\n| M\u1eadt \u0111\u1ed9 l\u1ed7i nghi\u00eam tr\u1ecdng<\/td>\n | \u22640,2 cm\u207b\u00b2 (\u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a xu\u1ed1ng 0,01 cm\u207b\u00b2)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\nC\u00e1c t\u00ecnh hu\u1ed1ng \u1ee9ng d\u1ee5ng<\/h3>\nThi\u1ebft b\u1ecb t\u1ea1o l\u1edbp SiC theo ph\u01b0\u01a1ng ph\u00e1p epitaxy d\u00f2ng kh\u00ed d\u1ecdc ki\u1ec3u t\u00e1ch \u0111\u00f4i \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn SiC hi\u1ec7u su\u1ea5t cao, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p \u0111\u00f2i h\u1ecfi hi\u1ec7u su\u1ea5t cao, \u0111i\u1ec7n \u00e1p cao v\u00e0 kh\u1ea3 n\u0103ng t\u1ea3n nhi\u1ec7t t\u1ed1t:<\/p>\n Xe \u0111i\u1ec7n (EV)<\/strong>
\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t MOSFET SiC v\u00e0 c\u00e1c m\u00f4-\u0111un c\u00f4ng su\u1ea5t cho b\u1ed9 bi\u1ebfn t\u1ea7n, b\u1ed9 s\u1ea1c tr\u00ean xe v\u00e0 b\u1ed9 chuy\u1ec3n \u0111\u1ed5i DC-DC, gi\u00fap n\u00e2ng cao hi\u1ec7u su\u1ea5t n\u0103ng l\u01b0\u1ee3ng v\u00e0 t\u0103ng ph\u1ea1m vi ho\u1ea1t \u0111\u1ed9ng.<\/p>\nH\u1ec7 th\u1ed1ng n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o<\/strong>
\u0110\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong c\u00e1c b\u1ed9 bi\u1ebfn t\u1ea7n quang \u0111i\u1ec7n v\u00e0 h\u1ec7 th\u1ed1ng l\u01b0u tr\u1eef n\u0103ng l\u01b0\u1ee3ng, gi\u00fap n\u00e2ng cao hi\u1ec7u su\u1ea5t chuy\u1ec3n \u0111\u1ed5i v\u00e0 \u0111\u1ed9 tin c\u1eady.<\/p>\n\u0110i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t c\u00f4ng nghi\u1ec7p<\/strong>
Ph\u00f9 h\u1ee3p cho c\u00e1c b\u1ed9 \u0111i\u1ec1u khi\u1ec3n \u0111\u1ed9ng c\u01a1 c\u00f4ng su\u1ea5t cao, h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a c\u00f4ng nghi\u1ec7p v\u00e0 b\u1ed9 ngu\u1ed3n y\u00eau c\u1ea7u ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh v\u00e0 hi\u1ec7u qu\u1ea3.<\/p>\nGiao th\u00f4ng \u0111\u01b0\u1eddng s\u1eaft v\u00e0 m\u1ea1ng l\u01b0\u1edbi \u0111i\u1ec7n<\/strong>
H\u1ed7 tr\u1ee3 c\u00e1c thi\u1ebft b\u1ecb cao \u00e1p v\u00e0 t\u1ea7n s\u1ed1 cao \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong l\u01b0\u1edbi \u0111i\u1ec7n th\u00f4ng minh, h\u1ec7 th\u1ed1ng truy\u1ec1n \u0111\u1ed9ng v\u00e0 h\u1ea1 t\u1ea7ng truy\u1ec1n t\u1ea3i \u0111i\u1ec7n.<\/p>\nThi\u1ebft b\u1ecb \u0111i\u1ec7n cao c\u1ea5p<\/strong>
R\u1ea5t ph\u00f9 h\u1ee3p \u0111\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb SiC ti\u00ean ti\u1ebfn nh\u01b0 \u0111i-\u1ed1t Schottky, MOSFET v\u00e0 c\u00e1c linh ki\u1ec7n cao \u00e1p th\u1ebf h\u1ec7 m\u1edbi.<\/p>\n![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png\") <\/p>\n
C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h3>\n1. Thi\u1ebft b\u1ecb epitaxy ki\u1ec3u t\u00e1ch n\u00e0y h\u1ed7 tr\u1ee3 c\u00e1c k\u00edch th\u01b0\u1edbc wafer n\u00e0o?<\/strong>
H\u1ec7 th\u1ed1ng n\u00e0y h\u1ed7 tr\u1ee3 c\u1ea3 t\u1ea5m wafer SiC 6 inch v\u00e0 8 inch, gi\u00fap c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t \u0111\u00e1p \u1ee9ng nhu c\u1ea7u s\u1ea3n xu\u1ea5t hi\u1ec7n t\u1ea1i \u0111\u1ed3ng th\u1eddi chu\u1ea9n b\u1ecb cho vi\u1ec7c m\u1edf r\u1ed9ng quy m\u00f4 trong t\u01b0\u01a1ng lai.<\/p>\n2. Thi\u1ebft k\u1ebf ki\u1ec3u t\u00e1ch r\u1eddi c\u00f3 nh\u1eefng \u01b0u \u0111i\u1ec3m g\u00ec?<\/strong>
Thi\u1ebft k\u1ebf m\u00f4-\u0111un t\u00e1ch r\u1eddi cho ph\u00e9p l\u1eafp \u0111\u1eb7t \u0111\u1ed9c l\u1eadp c\u00e1c m\u00f4-\u0111un ngu\u1ed3n \u0111i\u1ec7n, h\u1ec7 th\u1ed1ng tho\u00e1t kh\u00ed v\u00e0 EFEM, gi\u00fap t\u0103ng t\u00ednh linh ho\u1ea1t trong vi\u1ec7c b\u1ed1 tr\u00ed nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t v\u00e0 n\u00e2ng cao s\u1ef1 thu\u1eadn ti\u1ec7n trong b\u1ea3o tr\u00ec.<\/p>\n3. Thi\u1ebft k\u1ebf lu\u1ed3ng kh\u00ed d\u1ecdc gi\u00fap c\u1ea3i thi\u1ec7n ch\u1ea5t l\u01b0\u1ee3ng qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 nh\u01b0 th\u1ebf n\u00e0o?<\/strong>
Lu\u1ed3ng kh\u00ed d\u1ecdc \u0111\u1ea3m b\u1ea3o s\u1ef1 ph\u00e2n b\u1ed1 kh\u00ed \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean to\u00e0n b\u1ed9 t\u1ea5m wafer, gi\u00fap \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 d\u00e0y \u1ed5n \u0111\u1ecbnh, n\u1ed3ng \u0111\u1ed9 pha t\u1ea1p \u1ed5n \u0111\u1ecbnh v\u00e0 gi\u1ea3m m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt.<\/p>\n4. Thi\u1ebft b\u1ecb n\u00e0y c\u00f3 ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t kh\u00f4ng?<\/strong><\/p>\n\u0110\u00fang v\u1eady, c\u1ea5u h\u00ecnh hai bu\u1ed3ng h\u1ed7 tr\u1ee3 ho\u1ea1t \u0111\u1ed9ng li\u00ean t\u1ee5c tr\u00ean nhi\u1ec1u l\u00f2 nung, v\u1edbi c\u00f4ng su\u1ea5t v\u01b0\u1ee3t qu\u00e1 1.100 t\u1ea5m wafer m\u1ed7i th\u00e1ng, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh gi\u1ea3i ph\u00e1p l\u00fd t\u01b0\u1edfng cho s\u1ea3n xu\u1ea5t quy m\u00f4 l\u1edbn v\u00e0 \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng \u1ed5n \u0111\u1ecbnh cao cho c\u00e1c t\u1ea5m wafer \u0111\u1ed3ng th\u1eddi gi\u1ea3m thi\u1ec3u th\u1eddi gian ng\u1eebng ho\u1ea1t \u0111\u1ed9ng.<\/p>","protected":false},"excerpt":{"rendered":" Thi\u1ebft b\u1ecb ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 epitaxy silicon carbide (SiC) ki\u1ec3u lu\u1ed3ng kh\u00ed d\u1ecdc ph\u00e2n t\u00e1ch l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 epitaxy ti\u00ean ti\u1ebfn, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 s\u1ea3n xu\u1ea5t hi\u1ec7u qu\u1ea3 c\u00e1c t\u1ea5m wafer epitaxy SiC k\u00edch th\u01b0\u1edbc 6 inch v\u00e0 8 inch. V\u1edbi ki\u1ebfn tr\u00fac m\u00f4-\u0111un ki\u1ec3u ph\u00e2n t\u00e1ch, b\u1ed9 ngu\u1ed3n, c\u00e1c m\u00f4-\u0111un h\u00fat kh\u00ed th\u1ea3i v\u00e0 c\u00e1c m\u00f4-\u0111un EFEM\/PM\/TM c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c l\u1eafp \u0111\u1eb7t \u0111\u1ed9c l\u1eadp trong c\u00e1c khu v\u1ef1c an to\u00e0n ho\u1eb7c khu v\u1ef1c l\u1eedng.<\/p>","protected":false},"featured_media":2087,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[730],"product_tag":[615,616,485,751,752,756,749,759,744,750,753,755,758,757,748,746,754,741,747],"class_list":{"0":"post-2084","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-epitaxy-equipment","7":"product_tag-6-inch-wafer","8":"product_tag-8-inch-wafer","9":"product_tag-automated-wafer-handling","10":"product_tag-dual-chamber","11":"product_tag-efem-integration","12":"product_tag-electric-vehicle","13":"product_tag-high-throughput","14":"product_tag-high-end-sic-devices","15":"product_tag-industrial-power-electronics","16":"product_tag-low-defect","17":"product_tag-multi-zone-temperature-control","18":"product_tag-power-semiconductor","19":"product_tag-rail-transit","20":"product_tag-renewable-energy","21":"product_tag-sic-epitaxy","22":"product_tag-split-type-sic-epitaxy-equipment","23":"product_tag-thick-film-epitaxy","24":"product_tag-trench-filling-epitaxy","25":"product_tag-vertical-airflow","26":"desktop-align-left","27":"tablet-align-left","28":"mobile-align-left","29":"ast-product-gallery-layout-horizontal-slider","30":"ast-product-tabs-layout-horizontal","32":"first","33":"instock","34":"shipping-taxable","35":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2084","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2084"}],"version-history":[{"count":3,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2084\/revisions"}],"predecessor-version":[{"id":2093,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2084\/revisions\/2093"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2087"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2084"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2084"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2084"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2084"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}} |
![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-300x300.png\")
Thi\u1ebft b\u1ecb t\u1ea1o l\u1edbp ph\u1ee7 silicon carbide (SiC) ki\u1ec3u d\u00f2ng kh\u00ed d\u1ecdc ph\u00e2n t\u00e1ch l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng t\u1ea1o l\u1edbp ph\u1ee7 ti\u00ean ti\u1ebfn, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 s\u1ea3n xu\u1ea5t hi\u1ec7u qu\u1ea3 c\u00e1c t\u1ea5m wafer SiC 6 inch v\u00e0 8 inch. V\u1edbi ki\u1ebfn tr\u00fac ki\u1ec3u ph\u00e2n t\u00e1ch m\u00f4-\u0111un, b\u1ed9 ngu\u1ed3n, c\u00e1c m\u00f4-\u0111un h\u00fat kh\u00ed th\u1ea3i v\u00e0 c\u00e1c m\u00f4-\u0111un EFEM\/PM\/TM c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c l\u1eafp \u0111\u1eb7t \u0111\u1ed9c l\u1eadp trong c\u00e1c khu v\u1ef1c an to\u00e0n ho\u1eb7c khu v\u1ef1c l\u1eedng. S\u1ef1 linh ho\u1ea1t n\u00e0y cho ph\u00e9p t\u00edch h\u1ee3p li\u1ec1n m\u1ea1ch v\u00e0o c\u00e1c m\u00f4i tr\u01b0\u1eddng nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t hi\u1ec7n \u0111\u1ea1i \u0111\u1ed3ng th\u1eddi duy tr\u00ec kh\u1ea3 n\u0103ng t\u1ef1 \u0111\u1ed9ng h\u00f3a ho\u00e0n to\u00e0n th\u00f4ng qua m\u00f4-\u0111un SMIF v\u00e0 h\u1ec7 th\u1ed1ng li\u00ean k\u1ebft c\u1ea7n tr\u1ee5c tr\u00ean cao.<\/p>\n![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png\")
\u01afu \u0111i\u1ec3m k\u1ef9 thu\u1eadt ch\u00ednh<\/h3>\n