![\"T\u1ea5m](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6_inch_silicon_carbide_sic_wafer_for_ar_glasses_mos_sbd2-300x300.webp\")
<\/p>\nT\u1ea5m wafer cacbua silic (SiC) 4H-N k\u00edch th\u01b0\u1edbc 6 inch l\u00e0 m\u1ed9t ch\u1ea5t n\u1ec1n b\u00e1n d\u1eabn c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t th\u1ebf h\u1ec7 m\u1edbi. So v\u1edbi c\u00e1c v\u1eadt li\u1ec7u silicon truy\u1ec1n th\u1ed1ng, SiC c\u00f3 \u0111\u1ed9 b\u1ec1n \u0111i\u1ec7n tr\u01b0\u1eddng ph\u00e1 v\u1ee1 cao h\u01a1n \u0111\u00e1ng k\u1ec3, \u0111\u1ed9 d\u1eabn nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i v\u00e0 hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh trong \u0111i\u1ec1u ki\u1ec7n nhi\u1ec7t \u0111\u1ed9 v\u00e0 \u0111i\u1ec7n \u00e1p cao.<\/p>\n
Kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng kho\u1ea3ng 3,26 eV cho ph\u00e9p c\u00e1c thi\u1ebft b\u1ecb d\u1ef1a tr\u00ean SiC ho\u1ea1t \u0111\u1ed9ng \u1edf \u0111i\u1ec7n \u00e1p v\u00e0 t\u1ea7n s\u1ed1 chuy\u1ec3n m\u1ea1ch cao h\u01a1n \u0111\u1ed3ng th\u1eddi v\u1eabn duy tr\u00ec m\u1ee9c t\u1ed5n th\u1ea5t n\u0103ng l\u01b0\u1ee3ng th\u1ea5p. Do \u0111\u00f3, SiC \u0111\u00e3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u ch\u1ee7 ch\u1ed1t cho c\u00e1c h\u1ec7 th\u1ed1ng chuy\u1ec3n \u0111\u1ed5i n\u0103ng l\u01b0\u1ee3ng hi\u1ec7u su\u1ea5t cao, bao g\u1ed3m xe \u0111i\u1ec7n, h\u1ec7 th\u1ed1ng n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o v\u00e0 ngu\u1ed3n \u0111i\u1ec7n c\u00f4ng nghi\u1ec7p.<\/p>\n
\u0110\u1ecbnh d\u1ea1ng t\u1ea5m wafer 6 inch (lo\u1ea1i 150 mm) hi\u1ec7n l\u00e0 ti\u00eau chu\u1ea9n c\u00f4ng nghi\u1ec7p ch\u1ee7 \u0111\u1ea1o trong s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb SiC. \u0110\u1ecbnh d\u1ea1ng n\u00e0y mang l\u1ea1i s\u1ef1 c\u00e2n b\u1eb1ng t\u1ed1i \u01b0u gi\u1eefa n\u0103ng su\u1ea5t s\u1ea3n xu\u1ea5t, m\u1ee9c \u0111\u1ed9 ho\u00e0n thi\u1ec7n c\u1ee7a quy tr\u00ecnh v\u00e0 hi\u1ec7u qu\u1ea3 chi ph\u00ed, nh\u1edd \u0111\u00f3 ph\u00f9 h\u1ee3p cho c\u1ea3 s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t l\u1eabn c\u00e1c \u1ee9ng d\u1ee5ng nghi\u00ean c\u1ee9u ti\u00ean ti\u1ebfn.<\/p>\n
4H-SiC l\u00e0 d\u1ea1ng tinh th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t nh\u1edd t\u00ednh \u0111\u1ed1i x\u1ee9ng tinh th\u1ec3 v\u00e0 hi\u1ec7u su\u1ea5t \u0111i\u1ec7n \u01b0u vi\u1ec7t.<\/p>\n
C\u00e1c \u0111\u1eb7c t\u00ednh n\u1ed9i t\u1ea1i ch\u00ednh bao g\u1ed3m:<\/p>\n
Nh\u1eefng \u0111\u1eb7c t\u00ednh n\u00e0y khi\u1ebfn SiC tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u quan tr\u1ecdng cho c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t cao, hi\u1ec7u su\u1ea5t cao.<\/p>\n
![\"T\u1ea5m](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6_inch_silicon_carbide_sic_wafer_for_ar_glasses_mos_sbd4-300x300.webp\")
Qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 v\u00e0 quy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/h2>\nC\u00e1c t\u1ea5m wafer SiC th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p v\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT), m\u1ed9t quy tr\u00ecnh c\u00f4ng nghi\u1ec7p \u0111\u00e3 \u0111\u01b0\u1ee3c ho\u00e0n thi\u1ec7n \u0111\u1ec3 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC kh\u1ed1i.<\/p>\n
Trong qu\u00e1 tr\u00ecnh n\u00e0y, b\u1ed9t SiC c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao \u0111\u01b0\u1ee3c th\u0103ng hoa \u1edf nhi\u1ec7t \u0111\u1ed9 tr\u00ean 2000\u00b0C. C\u00e1c h\u1ea1t \u1edf pha h\u01a1i \u0111\u01b0\u1ee3c d\u1eabn truy\u1ec1n d\u01b0\u1edbi s\u1ef1 \u0111i\u1ec1u ch\u1ec9nh c\u1ea9n th\u1eadn c\u1ee7a \u0111\u1ed9 d\u1ed1c nhi\u1ec7t v\u00e0 t\u00e1i k\u1ebft tinh tr\u00ean m\u1ed9t tinh th\u1ec3 h\u1ea1t gi\u1ed1ng, t\u1ea1o th\u00e0nh m\u1ed9t kh\u1ed1i tinh th\u1ec3 \u0111\u01a1n.<\/p>\n
Sau khi k\u1ebft tinh, v\u1eadt li\u1ec7u tr\u1ea3i qua:<\/p>\n
Trong qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb, c\u00f3 th\u1ec3 \u00e1p d\u1ee5ng th\u00eam quy tr\u00ecnh epitaksi b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u00f3a h\u1ecdc t\u1eeb pha kh\u00ed (CVD) \u0111\u1ec3 t\u1ea1o ra c\u00e1c l\u1edbp epitaksi ch\u1ea5t l\u01b0\u1ee3ng cao v\u1edbi n\u1ed3ng \u0111\u1ed9 pha t\u1ea1p v\u00e0 \u0111\u1ed9 d\u00e0y \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t.<\/p>\n
| B\u1ea5t \u0111\u1ed9ng s\u1ea3n<\/th>\n | Lo\u1ea1i Z (Lo\u1ea1i s\u1ea3n xu\u1ea5t)<\/th>\n | Lo\u1ea1i D (Lo\u1ea1i k\u1ef9 thu\u1eadt)<\/th>\n<\/tr>\n<\/thead>\n |
|---|---|---|
| \u0110\u01b0\u1eddng k\u00ednh<\/td>\n | 149,5 \u2013 150,0 mm<\/td>\n | 149,5 \u2013 150,0 mm<\/td>\n<\/tr>\n |
| Lo\u1ea1i h\u00ecnh<\/td>\n | 4H-SiC<\/td>\n | 4H-SiC<\/td>\n<\/tr>\n |
| \u0110\u1ed9 d\u00e0y<\/td>\n | 350 \u00b1 15 \u00b5m<\/td>\n | 350 \u00b1 25 \u00b5m<\/td>\n<\/tr>\n |
| Lo\u1ea1i \u0111\u1ed9 d\u1eabn \u0111i\u1ec7n<\/td>\n | Lo\u1ea1i N<\/td>\n | Lo\u1ea1i N<\/td>\n<\/tr>\n |
| G\u00f3c l\u1ec7ch tr\u1ee5c<\/td>\n | 4,0\u00b0 h\u01b0\u1edbng v\u1ec1 \u00b1 0,5\u00b0<\/td>\n | 4,0\u00b0 h\u01b0\u1edbng v\u1ec1 \u00b1 0,5\u00b0<\/td>\n<\/tr>\n |
| \u0110i\u1ec7n tr\u1edf su\u1ea5t<\/td>\n | 0,015 \u2013 0,024 \u03a9\u00b7cm<\/td>\n | 0,015 \u2013 0,028 \u03a9\u00b7cm<\/td>\n<\/tr>\n |
| M\u1eadt \u0111\u1ed9 \u1ed1ng si\u00eau nh\u1ecf<\/td>\n | \u2264 0,2 cm\u207b\u00b2<\/td>\n | \u2264 15 cm\u207b\u00b2<\/td>\n<\/tr>\n |
| \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (Ra)<\/td>\n | \u2264 1 nm<\/td>\n | \u2264 1 nm<\/td>\n<\/tr>\n |
| \u0110\u1ed9 nh\u00e1m CMP<\/td>\n | \u2264 0,2 nm<\/td>\n | \u2264 0,5 nm<\/td>\n<\/tr>\n |
| T\u1ef7 l\u1ec7 cho vay tr\u00ean gi\u00e1 tr\u1ecb t\u00e0i s\u1ea3n (LTV)<\/td>\n | \u2264 2,5 \u00b5m<\/td>\n | \u2264 5 \u00b5m<\/td>\n<\/tr>\n |
| TTV<\/td>\n | \u2264 6 \u00b5m<\/td>\n | \u2264 15 \u00b5m<\/td>\n<\/tr>\n |
| Cung<\/td>\n | \u2264 25 \u00b5m<\/td>\n | \u2264 40 \u00b5m<\/td>\n<\/tr>\n |
| Warp<\/td>\n | \u2264 35 \u00b5m<\/td>\n | \u2264 60 \u00b5m<\/td>\n<\/tr>\n |
| Lo\u1ea1i tr\u1eeb c\u1ea1nh<\/td>\n | 3 mm<\/td>\n | 3 mm<\/td>\n<\/tr>\n |
| Bao b\u00ec<\/td>\n | B\u0103ng cassette \/ T\u1ea5m wafer \u0111\u01a1n<\/td>\n | B\u0103ng cassette \/ T\u1ea5m wafer \u0111\u01a1n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
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![\"T\u1ea5m](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6_inch_silicon_carbide_sic_wafer_for_ar_glasses_mos_sbd1-300x300.webp\")
Ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng & Ki\u1ec3m tra<\/h2>\n