{"id":2173,"date":"2026-04-14T03:08:56","date_gmt":"2026-04-14T03:08:56","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2173"},"modified":"2026-04-14T03:08:59","modified_gmt":"2026-04-14T03:08:59","slug":"4-inch-100mm-hpsi-silicon-carbide-wafer","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/4-inch-100mm-hpsi-silicon-carbide-wafer\/","title":{"rendered":"T\u1ea5m silicon carbide HPSI 4 inch (100 mm)"},"content":{"rendered":"

\"T\u1ea5mT\u1ea5m wafer cacbua silic HPSI 4 inch l\u00e0 m\u1ed9t ch\u1ea5t n\u1ec1n b\u00e1n d\u1eabn c\u00e1ch \u0111i\u1ec7n c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng RF, vi s\u00f3ng v\u00e0 quang \u0111i\u1ec7n t\u1eed ti\u00ean ti\u1ebfn. HPSI l\u00e0 vi\u1ebft t\u1eaft c\u1ee7a \u201chigh purity semi-insulating material\u201d (v\u1eadt li\u1ec7u b\u00e1n d\u1eabn c\u00e1ch \u0111i\u1ec7n c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao), \u0111\u01b0\u1ee3c \u0111\u1eb7c tr\u01b0ng b\u1edfi \u0111i\u1ec7n tr\u1edf su\u1ea5t c\u1ef1c cao v\u00e0 kh\u1ea3 n\u0103ng c\u00e1ch \u0111i\u1ec7n tuy\u1ec7t v\u1eddi.<\/p>\n

Cacbua silic l\u00e0 m\u1ed9t ch\u1ea5t b\u00e1n d\u1eabn c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng, \u0111\u01b0\u1ee3c c\u1ea5u t\u1ea1o t\u1eeb silic v\u00e0 cacbon. So v\u1edbi c\u00e1c t\u1ea5m wafer silic th\u00f4ng th\u01b0\u1eddng, n\u00f3 c\u00f3 \u0111\u1ed9 d\u1eabn nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, \u0111i\u1ec7n tr\u01b0\u1eddng ph\u00e1 v\u1ee1 cao h\u01a1n v\u00e0 hi\u1ec7u su\u1ea5t t\u1ed1t h\u01a1n trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n ho\u1ea1t \u0111\u1ed9ng kh\u1eafc nghi\u1ec7t. \u1ede d\u1ea1ng b\u00e1n c\u00e1ch \u0111i\u1ec7n, SiC gi\u00fap gi\u1ea3m \u0111\u00e1ng k\u1ec3 hi\u1ec7n t\u01b0\u1ee3ng d\u1eabn \u0111i\u1ec7n ph\u1ee5, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh n\u1ec1n t\u1ea3ng l\u00fd t\u01b0\u1edfng cho c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed t\u1ea7n s\u1ed1 cao v\u00e0 c\u00f4ng su\u1ea5t l\u1edbn.<\/p>\n

\u0110\u1ecbnh d\u1ea1ng t\u1ea5m wafer 4 inch n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u1ea3 nghi\u00ean c\u1ee9u v\u00e0 s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p nh\u1edd s\u1ef1 c\u00e2n b\u1eb1ng gi\u1eefa chi ph\u00ed, m\u1ee9c \u0111\u1ed9 ho\u00e0n thi\u1ec7n v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch quy tr\u00ecnh. N\u00f3 \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p cho c\u00e1c thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF), h\u1ec7 th\u1ed1ng truy\u1ec1n th\u00f4ng 5G, m\u00f4-\u0111un radar v\u00e0 c\u00e1c c\u00f4ng ngh\u1ec7 quang h\u1ecdc m\u1edbi n\u1ed5i nh\u01b0 c\u00e1c th\u00e0nh ph\u1ea7n \u1ed1ng d\u1eabn s\u00f3ng AR.<\/p>\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Tham s\u1ed1<\/th>\nGi\u00e1 tr\u1ecb<\/th>\n<\/tr>\n<\/thead>\n
\u0110\u01b0\u1eddng k\u00ednh<\/td>\n100 \u00b1 0,5 mm<\/td>\n<\/tr>\n
\u0110\u1ed9 d\u00e0y<\/td>\n350 \u03bcm<\/td>\n<\/tr>\n
Ch\u1ea5t li\u1ec7u<\/td>\nTinh th\u1ec3 \u0111\u01a1n SiC<\/td>\n<\/tr>\n
Lo\u1ea1i<\/td>\nHPSI (b\u00e1n c\u00e1ch nhi\u1ec7t)<\/td>\n<\/tr>\n
\u0110i\u1ec7n tr\u1edf su\u1ea5t<\/td>\nt\u1eeb \u22651E5 \u0111\u1ebfn \u22651E10 ohm\u00b7cm<\/td>\n<\/tr>\n
\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t<\/td>\nCMP Ra \u2264 0,2 nm<\/td>\n<\/tr>\n
TTV<\/td>\n\u2264 10 \u03bcm<\/td>\n<\/tr>\n
Warp<\/td>\n\u2264 30 \u03bcm<\/td>\n<\/tr>\n
Bu\u1ed5i gi\u1edbi thi\u1ec7u<\/td>\nT\u00f9y ch\u1ecdn tr\u1ee5c ch\u00ednh ho\u1eb7c tr\u1ee5c ph\u1ee5<\/td>\n<\/tr>\n
Edge<\/td>\nG\u00f3c v\u00e1t ti\u00eau chu\u1ea9n SEMI<\/td>\n<\/tr>\n
L\u1edbp<\/td>\nS\u1ea3n xu\u1ea5t \/ Nghi\u00ean c\u1ee9u \/ M\u00f4 h\u00ecnh<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

C\u00e1c th\u00f4ng s\u1ed1 n\u00e0y \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t cao, m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p v\u00e0 c\u00e1c t\u00ednh ch\u1ea5t c\u01a1 h\u1ecdc \u1ed5n \u0111\u1ecbnh, nh\u1eefng y\u1ebfu t\u1ed1 c\u1ea7n thi\u1ebft cho qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 tinh th\u1ec3 v\u00e0 s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb ch\u00ednh x\u00e1c.<\/p>\n

\u0110\u1eb7c t\u00ednh v\u1eadt li\u1ec7u\"\"<\/h2>\n

Cacbua silic l\u00e0 m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u b\u00e1n d\u1eabn th\u1ebf h\u1ec7 th\u1ee9 ba quan tr\u1ecdng nh\u1ea5t. Kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng c\u1ee7a n\u00f3 cho ph\u00e9p c\u00e1c thi\u1ebft b\u1ecb ho\u1ea1t \u0111\u1ed9ng \u1edf \u0111i\u1ec7n \u00e1p cao h\u01a1n v\u1edbi d\u00f2ng r\u00f2 th\u1ea5p h\u01a1n so v\u1edbi silicon.<\/p>\n

\u0110\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer HPSI, \u0111\u1eb7c \u0111i\u1ec3m n\u1ed5i b\u1eadt nh\u1ea5t l\u00e0 \u0111i\u1ec7n tr\u1edf su\u1ea5t c\u1ef1c cao. T\u00ednh ch\u1ea5t n\u00e0y gi\u00fap gi\u1ea3m thi\u1ec3u d\u00f2ng \u0111i\u1ec7n kh\u00f4ng mong mu\u1ed1n b\u00ean trong ch\u1ea5t n\u1ec1n, \u0111i\u1ec1u n\u00e0y c\u00f3 \u00fd ngh\u0129a quan tr\u1ecdng trong vi\u1ec7c duy tr\u00ec t\u00ednh to\u00e0n v\u1eb9n t\u00edn hi\u1ec7u trong c\u00e1c \u1ee9ng d\u1ee5ng t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF) v\u00e0 vi s\u00f3ng.<\/p>\n

\u0110\u1ed9 d\u1eabn nhi\u1ec7t cao h\u01a1n \u0111\u00e1ng k\u1ec3 so v\u1edbi c\u00e1c v\u1eadt li\u1ec7u b\u00e1n d\u1eabn truy\u1ec1n th\u1ed1ng, gi\u00fap t\u1ea3n nhi\u1ec7t hi\u1ec7u qu\u1ea3 trong qu\u00e1 tr\u00ecnh ho\u1ea1t \u0111\u1ed9ng \u1edf c\u00f4ng su\u1ea5t cao. \u0110i\u1ec1u n\u00e0y gi\u00fap gi\u1ea3m \u00e1p l\u1ef1c nhi\u1ec7t v\u00e0 n\u00e2ng cao \u0111\u1ed9 tin c\u1eady l\u00e2u d\u00e0i.<\/p>\n

SiC c\u0169ng c\u00f3 \u0111i\u1ec7n tr\u01b0\u1eddng ph\u00e1 v\u1ee1 cao, gi\u00fap c\u00e1c thi\u1ebft b\u1ecb c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c \u0111i\u1ec7n \u00e1p cao m\u00e0 kh\u00f4ng c\u1ea7n t\u0103ng k\u00edch th\u01b0\u1edbc. Ngo\u00e0i ra, v\u1eadt li\u1ec7u n\u00e0y duy tr\u00ec hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh trong \u0111i\u1ec1u ki\u1ec7n nhi\u1ec7t \u0111\u1ed9 cao, t\u1ea7n s\u1ed1 cao v\u00e0 ti\u1ebfp x\u00fac v\u1edbi b\u1ee9c x\u1ea1, khi\u1ebfn n\u00f3 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t.<\/p>\n

\u1ee8ng d\u1ee5ng<\/h2>\n

Thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn v\u00e0 vi s\u00f3ng<\/strong>
C\u00e1c t\u1ea5m wafer cacbua silic HPSI \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i l\u00e0m ch\u1ea5t n\u1ec1n cho b\u1ed9 khu\u1ebfch \u0111\u1ea1i t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF) v\u00e0 m\u1ea1ch t\u1ea7n s\u1ed1 cao. \u0110\u1ed9 d\u1eabn \u0111i\u1ec7n cao c\u1ee7a ch\u00fang gi\u00fap gi\u1ea3m t\u1ed5n th\u1ea5t ph\u1ee5 v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t truy\u1ec1n t\u00edn hi\u1ec7u, khi\u1ebfn ch\u00fang tr\u1edf th\u00e0nh th\u00e0nh ph\u1ea7n kh\u00f4ng th\u1ec3 thi\u1ebfu trong c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed vi\u1ec5n th\u00f4ng ti\u00ean ti\u1ebfn.<\/p>\n

H\u1ea1 t\u1ea7ng vi\u1ec5n th\u00f4ng 5G<\/strong>
Trong c\u00e1c h\u1ec7 th\u1ed1ng 5G, c\u00e1c thi\u1ebft b\u1ecb ho\u1ea1t \u0111\u1ed9ng \u1edf t\u1ea7n s\u1ed1 cao h\u01a1n v\u00e0 \u0111\u00f2i h\u1ecfi ph\u1ea3i s\u1eed d\u1ee5ng c\u00e1c v\u1eadt li\u1ec7u c\u00f3 kh\u1ea3 n\u0103ng c\u00e1ch \u0111i\u1ec7n tuy\u1ec7t v\u1eddi. C\u00e1c t\u1ea5m wafer SiC c\u1ee7a HPSI \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh trong c\u00e1c tr\u1ea1m g\u1ed1c v\u00e0 m\u00f4-\u0111un kh\u00f4ng d\u00e2y, gi\u00fap n\u00e2ng cao hi\u1ec7u qu\u1ea3 truy\u1ec1n d\u1eef li\u1ec7u v\u00e0 gi\u1ea3m thi\u1ec3u t\u1ed5n th\u1ea5t n\u0103ng l\u01b0\u1ee3ng.<\/p>\n

K\u00ednh AR v\u00e0 h\u1ec7 th\u1ed1ng quang h\u1ecdc<\/strong>
Trong c\u00e1c thi\u1ebft b\u1ecb th\u1ef1c t\u1ebf t\u0103ng c\u01b0\u1eddng, c\u00e1c t\u1ea5m wafer SiC \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c linh ki\u1ec7n quang h\u1ecdc v\u00e0 li\u00ean quan \u0111\u1ebfn \u1ed1ng d\u1eabn s\u00f3ng. \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ea5u tr\u00fac v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c c\u00f4ng ngh\u1ec7 gia c\u00f4ng ch\u00ednh x\u00e1c c\u1ee7a ch\u00fang g\u00f3p ph\u1ea7n th\u00fac \u0111\u1ea9y s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a c\u00e1c h\u1ec7 th\u1ed1ng quang h\u1ecdc nh\u1ecf g\u1ecdn v\u00e0 hi\u1ec7u su\u1ea5t cao.<\/p>\n

H\u1ec7 th\u1ed1ng radar v\u00e0 qu\u1ed1c ph\u00f2ng<\/strong>
C\u00e1c ch\u1ea5t n\u1ec1n SiC c\u1ee7a HPSI ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng radar v\u00e0 \u0111i\u1ec7n t\u1eed qu\u1ed1c ph\u00f2ng \u0111\u00f2i h\u1ecfi c\u00f4ng su\u1ea5t cao, t\u1ea7n s\u1ed1 cao v\u00e0 \u0111\u1ed9 tin c\u1eady cao. Ch\u00fang duy tr\u00ec ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh trong c\u00e1c \u0111i\u1ec1u ki\u1ec7n m\u00f4i tr\u01b0\u1eddng kh\u1eafc nghi\u1ec7t, bao g\u1ed3m nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 b\u1ee9c x\u1ea1.<\/p>\n

Thi\u1ebft b\u1ecb quang \u0111i\u1ec7n t\u1eed<\/strong>
C\u00e1c t\u1ea5m wafer n\u00e0y c\u0169ng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c thi\u1ebft b\u1ecb quang \u0111i\u1ec7n t\u1eed v\u00e0 quang t\u1eed, n\u01a1i kh\u1ea3 n\u0103ng c\u00e1ch ly \u0111i\u1ec7n v\u00e0 hi\u1ec7u su\u1ea5t t\u1ea3n nhi\u1ec7t \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng \u0111\u1ed1i v\u1edbi hi\u1ec7u su\u1ea5t v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n

\"\"<\/p>\n

C\u00e1c l\u1edbp h\u1ecdc hi\u1ec7n c\u00f3<\/h2>\n

Ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n xu\u1ea5t
\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb th\u01b0\u01a1ng m\u1ea1i v\u1edbi quy tr\u00ecnh ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng nghi\u00eam ng\u1eb7t v\u00e0 t\u1ef7 l\u1ec7 l\u1ed7i th\u1ea5p.<\/p>\n

D\u00e0nh cho nghi\u00ean c\u1ee9u
Ph\u00f9 h\u1ee3p cho vi\u1ec7c nghi\u00ean c\u1ee9u ph\u00e1t tri\u1ec3n, th\u1eed nghi\u1ec7m v\u00e0 t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh trong ph\u00f2ng th\u00ed nghi\u1ec7m.<\/p>\n

L\u1edbp gi\u1ea3
\u0110\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong hi\u1ec7u chu\u1ea9n thi\u1ebft b\u1ecb, ki\u1ec3m tra quy tr\u00ecnh v\u00e0 c\u00e1c m\u1ee5c \u0111\u00edch kh\u00f4ng li\u00ean quan \u0111\u1ebfn ch\u1ee9c n\u0103ng.<\/p>\n

So s\u00e1nh gi\u1eefa Si v\u00e0 SiC<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n
B\u1ea5t \u0111\u1ed9ng s\u1ea3n<\/th>\nSilic<\/th>\nCacbua silic<\/th>\n<\/tr>\n<\/thead>\n
Kho\u1ea3ng c\u00e1ch n\u0103ng l\u01b0\u1ee3ng<\/td>\n1,12 eV<\/td>\n~3,26 eV<\/td>\n<\/tr>\n
\u0110i\u1ec7n tr\u1edf su\u1ea5t<\/td>\nTh\u1ea5p<\/td>\nR\u1ea5t cao (HPSI)<\/td>\n<\/tr>\n
\u0110\u1ed9 d\u1eabn nhi\u1ec7t<\/td>\nTrung b\u00ecnh<\/td>\nCao<\/td>\n<\/tr>\n
Kh\u1ea3 n\u0103ng \u0111i\u1ec1u ch\u1ec9nh t\u1ea7n s\u1ed1<\/td>\nS\u1ed1 l\u01b0\u1ee3ng c\u00f3 h\u1ea1n<\/td>\nTuy\u1ec7t v\u1eddi<\/td>\n<\/tr>\n
Tr\u1ecdng t\u00e2m c\u1ee7a \u1ee9ng d\u1ee5ng<\/td>\nLogic v\u00e0 m\u1ea1ch t\u00edch h\u1ee3p<\/td>\nT\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn v\u00e0 t\u1ea7n s\u1ed1 cao<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Silic v\u1eabn chi\u1ebfm v\u1ecb tr\u00ed ch\u1ee7 \u0111\u1ea1o trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed truy\u1ec1n th\u1ed1ng, trong khi cacbua silic ng\u00e0y c\u00e0ng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c h\u1ec7 th\u1ed1ng t\u1ea7n s\u1ed1 cao v\u00e0 hi\u1ec7u su\u1ea5t cao.<\/p>\n

C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n

C\u00e2u h\u1ecfi: T\u1ea5m wafer cacbua silic HPSI l\u00e0 g\u00ec?
T\u1ea5m wafer HPSI l\u00e0 m\u1ed9t ch\u1ea5t n\u1ec1n cacbua silic b\u00e1n d\u1eabn c\u00e1ch \u0111i\u1ec7n c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao v\u1edbi \u0111i\u1ec7n tr\u1edf su\u1ea5t r\u1ea5t cao, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF), vi s\u00f3ng v\u00e0 quang \u0111i\u1ec7n t\u1eed.<\/p>\n

C\u00e2u h\u1ecfi: T\u1ea1i sao \u0111i\u1ec7n tr\u1edf su\u1ea5t cao l\u1ea1i quan tr\u1ecdng?
\u0110i\u1ec7n tr\u1edf su\u1ea5t cao gi\u00fap gi\u1ea3m hi\u1ec7n t\u01b0\u1ee3ng d\u1eabn \u0111i\u1ec7n ph\u1ee5 v\u00e0 nhi\u1ec5u t\u00edn hi\u1ec7u, \u0111i\u1ec1u n\u00e0y c\u00f3 \u00fd ngh\u0129a quan tr\u1ecdng trong vi\u1ec7c duy tr\u00ec hi\u1ec7u su\u1ea5t v\u00e0 t\u00ednh to\u00e0n v\u1eb9n t\u00edn hi\u1ec7u trong c\u00e1c thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 cao.<\/p>\n

H\u1ecfi: Carbide silic c\u00f3 ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng quang h\u1ecdc kh\u00f4ng?
\u0110\u00fang v\u1eady, cacbua silic c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong m\u1ed9t s\u1ed1 \u1ee9ng d\u1ee5ng quang h\u1ecdc v\u00e0 quang t\u1eed nh\u1edd t\u00ednh \u1ed5n \u0111\u1ecbnh nhi\u1ec7t v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c quy tr\u00ecnh ch\u1ebf t\u1ea1o ti\u00ean ti\u1ebfn.<\/p>","protected":false},"excerpt":{"rendered":"

T\u1ea5m wafer cacbua silic HPSI 4 inch l\u00e0 v\u1eadt li\u1ec7u then ch\u1ed1t cho c\u00e1c h\u1ec7 th\u1ed1ng \u0111i\u1ec7n t\u1eed t\u1ea7n s\u1ed1 cao v\u00e0 th\u1ebf h\u1ec7 m\u1edbi. S\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa \u0111i\u1ec7n tr\u1edf su\u1ea5t cao, hi\u1ec7u su\u1ea5t nhi\u1ec7t v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ea5u tr\u00fac khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c thi\u1ebft b\u1ecb RF, h\u1ea1 t\u1ea7ng vi\u1ec5n th\u00f4ng v\u00e0 c\u00e1c c\u00f4ng ngh\u1ec7 quang h\u1ecdc m\u1edbi n\u1ed5i. Khi nhu c\u1ea7u v\u1ec1 c\u00e1c h\u1ec7 th\u1ed1ng hi\u1ec7u su\u1ea5t cao v\u00e0 t\u1ea7n s\u1ed1 cao ti\u1ebfp t\u1ee5c gia t\u0103ng, c\u00e1c ch\u1ea5t n\u1ec1n SiC HPSI \u0111ang ng\u00e0y c\u00e0ng tr\u1edf n\u00ean quan tr\u1ecdng trong c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>","protected":false},"featured_media":2174,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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