{"id":2253,"date":"2026-04-15T05:46:37","date_gmt":"2026-04-15T05:46:37","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2253"},"modified":"2026-04-20T01:22:42","modified_gmt":"2026-04-20T01:22:42","slug":"2-inch-quartz-wafer-dsp-ssp-polished-substrate-for-mems-semiconductor-optical-use","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/2-inch-quartz-wafer-dsp-ssp-polished-substrate-for-mems-semiconductor-optical-use\/","title":{"rendered":"T\u1ea5m n\u1ec1n th\u1ea1ch anh 2 inch \u0111\u00e3 \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng DSP\/SSP d\u00e0nh cho \u1ee9ng d\u1ee5ng MEMS, b\u00e1n d\u1eabn v\u00e0 quang h\u1ecdc"},"content":{"rendered":"

T\u1ed5ng quan v\u1ec1 s\u1ea3n ph\u1ea9m<\/strong><\/h2>\n

\"T\u1ea5mT\u1ea5m th\u1ea1ch anh 2 inch l\u00e0 m\u1ed9t ch\u1ea5t n\u1ec1n c\u1ea5p b\u00e1n d\u1eabn \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb silicon dioxide (SiO\u2082) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao. S\u1ea3n ph\u1ea9m \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ph\u1eb3ng \u1edf m\u1ee9c micromet nh\u1edd c\u00e1c k\u1ef9 thu\u1eadt gia c\u00f4ng ch\u00ednh x\u00e1c nh\u01b0 c\u1eaft CNC v\u00e0 \u0111\u00e1nh b\u00f3ng b\u1eb1ng laser. C\u00e1c t\u1ea5m wafer n\u00e0y tu\u00e2n th\u1ee7 c\u00e1c ti\u00eau chu\u1ea9n SEMI v\u00e0 h\u1ed7 tr\u1ee3 t\u00f9y ch\u1ec9nh v\u1ec1 k\u00edch th\u01b0\u1edbc v\u00e0 \u0111\u1ed9 d\u00e0y (dung sai \u00b10,02 mm), khi\u1ebfn ch\u00fang ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c quang \u0111i\u1ec7n t\u1eed, MEMS (H\u1ec7 th\u1ed1ng vi c\u01a1 \u0111i\u1ec7n t\u1eed) v\u00e0 \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn.<\/p>\n

Fuyao cung c\u1ea5p d\u1ecbch v\u1ee5 s\u1ea3n xu\u1ea5t theo y\u00eau c\u1ea7u cho c\u00e1c h\u00ecnh d\u1ea1ng kh\u00f4ng ti\u00eau chu\u1ea9n, bao g\u1ed3m h\u00ecnh d\u1ea1ng t\u1ef1 do, \u0111\u1ed9 d\u00e0y bi\u1ebfn \u0111\u1ed5i v\u00e0 c\u00e1c ph\u01b0\u01a1ng ph\u00e1p x\u1eed l\u00fd b\u1ec1 m\u1eb7t ti\u00ean ti\u1ebfn nh\u01b0 l\u1edbp ph\u1ee7 ch\u1ed1ng ph\u1ea3n x\u1ea1 (AR) v\u00e0 m\u00e0ng ch\u1ed1ng th\u1ea5m n\u01b0\u1edbc. Ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng to\u00e0n b\u1ed9 quy tr\u00ecnh \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 l\u1ec7ch \u0111\u1ed9 d\u00e0y t\u1ed5ng th\u1ec3 (TTV) <0,005 mm v\u00e0 \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t Ra <1,5 nm. D\u1ecbch v\u1ee5 s\u1ea3n xu\u1ea5t m\u1eabu th\u1eed v\u1edbi s\u1ed1 l\u01b0\u1ee3ng nh\u1ecf (t\u1ed1i thi\u1ec3u 10 \u0111\u01a1n v\u1ecb) v\u00e0 c\u00e1c t\u00f9y ch\u1ecdn giao h\u00e0ng nhanh c\u00f3 s\u1eb5n cho c\u00e1c d\u1ef1 \u00e1n c\u1ea7n g\u1ea5p.<\/p>\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/strong><\/h1>\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Tham s\u1ed1<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
\u0110\u01b0\u1eddng k\u00ednh<\/td>\n2 inch (50,8 mm)<\/td>\n<\/tr>\n
Ph\u1ea1m vi \u0111\u1ed9 d\u00e0y<\/td>\n0,1 mm \u2013 1,0 mm<\/td>\n<\/tr>\n
\u0110\u1ed9 tinh khi\u1ebft c\u1ee7a v\u1eadt li\u1ec7u<\/td>\n\u226599,991 TP3T<\/td>\n<\/tr>\n
\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (Ra)<\/td>\n\u22645 nm<\/td>\n<\/tr>\n
\u0110\u1ed9 dao \u0111\u1ed9ng t\u1ed5ng th\u1ec3 v\u1ec1 \u0111\u1ed9 d\u00e0y<\/td>\n\u226410 \u03bcm<\/td>\n<\/tr>\n
H\u1ec7 s\u1ed1 truy\u1ec1n qua (@193 nm)<\/td>\n>90%<\/td>\n<\/tr>\n
H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t<\/td>\n~0,55 \u00d7 10\u207b\u2076\/\u00b0C<\/td>\n<\/tr>\n
\u0110i\u1ec3m n\u00f3ng ch\u1ea3y<\/td>\n~1.665\u00b0C<\/td>\n<\/tr>\n
Bao b\u00ec<\/td>\nPh\u00f2ng s\u1ea1ch c\u1ea5p 100<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n
C\u00e1c \u0111\u1eb7c \u0111i\u1ec3m ch\u00ednh<\/strong><\/div>\n<\/div>\n

1. Ch\u1ea5t l\u01b0\u1ee3ng quang h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i<\/p>\n

    \n
  • \n

    \u0110\u1ed9 truy\u1ec1n qua ph\u1ed5 r\u1ed9ng: >90% trong d\u1ea3i tia c\u1ef1c t\u00edm (185\u20133500 nm), v\u1edbi hi\u1ec7u su\u1ea5t v\u01b0\u1ee3t tr\u1ed9i \u0111\u1ed1i v\u1edbi tia c\u1ef1c t\u00edm s\u00f3ng ng\u1eafn (185 nm).\"T\u1ea5m<\/p>\n<\/li>\n

  • \n

    H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p: CTE ~0,52\u00d710\u207b\u2076\/\u00b0C (5\u201335\u00b0C), c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c nhi\u1ec7t \u0111\u1ed9 l\u00ean \u0111\u1ebfn 1100\u00b0C trong th\u1eddi gian d\u00e0i v\u00e0 ti\u1ebfp x\u00fac ng\u1eafn h\u1ea1n v\u1edbi nhi\u1ec7t \u0111\u1ed9 1450\u00b0C.<\/p>\n<\/li>\n<\/ul>\n

    2. T\u00ednh \u1ed5n \u0111\u1ecbnh c\u01a1 h\u1ecdc v\u00e0 h\u00f3a h\u1ecdc<\/p>\n

      \n
    • \n

      \u0110\u1ed9 b\u1ec1n cao: \u0110\u1ed9 b\u1ec1n u\u1ed1n cao g\u1ea5p 2\u20133 l\u1ea7n so v\u1edbi k\u00ednh th\u00f4ng th\u01b0\u1eddng, \u0111\u1ed9 c\u1ee9ng theo thang Mohs l\u00e0 7.<\/p>\n<\/li>\n

    • \n

      Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n: Kh\u1ea3 n\u0103ng ch\u1ed1ng axit cao g\u1ea5p 30 l\u1ea7n so v\u1edbi g\u1ed1m s\u1ee9, ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng h\u00f3a ch\u1ea5t kh\u1eafc nghi\u1ec7t.<\/p>\n<\/li>\n<\/ul>\n

      3. C\u00e1ch \u0111i\u1ec7n<\/p>\n

        \n
      • \n

        \u0110i\u1ec7n tr\u1edf su\u1ea5t v\u01b0\u1ee3t qu\u00e1 10\u00b9\u2078 \u03a9\u00b7cm c\u00f9ng v\u1edbi t\u1ed5n th\u1ea5t \u0111i\u1ec7n m\u00f4i th\u1ea5p \u1edf t\u1ea7n s\u1ed1 cao, l\u00fd t\u01b0\u1edfng cho c\u00e1c m\u1ea1ch RF v\u00e0 c\u1ea3m bi\u1ebfn.<\/p>\n<\/li>\n<\/ul>\n

        C\u00e1c \u1ee9ng d\u1ee5ng ch\u00ednh<\/strong><\/h1>\n

        1 S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/p>\n

          \n
        • \n

          Ch\u1ea5t n\u1ec1n cho c\u1ea3m bi\u1ebfn h\u00ecnh \u1ea3nh CMOS v\u00e0 \u0111\u00f3ng g\u00f3i chip RFID, h\u1ed7 tr\u1ee3 c\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i c\u1ea5p t\u1ea5m wafer (WLP) nh\u1eb1m \u0111\u1ea1t m\u1ee9c \u0111\u1ed9 t\u00edch h\u1ee3p cao h\u01a1n.<\/p>\n<\/li>\n

        • \n

          Ch\u1ea5t n\u1ec1n cho c\u00e1c thi\u1ebft b\u1ecb MEMS (v\u00ed d\u1ee5: c\u1ea3m bi\u1ebfn \u00e1p su\u1ea5t, c\u1ea3m bi\u1ebfn gia t\u1ed1c) \u0111\u1ea3m b\u1ea3o t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ea5u tr\u00fac cho c\u00e1c linh ki\u1ec7n vi m\u00f4.<\/p>\n<\/li>\n<\/ul>\n

          2 H\u1ec7 th\u1ed1ng quang \u0111i\u1ec7n t\u1eed<\/p>\n

            \n
          • \n

            C\u1eeda s\u1ed5 laser tia c\u1ef1c t\u00edm v\u00e0 b\u1ed9 gh\u00e9p t\u00edn hi\u1ec7u truy\u1ec1n th\u00f4ng s\u1ee3i quang, t\u1eadn d\u1ee5ng kh\u1ea3 n\u0103ng truy\u1ec1n d\u1eabn tia c\u1ef1c t\u00edm v\u01b0\u1ee3t tr\u1ed9i.<\/p>\n<\/li>\n

          • \n

            C\u1eeda s\u1ed5 quang h\u1ecdc h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5 c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng b\u1ee9c x\u1ea1 v\u00e0 chu k\u1ef3 nhi\u1ec7t.<\/p>\n<\/li>\n<\/ul>\n

            3 Y t\u1ebf v\u00e0 Nghi\u00ean c\u1ee9u<\/p>\n

              \n
            • \n

              C\u00e1c b\u1ed9 ph\u1eadn quang h\u1ecdc ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao d\u00e0nh cho h\u1ec7 th\u1ed1ng h\u00ecnh \u1ea3nh n\u1ed9i soi.<\/p>\n<\/li>\n

            • \n

              C\u1eeda s\u1ed5 quan s\u00e1t ch\u1ecbu nhi\u1ec7t cho c\u00e1c b\u00ecnh ph\u1ea3n \u1ee9ng trong ph\u00f2ng th\u00ed nghi\u1ec7m.<\/p>\n<\/li>\n<\/ul>\n

              4 t\u1ea5m k\u00ednh th\u1ea1ch anh chuy\u00ean d\u1ee5ng<\/p>\n

                \n
              • \n

                B\u1ec1 m\u1eb7t t\u1ef1 do, l\u1ed7 h\u1edf kh\u00f4ng \u0111\u1ed1i x\u1ee9ng, \u0111\u1ed9 d\u00e0y thay \u0111\u1ed5i.<\/p>\n<\/li>\n

              • \n

                C\u1eeda s\u1ed5 c\u1eaft nghi\u00eang \u0111\u1ec3 gi\u1ea3m thi\u1ec3u t\u1ed5n th\u1ea5t do ph\u1ea3n x\u1ea1.<\/p>\n<\/li>\n

              • \n

                C\u1eeda s\u1ed5 l\u1ed7 xuy\u00ean qua \u0111\u1ec3 t\u00edch h\u1ee3p nhi\u1ec1u c\u1ea3m bi\u1ebfn.<\/p>\n<\/li>\n

              • \n

                S\u1ea3n xu\u1ea5t m\u1eabu nhanh: 3\u20135 ng\u00e0y cho m\u1eabu th\u1eed, c\u00e1c l\u00f4 nh\u1ecf d\u01b0\u1edbi 500 \u0111\u01a1n v\u1ecb, c\u00f3 th\u1ec3 l\u1ef1a ch\u1ecdn ph\u1ee7 ch\u00e2n kh\u00f4ng (ph\u1ee7 ch\u1ed1ng ph\u1ea3n x\u1ea1 ho\u1eb7c ph\u1ee7 ph\u1ea3n x\u1ea1) cho c\u00e1c \u1ee9ng d\u1ee5ng nghi\u00ean c\u1ee9u v\u00e0 qu\u00e2n s\u1ef1.<\/p>\n<\/li>\n<\/ul>\n

                C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/strong><\/h1>\n

                1 T\u1ea1i sao n\u00ean ch\u1ecdn t\u1ea5m th\u1ea1ch anh 2 inch?<\/strong>
                T\u1ea5m th\u1ea1ch anh 2 inch l\u00e0 c\u00e1c ch\u1ea5t n\u1ec1n c\u1ea5p b\u00e1n d\u1eabn \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb silicon dioxide (SiO\u2082) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao. Ch\u00fang \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ph\u1eb3ng \u1edf m\u1ee9c micromet nh\u1edd c\u00f4ng ngh\u1ec7 c\u1eaft CNC ch\u00ednh x\u00e1c v\u00e0 \u0111\u00e1nh b\u00f3ng b\u1eb1ng laser. C\u00e1c t\u1ea5m th\u1ea1ch anh n\u00e0y h\u1ed7 tr\u1ee3 t\u00f9y ch\u1ec9nh v\u1ec1 k\u00edch th\u01b0\u1edbc v\u00e0 \u0111\u1ed9 d\u00e0y (\u00b10,02 mm) v\u00e0 tu\u00e2n th\u1ee7 c\u00e1c ti\u00eau chu\u1ea9n SEMI, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c quang \u0111i\u1ec7n t\u1eed, MEMS v\u00e0 \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn.<\/p>\n

                2. C\u00e1c \u1ee9ng d\u1ee5ng ch\u00ednh c\u1ee7a t\u1ea5m th\u1ea1ch anh 2 inch l\u00e0 g\u00ec?<\/strong>
                Ch\u00fang ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn (c\u1ea3m bi\u1ebfn h\u00ecnh \u1ea3nh CMOS, \u0111\u00f3ng g\u00f3i chip RFID), c\u1eeda s\u1ed5 laser tia c\u1ef1c t\u00edm, b\u1ed9 gh\u00e9p n\u1ed1i truy\u1ec1n th\u00f4ng s\u1ee3i quang v\u00e0 c\u00e1c linh ki\u1ec7n quang h\u1ecdc trong ng\u00e0nh h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5. C\u00e1c ph\u01b0\u01a1ng ph\u00e1p x\u1eed l\u00fd b\u1ec1 m\u1eb7t theo y\u00eau c\u1ea7u, ch\u1eb3ng h\u1ea1n nh\u01b0 l\u1edbp ph\u1ee7 ch\u1ed1ng ph\u1ea3n x\u1ea1, gi\u00fap n\u00e2ng cao hi\u1ec7u su\u1ea5t trong c\u00e1c h\u1ec7 th\u1ed1ng c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao.<\/p>","protected":false},"excerpt":{"rendered":"

                T\u1ea5m th\u1ea1ch anh 2 inch l\u00e0 m\u1ed9t ch\u1ea5t n\u1ec1n c\u1ea5p b\u00e1n d\u1eabn \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o t\u1eeb silicon dioxide (SiO\u2082) c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao. S\u1ea3n ph\u1ea9m \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ph\u1eb3ng \u1edf m\u1ee9c micromet nh\u1edd c\u00e1c k\u1ef9 thu\u1eadt gia c\u00f4ng ch\u00ednh x\u00e1c nh\u01b0 c\u1eaft CNC v\u00e0 \u0111\u00e1nh b\u00f3ng b\u1eb1ng laser. C\u00e1c t\u1ea5m wafer n\u00e0y tu\u00e2n th\u1ee7 c\u00e1c ti\u00eau chu\u1ea9n SEMI v\u00e0 h\u1ed7 tr\u1ee3 t\u00f9y ch\u1ec9nh v\u1ec1 k\u00edch th\u01b0\u1edbc v\u00e0 \u0111\u1ed9 d\u00e0y (dung sai \u00b10,02 mm), khi\u1ebfn ch\u00fang ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c quang \u0111i\u1ec7n t\u1eed, MEMS (H\u1ec7 th\u1ed1ng vi c\u01a1 \u0111i\u1ec7n t\u1eed) v\u00e0 \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn.<\/p>","protected":false},"featured_media":2272,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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