{"id":2077,"date":"2026-04-03T02:07:51","date_gmt":"2026-04-03T02:07:51","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2077"},"modified":"2026-04-03T02:09:04","modified_gmt":"2026-04-03T02:09:04","slug":"integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/","title":{"rendered":"Thi\u1ebft b\u1ecb t\u1ea1o l\u1edbp ph\u1ee7 SiC theo d\u00f2ng kh\u00ed d\u1ecdc t\u00edch h\u1ee3p d\u00e0nh cho c\u00e1c t\u1ea5m wafer epitaxy 6\u201d\/8\u201d"},"content":{"rendered":"<p data-start=\"187\" data-end=\"641\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2079 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Thi\u1ebft b\u1ecb ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 tinh th\u1ec3 cacbua silic (SiC) v\u1edbi lu\u1ed3ng kh\u00ed d\u1ecdc t\u00edch h\u1ee3p l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 tinh th\u1ec3 ti\u00ean ti\u1ebfn, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 s\u1ea3n xu\u1ea5t hi\u1ec7u qu\u1ea3 c\u00e1c t\u1ea5m wafer SiC c\u00f3 \u0111\u01b0\u1eddng k\u00ednh 6 inch v\u00e0 8 inch. \u0110\u01b0\u1ee3c thi\u1ebft k\u1ebf nh\u1eb1m \u0111\u00e1p \u1ee9ng nhu c\u1ea7u ng\u00e0y c\u00e0ng t\u0103ng trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t, h\u1ec7 th\u1ed1ng n\u00e0y t\u00edch h\u1ee3p kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 ch\u00ednh x\u00e1c, \u0111\u1ed9ng h\u1ecdc d\u00f2ng kh\u00ed \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a v\u00e0 t\u1ef1 \u0111\u1ed9ng h\u00f3a th\u00f4ng minh, t\u1eeb \u0111\u00f3 mang l\u1ea1i hi\u1ec7u su\u1ea5t v\u01b0\u1ee3t tr\u1ed9i v\u1ec1 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u, n\u0103ng su\u1ea5t v\u00e0 ki\u1ec3m so\u00e1t khuy\u1ebft t\u1eadt.<\/p>\n<p data-start=\"643\" data-end=\"982\">Tr\u00e1i tim c\u1ee7a h\u1ec7 th\u1ed1ng l\u00e0 thi\u1ebft k\u1ebf \u0111\u1ea7u phun kh\u00ed l\u01b0u th\u00f4ng theo chi\u1ec1u d\u1ecdc s\u00e1ng t\u1ea1o, gi\u00fap ph\u00e2n ph\u1ed1i \u0111\u1ed3ng \u0111\u1ec1u kh\u00ed x\u1eed l\u00fd tr\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer. K\u1ebft h\u1ee3p v\u1edbi h\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9 \u0111a v\u00f9ng, thi\u1ebft k\u1ebf n\u00e0y \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y tuy\u1ec7t v\u1eddi v\u00e0 n\u1ed3ng \u0111\u1ed9 pha t\u1ea1p \u1ed5n \u0111\u1ecbnh \u2014 nh\u1eefng y\u1ebfu t\u1ed1 then ch\u1ed1t \u0111\u1ed1i v\u1edbi c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n SiC hi\u1ec7u su\u1ea5t cao.<\/p>\n<p data-start=\"984\" data-end=\"1310\">H\u1ec7 th\u1ed1ng n\u00e0y \u00e1p d\u1ee5ng c\u1ea5u tr\u00fac t\u00edch h\u1ee3p cao v\u1edbi kh\u1ea3 n\u0103ng x\u1eed l\u00fd t\u1ea5m wafer t\u1ef1 \u0111\u1ed9ng th\u00f4ng qua h\u1ec7 th\u1ed1ng EFEM, c\u00f9ng v\u1edbi c\u01a1 ch\u1ebf chuy\u1ec3n t\u1ea5m wafer \u1edf nhi\u1ec7t \u0111\u1ed9 cao. \u0110i\u1ec1u n\u00e0y cho ph\u00e9p t\u00edch h\u1ee3p li\u1ec1n m\u1ea1ch v\u00e0o c\u00e1c d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i, gi\u1ea3m thi\u1ec3u s\u1ef1 can thi\u1ec7p th\u1ee7 c\u00f4ng, \u0111\u1ed3ng th\u1eddi n\u00e2ng cao t\u00ednh nh\u1ea5t qu\u00e1n c\u1ee7a quy tr\u00ecnh v\u00e0 hi\u1ec7u qu\u1ea3 v\u1eadn h\u00e0nh.<\/p>\n<p data-start=\"1312\" data-end=\"1615\">\u0110\u1ec3 h\u1ed7 tr\u1ee3 s\u1ea3n xu\u1ea5t quy m\u00f4 c\u00f4ng nghi\u1ec7p, thi\u1ebft b\u1ecb n\u00e0y \u0111\u01b0\u1ee3c trang b\u1ecb c\u1ea5u h\u00ecnh hai bu\u1ed3ng, cho ph\u00e9p v\u1eadn h\u00e0nh li\u00ean t\u1ee5c tr\u00ean nhi\u1ec1u l\u00f2 nung. V\u1edbi c\u00f4ng su\u1ea5t x\u1eed l\u00fd h\u01a1n 1.100 t\u1ea5m wafer m\u1ed7i th\u00e1ng \u2014 v\u00e0 c\u00f3 th\u1ec3 l\u00ean t\u1edbi 1.200 t\u1ea5m wafer nh\u1edd t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh \u2014 thi\u1ebft b\u1ecb n\u00e0y r\u1ea5t ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t s\u1ed1 l\u01b0\u1ee3ng l\u1edbn.<\/p>\n<p data-start=\"1617\" data-end=\"1971\">Thi\u1ebft b\u1ecb n\u00e0y t\u01b0\u01a1ng th\u00edch v\u1edbi c\u1ea3 t\u1ea5m wafer SiC 6 inch v\u00e0 8 inch, mang l\u1ea1i s\u1ef1 linh ho\u1ea1t cho c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t \u0111ang chuy\u1ec3n sang s\u1eed d\u1ee5ng c\u00e1c k\u00edch th\u01b0\u1edbc t\u1ea5m wafer l\u1edbn h\u01a1n. Thi\u1ebft b\u1ecb n\u00e0y c\u0169ng th\u1ec3 hi\u1ec7n kh\u1ea3 n\u0103ng v\u01b0\u1ee3t tr\u1ed9i trong vi\u1ec7c t\u1ea1o l\u1edbp epitaksi d\u00e0y v\u00e0 epitaksi l\u1ea5p r\u00e3nh, khi\u1ebfn n\u00f3 \u0111\u1eb7c bi\u1ec7t ph\u00f9 h\u1ee3p \u0111\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb cao \u00e1p v\u00e0 c\u00f4ng su\u1ea5t cao ti\u00ean ti\u1ebfn.<\/p>\n<p data-start=\"1973\" data-end=\"2214\">Ngo\u00e0i ra, thi\u1ebft k\u1ebf l\u00f2 ph\u1ea3n \u1ee9ng \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a gi\u00fap \u0111\u1ea3m b\u1ea3o m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p, n\u00e2ng cao n\u0103ng su\u1ea5t v\u00e0 gi\u1ea3m chi ph\u00ed s\u1edf h\u1eefu. C\u1ea5u tr\u00fac ch\u1eafc ch\u1eafn c\u00f9ng thi\u1ebft k\u1ebf thu\u1eadn ti\u1ec7n cho vi\u1ec7c b\u1ea3o tr\u00ec c\u00e0ng gi\u00fap t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 tin c\u1eady l\u00e2u d\u00e0i v\u00e0 s\u1ef1 \u1ed5n \u0111\u1ecbnh trong v\u1eadn h\u00e0nh.<\/p>\n<h2 data-section-id=\"qpn8c9\" data-start=\"2221\" data-end=\"2252\"><span role=\"text\"><img decoding=\"async\" class=\"size-medium wp-image-2078 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u01afu \u0111i\u1ec3m k\u1ef9 thu\u1eadt ch\u00ednh<\/span><\/h2>\n<ul data-start=\"2254\" data-end=\"2704\">\n<li data-section-id=\"1q2t12k\" data-start=\"2254\" data-end=\"2321\">Thi\u1ebft k\u1ebf v\u00f2i sen c\u00f3 lu\u1ed3ng kh\u00ed d\u1ecdc \u0111\u1ec3 ph\u00e2n ph\u1ed1i kh\u00ed \u0111\u1ed3ng \u0111\u1ec1u<\/li>\n<li data-section-id=\"1lzu0dd\" data-start=\"2322\" data-end=\"2387\">Ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 \u0111a v\u00f9ng \u0111\u1ec3 qu\u1ea3n l\u00fd nhi\u1ec7t ch\u00ednh x\u00e1c<\/li>\n<li data-section-id=\"1emeqzr\" data-start=\"2388\" data-end=\"2449\">C\u1ea5u h\u00ecnh hai bu\u1ed3ng d\u00e0nh cho s\u1ea3n xu\u1ea5t c\u00f4ng su\u1ea5t cao<\/li>\n<li data-section-id=\"rs6yfl\" data-start=\"2450\" data-end=\"2499\">M\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p v\u00e0 hi\u1ec7u su\u1ea5t n\u0103ng su\u1ea5t cao<\/li>\n<li data-section-id=\"h9m4ox\" data-start=\"2500\" data-end=\"2550\">X\u1eed l\u00fd t\u1ea5m wafer t\u1ef1 \u0111\u1ed9ng t\u00edch h\u1ee3p EFEM<\/li>\n<li data-section-id=\"bze71o\" data-start=\"2551\" data-end=\"2594\">T\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c t\u1ea5m wafer SiC k\u00edch th\u01b0\u1edbc 6 inch v\u00e0 8 inch<\/li>\n<li data-section-id=\"xhhop\" data-start=\"2595\" data-end=\"2655\">\u0110\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a cho c\u00e1c quy tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 d\u00e0y v\u00e0 l\u1ea5p \u0111\u1ea7y r\u00e3nh<\/li>\n<li data-section-id=\"1a3549x\" data-start=\"2656\" data-end=\"2704\">\u0110\u1ed9 tin c\u1eady cao c\u00f9ng v\u1edbi quy tr\u00ecnh b\u1ea3o tr\u00ec \u0111\u01a1n gi\u1ea3n<\/li>\n<\/ul>\n<h2 data-section-id=\"ca04ra\" data-start=\"2711\" data-end=\"2737\"><span role=\"text\">Hi\u1ec7u su\u1ea5t quy tr\u00ecnh<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2739\" data-end=\"3287\">\n<thead data-start=\"2739\" data-end=\"2768\">\n<tr data-start=\"2739\" data-end=\"2768\">\n<th class=\"\" data-start=\"2739\" data-end=\"2751\" data-col-size=\"sm\">Tham s\u1ed1<\/th>\n<th class=\"\" data-start=\"2751\" data-end=\"2768\" data-col-size=\"md\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2796\" data-end=\"3287\">\n<tr data-start=\"2796\" data-end=\"2884\">\n<td data-start=\"2796\" data-end=\"2809\" data-col-size=\"sm\">C\u00f4ng su\u1ea5t<\/td>\n<td data-start=\"2809\" data-end=\"2884\" data-col-size=\"md\">\u22651.100 t\u1ea5m wafer\/th\u00e1ng (h\u1ec7 th\u1ed1ng hai bu\u1ed3ng), t\u1ed1i \u0111a 1.200 t\u1ea5m wafer\/th\u00e1ng (khi \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a)<\/td>\n<\/tr>\n<tr data-start=\"2885\" data-end=\"2938\">\n<td data-start=\"2885\" data-end=\"2912\" data-col-size=\"sm\">Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1ec1 k\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\n<td data-col-size=\"md\" data-start=\"2912\" data-end=\"2938\">T\u1ea5m wafer SiC epitaxial 6\u201d \/ 8\u201d<\/td>\n<\/tr>\n<tr data-start=\"2939\" data-end=\"2975\">\n<td data-start=\"2939\" data-end=\"2961\" data-col-size=\"sm\">Ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9<\/td>\n<td data-start=\"2961\" data-end=\"2975\" data-col-size=\"md\">\u0110a v\u00f9ng<\/td>\n<\/tr>\n<tr data-start=\"2976\" data-end=\"3035\">\n<td data-start=\"2976\" data-end=\"2993\" data-col-size=\"sm\">H\u1ec7 th\u1ed1ng l\u01b0u th\u00f4ng kh\u00f4ng kh\u00ed<\/td>\n<td data-start=\"2993\" data-end=\"3035\" data-col-size=\"md\">Lu\u1ed3ng kh\u00ed \u0111a v\u00f9ng c\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh theo chi\u1ec1u d\u1ecdc<\/td>\n<\/tr>\n<tr data-start=\"3036\" data-end=\"3067\">\n<td data-start=\"3036\" data-end=\"3053\" data-col-size=\"sm\">T\u1ed1c \u0111\u1ed9 quay<\/td>\n<td data-start=\"3053\" data-end=\"3067\" data-col-size=\"md\">0\u20131.000 v\u00f2ng\/ph\u00fat<\/td>\n<\/tr>\n<tr data-start=\"3068\" data-end=\"3101\">\n<td data-start=\"3068\" data-end=\"3086\" data-col-size=\"sm\">T\u1ed1c \u0111\u1ed9 t\u0103ng tr\u01b0\u1edfng t\u1ed1i \u0111a<\/td>\n<td data-start=\"3086\" data-end=\"3101\" data-col-size=\"md\">\u226560 \u03bcm\/gi\u1edd<\/td>\n<\/tr>\n<tr data-start=\"3102\" data-end=\"3163\">\n<td data-start=\"3102\" data-end=\"3125\" data-col-size=\"sm\">\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y<\/td>\n<td data-col-size=\"md\" data-start=\"3125\" data-end=\"3163\">\u22642% (\u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a \u22641%, \u03c3\/trung b\u00ecnh, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"3164\" data-end=\"3224\">\n<td data-start=\"3164\" data-end=\"3184\" data-col-size=\"sm\">S\u1ef1 th\u1ed1ng nh\u1ea5t trong vi\u1ec7c s\u1eed d\u1ee5ng ch\u1ea5t k\u00edch th\u00edch<\/td>\n<td data-col-size=\"md\" data-start=\"3184\" data-end=\"3224\">\u22643% (\u0111\u00e3 t\u1ed1i \u01b0u h\u00f3a \u22641,5%, \u03c3\/trung b\u00ecnh, EE 5 mm)<\/td>\n<\/tr>\n<tr data-start=\"3225\" data-end=\"3287\">\n<td data-start=\"3225\" data-end=\"3249\" data-col-size=\"sm\">M\u1eadt \u0111\u1ed9 l\u1ed7i nghi\u00eam tr\u1ecdng<\/td>\n<td data-col-size=\"md\" data-start=\"3249\" data-end=\"3287\">\u22640,2 cm\u207b\u00b2 (\u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a xu\u1ed1ng 0,01 cm\u207b\u00b2)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h2 data-section-id=\"1w46w82\" data-start=\"3294\" data-end=\"3322\"><span role=\"text\">C\u00e1c t\u00ecnh hu\u1ed1ng \u1ee9ng d\u1ee5ng<\/span><\/h2>\n<p data-start=\"3324\" data-end=\"3514\">Thi\u1ebft b\u1ecb n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn d\u1ef1a tr\u00ean SiC, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong c\u00e1c ng\u00e0nh c\u00f4ng nghi\u1ec7p \u0111\u00f2i h\u1ecfi hi\u1ec7u su\u1ea5t cao, \u0111i\u1ec7n \u00e1p cao v\u00e0 kh\u1ea3 n\u0103ng t\u1ea3n nhi\u1ec7t t\u1ed1t:<\/p>\n<ul data-start=\"3516\" data-end=\"4364\">\n<li data-section-id=\"qrtaas\" data-start=\"3516\" data-end=\"3707\">Xe \u0111i\u1ec7n (EV)<br data-start=\"3545\" data-end=\"3548\" \/>\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong s\u1ea3n xu\u1ea5t MOSFET SiC v\u00e0 c\u00e1c m\u00f4-\u0111un c\u00f4ng su\u1ea5t cho b\u1ed9 bi\u1ebfn t\u1ea7n, b\u1ed9 s\u1ea1c tr\u00ean xe v\u00e0 b\u1ed9 chuy\u1ec3n \u0111\u1ed5i DC-DC, gi\u00fap n\u00e2ng cao hi\u1ec7u su\u1ea5t n\u0103ng l\u01b0\u1ee3ng v\u00e0 t\u0103ng ph\u1ea1m vi ho\u1ea1t \u0111\u1ed9ng.<\/li>\n<li data-section-id=\"1j97evh\" data-start=\"3709\" data-end=\"3867\">H\u1ec7 th\u1ed1ng n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o<br data-start=\"3739\" data-end=\"3742\" \/>\u0110\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong c\u00e1c b\u1ed9 bi\u1ebfn t\u1ea7n quang \u0111i\u1ec7n v\u00e0 h\u1ec7 th\u1ed1ng l\u01b0u tr\u1eef n\u0103ng l\u01b0\u1ee3ng, gi\u00fap n\u00e2ng cao hi\u1ec7u su\u1ea5t chuy\u1ec3n \u0111\u1ed5i v\u00e0 \u0111\u1ed9 tin c\u1eady c\u1ee7a h\u1ec7 th\u1ed1ng.<\/li>\n<li data-section-id=\"8pfhmh\" data-start=\"3869\" data-end=\"4041\">\u0110i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t c\u00f4ng nghi\u1ec7p<br data-start=\"3903\" data-end=\"3906\" \/>Ph\u00f9 h\u1ee3p cho c\u00e1c b\u1ed9 \u0111i\u1ec1u khi\u1ec3n \u0111\u1ed9ng c\u01a1 c\u00f4ng su\u1ea5t cao, h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a c\u00f4ng nghi\u1ec7p v\u00e0 b\u1ed9 ngu\u1ed3n y\u00eau c\u1ea7u ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh v\u00e0 hi\u1ec7u qu\u1ea3.<\/li>\n<li data-section-id=\"frfj8s\" data-start=\"4043\" data-end=\"4206\">Giao th\u00f4ng \u0111\u01b0\u1eddng s\u1eaft v\u00e0 m\u1ea1ng l\u01b0\u1edbi \u0111i\u1ec7n<br data-start=\"4075\" data-end=\"4078\" \/>H\u1ed7 tr\u1ee3 c\u00e1c thi\u1ebft b\u1ecb cao \u00e1p v\u00e0 t\u1ea7n s\u1ed1 cao \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong l\u01b0\u1edbi \u0111i\u1ec7n th\u00f4ng minh, h\u1ec7 th\u1ed1ng truy\u1ec1n \u0111\u1ed9ng v\u00e0 h\u1ea1 t\u1ea7ng truy\u1ec1n t\u1ea3i \u0111i\u1ec7n.<\/li>\n<li data-section-id=\"1k6eb43\" data-start=\"4208\" data-end=\"4364\">Thi\u1ebft b\u1ecb \u0111i\u1ec7n cao c\u1ea5p<br data-start=\"4236\" data-end=\"4239\" \/>R\u1ea5t ph\u00f9 h\u1ee3p \u0111\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb SiC ti\u00ean ti\u1ebfn nh\u01b0 \u0111i-\u1ed1t Schottky, MOSFET v\u00e0 c\u00e1c linh ki\u1ec7n cao \u00e1p th\u1ebf h\u1ec7 m\u1edbi.<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"wp-image-2080 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png\" alt=\"\" width=\"1024\" height=\"578\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-300x169.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-768x433.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-18x10.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-600x339.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application.png 1285w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h2 data-section-id=\"elc90z\" data-start=\"4371\" data-end=\"4381\"><span role=\"text\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/span><\/h2>\n<h3 data-section-id=\"1f731tm\" data-start=\"4383\" data-end=\"4453\"><span role=\"text\">1. Thi\u1ebft b\u1ecb t\u1ea1o l\u1edbp ph\u1ee7 n\u00e0y h\u1ed7 tr\u1ee3 c\u00e1c k\u00edch th\u01b0\u1edbc t\u1ea5m wafer n\u00e0o?<\/span><\/h3>\n<p data-start=\"4454\" data-end=\"4606\">H\u1ec7 th\u1ed1ng n\u00e0y h\u1ed7 tr\u1ee3 c\u1ea3 t\u1ea5m wafer SiC 6 inch v\u00e0 8 inch, gi\u00fap c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t \u0111\u00e1p \u1ee9ng nhu c\u1ea7u s\u1ea3n xu\u1ea5t hi\u1ec7n t\u1ea1i \u0111\u1ed3ng th\u1eddi chu\u1ea9n b\u1ecb cho vi\u1ec7c m\u1edf r\u1ed9ng quy m\u00f4 trong t\u01b0\u01a1ng lai.<\/p>\n<h3 data-section-id=\"8a4v60\" data-start=\"4613\" data-end=\"4683\"><span role=\"text\">2. Thi\u1ebft k\u1ebf lu\u1ed3ng kh\u00ed d\u1ecdc mang l\u1ea1i nh\u1eefng l\u1ee3i \u00edch g\u00ec?<\/span><\/h3>\n<p data-start=\"4684\" data-end=\"4858\">H\u1ec7 th\u1ed1ng lu\u1ed3ng kh\u00ed d\u1ecdc \u0111\u1ea3m b\u1ea3o s\u1ef1 ph\u00e2n b\u1ed1 kh\u00ed \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean to\u00e0n b\u1ed9 t\u1ea5m wafer, gi\u00fap c\u1ea3i thi\u1ec7n \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y, gi\u1ea3m thi\u1ec3u khuy\u1ebft t\u1eadt v\u00e0 n\u00e2ng cao ch\u1ea5t l\u01b0\u1ee3ng t\u1ed5ng th\u1ec3 c\u1ee7a l\u1edbp epitaxial.<\/p>\n<h3 data-section-id=\"1rbmoqb\" data-start=\"4865\" data-end=\"4935\"><span role=\"text\">3. Thi\u1ebft b\u1ecb n\u00e0y c\u00f3 ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t kh\u00f4ng?<\/span><\/h3>\n<p data-start=\"4936\" data-end=\"5110\">\u0110\u00fang v\u1eady, h\u1ec7 th\u1ed1ng n\u00e0y \u0111\u01b0\u1ee3c trang b\u1ecb c\u1ea5u h\u00ecnh hai bu\u1ed3ng v\u00e0 ch\u1ebf \u0111\u1ed9 v\u1eadn h\u00e0nh li\u00ean t\u1ee5c, v\u1edbi c\u00f4ng su\u1ea5t x\u1eed l\u00fd h\u00e0ng th\u00e1ng v\u01b0\u1ee3t qu\u00e1 1.100 t\u1ea5m wafer. H\u1ec7 th\u1ed1ng n\u00e0y r\u1ea5t ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p quy m\u00f4 l\u1edbn v\u00e0 \u1ed5n \u0111\u1ecbnh, \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng s\u1ea3n ph\u1ea9m \u0111\u1ed3ng \u0111\u1ec1u, t\u1ef7 l\u1ec7 thu h\u1ed3i cao v\u00e0 hi\u1ec7u qu\u1ea3 v\u1eadn h\u00e0nh l\u00e2u d\u00e0i.<\/p>","protected":false},"excerpt":{"rendered":"<p>Thi\u1ebft b\u1ecb ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 tinh th\u1ec3 cacbua silic (SiC) v\u1edbi lu\u1ed3ng kh\u00ed d\u1ecdc t\u00edch h\u1ee3p l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 tinh th\u1ec3 ti\u00ean ti\u1ebfn, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 s\u1ea3n xu\u1ea5t hi\u1ec7u qu\u1ea3 c\u00e1c t\u1ea5m wafer SiC c\u00f3 \u0111\u01b0\u1eddng k\u00ednh 6 inch v\u00e0 8 inch.<\/p>","protected":false},"featured_media":2078,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[730],"product_tag":[734,735,737,738,745,740,744,739,733,731,603,732,742,741,736,743],"class_list":{"0":"post-2077","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-epitaxy-equipment","7":"product_tag-6-inch-sic-wafer","8":"product_tag-8-inch-sic-wafer","9":"product_tag-cvd-epitaxy-system","10":"product_tag-epitaxial-growth-system","11":"product_tag-ev-power-semiconductors","12":"product_tag-high-voltage-sic-devices","13":"product_tag-industrial-power-electronics","14":"product_tag-semiconductor-manufacturing-equipment","15":"product_tag-sic-epi-wafer-production","16":"product_tag-sic-epitaxy-equipment","17":"product_tag-sic-power-devices","18":"product_tag-silicon-carbide-epitaxy-reactor","19":"product_tag-thick-epitaxy-growth","20":"product_tag-trench-filling-epitaxy","21":"product_tag-vertical-airflow-epitaxy","22":"product_tag-wafer-epitaxy-reactor","23":"desktop-align-left","24":"tablet-align-left","25":"mobile-align-left","26":"ast-product-gallery-layout-horizontal-slider","27":"ast-product-tabs-layout-horizontal","29":"first","30":"instock","31":"shipping-taxable","32":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2077","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2077"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2077\/revisions"}],"predecessor-version":[{"id":2082,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product\/2077\/revisions\/2082"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2078"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2077"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_brand?post=2077"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_cat?post=2077"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/product_tag?post=2077"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}