{"id":2196,"date":"2026-04-14T06:34:45","date_gmt":"2026-04-14T06:34:45","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2196"},"modified":"2026-04-14T06:34:48","modified_gmt":"2026-04-14T06:34:48","slug":"2-inch-6h-n-silicon-carbide-wafer","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/2-inch-6h-n-silicon-carbide-wafer\/","title":{"rendered":"T\u1ea5m wafer cacbua silic 2 inch, lo\u1ea1i 6H-N"},"content":{"rendered":"

\"T\u1ea5mT\u1ea5m wafer cacbua silic 6H-N k\u00edch th\u01b0\u1edbc 2 inch l\u00e0 m\u1ed9t ch\u1ea5t n\u1ec1n \u0111\u01a1n tinh th\u1ec3 \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u1ea3 nghi\u00ean c\u1ee9u v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng \u1edf c\u1ea5p \u0111\u1ed9 thi\u1ebft b\u1ecb. Lo\u1ea1i \u0111a h\u00ecnh 6H c\u00f3 c\u1ea5u tr\u00fac tinh th\u1ec3 l\u1ee5c gi\u00e1c, mang l\u1ea1i \u0111\u1ed9 d\u1eabn \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh v\u00e0 hi\u1ec7u su\u1ea5t t\u1ea3n nhi\u1ec7t t\u1ed1t trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n kh\u1eafc nghi\u1ec7t.<\/p>\n

V\u1edbi kho\u1ea3ng c\u00e1ch d\u1ea3i c\u1ea5m kho\u1ea3ng 3,02 eV, 6H-SiC cho ph\u00e9p ho\u1ea1t \u0111\u1ed9ng trong c\u00e1c m\u00f4i tr\u01b0\u1eddng m\u00e0 v\u1eadt li\u1ec7u silicon truy\u1ec1n th\u1ed1ng kh\u00f4ng th\u1ec3 \u0111\u00e1p \u1ee9ng, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong \u0111i\u1ec1u ki\u1ec7n \u0111i\u1ec7n \u00e1p cao, nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 t\u1ea7n s\u1ed1 cao. \u0110i\u1ec1u n\u00e0y khi\u1ebfn n\u00f3 tr\u1edf n\u00ean ph\u00f9 h\u1ee3p cho vi\u1ec7c ch\u1ebf t\u1ea1o m\u1eabu thi\u1ebft b\u1ecb \u1edf giai \u0111o\u1ea1n \u0111\u1ea7u, th\u1eed nghi\u1ec7m v\u1eadt li\u1ec7u v\u00e0 s\u1ea3n xu\u1ea5t c\u00e1c linh ki\u1ec7n \u0111i\u1ec7n t\u1eed chuy\u00ean d\u1ee5ng.<\/p>\n

C\u00e1c t\u1ea5m wafer SiC c\u1ee7a ZMSH \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00e1c k\u1ef9 thu\u1eadt ph\u00e1t tri\u1ec3n tinh th\u1ec3 c\u00f3 ki\u1ec3m so\u00e1t nh\u1eb1m \u0111\u1ea3m b\u1ea3o \u0111i\u1ec7n tr\u1edf su\u1ea5t \u1ed5n \u0111\u1ecbnh, m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t cao. C\u00e1c th\u00f4ng s\u1ed1 n\u00e0y c\u00f3 vai tr\u00f2 quan tr\u1ecdng trong vi\u1ec7c \u0111\u1ea3m b\u1ea3o k\u1ebft qu\u1ea3 th\u00ed nghi\u1ec7m c\u00f3 th\u1ec3 l\u1eb7p l\u1ea1i v\u00e0 hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb \u1ed5n \u0111\u1ecbnh.<\/p>\n

C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/h2>\n

C\u1ea5u tr\u00fac d\u1eabn \u0111i\u1ec7n lo\u1ea1i N<\/h3>\n

T\u1ea5m wafer \u0111\u01b0\u1ee3c pha t\u1ea1p th\u00e0nh lo\u1ea1i N, t\u1ea1o ra c\u00e1c \u0111\u01b0\u1eddng d\u1eabn d\u1eabn \u0111i\u1ec7n t\u1eed \u1ed5n \u0111\u1ecbnh, ph\u00f9 h\u1ee3p cho vi\u1ec7c ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb b\u00e1n d\u1eabn v\u00e0 c\u00e1c th\u00ed nghi\u1ec7m \u0111\u00e1nh gi\u00e1 t\u00ednh ch\u1ea5t \u0111i\u1ec7n.<\/p>\n

V\u1eadt li\u1ec7u b\u00e1n d\u1eabn c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng<\/h3>\n

V\u1edbi kho\u1ea3ng c\u00e1ch n\u0103ng l\u01b0\u1ee3ng kho\u1ea3ng 3,02 eV, SiC c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c c\u01b0\u1eddng \u0111\u1ed9 \u0111i\u1ec7n tr\u01b0\u1eddng cao h\u01a1n \u0111\u00e1ng k\u1ec3 so v\u1edbi silicon, cho ph\u00e9p ho\u1ea1t \u0111\u1ed9ng \u1edf \u0111i\u1ec7n \u00e1p cao v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n

\u0110\u1ed9 d\u1eabn nhi\u1ec7t cao<\/h3>\n

SiC c\u00f3 \u0111\u1ed9 d\u1eabn nhi\u1ec7t tuy\u1ec7t v\u1eddi, gi\u00fap t\u1ea3n nhi\u1ec7t hi\u1ec7u qu\u1ea3 kh\u1ecfi c\u00e1c v\u00f9ng ho\u1ea1t \u0111\u1ed9ng c\u1ee7a thi\u1ebft b\u1ecb. \u0110i\u1ec1u n\u00e0y gi\u00fap n\u00e2ng cao \u0111\u1ed9 tin c\u1eady c\u1ee7a thi\u1ebft b\u1ecb v\u00e0 k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd ho\u1ea1t \u0111\u1ed9ng trong c\u00e1c \u1ee9ng d\u1ee5ng c\u00f4ng su\u1ea5t cao.<\/p>\n

\u0110\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc cao<\/h3>\n

V\u1edbi \u0111\u1ed9 c\u1ee9ng theo thang Mohs kho\u1ea3ng 9,2, c\u00e1c t\u1ea5m wafer SiC c\u00f3 kh\u1ea3 n\u0103ng ch\u1ed1ng ch\u1ecbu cao tr\u01b0\u1edbc c\u00e1c t\u00e1c \u0111\u1ed9ng c\u01a1 h\u1ecdc, m\u00e0i m\u00f2n b\u1ec1 m\u1eb7t v\u00e0 \u1ee9ng su\u1ea5t gia c\u00f4ng trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/p>\n

\u0110i\u1ec7n tr\u01b0\u1eddng c\u00f3 \u0111\u1ed9 ph\u00e2n r\u00e3 cao<\/h3>\n

\u0110\u1ed9 b\u1ec1n \u0111i\u1ec7n tr\u01b0\u1eddng cao cho ph\u00e9p thi\u1ebft k\u1ebf c\u00e1c c\u1ea5u tr\u00fac thi\u1ebft b\u1ecb nh\u1ecf g\u1ecdn m\u00e0 v\u1eabn \u0111\u1ea3m b\u1ea3o kh\u1ea3 n\u0103ng ch\u1ecbu \u0111i\u1ec7n \u00e1p cao, khi\u1ebfn SiC tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u l\u00fd t\u01b0\u1edfng cho l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t ti\u00ean ti\u1ebfn.<\/p>\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Tham s\u1ed1<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
Ch\u1ea5t li\u1ec7u<\/td>\nCacbua silic \u0111\u01a1n tinh th\u1ec3<\/td>\n<\/tr>\n
Th\u01b0\u01a1ng hi\u1ec7u<\/td>\nZMSH<\/td>\n<\/tr>\n
Lo\u1ea1i h\u00ecnh<\/td>\n6H-N<\/td>\n<\/tr>\n
\u0110\u01b0\u1eddng k\u00ednh<\/td>\n2 inch (50,8 mm)<\/td>\n<\/tr>\n
\u0110\u1ed9 d\u00e0y<\/td>\n350 \u03bcm \/ 650 \u03bcm<\/td>\n<\/tr>\n
Lo\u1ea1i \u0111\u1ed9 d\u1eabn \u0111i\u1ec7n<\/td>\nLo\u1ea1i N<\/td>\n<\/tr>\n
B\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n<\/td>\nB\u1ec1 m\u1eb7t silicon \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng CMP<\/td>\n<\/tr>\n
Ph\u01b0\u01a1ng ph\u00e1p \u0111i\u1ec1u tr\u1ecb C-face<\/td>\n\u0110\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc<\/td>\n<\/tr>\n
\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td>\nRa < 0,2 nm (m\u1eb7t Si)<\/td>\n<\/tr>\n
\u0110i\u1ec7n tr\u1edf su\u1ea5t<\/td>\n0,015 \u2013 0,028 \u03a9\u00b7cm<\/td>\n<\/tr>\n
M\u00e0u s\u1eafc<\/td>\nTrong su\u1ed1t \/ Xanh nh\u1ea1t<\/td>\n<\/tr>\n
Bao b\u00ec<\/td>\nH\u1ed9p \u0111\u1ef1ng m\u1ed9t t\u1ea5m wafer<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

T\u00ednh ch\u1ea5t v\u1eadt li\u1ec7u c\u1ee7a 6H-SiC<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
B\u1ea5t \u0111\u1ed9ng s\u1ea3n<\/th>\nGi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<\/thead>\n
C\u00e1c th\u00f4ng s\u1ed1 m\u1ea1ng tinh th\u1ec3<\/td>\na = 3,073 \u00c5, c = 15,117 \u00c5<\/td>\n<\/tr>\n
\u0110\u1ed9 c\u1ee9ng Mohs<\/td>\n\u2248 9,2<\/td>\n<\/tr>\n
M\u1eadt \u0111\u1ed9<\/td>\n3,21 g\/cm\u00b3<\/td>\n<\/tr>\n
H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t<\/td>\n4\u20135 \u00d7 10\u207b\u2076 \/K<\/td>\n<\/tr>\n
Chi\u1ebft su\u1ea5t (750 nm)<\/td>\nn\u2080 = 2,60, n\u2091 = 2,65<\/td>\n<\/tr>\n
H\u1eb1ng s\u1ed1 \u0111i\u1ec7n m\u00f4i<\/td>\n\u2248 9,66<\/td>\n<\/tr>\n
\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\n~3,7\u20133,9 W\/cm\u00b7K<\/td>\n<\/tr>\n
Kho\u1ea3ng c\u00e1ch n\u0103ng l\u01b0\u1ee3ng<\/td>\n3,02 eV<\/td>\n<\/tr>\n
Ph\u00e2n t\u00edch \u0111i\u1ec7n tr\u01b0\u1eddng<\/td>\n3\u20135 \u00d7 10\u2076 V\/cm<\/td>\n<\/tr>\n
T\u1ed1c \u0111\u1ed9 tr\u00f4i b\u00e3o h\u00f2a<\/td>\n2,0 \u00d7 10\u2075 m\/s<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Nh\u1eefng t\u00ednh ch\u1ea5t v\u1eadt l\u00fd v\u1ed1n c\u00f3 n\u00e0y khi\u1ebfn 6H-SiC tr\u1edf n\u00ean ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh trong \u0111i\u1ec1u ki\u1ec7n \u0111i\u1ec7n v\u00e0 nhi\u1ec7t kh\u1eafc nghi\u1ec7t.<\/p>\n

\"T\u1ea5mQuy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/h2>\n

C\u00e1c t\u1ea5m wafer tinh th\u1ec3 \u0111\u01a1n SiC th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p Ph\u01b0\u01a1ng ph\u00e1p v\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT)<\/strong>, m\u1ed9t quy tr\u00ecnh c\u00f4ng nghi\u1ec7p \u0111\u00e3 \u0111\u01b0\u1ee3c ho\u00e0n thi\u1ec7n \u0111\u1ec3 nu\u00f4i c\u1ea5y tinh th\u1ec3 b\u00e1n d\u1eabn c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng.<\/p>\n

Trong quy tr\u00ecnh n\u00e0y, nguy\u00ean li\u1ec7u SiC c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao \u0111\u01b0\u1ee3c th\u0103ng hoa \u1edf nhi\u1ec7t \u0111\u1ed9 tr\u00ean 2000\u00b0C. C\u00e1c h\u1ea1t h\u01a1i \u0111\u01b0\u1ee3c d\u1eabn qua m\u1ed9t d\u1ea3i nhi\u1ec7t \u0111\u1ed9 \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd v\u00e0 t\u00e1i k\u1ebft tinh tr\u00ean m\u1ed9t tinh th\u1ec3 h\u1ea1t gi\u1ed1ng, t\u1ea1o th\u00e0nh m\u1ed9t th\u1ecfi tinh th\u1ec3 \u0111\u01a1n (boule). Sau khi k\u1ebft tinh, th\u1ecfi tinh th\u1ec3 n\u00e0y \u0111\u01b0\u1ee3c gia c\u00f4ng th\u00e0nh c\u00e1c t\u1ea5m wafer th\u00f4ng qua c\u00e1c c\u00f4ng \u0111o\u1ea1n c\u1eaft l\u00e1t, m\u00e0i ph\u1eb3ng, \u0111\u00e1nh b\u00f3ng v\u00e0 l\u00e0m s\u1ea1ch.<\/p>\n

\u0110\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c thi\u1ebft b\u1ecb, c\u00e1c t\u1ea5m wafer c\u00f3 th\u1ec3 tr\u1ea3i qua c\u00e1c b\u01b0\u1edbc x\u1eed l\u00fd b\u1ed5 sung Ph\u01b0\u01a1ng ph\u00e1p ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 epitactic b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD)<\/strong>, cho ph\u00e9p ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c n\u1ed3ng \u0111\u1ed9 ch\u1ea5t pha t\u1ea1p v\u00e0 \u0111\u1ed9 d\u00e0y l\u1edbp. B\u01b0\u1edbc n\u00e0y l\u00e0 r\u1ea5t quan tr\u1ecdng trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t MOSFET v\u00e0 \u0111i\u1ed1t.<\/p>\n

\u1ee8ng d\u1ee5ng<\/h2>\n

\u0110i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t<\/h3>\n

C\u00e1c t\u1ea5m wafer SiC 6H-N k\u00edch th\u01b0\u1edbc 2 inch \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n v\u00e0 ch\u1ebf t\u1ea1o m\u1eabu c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t, bao g\u1ed3m \u0111i-\u1ed1t, c\u1ea5u tr\u00fac MOSFET v\u00e0 m\u00f4-\u0111un c\u00f4ng su\u1ea5t. C\u00e1c thi\u1ebft b\u1ecb n\u00e0y \u0111\u00f3ng vai tr\u00f2 thi\u1ebft y\u1ebfu trong c\u00e1c h\u1ec7 th\u1ed1ng chuy\u1ec3n \u0111\u1ed5i n\u0103ng l\u01b0\u1ee3ng v\u00e0 m\u1ea1ch qu\u1ea3n l\u00fd ngu\u1ed3n.<\/p>\n

Thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao<\/h3>\n

V\u1eadt li\u1ec7u SiC duy tr\u00ec hi\u1ec7u su\u1ea5t \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao, khi\u1ebfn ch\u00fang tr\u1edf n\u00ean ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5, h\u1ec7 th\u1ed1ng gi\u00e1m s\u00e1t c\u00f4ng nghi\u1ec7p v\u00e0 c\u01a1 s\u1edf h\u1ea1 t\u1ea7ng n\u0103ng l\u01b0\u1ee3ng.<\/p>\n

Nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n ch\u1ea5t b\u00e1n d\u1eabn<\/h3>\n

Nh\u1edd t\u00ednh s\u1eb5n c\u00f3 v\u00e0 hi\u1ec7u qu\u1ea3 v\u1ec1 chi ph\u00ed, c\u00e1c t\u1ea5m wafer 2 inch \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c ph\u00f2ng th\u00ed nghi\u1ec7m c\u1ee7a tr\u01b0\u1eddng \u0111\u1ea1i h\u1ecdc, vi\u1ec7n nghi\u00ean c\u1ee9u v\u00e0 m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t th\u1eed nghi\u1ec7m \u0111\u1ec3 nghi\u00ean c\u1ee9u v\u1eadt li\u1ec7u v\u00e0 th\u1eed nghi\u1ec7m thi\u1ebft b\u1ecb.<\/p>\n

\u1ee8ng d\u1ee5ng quang \u0111i\u1ec7n t\u1eed v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u1eb7c bi\u1ec7t<\/h3>\n

SiC c\u0169ng c\u00f3 t\u00ednh trong su\u1ed1t quang h\u1ecdc trong m\u1ed9t s\u1ed1 d\u1ea3i b\u01b0\u1edbc s\u00f3ng nh\u1ea5t \u0111\u1ecbnh, cho ph\u00e9p \u1ee9ng d\u1ee5ng trong c\u00e1c l\u0129nh v\u1ef1c nghi\u00ean c\u1ee9u chuy\u00ean s\u00e2u v\u1ec1 quang t\u1eed v\u00e0 quang \u0111i\u1ec7n t\u1eed.<\/p>\n

\u01afu \u0111i\u1ec3m\"T\u1ea5m<\/h2>\n

N\u1ec1n t\u1ea3ng t\u1ea5m wafer SiC 2 inch mang l\u1ea1i nhi\u1ec1u l\u1ee3i th\u1ebf cho c\u00f4ng t\u00e1c nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n:<\/p>\n

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  • Chi ph\u00ed th\u1ea5p h\u01a1n so v\u1edbi c\u00e1c k\u00edch th\u01b0\u1edbc t\u1ea5m wafer l\u1edbn h\u01a1n<\/li>\n
  • D\u1ec5 d\u00e0ng thao t\u00e1c h\u01a1n trong c\u00e1c th\u00ed nghi\u1ec7m quy m\u00f4 ph\u00f2ng th\u00ed nghi\u1ec7m<\/li>\n
  • Ph\u00f9 h\u1ee3p cho vi\u1ec7c t\u1ea1o m\u1eabu nhanh v\u00e0 th\u1eed nghi\u1ec7m quy tr\u00ecnh<\/li>\n
  • Ch\u1ea5t l\u01b0\u1ee3ng tinh th\u1ec3 \u1ed5n \u0111\u1ecbnh \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c k\u1ebft qu\u1ea3 l\u1eb7p l\u1ea1i \u0111\u01b0\u1ee3c<\/li>\n
  • C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh linh ho\u1ea1t ph\u00f9 h\u1ee3p v\u1edbi nhu c\u1ea7u nghi\u00ean c\u1ee9u<\/li>\n<\/ul>\n

    C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n

    C\u00e2u h\u1ecfi 1: S\u1ef1 kh\u00e1c bi\u1ec7t gi\u1eefa 6H-SiC v\u00e0 4H-SiC l\u00e0 g\u00ec?<\/h3>\n

    6H-SiC v\u00e0 4H-SiC l\u00e0 hai d\u1ea1ng tinh th\u1ec3 kh\u00e1c nhau. 4H-SiC th\u01b0\u1eddng c\u00f3 \u0111\u1ed9 di \u0111\u1ed9ng \u0111i\u1ec7n t\u1eed cao h\u01a1n v\u00e0 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n c\u00f4ng nghi\u1ec7p, trong khi 6H-SiC c\u00f3 t\u00ednh ch\u1ea5t \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh v\u00e0 th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong nghi\u00ean c\u1ee9u c\u0169ng nh\u01b0 c\u00e1c \u1ee9ng d\u1ee5ng \u0111i\u1ec7n t\u1eed chuy\u00ean bi\u1ec7t.<\/p>\n

    C\u00e2u h\u1ecfi 2: B\u1ec1 m\u1eb7t c\u1ee7a t\u1ea5m wafer \u0111\u01b0\u1ee3c x\u1eed l\u00fd nh\u01b0 th\u1ebf n\u00e0o?<\/h3>\n

    M\u1eb7t Si \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p \u0111\u00e1nh b\u00f3ng h\u00f3a h\u1ecdc-c\u01a1 h\u1ecdc (CMP) \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 nh\u1eb5n b\u1ec1 m\u1eb7t c\u1ef1c cao (Ra < 0,2 nm). M\u1eb7t C \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc \u0111\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u gia c\u00f4ng kh\u00e1c nhau.<\/p>\n

    C\u00e2u h\u1ecfi 3: C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt c\u1ee7a t\u1ea5m wafer kh\u00f4ng?<\/h3>\n

    \u0110\u00fang v\u1eady. ZMSH cung c\u1ea5p c\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh bao g\u1ed3m \u0111\u1ed9 d\u00e0y, n\u1ed3ng \u0111\u1ed9 ch\u1ea5t pha t\u1ea1p, d\u1ea3i \u0111i\u1ec7n tr\u1edf su\u1ea5t v\u00e0 quy tr\u00ecnh x\u1eed l\u00fd b\u1ec1 m\u1eb7t theo y\u00eau c\u1ea7u c\u1ee7a kh\u00e1ch h\u00e0ng.<\/p>","protected":false},"excerpt":{"rendered":"

    ZMSH cung c\u1ea5p c\u00e1c t\u1ea5m wafer cacbua silic (SiC) 6H-N \u0111\u01b0\u1eddng k\u00ednh 2 inch ch\u1ea5t l\u01b0\u1ee3ng cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho nghi\u00ean c\u1ee9u b\u00e1n d\u1eabn, ph\u00e1t tri\u1ec3n \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t v\u00e0 s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed hi\u1ec7u su\u1ea5t cao. Cacbua silic l\u00e0 v\u1eadt li\u1ec7u b\u00e1n d\u1eabn c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng, mang l\u1ea1i c\u00e1c t\u00ednh ch\u1ea5t \u0111i\u1ec7n, nhi\u1ec7t v\u00e0 c\u01a1 h\u1ecdc v\u01b0\u1ee3t tr\u1ed9i so v\u1edbi c\u00e1c ch\u1ea5t n\u1ec1n silic (Si) truy\u1ec1n th\u1ed1ng.<\/p>","protected":false},"featured_media":2197,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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