e0 laser. V\u1edbi h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t c\u1ef1c th\u1ea5p, kh\u1ea3 n\u0103ng truy\u1ec1n qua tia UV-IR v\u01b0\u1ee3t tr\u1ed9i v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t tuy\u1ec7t v\u1eddi, s\u1ea3n ph\u1ea9m n\u00e0y l\u00e0 l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng \u0111\u00f2i h\u1ecfi kh\u1eaft khe nh\u01b0 quang kh\u1eafc, \u0103n m\u00f2n, l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng v\u00e0 s\u1ea3n xu\u1ea5t c\u1ea3m bi\u1ebfn \u0111\u1ed9 ch\u00ednh x\u00e1c cao.<\/p>","protected":false},"featured_media":2265,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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![\"\"](\"https:\/\/www.fuyao-quartz.com\/wp-content\/uploads\/2026\/03\/8inch_quartz_wafer_diameter_200mm_ttv_10_m_ra_1_0_nm_for_high_precision_sensors2-300x300.jpg\")
T\u1ea5m wafer th\u1ea1ch anh nung ch\u1ea3y 8 inch l\u00e0 ch\u1ea5t n\u1ec1n th\u1ea1ch anh t\u1ed5ng h\u1ee3p c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao (SiO\u2082 \u226599,991%) \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh ri\u00eang cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c cao trong c\u00e1c h\u1ec7 th\u1ed1ng b\u00e1n d\u1eabn, MEMS, quang h\u1ecdc v\u00e0 laser. V\u1edbi h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t c\u1ef1c th\u1ea5p, kh\u1ea3 n\u0103ng truy\u1ec1n qua tia UV-IR v\u01b0\u1ee3t tr\u1ed9i v\u00e0 kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t tuy\u1ec7t v\u1eddi, s\u1ea3n ph\u1ea9m n\u00e0y l\u00e0 l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c m\u00f4i tr\u01b0\u1eddng \u0111\u00f2i h\u1ecfi kh\u1eaft khe nh\u01b0 quang kh\u1eafc, \u0103n m\u00f2n, l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng v\u00e0 s\u1ea3n xu\u1ea5t c\u1ea3m bi\u1ebfn \u0111\u1ed9 ch\u00ednh x\u00e1c cao.<\/p>\n