{"id":2183,"date":"2026-04-14T05:20:25","date_gmt":"2026-04-14T05:20:25","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2183"},"modified":"2026-04-14T05:20:28","modified_gmt":"2026-04-14T05:20:28","slug":"8-inch-sic-epitaxial-wafer","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/8-inch-sic-epitaxial-wafer\/","title":{"rendered":"T\u1ea5m wafer SiC ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 d\u00e0y 8 inch (200 mm)"},"content":{"rendered":"

\"T\u1ea5mT\u1ea5m wafer SiC \u00e9pitaksi 8 inch l\u00e0 th\u00e0nh t\u1ef1u m\u1edbi nh\u1ea5t trong c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn khe n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng. \u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o tr\u00ean n\u1ec1n SiC 200 mm v\u1edbi l\u1edbp \u00e9pitaksi ch\u1ea5t l\u01b0\u1ee3ng cao, s\u1ea3n ph\u1ea9m n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 h\u1ed7 tr\u1ee3 s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n c\u00f4ng su\u1ea5t c\u00f3 kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng v\u00e0 hi\u1ec7u su\u1ea5t cao.<\/p>\n

So v\u1edbi c\u00e1c t\u1ea5m wafer c\u00f3 k\u00edch th\u01b0\u1edbc nh\u1ecf h\u01a1n, t\u1ea5m wafer SiC 8 inch gi\u00fap t\u0103ng \u0111\u00e1ng k\u1ec3 di\u1ec7n t\u00edch s\u1eed d\u1ee5ng, t\u1eeb \u0111\u00f3 n\u00e2ng cao n\u0103ng su\u1ea5t thi\u1ebft b\u1ecb tr\u00ean m\u1ed7i t\u1ea5m wafer v\u00e0 gi\u1ea3m chi ph\u00ed tr\u00ean m\u1ed7i chip. \u0110i\u1ec1u n\u00e0y khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh gi\u1ea3i ph\u00e1p quan tr\u1ecdng cho c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p \u0111ang chuy\u1ec3n sang s\u1ea3n xu\u1ea5t quy m\u00f4 l\u1edbn c\u00e1c thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t silicon carbide.<\/p>\n

C\u00e1c t\u1ea5m wafer epitaxial SiC k\u1ebft h\u1ee3p nh\u1eefng \u01b0u \u0111i\u1ec3m v\u1ed1n c\u00f3 c\u1ee7a cacbua silic, bao g\u1ed3m kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng, \u0111i\u1ec7n tr\u01b0\u1eddng ph\u00e1 v\u1ee1 cao v\u00e0 \u0111\u1ed9 d\u1eabn nhi\u1ec7t tuy\u1ec7t v\u1eddi, v\u1edbi c\u00e1c l\u1edbp epitaxial \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c v\u00e0 thi\u1ebft k\u1ebf ri\u00eang cho vi\u1ec7c ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb. C\u00e1c t\u1ea5m wafer n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c MOSFET th\u1ebf h\u1ec7 m\u1edbi, \u0111i\u1ed1t Schottky v\u00e0 c\u00e1c m\u00f4-\u0111un c\u00f4ng su\u1ea5t t\u00edch h\u1ee3p.<\/p>\n

\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u00ednh<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Tham s\u1ed1<\/th>\nGi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<\/thead>\n
\u0110\u01b0\u1eddng k\u00ednh<\/td>\n200 \u00b1 0,5 mm<\/td>\n<\/tr>\n
Lo\u1ea1i h\u00ecnh<\/td>\n4H-SiC<\/td>\n<\/tr>\n
Lo\u1ea1i \u0111\u1ed9 d\u1eabn \u0111i\u1ec7n<\/td>\nLo\u1ea1i N<\/td>\n<\/tr>\n
\u0110\u1ed9 d\u00e0y<\/td>\n700 \u00b1 50 \u03bcm<\/td>\n<\/tr>\n
B\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n<\/td>\n\u0110\u00e1nh b\u00f3ng CMP hai m\u1eb7t<\/td>\n<\/tr>\n
Bu\u1ed5i gi\u1edbi thi\u1ec7u<\/td>\n4,0\u00b0 l\u1ec7ch tr\u1ee5c \u00b10,5\u00b0<\/td>\n<\/tr>\n
Notch<\/td>\nH\u01b0\u1edbng r\u00e3nh ti\u00eau chu\u1ea9n<\/td>\n<\/tr>\n
H\u00ecnh d\u1ea1ng c\u1ea1nh<\/td>\nM\u1eb7t v\u00e1t \/ M\u00e9p bo tr\u00f2n<\/td>\n<\/tr>\n
\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td>\nC\u1ea5p \u0111\u1ed9 d\u01b0\u1edbi nanomet<\/td>\n<\/tr>\n
Bao b\u00ec<\/td>\nH\u1ed9p \u0111\u1ef1ng b\u0103ng cassette ho\u1eb7c h\u1ed9p \u0111\u1ef1ng t\u1ea5m wafer \u0111\u01a1n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u0110i\u1ec7n tr\u1edf su\u1ea5t \u0111i\u1ec3n h\u00ecnh:<\/p>\n

    \n
  • Lo\u1ea1i N: 0,015\u20130,028 \u03a9\u00b7cm<\/li>\n
  • B\u00e1n c\u00e1ch \u0111i\u1ec7n: \u22651E7 \u03a9\u00b7cm<\/li>\n<\/ul>\n

    C\u00e1c c\u1ea5p l\u1edbp hi\u1ec7n c\u00f3:<\/p>\n

      \n
    • Lo\u1ea1i Zero MPD<\/li>\n
    • Ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n xu\u1ea5t<\/li>\n
    • D\u00e0nh cho nghi\u00ean c\u1ee9u<\/li>\n
    • L\u1edbp gi\u1ea3<\/li>\n<\/ul>\n

      \"T\u1ea5mKh\u1ea3 n\u0103ng t\u1ea1o l\u1edbp epitaxial<\/h2>\n

      L\u1edbp epitactic \u0111\u01b0\u1ee3c t\u1ea1o ra b\u1eb1ng c\u00f4ng ngh\u1ec7 l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD) ti\u00ean ti\u1ebfn, cho ph\u00e9p ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c \u0111\u1ed9 d\u00e0y, n\u1ed3ng \u0111\u1ed9 pha t\u1ea1p v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u.<\/p>\n

      C\u00e1c t\u00f9y ch\u1ecdn t\u00f9y ch\u1ec9nh bao g\u1ed3m:<\/p>\n

        \n
      • L\u1edbp epitaksi lo\u1ea1i N ho\u1eb7c lo\u1ea1i P<\/li>\n
      • \u0110\u1ed9 d\u00e0y l\u1edbp epi c\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c c\u1ea5u tr\u00fac thi\u1ebft b\u1ecb kh\u00e1c nhau<\/li>\n
      • H\u1ed3 s\u01a1 pha t\u1ea1p \u0111\u1ed3ng nh\u1ea5t tr\u00ean to\u00e0n b\u1ed9 t\u1ea5m wafer<\/li>\n
      • M\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p \u0111\u1ec3 \u0111\u1ea1t n\u0103ng su\u1ea5t thi\u1ebft b\u1ecb cao<\/li>\n<\/ul>\n

        Qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 ch\u1ea5t l\u01b0\u1ee3ng cao l\u00e0 y\u1ebfu t\u1ed1 thi\u1ebft y\u1ebfu \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t \u0111i\u1ec7n \u1ed5n \u0111\u1ecbnh v\u00e0 \u0111\u1ed9 tin c\u1eady l\u00e2u d\u00e0i cho c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n.<\/p>\n

        \"T\u1ea5mQuy tr\u00ecnh s\u1ea3n xu\u1ea5t<\/h2>\n

        Chu\u1ea9n b\u1ecb ch\u1ea5t n\u1ec1n<\/strong>
        C\u00e1c ch\u1ea5t n\u1ec1n SiC \u0111\u01a1n tinh th\u1ec3 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00e1c ph\u01b0\u01a1ng ph\u00e1p ph\u00e1t tri\u1ec3n \u1edf nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 \u0111\u01b0\u1ee3c m\u00e0i b\u00f3ng \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t c\u1ef1c th\u1ea5p.<\/p>\n

        S\u1ef1 ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7<\/strong>
        L\u1edbp epitaksi \u0111\u01b0\u1ee3c l\u1eafng \u0111\u1ecdng \u1edf nhi\u1ec7t \u0111\u1ed9 cao b\u1eb1ng h\u1ec7 th\u1ed1ng CVD, \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 d\u00e0y \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt li\u1ec7u \u1ed5n \u0111\u1ecbnh tr\u00ean to\u00e0n b\u1ed9 t\u1ea5m wafer 200 mm.<\/p>\n

        Ki\u1ec3m tra doping<\/strong>
        Trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7, ng\u01b0\u1eddi ta ti\u1ebfn h\u00e0nh pha t\u1ea1p ch\u00ednh x\u00e1c \u0111\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u c\u1ee7a c\u00e1c ki\u1ebfn tr\u00fac thi\u1ebft b\u1ecb kh\u00e1c nhau.<\/p>\n

        \u0110o l\u01b0\u1eddng v\u00e0 Ki\u1ec3m tra<\/strong>
        M\u1ed7i t\u1ea5m wafer \u0111\u1ec1u \u0111\u01b0\u1ee3c ki\u1ec3m tra to\u00e0n di\u1ec7n, bao g\u1ed3m ph\u00e2n t\u00edch b\u1ec1 m\u1eb7t, l\u1eadp b\u1ea3n \u0111\u1ed3 khuy\u1ebft t\u1eadt v\u00e0 \u0111\u00e1nh gi\u00e1 c\u00e1c th\u00f4ng s\u1ed1 \u0111i\u1ec7n \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng \u1ed5n \u0111\u1ecbnh.<\/p>\n

        \u01afu \u0111i\u1ec3m<\/h2>\n

        S\u1ea3n xu\u1ea5t c\u00f3 kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng<\/strong>
        K\u00edch th\u01b0\u1edbc t\u1ea5m wafer 8 inch gi\u00fap t\u0103ng \u0111\u00e1ng k\u1ec3 s\u1ea3n l\u01b0\u1ee3ng chip tr\u00ean m\u1ed7i t\u1ea5m wafer, t\u1eeb \u0111\u00f3 n\u00e2ng cao hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t v\u00e0 gi\u1ea3m chi ph\u00ed tr\u00ean m\u1ed7i thi\u1ebft b\u1ecb.<\/p>\n

        Hi\u1ec7u su\u1ea5t cao<\/strong>
        C\u00e1c t\u00ednh ch\u1ea5t c\u1ee7a v\u1eadt li\u1ec7u SiC gi\u00fap gi\u1ea3m t\u1ed5n th\u1ea5t chuy\u1ec3n m\u1ea1ch, t\u0103ng m\u1eadt \u0111\u1ed9 c\u00f4ng su\u1ea5t v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t n\u0103ng l\u01b0\u1ee3ng.<\/p>\n

        Qu\u1ea3n l\u00fd nhi\u1ec7t hi\u1ec7u qu\u1ea3<\/strong>
        \u0110\u1ed9 d\u1eabn nhi\u1ec7t cao gi\u00fap \u0111\u1ea3m b\u1ea3o ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh trong \u0111i\u1ec1u ki\u1ec7n c\u00f4ng su\u1ea5t cao v\u00e0 gi\u1ea3m nhu c\u1ea7u l\u00e0m m\u00e1t.<\/p>\n

        M\u1eadt \u0111\u1ed9 l\u1ed7i th\u1ea5p<\/strong>
        C\u00e1c quy tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 v\u00e0 \u00e9p l\u1edbp ti\u00ean ti\u1ebfn \u0111\u1ea3m b\u1ea3o n\u0103ng su\u1ea5t cao v\u00e0 hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb \u1ed5n \u0111\u1ecbnh.<\/p>\n

        N\u1ec1n t\u1ea3ng s\u1eb5n s\u00e0ng cho t\u01b0\u01a1ng lai<\/strong>
        C\u00e1c t\u1ea5m wafer SiC 8 inch ph\u00f9 h\u1ee3p v\u1edbi xu h\u01b0\u1edbng c\u1ee7a ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn h\u01b0\u1edbng t\u1edbi c\u00e1c \u0111\u1ecbnh d\u1ea1ng t\u1ea5m wafer l\u1edbn h\u01a1n v\u00e0 s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t t\u1ef1 \u0111\u1ed9ng.<\/p>\n

        \"\"<\/p>\n

        \u1ee8ng d\u1ee5ng<\/h2>\n

        Xe \u0111i\u1ec7n<\/strong>
        \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong b\u1ed9 bi\u1ebfn t\u1ea7n k\u00e9o, b\u1ed9 s\u1ea1c tr\u00ean xe v\u00e0 b\u1ed9 chuy\u1ec3n \u0111\u1ed5i DC-DC. K\u00edch th\u01b0\u1edbc t\u1ea5m wafer l\u1edbn h\u01a1n h\u1ed7 tr\u1ee3 s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n hi\u1ec7u su\u1ea5t cao cho c\u00e1c n\u1ec1n t\u1ea3ng xe \u0111i\u1ec7n.<\/p>\n

        H\u1ec7 th\u1ed1ng n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o<\/strong>
        \u0110\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong c\u00e1c b\u1ed9 bi\u1ebfn t\u1ea7n n\u0103ng l\u01b0\u1ee3ng m\u1eb7t tr\u1eddi v\u00e0 b\u1ed9 bi\u1ebfn t\u1ea7n \u0111i\u1ec7n gi\u00f3, n\u01a1i hi\u1ec7u su\u1ea5t v\u00e0 \u0111\u1ed9 tin c\u1eady l\u00e0 y\u1ebfu t\u1ed1 then ch\u1ed1t \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o ho\u1ea1t \u0111\u1ed9ng l\u00e2u d\u00e0i.<\/p>\n

        \u0110i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t c\u00f4ng nghi\u1ec7p<\/strong>
        H\u1ed7 tr\u1ee3 c\u00e1c b\u1ed9 \u0111i\u1ec1u khi\u1ec3n \u0111\u1ed9ng c\u01a1, h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a v\u00e0 thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t cao \u0111\u00f2i h\u1ecfi qu\u00e1 tr\u00ecnh chuy\u1ec3n \u0111\u1ed5i n\u0103ng l\u01b0\u1ee3ng \u1ed5n \u0111\u1ecbnh v\u00e0 hi\u1ec7u qu\u1ea3.<\/p>\n

        5G v\u00e0 h\u1ea1 t\u1ea7ng t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn<\/strong>
        Cho ph\u00e9p s\u1eed d\u1ee5ng c\u00e1c linh ki\u1ec7n RF t\u1ea7n s\u1ed1 cao v\u00e0 c\u00f4ng su\u1ea5t l\u1edbn trong c\u00e1c h\u1ec7 th\u1ed1ng truy\u1ec1n th\u00f4ng v\u00e0 tr\u1ea1m g\u1ed1c.<\/p>\n

        Thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed ti\u00eau d\u00f9ng<\/strong>
        \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c b\u1ed9 ngu\u1ed3n nh\u1ecf g\u1ecdn, hi\u1ec7u su\u1ea5t cao v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng s\u1ea1c nhanh.<\/p>\n

        C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n

        C\u00e2u h\u1ecfi 1: \u01afu \u0111i\u1ec3m ch\u00ednh c\u1ee7a t\u1ea5m wafer SiC 8 inch l\u00e0 g\u00ec?
        K\u00edch th\u01b0\u1edbc t\u1ea5m wafer l\u1edbn h\u01a1n gi\u00fap t\u0103ng s\u1ed1 l\u01b0\u1ee3ng chip tr\u00ean m\u1ed7i t\u1ea5m wafer, t\u1eeb \u0111\u00f3 gi\u1ea3m \u0111\u00e1ng k\u1ec3 chi ph\u00ed s\u1ea3n xu\u1ea5t tr\u00ean m\u1ed7i thi\u1ebft b\u1ecb v\u00e0 n\u00e2ng cao hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t.<\/p>\n

        C\u00e2u h\u1ecfi 2: C\u00f4ng ngh\u1ec7 SiC 8 inch \u0111\u00e3 \u0111\u1ea1t \u0111\u1ebfn \u0111\u1ed9 ch\u00edn mu\u1ed3i ch\u01b0a?
        Hi\u1ec7n t\u1ea1i, c\u00f4ng ngh\u1ec7 n\u00e0y \u0111ang chuy\u1ec3n t\u1eeb giai \u0111o\u1ea1n s\u1ea3n xu\u1ea5t th\u1eed nghi\u1ec7m sang giai \u0111o\u1ea1n s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t ban \u0111\u1ea7u, \u0111\u1ed3ng th\u1eddi ng\u00e0y c\u00e0ng \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n

        C\u00e2u h\u1ecfi 3: C\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh c\u00e1c l\u1edbp epitactic kh\u00f4ng?
        \u0110\u00fang v\u1eady, lo\u1ea1i ch\u1ea5t ph\u1ee7, \u0111\u1ed9 d\u00e0y v\u00e0 c\u00e1c t\u00ednh ch\u1ea5t \u0111i\u1ec7n c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c \u0111i\u1ec1u ch\u1ec9nh \u0111\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u c\u1ee5 th\u1ec3 c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n

        C\u00e2u h\u1ecfi 4: C\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t hi\u1ec7n t\u1ea1i c\u00f3 t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c t\u1ea5m wafer 8 inch kh\u00f4ng?
        C\u00f3 th\u1ec3 c\u1ea7n ph\u1ea3i n\u00e2ng c\u1ea5p m\u1ed9t s\u1ed1 thi\u1ebft b\u1ecb, nh\u01b0ng nhi\u1ec1u nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip hi\u1ec7n \u0111\u1ea1i \u0111\u00e3 v\u00e0 \u0111ang chu\u1ea9n b\u1ecb cho quy tr\u00ecnh ch\u1ebf t\u1ea1o SiC 200 mm.<\/p>","protected":false},"excerpt":{"rendered":"

        T\u1ea5m wafer SiC \u00e9pitaksi 8 inch l\u00e0 th\u00e0nh t\u1ef1u m\u1edbi nh\u1ea5t trong c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn khe n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng. \u0110\u01b0\u1ee3c ch\u1ebf t\u1ea1o tr\u00ean n\u1ec1n SiC 200 mm v\u1edbi l\u1edbp \u00e9pitaksi ch\u1ea5t l\u01b0\u1ee3ng cao, s\u1ea3n ph\u1ea9m n\u00e0y \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 h\u1ed7 tr\u1ee3 s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n c\u00f4ng su\u1ea5t c\u00f3 kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng v\u00e0 hi\u1ec7u su\u1ea5t cao.<\/p>","protected":false},"featured_media":2184,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[729],"product_tag":[944,735,947,945,943,933,946,948,692],"class_list":{"0":"post-2183","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-wafer","7":"product_tag-200mm-silicon-carbide-wafer","8":"product_tag-8-inch-sic-wafer","9":"product_tag-high-efficiency-power-electronics","10":"product_tag-sic-epi-wafer","11":"product_tag-sic-epitaxial-wafer","12":"product_tag-sic-mosfet-wafer","13":"product_tag-sic-power-device-substrate","14":"product_tag-silicon-carbide-epitaxy","15":"product_tag-wide-bandgap-semiconductor","16":"desktop-align-left","17":"tablet-align-left","18":"mobile-align-left","19":"ast-product-gallery-layout-horizontal-slider","20":"ast-product-tabs-layout-horizontal","22":"first","23":"instock","24":"shipping-taxable","25":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2183","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2183"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2183\/revisions"}],"predecessor-version":[{"id":2188,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2183\/revisions\/2188"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2184"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2183"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2183"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2183"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2183"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}